| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/08/2009 | CN100477140C Packing component of semiconductor and preparing method thereof |
| 04/08/2009 | CN100477139C Method for forming bumps, semiconductor device and method for manufacturing same, substrate processing apparatus and semiconductor manufacturing apparatus |
| 04/08/2009 | CN100477138C Terminal electrode forming method of chip electronic element and apparatus therefor |
| 04/08/2009 | CN100477137C Encapsulation mould with the static discharge protection |
| 04/08/2009 | CN100477136C Circuit board and construction structure |
| 04/08/2009 | CN100477135C Method for reducing line edge roughness for trench etch, and semiconductor device thereof |
| 04/08/2009 | CN100477134C Fine particles depositing device and method, and preparing method for light emitting element |
| 04/08/2009 | CN100477133C Near-infrared high-transmission rate and multi-crystal transparent conductive oxide film and making method thereof |
| 04/08/2009 | CN100477132C Method for fabricating semiconductor wafer, semiconductor device and non-volatile memory device |
| 04/08/2009 | CN100477131C Method for forming semiconductor devices |
| 04/08/2009 | CN100477130C Methods of forming charge-trapping dielectric layers for semiconductor memory devices |
| 04/08/2009 | CN100477129C Thin film transistor, organic electro-luminescent display unit and making method thereof |
| 04/08/2009 | CN100477128C Method for forming semiconductor structure |
| 04/08/2009 | CN100477127C Method for fabricating thin film transistor |
| 04/08/2009 | CN100477126C Method for fabricating integrated circuit channel region |
| 04/08/2009 | CN100477125C Method for asymmetric spacer formation |
| 04/08/2009 | CN100477124C Method for generating a structure on a substrate |
| 04/08/2009 | CN100477123C SOI bottom pre-doping merged e-SiGe for polycrystalline silicon height reduction |
| 04/08/2009 | CN100477122C Field plane board structure of the high-voltage part and making method thereof |
| 04/08/2009 | CN100477121C Semiconductor device with parallel plate trench capacitor |
| 04/08/2009 | CN100477120C Control method of polishing technology |
| 04/08/2009 | CN100477119C Film forming method, semiconductor device manufacturing method, semiconductor device and film forming device |
| 04/08/2009 | CN100477118C Method for making layout wire and method for making semiconductor device |
| 04/08/2009 | CN100477117C Stack structure for metal inlay, forming method and metal inlay method thereof |
| 04/08/2009 | CN100477116C Method and apparatus for forming silicon oxide film |
| 04/08/2009 | CN100477115C Method and system for forming graded dielectric films on lower cushion |
| 04/08/2009 | CN100477114C Method for preparing ferroelectric film on silicon substrate through temperature modulation |
| 04/08/2009 | CN100477113C Method for producing material of electronic device |
| 04/08/2009 | CN100477112C Methods of forming deuterated silicon nitride-containing materials |
| 04/08/2009 | CN100477111C Processing method |
| 04/08/2009 | CN100477110C Method for fabricating semiconductor device |
| 04/08/2009 | CN100477109C Semiconductor components and manufacture method thereof |
| 04/08/2009 | CN100477108C Film forming method and film forming apparatus |
| 04/08/2009 | CN100477107C Method for cleaning process chamber of substrate processing apparatus, substrate processing apparatus and method for processing substrate |
| 04/08/2009 | CN100477106C Semiconductor device fabrication method |
| 04/08/2009 | CN100477105C Substrate processor and method for manufacturing device |
| 04/08/2009 | CN100477104C Plasma treatment apparatus |
| 04/08/2009 | CN100477103C Atmospheric transfer chamber and after-processing transfer method of processed object |
| 04/08/2009 | CN100477102C Method of liquid feeding and apparatus therefor |
| 04/08/2009 | CN100477101C Cutting device |
| 04/08/2009 | CN100477100C Method of protecting semiconductor wafer and adhesive film for protection of semiconductor wafer |
| 04/08/2009 | CN100477099C Clapboard for dividing semiconductor wafer |
| 04/08/2009 | CN100477098C Plating apparatus and plating method |
| 04/08/2009 | CN100477097C Film-forming method |
| 04/08/2009 | CN100477096C Ultra-uniform silicides in integrated circuit technology |
| 04/08/2009 | CN100477095C Manufacture method of sputtering deposition of high-density Ru nanocrystalline for flash memory |
| 04/08/2009 | CN100477094C Manufacture method of atomic layer deposition of high-density Ru nanocrystalline for flash memory |
| 04/08/2009 | CN100477093C Method for forming semiconductor device |
| 04/08/2009 | CN100477092C A semiconductor substrate with solid phase epitaxial regrowth with reduced junction leakage and method of producing same |
| 04/08/2009 | CN100477091C Processor |
| 04/08/2009 | CN100477090C Process apparatus and transportation system thereof, and method for protecting pressure control valve |
| 04/08/2009 | CN100477089C Crystal growing method for single-crystal gallium nitride |
| 04/08/2009 | CN100477088C Vapor phase growing device |
| 04/08/2009 | CN100477087C Loading table and heat treating apparatus having the loading table |
| 04/08/2009 | CN100477086C Heat treatment method and heat treatment device |
| 04/08/2009 | CN100477085C Laser mask, method of crystallization using the same, and method for fabricating display device with the same |
| 04/08/2009 | CN100477084C Photoresist coating liquid supplying apparatus, and photoresist coating liquid supplying method and photoresist coating apparatus using the photoresist coating liquid supplying apparatus |
| 04/08/2009 | CN100477083C Exposing device, exposing method, and assembly manufacturing method |
| 04/08/2009 | CN100477082C Production of polishing sheet single-sided main diffusion |
| 04/08/2009 | CN100477081C Method for manufacturing semiconductor device |
| 04/08/2009 | CN100477080C Method for manufacturing semiconductor device |
| 04/08/2009 | CN100477079C Transferring method |
| 04/08/2009 | CN100477078C Substrate processing apparatus and substrate processing method |
| 04/08/2009 | CN100477077C Method for making double-side technology |
| 04/08/2009 | CN100477076C Heater, wafer heating apparatus and method for manufacturing heater |
| 04/08/2009 | CN100477075C Semiconductor apparatus with multiple delivery devices for components |
| 04/08/2009 | CN100477074C High-Pressure processing method and high-pressure processing device |
| 04/08/2009 | CN100477073C Method for automatic forming semiconductor experiment element layout and system thereof |
| 04/08/2009 | CN100477072C Method and device for separating combined element using fluid |
| 04/08/2009 | CN100477071C Drying device and drying method of single wafer |
| 04/08/2009 | CN100477000C Semiconductor integrated circuit device having power supply startup sequence |
| 04/08/2009 | CN100476997C Magnetoresistance random access memory for improved extendability |
| 04/08/2009 | CN100476996C Control device for reversing the direction of magnetisation without an external magnetic field |
| 04/08/2009 | CN100476993C Semiconductor memory appts. having reduced magnetic interference |
| 04/08/2009 | CN100476992C Film magnetic storage device equipped with false elements for data reading reference |
| 04/08/2009 | CN100476991C Semiconductor IC device and making method thereof |
| 04/08/2009 | CN100476988C Sense amplifier and architecture for open digit arrays |
| 04/08/2009 | CN100476869C Method for manufacturing electronic device |
| 04/08/2009 | CN100476836C Method for reducing mask processes by lowing winding placement change |
| 04/08/2009 | CN100476798C Method and system for diagnosing a processing system using adaptive multivariate analysis |
| 04/08/2009 | CN100476749C Method for controlling preventive maintenance cycles of semiconductor fabricating equipments arranged in controlling system |
| 04/08/2009 | CN100476733C System and method for semiconductor simulation on tool |
| 04/08/2009 | CN100476663C Fault diagnosis of prodn. appts. and fault diagnosis system |
| 04/08/2009 | CN100476648C Methods and systems for transport system(s) integration |
| 04/08/2009 | CN100476599C Photoetching mark structure, photoetching projection device comprising the photoetching mark structure, and method for aligning with the photoetching mark structure |
| 04/08/2009 | CN100476598C Composition for antireflection coating and method for forming pattern |
| 04/08/2009 | CN100476595C Method for ascertaining radiation power and exposure equipment |
| 04/08/2009 | CN100476594C Pattern forming method |
| 04/08/2009 | CN100476593C Lithographic apparatus and device manufacturing method |
| 04/08/2009 | CN100476592C Method and device for immersion lithography using high ph immersion fluid |
| 04/08/2009 | CN100476589C Method of and apparatus for supplying a dynamic protective layer to a reflector |
| 04/08/2009 | CN100476588C Lithographic apparatus and device manufacturing method, and measurement systems |
| 04/08/2009 | CN100476587C Control system, lithographic apparatus, device manufacturing method and device manufactured thereby |
| 04/08/2009 | CN100476586C Transmission shear grating in checkerboard configuration for EUV wavefront sensor |
| 04/08/2009 | CN100476585C Impurity shielding with extendable slice |
| 04/08/2009 | CN100476584C Method and apparatus for isolating light source gas from main chamber gas in a lithography tool |
| 04/08/2009 | CN100476583C Ring sulfonium and sulfonium oxide and photoacid generator and photoetching glue containing ring sulfonium and sulfonium oxide |
| 04/08/2009 | CN100476582C Nozzle assembly for applying a liquid to a substrate |
| 04/08/2009 | CN100476553C Apparatus and method for fabricating bonded substrate |
| 04/08/2009 | CN100476529C Method of fabricating array substrate for in-plane switching liquid crystal display device |