Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/2009
04/01/2009CN101399178A Method of manufacturing semiconductor device
04/01/2009CN101399177A Method of manufacturing semiconductor device
04/01/2009CN101399176A Substrate processing system, control method for substrate processing apparatus and program
04/01/2009CN101399175A Display substrate manufacturing method and vacuum processing apparatus
04/01/2009CN101399174A Substrate cleaning apparatus and method, substrate processing apparatus and method and storage medium
04/01/2009CN101399173A Heat treatment method and heat treatment apparatus
04/01/2009CN101399172A Apparatus for and method of processing substrate
04/01/2009CN101399171A Method of forming alignment mark
04/01/2009CN101399170A Inductively coupled plasma processing apparatus
04/01/2009CN101399169A Film-forming method, film-forming apparatus, storage medium, and semiconductor device
04/01/2009CN101399168A Method for controlling stability in wet chemical bath process
04/01/2009CN101399167A Method for assembling silicon nano-wire
04/01/2009CN101399166A Etching substrates mounted with gas wall
04/01/2009CN101399165A Multi-sectorization hot disc structure
04/01/2009CN101399164A Semi-insulation gallium arsenide wafer double face finishing method
04/01/2009CN101399163A Method for calibrating epitaxial reaction chamber temperature
04/01/2009CN101399162A Preprocess method for silicon epitaxy growth chamber
04/01/2009CN101399161A Heat treatment method and device for semiconductor workpieces
04/01/2009CN101399160A Heat treatment method and device for semiconductor workpieces
04/01/2009CN101399147A Ion implantation method
04/01/2009CN101398684A Scheduling method and program for a substrate treating apparatus
04/01/2009CN101398635A Auto gain link closed-loop feedback control method in self-adapting focusing and leveling sensor system
04/01/2009CN101398634A Lithographic apparatus and device manufacturing method, and measurement systems
04/01/2009CN101398633A Lithographic apparatus and device manufacturing method, and measurement systems
04/01/2009CN101398629A Exposal correcting method
04/01/2009CN101398627A Coating treatment method, coating treatment apparatus, and computer-readable storage medium
04/01/2009CN101398617A Replication and transfer of microstructures and nanostructures
04/01/2009CN101398611A Graytone mask plate and and graytone mask, and methof for producing the same and pattern copying method
04/01/2009CN101398588A Liquid crystal display and method for manufacturing the same
04/01/2009CN101398580A LCD device and method for manufacturing same
04/01/2009CN101398579A Method for making micro reflector layer and silicon based LCD
04/01/2009CN101398578A Capacitor, silicon based LCD and method for making same
04/01/2009CN101398572A LCD and method for making conductive spacer therein
04/01/2009CN101398458A Needle testing system
04/01/2009CN101398457A Wafer, test system thereof, test method thereof, and test fixture thereof
04/01/2009CN101398395A Silicon chip edge notching detection method and device
04/01/2009CN101398394A Silicon chip edge notching detection method and device
04/01/2009CN101398393A Silicon chip product defect analysis method and device
04/01/2009CN101398293A Measurement system and method for measuring critical dimensions using ellipsometry
04/01/2009CN101397986A Multifunctional pumping vacuum device
04/01/2009CN101397689A Removal method of oil, wax and residual gum on diode surface
04/01/2009CN101397653A Metal film forming method and computer-readable storage medium
04/01/2009CN101397528A Cleaning agent for semiconductor device and cleaning method using the same
04/01/2009CN101397499A TaN material corrosive solution and TaN material corrosion method
04/01/2009CN101397482A Polishing liquid and polishing method using the same
04/01/2009CN101397481A Polishing liquid
04/01/2009CN101397480A 抛光液和抛光方法 Polishing liquid and polishing method
04/01/2009CN101397120A Micromachined electromechanical device
04/01/2009CN101396805A Carrier head with retaining ring and carrier ring
04/01/2009CN101396765A Laser machining device
04/01/2009CN101396764A Laser machining device
04/01/2009CN100475020C Method and device for extracting electronic components from tubes and electronic components conveying device
04/01/2009CN100475017C Packaging method for electronic nose system
04/01/2009CN100475004C Wiring board manufacturing method
04/01/2009CN100475001C Multilayer structure forming method, method of manufacturing wiring board, and method for manufacturing electronic apparatus
04/01/2009CN100475000C Electric circuit module and method for assembling the same
04/01/2009CN100474903C Display device
04/01/2009CN100474897C Image sensor with integrated film infrared filter
04/01/2009CN100474776C Field programmable gate array
04/01/2009CN100474717C Semiconductor laser element and manufacturing method thereof
04/01/2009CN100474652C Active matrix electroluminescence device and method for fabricating the same
04/01/2009CN100474646C Packaging method for white light illuminating diode
04/01/2009CN100474639C Light emitting device and method of manufacturing the same
04/01/2009CN100474634C Enhanced photodetector
04/01/2009CN100474633C Capacitor in the semiconductor device and method of fabricating the same
04/01/2009CN100474631C Vertical diode, matrix position sensitive apparatus and manufacturing method of the same
04/01/2009CN100474630C Semiconductor device and method for manufacturing the same
04/01/2009CN100474629C Wireless chip and method of manufacturing the same
04/01/2009CN100474628C Method for annealing silicon thin films and polycrystalline silicon thin films prepared therefrom
04/01/2009CN100474627C Thin film transistor with light doped drain/offset (LDD/OFFSET) area structure
04/01/2009CN100474626C Field effect transistors and forming method thereof
04/01/2009CN100474624C Semiconductor device including field-effect transistor and manufacturing method thereof
04/01/2009CN100474623C N-type carbon nanotube field effect transistor and preparation method thereof
04/01/2009CN100474622C Semiconductor device and manufacturing method thereof
04/01/2009CN100474621C Semiconductor device and manufacturing method thereof
04/01/2009CN100474620C Dielectric isolation type semiconductor device
04/01/2009CN100474618C Step-embedded SiGe structure for PFET mobility enhancement
04/01/2009CN100474617C Field effect transistor using insulator-semiconductor transition material layer as channel material and method for manufacturing the same
04/01/2009CN100474616C Trench MOSFET device with improved on-resistance
04/01/2009CN100474614C Semiconductor device and manufacturing method thereof
04/01/2009CN100474613C Dielectric layer for semiconductor device and method for manufacturing the same
04/01/2009CN100474612C Methods for forming power semiconductor devices using boule-grown silicon carbide drift layers and power semiconductor devices formed thereby
04/01/2009CN100474611C Field-effect transistor, complementary field-effect transistor, and method of manufacturing field-effect transistor
04/01/2009CN100474608C Broad spectrum light emitting devices and methods and systems for fabricating the same
04/01/2009CN100474606C CMOS image sensor and manufacturing method thereof
04/01/2009CN100474604C CMOS image sensor and method for fabricating the same
04/01/2009CN100474603C CMOS image sensor and method for manufacturing the same
04/01/2009CN100474601C Low-dark current active picture element adapted to CMOS image sensor and producing method thereof
04/01/2009CN100474596C Solid-state imaging device and method for making the same
04/01/2009CN100474595C Semiconductor device
04/01/2009CN100474594C SOI substrate and method for producing the same
04/01/2009CN100474593C Semiconductor device and method for fabricating the same
04/01/2009CN100474592C 半导体存储器件 The semiconductor memory device
04/01/2009CN100474591C Array of nonvolatile memory cells and methods of manufacturing, and operating therefor
04/01/2009CN100474585C Arranging method for cathode pattern in integrated gate pole changing thyratron transistor
04/01/2009CN100474584C Thin film transistor array substrate and method of manufacturing the same
04/01/2009CN100474582C Mixed integrated circuit device and manufacturing method thereof
04/01/2009CN100474579C 电路装置 Circuit means
04/01/2009CN100474577C Base board and electric test method therefor
04/01/2009CN100474575C Semiconductor device and manufacturing method thereof