Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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05/06/2009 | CN101427184A 光刻系统和投影方法 Projection lithography system and method |
05/06/2009 | CN101427183A Composition for forming lower layer film and pattern forming method |
05/06/2009 | CN101426957A Substrate support system and method |
05/06/2009 | CN101426952A Film forming apparatus and barrier film manufacturing method |
05/06/2009 | CN101426950A Film deposition apparatus and film deposition method |
05/06/2009 | CN101426949A Integrated capacitive and inductive power sources for a plasma etching chamber |
05/06/2009 | CN101426874A Adhesive tape |
05/06/2009 | CN101426730A Method for producing oxide particle, slurry, polishing agent and method for polishing substrate |
05/06/2009 | CN101426618A Manufacturing method of polishing pad |
05/06/2009 | CN101426359A 换热器 Heat Exchanger |
05/06/2009 | CN101425659A Semiconductor laser and manufacturing method thereof |
05/06/2009 | CN101425658A Laser diode expitaxial wafer and method for producing same |
05/06/2009 | CN101425552A Method for preparing high performance mercury cadmium telluride p-n junction by ion injection |
05/06/2009 | CN101425543A Thin-film transistor substrate and method of manufacturing the same |
05/06/2009 | CN101425540A Semiconductor device and method of manufacture |
05/06/2009 | CN101425539A High-mobility trench mosfets |
05/06/2009 | CN101425538A Metal-gated mosfet devices having scaled gate stack thickness |
05/06/2009 | CN101425535A Memory and manufacturing method thereof |
05/06/2009 | CN101425534A Transistor and method of fabricating the same |
05/06/2009 | CN101425533A Organic electroluminescent device, method for producing the same, and electronic apparatus |
05/06/2009 | CN101425527A Solid-state imaging device, production method and drive method thereof, and camera |
05/06/2009 | CN101425526A Optical device and method of manufacturing the same |
05/06/2009 | CN101425525A Semiconductor device and method of manufacturing the same |
05/06/2009 | CN101425524A Solid-state imaging device and production method therefor |
05/06/2009 | CN101425523A CMOS semiconductor sensor package component and manufacturing method thereof |
05/06/2009 | CN101425522A Dielectrically isolated integrated circuit extending wafer and preparation method thereof |
05/06/2009 | CN101425521A High resistivity soi base wafer using thermally annealed substrate |
05/06/2009 | CN101425519A Transient voltage suppressor manufactured in silicon on oxide (soi) layer |
05/06/2009 | CN101425518A Multiple crystallographic orientation semiconductor structures |
05/06/2009 | CN101425515A Semiconductor device with vertical channel transistor and method for fabricating the same |
05/06/2009 | CN101425513A Light emitting module having heat radiation function, reflection cover and assembling method thereof |
05/06/2009 | CN101425512A Stacked semiconductor package and method for manufacturing the same |
05/06/2009 | CN101425510A Sensor module package structure and method of the same |
05/06/2009 | CN101425507A LED row having heat radiating fins and production method |
05/06/2009 | CN101425506A LED and its making method |
05/06/2009 | CN101425504A Semiconductor device, method and apparatus for testing same, and method for manufacturing semiconductor device |
05/06/2009 | CN101425503A Semiconductor device and method for manufacturing the same |
05/06/2009 | CN101425502A Fuse breakdown method adapted to semiconductor device |
05/06/2009 | CN101425494A Solder-top enhanced semiconductor device and method for low parasitic impedance packaging |
05/06/2009 | CN101425491A Elastic projection of sloped lateral wall and production method thereof |
05/06/2009 | CN101425487A Manufacturing method for heat conducting device capable for LED installation |
05/06/2009 | CN101425482A Active element array substrate manufacturing method and construction thereof |
05/06/2009 | CN101425481A Pixel construction and manufacturing method thereof |
05/06/2009 | CN101425480A Manufacturing method for thin-film transistor substrate |
05/06/2009 | CN101425479A High-k dielectric metal gate device structure and method for forming the same |
05/06/2009 | CN101425478A Method for providing self-alignment contact in semiconductor device set |
05/06/2009 | CN101425477A Forming method of shallow groove isolation and grinding method of semiconductor structure |
05/06/2009 | CN101425476A Shallow slot preparing method |
05/06/2009 | CN101425475A Production method for chip mark |
05/06/2009 | CN101425474A Method and apparatus for providing an electrostatic chuck with reduced plasma penetration and arcing |
05/06/2009 | CN101425473A Vacuum keeping device and wafer cutting machine having the device |
05/06/2009 | CN101425472A Electrostatic clamping disc controlling temperature by air and method for controlling temperature of substrate |
05/06/2009 | CN101425471A Manufacturing method of semiconductor integrated device |
05/06/2009 | CN101425470A Method for forming image sensor protection layer |
05/06/2009 | CN101425469A Semi-conductor packaging method using large size panel |
05/06/2009 | CN101425468A Coated lead wire frame |
05/06/2009 | CN101425467A Method for preparing transparent conductive film and transparent hetero-junction on flexible substrate |
05/06/2009 | CN101425466A Semiconductor component and method of manufacture |
05/06/2009 | CN101425465A Semiconductor component and method of manufacture |
05/06/2009 | CN101425464A Method for manufacturing thin-film transistor |
05/06/2009 | CN101425463A TVS diode device construction with low voltage/low leakage current and production method thereof |
05/06/2009 | CN101425462A Method for fabricating semiconductor device |
05/06/2009 | CN101425461A Method and system for improving dielectric film quality for void free gap fill |
05/06/2009 | CN101425460A Method of manufacturing ceramic film and ceramic film manufacturing apparatus |
05/06/2009 | CN101425459A Etching method |
05/06/2009 | CN101425458A Methods and systems for forming at least one dielectric layer |
05/06/2009 | CN101425457A High dielectric constant grid dielectric material forming method and a semiconductor device |
05/06/2009 | CN101425456A Method for manufacturing soi substrate and semiconductor device |
05/06/2009 | CN101425455A Semiconductor substrate and method for manufacturing the same, and method for manufacturing semiconductor device |
05/06/2009 | CN101425454A Method for manufacturing SOI substrate |
05/06/2009 | CN101425453A Alpha tantalum layer forming method, mim capacitor and forming method thereof |
05/06/2009 | CN101425452A Substrate processing apparatus and a substrate processing method |
05/06/2009 | CN101425451A Substrate treatment method and substrate treatment apparatus |
05/06/2009 | CN101425450A Gas supply device, substrate processing apparatus and substrate processing method |
05/06/2009 | CN101425449A Method for manufacturing semiconductor substrate, semiconductor device and electronic device |
05/06/2009 | CN101425448A Process control method and apparatus |
05/06/2009 | CN101424950A Temperature control device for target substrate, temperature control method and plasma processing apparatus including same |
05/06/2009 | CN101424920A Data processing and management equipment and method for data analysis of particles in surface structuring device or film forming device |
05/06/2009 | CN101424888A Combination for tripping photoresist, tripping method and making method of display divice |
05/06/2009 | CN101424886A Developing method and developer coating apparatus |
05/06/2009 | CN101424883A Exposure system and device producing method |
05/06/2009 | CN101424882A Exposing device, methods for forming pattern, channel, and hole by using the same, and liquid crystal display device therewith and method for fabricating the same |
05/06/2009 | CN101424875A Mask and method for forming a semiconductor device using the same |
05/06/2009 | CN101424874A Exposure mask and method for fabricating thin-film transistor |
05/06/2009 | CN101424853A Liquid crystal display device |
05/06/2009 | CN101424849A TFT-LCD pixel structure and method for manufacturing same |
05/06/2009 | CN101424848A TFT-LCD pixel structure and method for manufacturing same |
05/06/2009 | CN101424847A TFT-LCD pixel structure and method for manufacturing same |
05/06/2009 | CN101424846A TFT-LCD array substrate, liquid crystal display panel and method for producing same |
05/06/2009 | CN101424844A Method for manufacturing LCD array substrate |
05/06/2009 | CN101424841A LCD and making method thereof |
05/06/2009 | CN101424839A LCD device |
05/06/2009 | CN101424837A Method for manufacturing LCD array substrate |
05/06/2009 | CN101424836A Method for manufacturing LCD array substrate |
05/06/2009 | CN101424835A Method for manufacturing LCD array substrate |
05/06/2009 | CN101424797A Protective cover structure and use thereof |
05/06/2009 | CN101423935A Substrate processing apparatus and method of controlling substrate processing apparatus |
05/06/2009 | CN101423931A Method for forming metal oxide on surface of substrate |
05/06/2009 | CN101423930A Showerhead design with precursor source |
05/06/2009 | CN101423928A Plasma processing apparatus and controlling method for plasma processing apparatus |