Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2008
11/26/2008CN100437928C Sucking apparatus
11/26/2008CN100437927C GaAs substrate cleaning method, GaAs substrate manufacturing method, epitaxial substrate manufacturing method and GaAs wafer
11/26/2008CN100437926C Method and device for separating a reinforcing-plate fixed to a reinforced semiconductor wafer
11/26/2008CN100437925C Material for purification of semiconductor polishing slurry, module for purification of semiconductor polishing slurry and process for producing semiconductor polishing slurry
11/26/2008CN100437924C 化学机械抛光垫 The chemical mechanical polishing pad
11/26/2008CN100437923C Cleaning method and apparatus for semiconductor chip
11/26/2008CN100437922C Cleaning composition and method of cleaning therewith
11/26/2008CN100437921C Wafer cleaning and drying apparatus
11/26/2008CN100437920C Guard belt mounting method and device
11/26/2008CN100437919C Method of dicing semiconductor wafer into chips, and apparatus using this method
11/26/2008CN100437918C Mounting device and method
11/26/2008CN100437917C Transparent conductive film and method forming thereof, electrooptic device and electronic apparatus
11/26/2008CN100437916C Method for manufacturing semiconductor device
11/26/2008CN100437915C Metal conducting wire and producing method thereof
11/26/2008CN100437914C Method for manufacturing gate electrode for use in semiconductor device
11/26/2008CN100437913C Nitrogen oxidation of etched MOS gate structure
11/26/2008CN100437912C Method for forming impurity-introduced layer, method for cleaning object to be processed, apparatus for introducing impurity and method for producing device
11/26/2008CN100437911C Laser irradiation method and laser irradiation apparatus, and method for fabricating semiconductor device
11/26/2008CN100437910C Method for epitaxy InAlGaN monocrystal film using MBE
11/26/2008CN100437909C Laser annealing method and semiconductor device fabricating method
11/26/2008CN100437908C Process for preparing nitrigen-aluminium co-blended hole zinc oxide thin film material
11/26/2008CN100437907C Semiconductor device and method for manufacturing the same
11/26/2008CN100437906C Semiconductor thin film and modifying method, estimating method and application thereof
11/26/2008CN100437905C Formation of lattice-tuning semiconductor substrates
11/26/2008CN100437904C Method of manufacturing substrate having resist film
11/26/2008CN100437903C Photomask, pattern formation method using photomask and mask data creation method
11/26/2008CN100437902C Method for patterning a ferroelectric polymer layer
11/26/2008CN100437901C Particle sticking prevention apparatus and plasma processing apparatus
11/26/2008CN100437900C Gate valve apparatus and processing system
11/26/2008CN100437899C Device for reducing the impurity in the processing environment and its method
11/26/2008CN100437898C Work-piece processing system
11/26/2008CN100437897C Method and apparatus for controlling the volume of a plasma
11/26/2008CN100437896C Plasma processing apparatus and plasma processing method
11/26/2008CN100437895C Structure inspection method, pattern formation method, process condition determination and method for producing semiconductor device
11/26/2008CN100437894C Method of heating a substrate in a variable temperature process using a fixed temperature chuck
11/26/2008CN100437893C Susceptor shaft vacuum pumping
11/26/2008CN100437885C Highly efficient compact capacitance coupled plasma reactor/generator and method
11/26/2008CN100437883C Plasma surface treatment method and device for carrying out said method
11/26/2008CN100437849C Thin film capacitor and method for manufacturing same
11/26/2008CN100437844C Inductive coupling coil
11/26/2008CN100437828C Content-addressed memory unit
11/26/2008CN100437820C Data erasing method, and memory apparatus having data erasing circuit using such method
11/26/2008CN100437666C Active matrix panel inspection device, inspection method, and active matrix OLED panel manufacturing method
11/26/2008CN100437592C Optimum design device and method for integrated circuit and recording medium
11/26/2008CN100437361C Method for making ultraviolet solidified nano impression formboard
11/26/2008CN100437360C Pellicle frame and pellicle for photolithography using the same
11/26/2008CN100437359C Anti-stripping photolithography method for integrated circuit
11/26/2008CN100437358C Exposure apparatus and device manufacturing method
11/26/2008CN100437356C Method and system for immersion lithography
11/26/2008CN100437355C Photoetching projector and device manufacturing method
11/26/2008CN100437353C Preparation method of nano mould in nano-seal technology
11/26/2008CN100437312C Liquid crystal display device
11/26/2008CN100437307C Panel for displaying device, manufacturing method thereof and liquid-crystal displaying device therewith
11/26/2008CN100437306C TFT array circuit board and mfg method
11/26/2008CN100437305C Liquid-crystal displaying device, and method for driving it
11/26/2008CN100437259C Display device manufacturing method
11/26/2008CN100437234C Drive chip and display device with the same
11/26/2008CN100437218C Substrate treatment apparatus
11/26/2008CN100437172C Optical waveguide and the method of fabricating the same
11/26/2008CN100437132C Method for burn-in test and measurement program for burn-in test
11/26/2008CN100437131C Testing device, device for setting standard to judge if qualified or not, testing method and program
11/26/2008CN100437130C Manufacture defect analysis system and detection method thereof
11/26/2008CN100436653C Method for electrolytic copper plating
11/26/2008CN100436469C Selectively coating metal to nucleic acid by nano metal particles generated in-situ
11/26/2008CN100436292C Wafer carrier transport management method and system thereof
11/26/2008CN100436291C Conveyer for plate
11/26/2008CN100436145C Multishaft type ink distributor
11/26/2008CN100436083C Base plate supporting structure and loading device and mechanical arm
11/26/2008CN100436060C Grinding pad and its making process
11/26/2008CN100436030C Processing method using laser beam
11/26/2008CN100435978C Fluid injection apparatus for semiconductor processing
11/25/2008USRE40586 Reduced striae extreme ultra violet elements
11/25/2008US7458057 Pattern correction method, pattern correction system, mask manufacturing method, semiconductor device manufacturing method, recording medium, and designed pattern
11/25/2008US7457455 Pattern defect inspection method and apparatus
11/25/2008US7457453 Pattern inspection method and apparatus
11/25/2008US7457098 Electrostatic chuck
11/25/2008US7457087 Electrostatic discharge protective circuit and semiconductor integrated circuit using the same
11/25/2008US7457043 Projection exposure system
11/25/2008US7456977 Wireless substrate-like sensor
11/25/2008US7456966 Alignment mark system and method to improve wafer alignment search range
11/25/2008US7456947 Inspecting apparatus and inspecting method
11/25/2008US7456932 Filter window, lithographic projection apparatus, filter window manufacturing method, device manufacturing method and device manufactured thereby
11/25/2008US7456913 LCD with first and second circuit regions each with separately optimized transistor properties
11/25/2008US7456912 Organic thin film transistor array substrate and liquid crystal display including the same
11/25/2008US7456892 Signal charge transfer line for transferring signal charge by application of transfer pulses to transfer electrodes
11/25/2008US7456810 Light-emitting device and driving method thereof
11/25/2008US7456723 Inductors having input/output paths on opposing sides
11/25/2008US7456680 Internal voltage generating circuit and semiconductor integrated circuit device
11/25/2008US7456660 Semiconductor device and display device
11/25/2008US7456659 Semiconductor integrated circuit
11/25/2008US7456646 Wafer probe
11/25/2008US7456566 Top-emission type organic electroluminescence display device and method for fabricating the same
11/25/2008US7456527 Moveable object carrier, lithographic apparatus comprising the moveable object carrier and device manufacturing method
11/25/2008US7456506 Radio frequency identification (RFID) tag lamination process using liner
11/25/2008US7456501 Semiconductor structure having recess with conductive metal
11/25/2008US7456499 Power light emitting die package with reflecting lens and the method of making the same
11/25/2008US7456497 Electronic devices and its production methods
11/25/2008US7456495 Semiconductor module with a semiconductor stack, and methods for its production
11/25/2008US7456490 sealing porous dielectrics using silane coupling reagents is herein described. A sealant chain (silane coupling reagent) is formed from at least silicon, carbon, oxygen, and hydrogen and exposed to a porous dielectric material, wherein the sealant chain reacts with a second chain, that has at least O2
11/25/2008US7456489 Wafer with optical control modules in IC fields