Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/2009
04/01/2009CN100474573C Semiconductor device and manufacturing method thereof
04/01/2009CN100474571C Semiconductor device and power supply system
04/01/2009CN100474570C Methods for the control of flatness and electron mobility of diamond coated silicon and structures formed thereby
04/01/2009CN100474569C Method of manufacturing flash memory device
04/01/2009CN100474568C Method of manufacturing a flash memory device
04/01/2009CN100474567C Flash memory device and method of manufacturing the same
04/01/2009CN100474566C Radio chip
04/01/2009CN100474565C Front technique for manufacturing high voltage LCD driving device
04/01/2009CN100474564C Method for fabricating integrated circuit
04/01/2009CN100474563C Process for dividing integrated devices in thin semiconductor chips
04/01/2009CN100474562C Jet printing type aggregates removing equipment
04/01/2009CN100474561C Method for integrating insulation film between fluorine doped silicon oxide glass layers
04/01/2009CN100474560C Method for making thick metal inductance in integrated circuit
04/01/2009CN100474559C Wiring over substrate, semiconductor device, and methods for manufacturing thereof
04/01/2009CN100474558C Process for producing the semiconductor device
04/01/2009CN100474557C Method for the catastrophic transfer of a thin layer after co-implantation
04/01/2009CN100474556C Catastrophic transfer of thin film after co-implantation
04/01/2009CN100474555C Solution method of metal silicide deposit extension by STI edge
04/01/2009CN100474554C Pasted SOI substrate, process for producing the same and semiconductor device
04/01/2009CN100474553C Electrostatic chuck and manufacturing method thereof
04/01/2009CN100474552C Method for manufacturing element substrate and supporting apparatus for the substrate
04/01/2009CN100474551C Locating calibration device and locating calibration system
04/01/2009CN100474550C Substrate attaching method
04/01/2009CN100474549C Preparation method of extension testing piece
04/01/2009CN100474548C Device for detecting metal etching defect
04/01/2009CN100474547C Temperature inspecting method in range of 250 to 550 DEG C in semiconductor technology
04/01/2009CN100474546C Method and apparatus for mapping a position of a capillary tool tip using a prism
04/01/2009CN100474545C Test board for high-frequency system level test
04/01/2009CN100474544C Semiconductor device and method of making the same
04/01/2009CN100474543C Semiconductor device and method of making the same
04/01/2009CN100474542C Method for forming conduction protruding block and structure of the conduction protruding block
04/01/2009CN100474541C Making method for chip encapsulation structure
04/01/2009CN100474540C Method and system for performing die attach using a flame
04/01/2009CN100474539C Wafer-level coated copper stud bumps
04/01/2009CN100474538C Method for chemical vapor deposition in high aspect ratio spaces
04/01/2009CN100474537C Method for manufacturing groove type MOS transistor
04/01/2009CN100474536C A non extension method for making high-voltage part groove
04/01/2009CN100474535C Field effect transistor with local source/drain insulation and associated method of production
04/01/2009CN100474534C Mos transistor with elevated source and drain structures and method of fabrication thereof
04/01/2009CN100474533C Production of extra-high resistance on surface of active zone
04/01/2009CN100474532C Method for manufacturing semiconductor device
04/01/2009CN100474531C Growth of silicon-nitride film
04/01/2009CN100474530C Process for producing modified porous silica film, modified porous silica film obtained by the process, and semiconductor device employing the modified porous silica film
04/01/2009CN100474529C Method for manufacturing silicon dioxide layer
04/01/2009CN100474528C Film formation method and apparatus for semiconductor process
04/01/2009CN100474527C 等离子体蚀刻方法 The plasma etching method
04/01/2009CN100474526C Plasma processing apparatus
04/01/2009CN100474525C Vertical heat treatment apparatus and method for using the same
04/01/2009CN100474524C Plasma etching method and computer-readable storage medium
04/01/2009CN100474523C Method for etching silicon carbide single crystal
04/01/2009CN100474522C Silicon chip surface pattern etching method and silicon chip thereof
04/01/2009CN100474521C Temperature controlled hot edge ring assembly, and device comprising the same and the use thereof
04/01/2009CN100474520C Lactate-containing corrosion inhibitor
04/01/2009CN100474519C Three beam MEMS device and correlation method
04/01/2009CN100474518C Method for machining substrate and method for manufacturing element
04/01/2009CN100474517C Ti film method for forming the same
04/01/2009CN100474516C Operating method of vertical heat treatment device
04/01/2009CN100474515C Film formation apparatus and method for semiconductor process
04/01/2009CN100474514C Fabrication method of semiconductor integrated circuit device
04/01/2009CN100474513C Method for manufacturing a semiconductor device and semiconductor device made thereby
04/01/2009CN100474512C Method for producing III-V family semiconductor compound and solid solution thin film
04/01/2009CN100474511C Gallium nitride crystal, homoepitaxial gallium-nitride-based devices and method for producing the same
04/01/2009CN100474510C Reflow method, pattern generating method, and fabrication method for TFT element for LCD
04/01/2009CN100474509C Integrated circuit with a capacitor and method for the production thereof
04/01/2009CN100474508C Plasma treatment apparatus
04/01/2009CN100474507C Heat treatment unit
04/01/2009CN100474506C Substrate processing apparatus and lid supporting apparatus for the same
04/01/2009CN100474505C Method for forming silicon epitaxy test chip
04/01/2009CN100474504C Vacuum obtaining system
04/01/2009CN100474503C Nitrogen protecting cover
04/01/2009CN100474502C Method for manufacturing semiconductor device
04/01/2009CN100474495C Method and apparatus for micro-jet enabled, low energy ion generation and transport in plasma processing
04/01/2009CN100474494C In-process wafer charge monitor and control system for ion implanter
04/01/2009CN100474457C Test method for a semiconductor memory
04/01/2009CN100474443C Semiconductor memory device having memory cells requiring no refresh operation
04/01/2009CN100474442C Fault removing circuit for storage and power control method thereof
04/01/2009CN100474440C Magnetic memory device and method
04/01/2009CN100474438C Resistance cross point array connecting storage location
04/01/2009CN100474437C Magnetic RAM
04/01/2009CN100474362C Light-emitting device
04/01/2009CN100474185C Method for inspecting substrate processing apparatus
04/01/2009CN100474125C Method of controlling photoresist stripping process and regenerating photoresist stripper composition based on near infrared spectrometer
04/01/2009CN100474123C Self-adapting technique changing method for self-adapting focusing and leveling adjustment sensor system
04/01/2009CN100474121C Substrate processing system and substrate processing method
04/01/2009CN100474120C Method for computing values related to parts of multi-value picture element of the polygon brims
04/01/2009CN100474119C Resist pattern forming method and semiconductor device manufacturing method
04/01/2009CN100474118C Method for improving silicon scraps contamination when back grinding
04/01/2009CN100474115C Aberration field measuring method for imaging optical system of photoetching apparatus
04/01/2009CN100474114C Supporting rack
04/01/2009CN100474113C Method of through hole etching for RF device products
04/01/2009CN100474111C Method for designing phase grating pattern, and method for producing photomask system
04/01/2009CN100474108C Critical dimension control using full phase and trim masks
04/01/2009CN100474090C Preparation method of thin film transistor matrix substrate
04/01/2009CN100474087C Pixel structure of thin film transistor liquid crystal display
04/01/2009CN100474081C Apparatus for fabricating bonded substrate
04/01/2009CN100474045C Liquid crystal display device
04/01/2009CN100473974C Time-resolved measurement apparatus
04/01/2009CN100473956C Gas flow rate calibrating method
04/01/2009CN100473919C Cooling/heating apparatus and mounting apparatus
04/01/2009CN100473760C Method for producing metal material having formed thereon chromium oxide passive film