Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/2009
04/08/2009CN101405845A Surface processing apparatus
04/08/2009CN101405844A Methods for etching a dielectric barrier layer with high selectivity
04/08/2009CN101405843A Method for forming thin film and multilayer structure of thin film
04/08/2009CN101405842A Annealing apparatus
04/08/2009CN101405841A Heat shield plate for substrate annealing apparatus
04/08/2009CN101405840A Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method
04/08/2009CN101405839A Movable body drive method and movable body drive system, pattern formation method and apparatus, device manufacturing method and decision method
04/08/2009CN101405838A Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method and correction method
04/08/2009CN101405837A Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method
04/08/2009CN101405836A Manufacturing method of semiconductor device
04/08/2009CN101405835A Method of cleaning a semiconductor wafer
04/08/2009CN101405834A Novel reworkable underfills for ceramic MCM C4 protection
04/08/2009CN101405833A Method and structure for fabricating solar cells
04/08/2009CN101405832A Method for separating wafers from a stack of wafers
04/08/2009CN101405659A Reflective, refractive and projecting optical system; reflective, refractive and projecting device; scanning exposure device; and method of manufacturing micro device
04/08/2009CN101405657A Photosensitive composition, photosensitive film, permanent pattern forming method, and printed board
04/08/2009CN101405655A Negative-type photosensitive fluorinated aromatic resin composition
04/08/2009CN101405426A SiOx:Si composite material compositions and methods of making same
04/08/2009CN101405234A Methods for etching a bottom anti-reflective coating layer in dual damascene application
04/08/2009CN101405216A Topography directed patterning
04/08/2009CN101405208A Tray stack transfer apparatus
04/08/2009CN101404863A Electronic circuit device and method of making the same
04/08/2009CN101404862A Electronic circuit device and method of making the same
04/08/2009CN101404861A Electronic circuit device and method of making the same
04/08/2009CN101404314A Light emitting device and method for manufacturing the same
04/08/2009CN101404303A Wet-method etching device for oxide film
04/08/2009CN101404295A Thin film transistor, display device having thin film transistor, and method for manufacturing the same
04/08/2009CN101404290A Image sensor and method of fabricating the same
04/08/2009CN101404289A Image sensor and method of fabricating the same
04/08/2009CN101404288A Solid state imaging device, method of manufacturing the same, and imaging apparatus
04/08/2009CN101404287A Semiconductor storage device and manufacturing method of the same
04/08/2009CN101404284A Semiconductor device and method for fabricating the same
04/08/2009CN101404283A Planar MOSFET integrated with schottky diode and its layout method
04/08/2009CN101404282A Semiconductor device and method of manufacturing the same
04/08/2009CN101404276A Light emitting module and method for manufacturing the same
04/08/2009CN101404274A Lead frame, packaging structure and packaging method for packaging three-pin electronic component
04/08/2009CN101404272A Labeling type semiconductor component and its production method
04/08/2009CN101404270A Semiconductor device, method of manufacturing the same, and semiconductor substrate
04/08/2009CN101404269A Semiconductor device, method for mounting semiconductor device, and mounting structure of semiconductor device
04/08/2009CN101404268A Semiconductor device and method of bump formation
04/08/2009CN101404267A Semiconductor device and method of manufacturing the same
04/08/2009CN101404264A Spin head
04/08/2009CN101404263A Position sensor system for substrate transfer robot
04/08/2009CN101404262A Semiconductor device and method of manufacturing integrated circuit chip
04/08/2009CN101404261A Triode and manufacturing method thereof
04/08/2009CN101404260A LED display packaging method
04/08/2009CN101404259A Wiring board, semiconductor apparatus and method of manufacturing them
04/08/2009CN101404258A Method of manufacturing wafer level package
04/08/2009CN101404257A Field effect transistor and method for manufacturing the same
04/08/2009CN101404256A Method for producing AlGaN/AlInN composite potential barrier gallium nitride field effect pipe
04/08/2009CN101404255A Method for producing static induction thyristor by silicon-silicon direct bonding
04/08/2009CN101404254A Method for producing open PN junction fast-recovery rectifier diode by silicon mono-crystal sheet
04/08/2009CN101404253A Method of improving oxide growth rate of selective oxidation processes
04/08/2009CN101404252A Full-silicide metal gate electrode manufacturing process
04/08/2009CN101404251A Crystallization equipment, crystallization method, and phase modulation element
04/08/2009CN101404250A Selective formation of silicon carbon epitaxial layer
04/08/2009CN101404249A Method for preparing silicon carbide epitaxial layer without step appearance
04/08/2009CN101404248A GaN single-crystal substrate and method for producing GaN single crystal
04/08/2009CN101404247A Method for preparing nitride quantum point
04/08/2009CN101404246A Epitaxial growth method for large scale InGaSb quantum point
04/08/2009CN101404245A Method for reducing wafer arcing
04/08/2009CN101404244A Method for treating process solution and apparatus for treating substrate
04/08/2009CN101404243A Processing system for process object and thermal processing method for process object
04/08/2009CN101404242A Method and apparatus for cleaning a substrate
04/08/2009CN101404241A Protective tape separation method and apparatus using the same
04/08/2009CN101404198A Dilute magnetic semiconductor material with high curie temperature and its production method
04/08/2009CN101404142A Current mirror type TFT-OLED display image element unit circuit and its production method
04/08/2009CN101403864A Method for self-judgment of measurement data reliability of self-adapting focusing and leveling sensor system
04/08/2009CN101403854A Nano-patterning method and method of manufacturing master plate and discrete track magnetic recording media
04/08/2009CN101403836A Liquid crystal display device
04/08/2009CN101403785A Probe apparatus and probing method
04/08/2009CN101403764A The connecting device for burn in testing equipment
04/08/2009CN101403118A Silicon slice corrosion single-face protection clamper
04/08/2009CN101403095A Workpiece clamping head structure
04/08/2009CN101403094A Method for growth of type n ZnMgO Ga semiconductor film on flexible substrate
04/08/2009CN101402808A Conductive pattern formation ink, conductive pattern and wiring substrate
04/08/2009CN101402227A Cutting blade detection mechanism
04/08/2009CN101402226A Cutting device
04/08/2009CN101402091A Cleaning sheet, carrying member with a cleaning function and method of cleaning substrate processing equipment
04/08/2009CN100477891C Multilayer wiring board, method for producing the came, and method for producing fiber reinforced resin board
04/08/2009CN100477888C Method and device for mounting conductive ball
04/08/2009CN100477522C Integrated circuit and method for testing integrated circuit
04/08/2009CN100477501C Semiconductor integrated circuit device
04/08/2009CN100477425C Nitride semiconductor device and method for manufacturing same
04/08/2009CN100477315C Method for fabricating piezoelectric element
04/08/2009CN100477310C Organic semiconductor device
04/08/2009CN100477308C A making method for the diameter-adjustable silicon quanta line array
04/08/2009CN100477304C Semiconductor light-emitting device, and a method of manufacture of a semiconductor device
04/08/2009CN100477303C Growing method of gallium nitride semiconductor
04/08/2009CN100477299C Semiconductor device and optical device using said semiconductor device
04/08/2009CN100477295C Method for processing surface oxidation film of mercury cadmium telluride film material
04/08/2009CN100477292C Method for fabricating silicon photoelectric diode
04/08/2009CN100477288C Photovoltaic device
04/08/2009CN100477283C Diode presenting high breakdown voltage
04/08/2009CN100477282C Devices and operation methods for reducing second bit effect in memory device
04/08/2009CN100477281C Non-volatile semiconductor memory cell and method for producing the same
04/08/2009CN100477280C Nonvolatile memory devices with trenched side-wall transistors and method of fabricating the same
04/08/2009CN100477279C Thin-film transistor structure and method of manufacture thereof
04/08/2009CN100477278C Silicon-on-insulator wafer, silicon-on-insulator device and manufacturing method thereof
04/08/2009CN100477277C Semiconductor wafer and producing method of semiconductor device