Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2008
11/26/2008EP1995769A1 Exposure method and exposure apparatus, stage unit, and device manufacturing method
11/26/2008EP1995768A1 Exposure apparatus, maintenance method, exposure method and device manufacturing method
11/26/2008EP1995767A1 Projection optical system, aligner and method for fabricating semiconductor device
11/26/2008EP1995766A2 Controlled annealing method
11/26/2008EP1995636A1 Composition for forming lower layer film and pattern forming method
11/26/2008EP1995635A1 Negative-type photosensitive fluorinated aromatic resin composition
11/26/2008EP1995357A1 Gallium nitride material and method for producing same
11/26/2008EP1994567A2 Mos transistor with adjustable threshold
11/26/2008EP1994566A1 Insulated gate-type semiconductor device and manufacturing method thereof
11/26/2008EP1994563A2 Structure and method for mosfet gate electrode landing pad
11/26/2008EP1994559A2 High throughput deposition apparatus with magnetic support
11/26/2008EP1994558A1 Copper electrodeposition in microelectronics
11/26/2008EP1994557A1 Vertical eeprom device
11/26/2008EP1994556A2 Highly selective doped oxide etchant
11/26/2008EP1994555A2 Precursor compositions for atomic layer deposition and chemical vapor deposition of titanate, lanthanate, and tantalate dielectric films
11/26/2008EP1994554A1 Method for processing, in particular, thin rear sides of a wafer, wafer-carrier arrangement and method for producing said type of wafer-carrier arrangement
11/26/2008EP1994553A2 Gate-coupled eprom cell for printhead
11/26/2008EP1994552A2 Pulsed growth of gan nanowires and applications in group iii nitride semiconductor substrate materials and devices
11/26/2008EP1994551A2 Methods of making qfn package with power and ground rings
11/26/2008EP1994550A2 Method and apparatus for combinatorially varying materials, unit process and process sequence
11/26/2008EP1994549A2 Active spectral control of duv light source
11/26/2008EP1994548A1 Device for fluid treating plate-like articles
11/26/2008EP1994447A1 Lithography system and projection method
11/26/2008EP1994201A2 Epitaxial deposition process and apparatus
11/26/2008EP1994134A1 Stabilized, non-aqueous cleaning compositions for microelectronics substrates
11/26/2008EP1994112A1 Cmp slurry and method for polishing semiconductor wafer using the same
11/26/2008EP1994106A1 Free radical-forming activator attached to solid and used to enhance cmp formulations
11/26/2008EP1993781A1 Manufacturing method of memory element, laser irradiation apparatus, and laser irradiation method
11/26/2008EP1842231A4 Micro-feature fill process and apparatus using hexachlorodisilane or other chlorine-containing silicon precursor
11/26/2008EP1706899A4 Planarization method of manufacturing a superjunction device
11/26/2008EP1685038A4 Low cost wafer box improvements
11/26/2008EP1623457B1 Endpoint detection in time division multiplexed processes using an envelope follower algorithm
11/26/2008EP1573802B1 Method of the production of cavities in a silicon sheet
11/26/2008EP1547133A4 Mim capacitor structures and fabrication methods in dual-damascene structures
11/26/2008EP1525609B1 Device for etching semiconductors with a large surface area
11/26/2008EP1518270B1 Method for producing a packaging for semiconductor components
11/26/2008EP1436843A4 Method for wrapped-gate mosfet
11/26/2008EP1412985A4 Contact method for thin silicon carbide epitaxial layer and semiconductor devices formed by those methods
11/26/2008EP1397808B3 Steering gate and bit line segmentation in non-volatile memories
11/26/2008EP1364566B1 Electronic component, component mounting equipment, and component mounting method
11/26/2008EP1269511B1 Plasma reactor with overhead rf electrode tuned to the plasma
11/26/2008EP1125315B1 Method for hf-hf cleaning
11/26/2008CN201156549Y Non-carriage multi-point multi-row gluing machine
11/26/2008CN201156548Y LED support unit and LED support
11/26/2008CN201156546Y Cleaning seat of solar chip
11/26/2008CN201156533Y Automatic identifying rotary taking and putting mechanism
11/26/2008CN201156532Y Storage apparatus for storing semi-conductor component
11/26/2008CN201156531Y Gas proportion protecting apparatus for copper wire linking position of transistor
11/26/2008CN201156530Y Crystal fitting machine
11/26/2008CN201156132Y Electrostatic absorption station
11/26/2008CN201154988Y Single-faced floating corrosion unit for silicon wafer
11/26/2008CN201154782Y Container and metal actuating device of locking mechanism of the container
11/26/2008CN101313470A Logic block control system and logic block control method
11/26/2008CN101313410A Interconnector, solar battery string using such interconnector, method for manufacturing such solar battery string and solar battery module using such solar battery string
11/26/2008CN101313408A P-n junction diode and manufacturing method
11/26/2008CN101313404A Apparatus and methods for solar energy conversion using nanoscale cometal structures
11/26/2008CN101313403A Reticle alignment technique
11/26/2008CN101313401A Semiconductor device and manufacturing method thereof
11/26/2008CN101313400A Sheet adhering apparatus and sheet adhering method
11/26/2008CN101313399A Process for temporary fixing of a polymeric layer material on rough surfaces
11/26/2008CN101313398A Substrate inspection device and substrate inspection method
11/26/2008CN101313397A Carbon nanotubes solder composite for high performance interconnect
11/26/2008CN101313396A Au-Sn alloy bump having no trapped-in large void and process for producing the same
11/26/2008CN101313395A System and method for the manufacture of semiconductor devices by the implantation of carbon clusters
11/26/2008CN101313394A Method of manufacturing a semiconductor device and semiconductor device obtained with such a method
11/26/2008CN101313393A Plasma oxidation method and method for manufacturing semiconductor device
11/26/2008CN101313392A Coated substrates and methods for their preparation
11/26/2008CN101313391A Semiconductor surface treatment agent
11/26/2008CN101313390A Microwave introduction device
11/26/2008CN101313389A Apparatus for cleaning substrate, substrate-cleaning method, substrate treating equipment
11/26/2008CN101313388A Friction reducing aid for cmp
11/26/2008CN101313387A 激光加工方法 The laser processing method
11/26/2008CN101313386A Mos transistor with better short channel effect control and corresponding manufacturing method
11/26/2008CN101313385A Washing liquid for photolithography, and method for washing exposure device using the same
11/26/2008CN101313384A Apparatus and method for wet-chemical processing of flat, thin substrates in a continuous method
11/26/2008CN101313365A Semiconductor device and its operating method
11/26/2008CN101313247A Radiation-sensitive resin composition
11/26/2008CN101313246A Radiation-sensitive resin composition
11/26/2008CN101313202A Infrared detection unit using a semiconductor optical lens
11/26/2008CN101313092A Interconnects and heat dissipators based on nanostructures
11/26/2008CN101313042A Compositions and methods for tantalum cmp
11/26/2008CN101312894A Stacker
11/26/2008CN101312615A Printed circuit board and manufacturing method thereof
11/26/2008CN101312225A Method for depositing a silicon layer on a transmitting conductive oxide layer suitable for use in solar cell applications
11/26/2008CN101312223A Method for manufacturing film on solar energy battery substrate by sputtering process
11/26/2008CN101312216A Flash memory device with mixing structure charge trapping layer and its manufacture method
11/26/2008CN101312214A Semiconductor device and its manufacture method
11/26/2008CN101312213A Nanocrystalline floating gate structure non-volatility memory cell and its manufacture method
11/26/2008CN101312212A Non-volatile memory utilizing high K medium and nanocrystalline floating gate and its manufacture method
11/26/2008CN101312211A Semiconductor device and its manufacture method
11/26/2008CN101312210A Semiconductor device and manufacture process
11/26/2008CN101312209A Semiconductor device and its manufacture method
11/26/2008CN101312208A NMOS transistor and method for forming same
11/26/2008CN101312203A Image sensor chip scale package having inter-adhesion with gap and method of the same
11/26/2008CN101312201A CMOS image sensor and method for forming same
11/26/2008CN101312200A Image sensing devices and methods for fabricating the same
11/26/2008CN101312199A Multiple port register file cell and manufacturing method thereof
11/26/2008CN101312198A Semiconductor device
11/26/2008CN101312197A Memory cell and method for manufacturing and operating the same
11/26/2008CN101312196A Semiconductor device and its manufacture method