Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2009
05/06/2009CN100485859C Unit cleaning method and substrate treater for depressurizing chamber
05/06/2009CN100485821C Allowance method for point to ground resistance on tray
05/06/2009CN100485816C Nonvolatile memory, and IC card, ID card and ID tag thereof
05/06/2009CN100485533C Substrate processing system and method
05/06/2009CN100485532C Antireflective film and exposure method
05/06/2009CN100485531C Pixel structure and manufacturing method therefor
05/06/2009CN100485530C Integrated optical metrology and lithographic process system for dynamic critical dimension control
05/06/2009CN100485528C System and method for reducing disturbances induced by movement in immersion photolithography
05/06/2009CN100485526C Corrosion-resisting pattern-thickening material and process for forming the same, and semiconductor device and process for manufacturing the same
05/06/2009CN100485525C Manufacturing process of MEMS impression template based on wet etching
05/06/2009CN100485501C Pixel structure and liquid crystal display panel
05/06/2009CN100485498C Display device
05/06/2009CN100485476C Manufacturing method of liquid crystal display
05/06/2009CN100485446C Laser processing device
05/06/2009CN100485350C Method and system for determining characteristics of substrates employing fluid geometries
05/06/2009CN100485084C Atomic layer deposition method
05/06/2009CN100484718C Cushion layer for polishing pad
05/06/2009CN100484686C Method for producing leadless welding flux delamination structure
05/06/2009CN100484498C A flexible retina chip and preparation method thereof
05/05/2009USRE40705 High-breakdown-voltage semiconductor apparatus
05/05/2009US7530037 Methods of generating planar double gate transistor shapes and data processing system readable media to perform the methods
05/05/2009US7529634 Method, apparatus, and computer program of searching for clustering faults in semiconductor device manufacturing
05/05/2009US7529631 Defect detection system, defect detection method, and defect detection program
05/05/2009US7529595 Method of controlling substrate processing apparatus and substrate processing apparatus
05/05/2009US7529128 Integrated code and data flash memory
05/05/2009US7529126 Nonvolatile memory device and semiconductor device
05/05/2009US7529102 Wiring substrate, electronic device, electro-optical device, and electronic apparatus
05/05/2009US7528954 Method of adjusting optical imaging system, positional deviation detecting mark, method of detecting positional deviation, method of detecting position, position detecting device and mark identifying device
05/05/2009US7528935 Lithographic apparatus, device manufacturing method, and device manufactured thereby
05/05/2009US7528930 Exposure apparatus and device manufacturing method
05/05/2009US7528929 Lithographic apparatus and device manufacturing method
05/05/2009US7528884 Optical device
05/05/2009US7528816 Shift register circuit, driving circuit of display device, and display device using the driving circuit
05/05/2009US7528550 Ion implantation system and control method
05/05/2009US7528494 Accessible chip stack and process of manufacturing thereof
05/05/2009US7528493 Interconnect structure and method of fabrication of same
05/05/2009US7528491 Semiconductor components and assemblies including vias of varying lateral dimensions
05/05/2009US7528490 Semiconductor device and ferroelectric memory, and method for manufacturing semiconductor device
05/05/2009US7528487 Semiconductor device having insulating material dispersed with conductive particles which establish electrical connection by penetrating to both copper conductive layer and land of wiring board
05/05/2009US7528486 Anisotropic conductive film and bump, and packaging structure of semiconductor having the same
05/05/2009US7528483 Cooling system for a semiconductor device and method of fabricating same
05/05/2009US7528478 Semiconductor devices having post passivation interconnections and a buffer layer
05/05/2009US7528477 Castellation wafer level packaging of integrated circuit chips
05/05/2009US7528474 Stacked semiconductor package assembly having hollowed substrate
05/05/2009US7528471 Integrated circuit incorporating wire bond inductance
05/05/2009US7528467 IC substrate with over voltage protection function
05/05/2009US7528466 Copper gate electrode of liquid crystal display device and method of fabricating the same
05/05/2009US7528463 Semiconductor on insulator structure
05/05/2009US7528454 Semiconductor memory with sense amplifier
05/05/2009US7528453 Field effect transistor with local source/drain insulation and associated method of production
05/05/2009US7528450 Semiconductor device having NMOSFET and PMOSFET and manufacturing method therefor
05/05/2009US7528446 Semiconductor substrate, semiconductor device, and manufacturing methods for them
05/05/2009US7528445 Wing gate transistor for integrated circuits
05/05/2009US7528444 Efficient transistor structure
05/05/2009US7528434 Production process for a semiconductor component with a praseodymium oxide dielectric
05/05/2009US7528432 Semiconductor device having a capacitor and protection insulating films for same
05/05/2009US7528431 Semiconductor device having isolation pattern in interlayer insulating layer between capacitor contact plugs and methods of fabricating the same
05/05/2009US7528430 Electronic systems
05/05/2009US7528428 Field-effect transistor with spin-dependent transmission characteristics and non-volatile memory using the same
05/05/2009US7528426 Lateral junction field-effect transistor
05/05/2009US7528417 Light-emitting diode device and production method thereof
05/05/2009US7528416 Vertical structure LED and fabricating method thereof
05/05/2009US7528410 Semiconductor device and method for manufacturing the same
05/05/2009US7528408 Semiconductor thin film and process for production thereof
05/05/2009US7528406 Semiconductor integrated circuit and method of fabricating same
05/05/2009US7528405 Conductive memory stack with sidewall
05/05/2009US7528404 Assembly of a semiconductor die attached to substrate with oxazoline derivative bearing an electron donor or acceptor functionality
05/05/2009US7528395 Radiation source, lithographic apparatus and device manufacturing method
05/05/2009US7528392 Techniques for low-temperature ion implantation
05/05/2009US7528347 Cooling device and heat treating device using the same
05/05/2009US7528207 Method for producing polymer, polymer, composition for forming insulating film, method for producing insulating film, and insulating film
05/05/2009US7528098 Semiconductor process residue removal composition and process
05/05/2009US7528079 Method of changing an energy attenuation factor of a linear light in order to crystallize a semiconductor film
05/05/2009US7528078 Process of forming electronic device including a densified nitride layer adjacent to an opening within a semiconductor layer
05/05/2009US7528077 Semiconductor device and method for manufacturing the same
05/05/2009US7528076 Method for manufacturing gate oxide layer with different thicknesses
05/05/2009US7528075 Self-masking defect removing method
05/05/2009US7528074 Method of manufacturing a semiconductor device and method of etching an insulating film
05/05/2009US7528073 Dry etching method and diffractive optical element
05/05/2009US7528072 Crystallographic preferential etch to define a recessed-region for epitaxial growth
05/05/2009US7528071 Method for fabricating semiconductor device
05/05/2009US7528070 Sputtering apparatus and method for forming metal silicide layer using the same
05/05/2009US7528069 Fine pitch interconnect and method of making
05/05/2009US7528068 Method for manufacturing semiconductor device
05/05/2009US7528067 MOSFET structure with multiple self-aligned silicide contacts
05/05/2009US7528066 Structure and method for metal integration
05/05/2009US7528065 Structure and method for MOSFET gate electrode landing pad
05/05/2009US7528064 Interconnect structures with bond-pads and methods of forming bump sites on bond-pads
05/05/2009US7528063 Semiconductor device having a reductant layer and manufacturing method thereof
05/05/2009US7528062 Integrated matching network and method for manufacturing integrated matching networks
05/05/2009US7528061 Systems and methods for solder bonding
05/05/2009US7528060 Branched nanostructures and method of synthesizing the same
05/05/2009US7528059 Method for reducing polish-induced damage in a contact structure by forming a capping layer
05/05/2009US7528058 Method for producing a contact and electronic component comprising said type of contact
05/05/2009US7528057 Laser annealing method and laser annealing device
05/05/2009US7528056 Low-cost strained SOI substrate for high-performance CMOS technology
05/05/2009US7528055 Method of producing a nitride semiconductor device and nitride semiconductor device
05/05/2009US7528054 Semiconductor component with a thin semiconductor chip and a stiff wiring substrate, and methods for producing and further processing of thin semiconductor chips
05/05/2009US7528053 Three-dimensional package and method of making the same
05/05/2009US7528052 Method for fabricating semiconductor device with trench isolation structure