Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2009
05/06/2009CN101427184A 光刻系统和投影方法 Projection lithography system and method
05/06/2009CN101427183A Composition for forming lower layer film and pattern forming method
05/06/2009CN101426957A Substrate support system and method
05/06/2009CN101426952A Film forming apparatus and barrier film manufacturing method
05/06/2009CN101426950A Film deposition apparatus and film deposition method
05/06/2009CN101426949A Integrated capacitive and inductive power sources for a plasma etching chamber
05/06/2009CN101426874A Adhesive tape
05/06/2009CN101426730A Method for producing oxide particle, slurry, polishing agent and method for polishing substrate
05/06/2009CN101426618A Manufacturing method of polishing pad
05/06/2009CN101426359A 换热器 Heat Exchanger
05/06/2009CN101425659A Semiconductor laser and manufacturing method thereof
05/06/2009CN101425658A Laser diode expitaxial wafer and method for producing same
05/06/2009CN101425552A Method for preparing high performance mercury cadmium telluride p-n junction by ion injection
05/06/2009CN101425543A Thin-film transistor substrate and method of manufacturing the same
05/06/2009CN101425540A Semiconductor device and method of manufacture
05/06/2009CN101425539A High-mobility trench mosfets
05/06/2009CN101425538A Metal-gated mosfet devices having scaled gate stack thickness
05/06/2009CN101425535A Memory and manufacturing method thereof
05/06/2009CN101425534A Transistor and method of fabricating the same
05/06/2009CN101425533A Organic electroluminescent device, method for producing the same, and electronic apparatus
05/06/2009CN101425527A Solid-state imaging device, production method and drive method thereof, and camera
05/06/2009CN101425526A Optical device and method of manufacturing the same
05/06/2009CN101425525A Semiconductor device and method of manufacturing the same
05/06/2009CN101425524A Solid-state imaging device and production method therefor
05/06/2009CN101425523A CMOS semiconductor sensor package component and manufacturing method thereof
05/06/2009CN101425522A Dielectrically isolated integrated circuit extending wafer and preparation method thereof
05/06/2009CN101425521A High resistivity soi base wafer using thermally annealed substrate
05/06/2009CN101425519A Transient voltage suppressor manufactured in silicon on oxide (soi) layer
05/06/2009CN101425518A Multiple crystallographic orientation semiconductor structures
05/06/2009CN101425515A Semiconductor device with vertical channel transistor and method for fabricating the same
05/06/2009CN101425513A Light emitting module having heat radiation function, reflection cover and assembling method thereof
05/06/2009CN101425512A Stacked semiconductor package and method for manufacturing the same
05/06/2009CN101425510A Sensor module package structure and method of the same
05/06/2009CN101425507A LED row having heat radiating fins and production method
05/06/2009CN101425506A LED and its making method
05/06/2009CN101425504A Semiconductor device, method and apparatus for testing same, and method for manufacturing semiconductor device
05/06/2009CN101425503A Semiconductor device and method for manufacturing the same
05/06/2009CN101425502A Fuse breakdown method adapted to semiconductor device
05/06/2009CN101425494A Solder-top enhanced semiconductor device and method for low parasitic impedance packaging
05/06/2009CN101425491A Elastic projection of sloped lateral wall and production method thereof
05/06/2009CN101425487A Manufacturing method for heat conducting device capable for LED installation
05/06/2009CN101425482A Active element array substrate manufacturing method and construction thereof
05/06/2009CN101425481A Pixel construction and manufacturing method thereof
05/06/2009CN101425480A Manufacturing method for thin-film transistor substrate
05/06/2009CN101425479A High-k dielectric metal gate device structure and method for forming the same
05/06/2009CN101425478A Method for providing self-alignment contact in semiconductor device set
05/06/2009CN101425477A Forming method of shallow groove isolation and grinding method of semiconductor structure
05/06/2009CN101425476A Shallow slot preparing method
05/06/2009CN101425475A Production method for chip mark
05/06/2009CN101425474A Method and apparatus for providing an electrostatic chuck with reduced plasma penetration and arcing
05/06/2009CN101425473A Vacuum keeping device and wafer cutting machine having the device
05/06/2009CN101425472A Electrostatic clamping disc controlling temperature by air and method for controlling temperature of substrate
05/06/2009CN101425471A Manufacturing method of semiconductor integrated device
05/06/2009CN101425470A Method for forming image sensor protection layer
05/06/2009CN101425469A Semi-conductor packaging method using large size panel
05/06/2009CN101425468A Coated lead wire frame
05/06/2009CN101425467A Method for preparing transparent conductive film and transparent hetero-junction on flexible substrate
05/06/2009CN101425466A Semiconductor component and method of manufacture
05/06/2009CN101425465A Semiconductor component and method of manufacture
05/06/2009CN101425464A Method for manufacturing thin-film transistor
05/06/2009CN101425463A TVS diode device construction with low voltage/low leakage current and production method thereof
05/06/2009CN101425462A Method for fabricating semiconductor device
05/06/2009CN101425461A Method and system for improving dielectric film quality for void free gap fill
05/06/2009CN101425460A Method of manufacturing ceramic film and ceramic film manufacturing apparatus
05/06/2009CN101425459A Etching method
05/06/2009CN101425458A Methods and systems for forming at least one dielectric layer
05/06/2009CN101425457A High dielectric constant grid dielectric material forming method and a semiconductor device
05/06/2009CN101425456A Method for manufacturing soi substrate and semiconductor device
05/06/2009CN101425455A Semiconductor substrate and method for manufacturing the same, and method for manufacturing semiconductor device
05/06/2009CN101425454A Method for manufacturing SOI substrate
05/06/2009CN101425453A Alpha tantalum layer forming method, mim capacitor and forming method thereof
05/06/2009CN101425452A Substrate processing apparatus and a substrate processing method
05/06/2009CN101425451A Substrate treatment method and substrate treatment apparatus
05/06/2009CN101425450A Gas supply device, substrate processing apparatus and substrate processing method
05/06/2009CN101425449A Method for manufacturing semiconductor substrate, semiconductor device and electronic device
05/06/2009CN101425448A Process control method and apparatus
05/06/2009CN101424950A Temperature control device for target substrate, temperature control method and plasma processing apparatus including same
05/06/2009CN101424920A Data processing and management equipment and method for data analysis of particles in surface structuring device or film forming device
05/06/2009CN101424888A Combination for tripping photoresist, tripping method and making method of display divice
05/06/2009CN101424886A Developing method and developer coating apparatus
05/06/2009CN101424883A Exposure system and device producing method
05/06/2009CN101424882A Exposing device, methods for forming pattern, channel, and hole by using the same, and liquid crystal display device therewith and method for fabricating the same
05/06/2009CN101424875A Mask and method for forming a semiconductor device using the same
05/06/2009CN101424874A Exposure mask and method for fabricating thin-film transistor
05/06/2009CN101424853A Liquid crystal display device
05/06/2009CN101424849A TFT-LCD pixel structure and method for manufacturing same
05/06/2009CN101424848A TFT-LCD pixel structure and method for manufacturing same
05/06/2009CN101424847A TFT-LCD pixel structure and method for manufacturing same
05/06/2009CN101424846A TFT-LCD array substrate, liquid crystal display panel and method for producing same
05/06/2009CN101424844A Method for manufacturing LCD array substrate
05/06/2009CN101424841A LCD and making method thereof
05/06/2009CN101424839A LCD device
05/06/2009CN101424837A Method for manufacturing LCD array substrate
05/06/2009CN101424836A Method for manufacturing LCD array substrate
05/06/2009CN101424835A Method for manufacturing LCD array substrate
05/06/2009CN101424797A Protective cover structure and use thereof
05/06/2009CN101423935A Substrate processing apparatus and method of controlling substrate processing apparatus
05/06/2009CN101423931A Method for forming metal oxide on surface of substrate
05/06/2009CN101423930A Showerhead design with precursor source
05/06/2009CN101423928A Plasma processing apparatus and controlling method for plasma processing apparatus