| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/09/2009 | US20090093908 Target Position detection apparatus for robot |
| 04/09/2009 | US20090093192 Device for and method of polishing peripheral edge of semiconductor wafer |
| 04/09/2009 | US20090093135 Semiconductor manufacturing apparatus and method for curing material with uv light |
| 04/09/2009 | US20090093134 Semiconductor manufacturing apparatus and method for curing materials with uv light |
| 04/09/2009 | US20090093133 Self-assembled sidewall spacer |
| 04/09/2009 | US20090093132 Methods to obtain low k dielectric barrier with superior etch resistivity |
| 04/09/2009 | US20090093131 Low-temperature catalyzed formation of segmented nanowire of dielectric material |
| 04/09/2009 | US20090093130 Silicon oxycarbide, growth method of silicon oxycarbide layer, semiconductor device and manufacture method for semiconductor device |
| 04/09/2009 | US20090093129 Gas Baffle and Distributor for Semiconductor Processing Chamber |
| 04/09/2009 | US20090093128 Methods for high temperature deposition of an amorphous carbon layer |
| 04/09/2009 | US20090093127 Treatment of a Substrate with a Liquid Medium |
| 04/09/2009 | US20090093126 Method of and an apparatus for processing a substrate |
| 04/09/2009 | US20090093125 Chemistry and compositions for manufacturing integrated circuits |
| 04/09/2009 | US20090093124 Method of manufacturing semiconductor device |
| 04/09/2009 | US20090093123 Spin head, chuck pin used in the spin head, and method for treating a substrate with the spin head |
| 04/09/2009 | US20090093122 Method For Producing Group III-V Nitride Semiconductor Substrate |
| 04/09/2009 | US20090093121 Method for Fabricating a Fine Pattern |
| 04/09/2009 | US20090093120 Hole pattern forming method and semiconductor device manufacturing method |
| 04/09/2009 | US20090093119 Method of fabricating semiconductor device |
| 04/09/2009 | US20090093118 Polishing composition |
| 04/09/2009 | US20090093117 Method of manufacturing substrate |
| 04/09/2009 | US20090093116 Method for forming Zener Zap Diodes and Ohmic Contacts in the Same Integrated Circuit |
| 04/09/2009 | US20090093115 Method for forming metal line of semiconductor device by annealing aluminum and copper layers together |
| 04/09/2009 | US20090093114 Method of forming a dual-damascene structure using an underlayer |
| 04/09/2009 | US20090093113 Electrochemical etching of through silicon vias |
| 04/09/2009 | US20090093112 Methods and apparatus of creating airgap in dielectric layers for the reduction of rc delay |
| 04/09/2009 | US20090093111 Sprocket opening alignment process and apparatus for multilayer solder decal |
| 04/09/2009 | US20090093110 BGA package having half-etched bonding pad and cut plating line and method of fabricating same |
| 04/09/2009 | US20090093109 Method for producing a semiconductor device using a solder alloy |
| 04/09/2009 | US20090093108 Semiconductor fabrication process including silicide stringer removal processing |
| 04/09/2009 | US20090093107 Semiconductor substrate cleaning methods, and methods of manufacture using same |
| 04/09/2009 | US20090093106 Bonded soi substrate, and method for manufacturing the same |
| 04/09/2009 | US20090093105 Particle deposition apparatus, particle deposition method, and manufacturing method of light-emitting device |
| 04/09/2009 | US20090093104 Manufacturing method for semiconductor chips |
| 04/09/2009 | US20090093103 Method and device for controlled cleaving process |
| 04/09/2009 | US20090093102 Method for manufacturing semiconductor substrate |
| 04/09/2009 | US20090093101 Method for Manufacturing a Transistor of a Semiconductor Memory Device |
| 04/09/2009 | US20090093100 Method for forming an air gap in multilevel interconnect structure |
| 04/09/2009 | US20090093099 Layout method and layout apparatus for semiconductor integrated circuit |
| 04/09/2009 | US20090093098 Manufacturing method of semiconductor device having trench isolation |
| 04/09/2009 | US20090093097 Method for Manufacturing Dual Gate in Semiconductor Device |
| 04/09/2009 | US20090093096 Semiconductor device and manufacturing method thereof |
| 04/09/2009 | US20090093095 Method to improve transistor tox using si recessing with no additional masking steps |
| 04/09/2009 | US20090093094 Selective Formation of Silicon Carbon Epitaxial Layer |
| 04/09/2009 | US20090093093 Method of fabricating thin film transistor |
| 04/09/2009 | US20090093092 Soi substrate contact with extended silicide area |
| 04/09/2009 | US20090093091 Method of fabricating semiconductor package |
| 04/09/2009 | US20090093090 Method for producing a power semiconductor module comprising surface-mountable flat external contacts |
| 04/09/2009 | US20090093089 Method for fabricating heat dissipating semiconductor package |
| 04/09/2009 | US20090093088 Roll-on encapsulation method for semiconductor packages |
| 04/09/2009 | US20090093087 Method of manufacturing semiconductor device |
| 04/09/2009 | US20090093086 Lead forming apparatus and method of fabricating semiconductor device |
| 04/09/2009 | US20090093085 Carrier Structure for stacked-type semiconductor device, method of producing the same, and method of fabricating stacked-type semiconductor device |
| 04/09/2009 | US20090093084 Die offset die to bonding |
| 04/09/2009 | US20090093083 Method of depositing chalcogenide film for phase-change memory |
| 04/09/2009 | US20090093081 Process of phosphorus diffusion for manufacturing solar cell |
| 04/09/2009 | US20090093080 Solar cells and methods and apparatuses for forming the same including i-layer and n-layer chamber cleaning |
| 04/09/2009 | US20090093079 Method of producing an asymmetric architecture semi-conductor device |
| 04/09/2009 | US20090093078 System and Method for High Temperature Compact Thermoelectric Generator (TEG) Device Construction |
| 04/09/2009 | US20090093077 METHOD OF MANUFACTURING GaN SUBSTRATE, METHOD OF MANUFACTURING EPITAXIALWAFER, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND EPITAXIALWAFER |
| 04/09/2009 | US20090093076 Method for manufacturing monolithic semiconductor laser |
| 04/09/2009 | US20090093075 Method of separating semiconductor dies |
| 04/09/2009 | US20090093074 Light Emission From Silicon-Based Nanocrystals By Sequential Thermal Annealing Approaches |
| 04/09/2009 | US20090093073 Method of making circuitized substrate with internal optical pathway using photolithography |
| 04/09/2009 | US20090093072 Electronic assemblies with hot spot cooling and methods relating thereto |
| 04/09/2009 | US20090093071 Thermal treatment apparatus, thermal treatment method and method of manufacturing semiconductor device |
| 04/09/2009 | US20090093070 Capacitor, method of manufacturing the same, method of manufacturing ferroelectric memory device, method of manufacturing actuator, and method of manufacturing liquid jet head |
| 04/09/2009 | US20090092932 Mixture of photomasks; controlling incline of pattern; lithography; phase shifting; removal of mask by etching |
| 04/09/2009 | US20090092905 Photomask defect correction device and photomask defect correction method |
| 04/09/2009 | US20090092748 Electronic device packaging and curable resin composition |
| 04/09/2009 | US20090092472 Apparatus and system for handling a glass sheet |
| 04/09/2009 | US20090092470 End effector with sensing capabilities |
| 04/09/2009 | US20090092469 Substrate processing unit, substrate transfer method, substrate cleansing process unit, and substrate plating apparatus |
| 04/09/2009 | US20090092468 Inlet port mechanism for introducing object and treatment system |
| 04/09/2009 | US20090092467 Stage apparatus |
| 04/09/2009 | US20090092466 Multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same |
| 04/09/2009 | US20090092166 Nitride semiconductor light-emitting device |
| 04/09/2009 | US20090092165 Laser diode having nano patterns and method of fabricating the same |
| 04/09/2009 | US20090092164 Optical semiconductor device and method of manufacturing same |
| 04/09/2009 | US20090092163 Laser diode and method of manufacturing the same |
| 04/09/2009 | US20090092162 Means for improved implementation of laser diodes and laser diode arrays |
| 04/09/2009 | US20090092033 Electric field sensor having vertical structure, fabrication method thereof, and storage unit using the same |
| 04/09/2009 | US20090091976 Integrated Circuit with Switching Unit for Memory Cell Coupling, and Method for Producing an Integrated Circuit for Memory Cell Coupling |
| 04/09/2009 | US20090091962 Multi-chip memory device with stacked memory chips, method of stacking memory chips, and method of controlling operation of multi-chip package memory |
| 04/09/2009 | US20090091752 Apparatus and a method for inspection of a mask blank, a method for manufacturing a reflective exposure mask, a method for reflective exposure, and a method for manufacturing semiconductor integrated circuits |
| 04/09/2009 | US20090091750 Method For Inspecting Pattern Defect And Device For Realizing The Same |
| 04/09/2009 | US20090091736 Calculation method, generation method, program, exposure method, and mask fabrication method |
| 04/09/2009 | US20090091735 Illumination optical system and exposure apparatus having the same |
| 04/09/2009 | US20090091678 Array substrate for a liquid crystal display device and manufacturing method of the same |
| 04/09/2009 | US20090091677 Liquid crystal display and method for manufacturing the same |
| 04/09/2009 | US20090091675 Liquid crystal display device and manufacturing method thereof |
| 04/09/2009 | US20090091600 Micro-fluid ejection head and stress relieved orifice plate therefor |
| 04/09/2009 | US20090091352 Nanotube-based switching elements with multiple controls |
| 04/09/2009 | US20090091245 Method for manufacturing an oled, an intermediate product for manufacturing an oled, as well as an oled |
| 04/09/2009 | US20090091044 Dicing die attachment film and method for packaging semiconductor using same |
| 04/09/2009 | US20090091042 Integrated circuit package system including die having relieved active region |
| 04/09/2009 | US20090091041 Stacked type chip package structure and method of fabricating the same |
| 04/09/2009 | US20090091039 Semiconductor device, method of manufacturing the same, and semiconductor substrate |
| 04/09/2009 | US20090091038 Air gap for interconnect application |
| 04/09/2009 | US20090091037 Methods for Fabricating Contacts to Pillar Structures in Integrated Circuits |