Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2009
05/07/2009WO2009057665A1 Thin film active element group, thin film active element array, organic light emitting device, display device and method for manufacturing thin film active element group
05/07/2009WO2009057660A1 Half-tone mask, half-tone mask blank and method for manufacturing half-tone mask
05/07/2009WO2009057638A1 Positive photosensitive resin composition, method for forming pattern, electronic component
05/07/2009WO2009057632A1 Apparatus for connecting utility medium supply member, stage apparatus, apparatus for supporting projection optical system, and exposure apparatus
05/07/2009WO2009057614A1 Electronic device, electronic device manufacturing method, and mounting board
05/07/2009WO2009057612A1 Circuit connecting material and connecting structure for circuit member
05/07/2009WO2009057601A1 Iii nitride electronic device and iii nitride semiconductor epitaxial substrate
05/07/2009WO2009057589A1 Capacitor, semiconductor device comprising the same, and method for manufacturing capacitor
05/07/2009WO2009057583A1 Plasma processing system and plasma processing method
05/07/2009WO2009057582A1 Electrical connection body and method for fabricating the same
05/07/2009WO2009057530A1 Adhesive composition for semiconductor and semicondutor device produced using the adhesive composition
05/07/2009WO2009057514A1 Organic transistor, organic transistor array, and display device
05/07/2009WO2009057513A1 Vacuum gate valve, and gate opening/closing method using the gate valve
05/07/2009WO2009057504A1 Magnetoresistive element, magnetic random access memory, and initialization method thereof
05/07/2009WO2009057482A1 Semiconductor mounting apparatus and semiconductor mounting method
05/07/2009WO2009057469A1 Method for forming silicon dots
05/07/2009WO2009057458A1 Composition for forming resist underlayer film and method of forming resist pattern from the same
05/07/2009WO2009057444A1 Circuit board and display device
05/07/2009WO2009057428A1 Magnetoresistive effect memory device
05/07/2009WO2009057422A1 Copper anode or phosphorus-containing copper anode, method for electroplating copper on semiconductor wafer, and semiconductor wafer with particle not significantly deposited thereon
05/07/2009WO2009057405A1 Machine and method for mounting electronic component
05/07/2009WO2009057395A1 Substrate cleaning method for removing oxide film
05/07/2009WO2009057385A1 Power amplifier and power amplifier control method
05/07/2009WO2009057376A1 Circuit connecting material, connection structure and method for producing the same
05/07/2009WO2009057258A1 Work polishing head, and polishing apparatus having the polishing head
05/07/2009WO2009057225A1 Semiconductor device and its manufacturing method
05/07/2009WO2009057223A1 Surface treating apparatus and method for substrate treatment
05/07/2009WO2009057203A1 Abnormality detecting device for detecting abnormality of contact section of contact arm
05/07/2009WO2009057194A1 Semiconductor structure, and manufacturing method for that semiconductor structure
05/07/2009WO2009057185A1 Cvd device
05/07/2009WO2009057015A1 Trench gate mosfet and method of manufacturing the same
05/07/2009WO2009057010A1 Multilayer structure and method of producing the same
05/07/2009WO2009056491A1 Cmp slurry composition and process for planarizing copper containing surfaces provided with a diffusion barrier layer
05/07/2009WO2009056478A2 Strained semiconductor-on-insulator by si:c combined with porous process
05/07/2009WO2009056471A1 Hybrid orientation semiconductor structure with reduced boundary defects and method of forming same
05/07/2009WO2009056469A1 Foil perforating needle for detaching a small die from a foil
05/07/2009WO2009056468A1 Pick-up tool and method for grasping and mounting small dies
05/07/2009WO2009056417A1 Method for enabling multiple vt devices using high-k metal gate stacks
05/07/2009WO2009056235A2 Multilayer system comprising contact elements, and method for the production of a contact element for a multilayer system
05/07/2009WO2009055992A1 Plating apparatus for metallization on semiconductor workpiece
05/07/2009WO2009055989A1 Method and apparatus to prewet wafer surface for metallization from electrolyte solution
05/07/2009WO2009055862A1 Method of component assembly on a substrate
05/07/2009WO2009038441A3 Method for etching glass or metal substrates using negative photoresist and method for fabricating cliche using the same
05/07/2009WO2009036053A3 Tuning via facet with minimal rie lag
05/07/2009WO2009035268A3 Room temperature-operating single-electron device and the fabrication method thereof
05/07/2009WO2009032576A3 Method to fabricate adjacent silicon fins of differing heights
05/07/2009WO2009032230A3 A cmos device having gate insulation layers of different type and thickness and method of forming the same
05/07/2009WO2009029942A3 Mechanically integrated and closely coupled print head and mist source
05/07/2009WO2009029938A3 Apparatus for anisotropic focusing
05/07/2009WO2009029532A3 Thermocouple
05/07/2009WO2009014741A9 A plasma processing method for forming a film and an electronic component manufactured by the method
05/07/2009WO2009013255A3 Method for transferring an epitaxial layer from a donor wafer to a system wafer appertaining to microsystems technology
05/07/2009WO2008122891A3 Binding of costituents having a high mobility in an electronic connection
05/07/2009WO2008118824A3 Signaling circuit and method for integrated circuit devices and systems
05/07/2009WO2008118531A3 Oxide-containing film formed from silicon
05/07/2009WO2008046785A3 Method for stabilizing and functionalizing porous metallic layers
05/07/2009WO2007118121A3 Method and structure for fabricating solar cells using a layer transfer process
05/07/2009WO2007067330A3 Leadless semiconductor package and method of manufacture
05/07/2009WO2007059220A3 Methods to shape the electric field in electron devices, passivate dislocations and point defects, and enhance the luminescence efficiency of optical devices
05/07/2009WO2007056708A3 A strain-compensated metastable compound base heterojunction bipolar transistor
05/07/2009WO2007055849A3 Multi-step system and method for curing a dielectric film
05/07/2009WO2007047822A3 Nanoporous low-k films with infiltrated porosity
05/07/2009WO2007040798A3 Method to improve transmittance of an encapsulating film
05/07/2009WO2007040717A3 Process and system for etching doped silicon
05/07/2009WO2007035731A3 Defectivity and process control of electroless deposition in microelectronics applications
05/07/2009WO2007030327A3 High temperature microelectromechanical (mem) devices and fabrication method
05/07/2009WO2007022145A3 Cleanspace fabricator support and method
05/07/2009WO2007014320A3 Method and structure for fabricating multiple tile regions onto a plate using a controlled cleaving process
05/07/2009WO2007002140A3 A cold-walled vessel process for compounding, homogenizing and consolidating semiconductor compounds
05/07/2009WO2006138496A3 Remote chip attachment
05/07/2009WO2006138491A3 Back-to-front via process
05/07/2009WO2006107573A3 High strip rate downstream chamber
05/07/2009WO2006104921A3 A plasma enhanced atomic layer deposition system and method
05/07/2009WO2006072022A3 Electronic device including a guest material within a layer and a process for forming the same
05/07/2009US20090119635 Mask pattern correction method for manufacture of semiconductor integrated circuit device
05/07/2009US20090119069 Method for determining relative swing curve amplitude
05/07/2009US20090117871 Switch circuit and method of switching radio frequency signals
05/07/2009US20090117829 Polishing slurry for metal, and polishing method
05/07/2009US20090117828 Polishing apparatus and substrate processing apparatus
05/07/2009US20090117752 Semiconductor device manufacturing method and substrate processing apparatus
05/07/2009US20090117751 Method for forming radical oxide layer and method for forming dual gate oxide layer using the same
05/07/2009US20090117750 Methods of Forming a Semiconductor Device
05/07/2009US20090117749 Etching Method of Single Wafer
05/07/2009US20090117748 Method for manufacturing a phase change memory device capable of improving thermal efficiency of phase change material
05/07/2009US20090117747 Method for Surface Treating Semiconductor
05/07/2009US20090117746 Gas supply device, substrate processing apparatus and substrate processing method
05/07/2009US20090117745 Methods for selectively etching a barrier layer in dual damascene applications
05/07/2009US20090117744 Ion implantation mask forming method
05/07/2009US20090117743 Film formation apparatus and method for using same
05/07/2009US20090117742 Method for fabricating fine pattern in semiconductor device
05/07/2009US20090117741 Method for fabricating monolithic two-dimensional nanostructures
05/07/2009US20090117740 Fluid-confining apparatus and method of operating the same
05/07/2009US20090117739 Method for forming pattern in semiconductor device
05/07/2009US20090117738 Method for producing substrate
05/07/2009US20090117737 Polyconductor line end formation and related mask
05/07/2009US20090117736 Ammonia-based plasma treatment for metal fill in narrow features
05/07/2009US20090117735 Implantation of multiple species to address copper reliability
05/07/2009US20090117734 Processes for forming electronic devices including polishing metal-containing layers
05/07/2009US20090117733 Protection of seedlayer for electroplating
05/07/2009US20090117732 Method of fabricating semicondcutor device