| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/05/2009 | US7528051 Method of inducing stresses in the channel region of a transistor |
| 05/05/2009 | US7528050 High performance field effect transistors on SOI substrate with stress-inducing material as buried insulator and methods |
| 05/05/2009 | US7528049 Method for manufacturing bonded SOI wafer and bonded SOI wafer manufactured thereby |
| 05/05/2009 | US7528048 Planar vertical resistor and bond pad resistor and related method |
| 05/05/2009 | US7528047 Self-aligned split gate memory cell and method of forming |
| 05/05/2009 | US7528046 Method for manufacturing semiconductor device |
| 05/05/2009 | US7528045 MOS transistor and manufacturing methods thereof |
| 05/05/2009 | US7528043 Scalable gate and storage dielectric |
| 05/05/2009 | US7528042 Method for fabricating semiconductor devices having dual gate oxide layer |
| 05/05/2009 | US7528041 Method of manufacturing semiconductor device that utilizes oxidation prevention film to form thick and thin gate insulator portions |
| 05/05/2009 | US7528040 Methods of fabricating silicon carbide devices having smooth channels |
| 05/05/2009 | US7528039 Method of fabricating flash memory |
| 05/05/2009 | US7528038 Non-volatile two-transistor semiconductor memory cell and method for producing the same |
| 05/05/2009 | US7528037 Flash memory having a high-permittivity tunnel dielectric |
| 05/05/2009 | US7528036 Non-volatile semiconductor memory and method of making same, and semiconductor device and method of making device |
| 05/05/2009 | US7528035 Vertical trench memory cell with insulating ring |
| 05/05/2009 | US7528034 Method for forming ferroelectric capacitor, ferroelectric capacitor and electronic device |
| 05/05/2009 | US7528033 Semiconductor device with a dummy gate and a method of manufacturing a semiconductor device with a dummy gate |
| 05/05/2009 | US7528032 Method for manufacturing semiconductor device |
| 05/05/2009 | US7528031 Semiconductor device and method for manufacturing the same |
| 05/05/2009 | US7528030 Semiconductor device comprising at least one MOS transistor having an etch stop layer, and corresponding fabrication process |
| 05/05/2009 | US7528029 Stressor integration and method thereof |
| 05/05/2009 | US7528028 Super anneal for process induced strain modulation |
| 05/05/2009 | US7528027 Structure and method for manufacturing device with ultra thin SOI at the tip of a V-shape channel |
| 05/05/2009 | US7528026 Method for reducing silicide defects by removing contaminants prior to drain/source activation |
| 05/05/2009 | US7528025 Nonplanar transistors with metal gate electrodes |
| 05/05/2009 | US7528024 Dual work function metal gate integration in semiconductor devices |
| 05/05/2009 | US7528023 Apparatus for crystallizing semiconductor with laser beams |
| 05/05/2009 | US7528022 Method of forming fin field effect transistor using damascene process |
| 05/05/2009 | US7528021 Thin film transistor array panel and method of manufacturing the same |
| 05/05/2009 | US7528020 Method for forming thin film transistor |
| 05/05/2009 | US7528019 Method of fabricating thin film transistor of thin film transistor liquid crystal display and method of fabricating liquid crystal display |
| 05/05/2009 | US7528017 Method of manufacturing complementary diodes |
| 05/05/2009 | US7528016 Semiconductor device and manufacturing method thereof |
| 05/05/2009 | US7528015 Tunable antifuse element and method of manufacture |
| 05/05/2009 | US7528014 Semiconductor device and method of manufacturing the same |
| 05/05/2009 | US7528013 Method for fabricating high performance leadframe in electronic package |
| 05/05/2009 | US7528012 Method for forming heat sinks on silicon on insulator wafers |
| 05/05/2009 | US7528011 Semiconductor device and manufacturing method thereof |
| 05/05/2009 | US7528010 Semiconductor component and method for producing the same |
| 05/05/2009 | US7528009 Wafer-leveled chip packaging structure and method thereof |
| 05/05/2009 | US7528008 Method of electrically connecting a microelectronic component |
| 05/05/2009 | US7528007 Methods for assembling semiconductor devices and interposers |
| 05/05/2009 | US7528006 Integrated circuit die containing particle-filled through-silicon metal vias with reduced thermal expansion |
| 05/05/2009 | US7528005 Method of manufacturing chip size package semiconductor device without intermediate substrate |
| 05/05/2009 | US7528002 Formation of nanowhiskers on a substrate of dissimilar material |
| 05/05/2009 | US7528000 Method of fabricating optical device caps |
| 05/05/2009 | US7527999 Cd1−xZnxS high performance TCR material for uncooled microbolometers used in infrared sensors and method of making same |
| 05/05/2009 | US7527998 Method of manufacturing MEMS devices providing air gap control |
| 05/05/2009 | US7527997 MEMS structure with anodically bonded silicon-on-insulator substrate |
| 05/05/2009 | US7527996 Non-planar surface structures and process for microelectromechanical systems |
| 05/05/2009 | US7527995 Method of making prestructure for MEMS systems |
| 05/05/2009 | US7527994 Amorphous silicon thin-film transistors and methods of making the same |
| 05/05/2009 | US7527993 Method and structure for fabricating smooth mirrors for liquid crystal on silicon devices |
| 05/05/2009 | US7527992 Thin film transistor array panel and manufacturing method thereof |
| 05/05/2009 | US7527991 Light emitting apparatus provided with fluorescent substance and semiconductor light emitting device, and method of manufacturing the same |
| 05/05/2009 | US7527990 Solid state imaging device and producing method thereof |
| 05/05/2009 | US7527989 Method for fabricating liquid crystal display panel |
| 05/05/2009 | US7527988 Triode structure field emission display device using carbon nanotubes and method of fabricating the same |
| 05/05/2009 | US7527987 Fast localization of electrical failures on an integrated circuit system and method |
| 05/05/2009 | US7527986 Method for fabricating magnetic tunnel junction cell |
| 05/05/2009 | US7527985 Method for manufacturing a resistor random access memory with reduced active area and reduced contact areas |
| 05/05/2009 | US7527984 Semiconductor device |
| 05/05/2009 | US7527983 Ferromagnetic material |
| 05/05/2009 | US7527982 Manufacturing method of a semiconductor device including a crystalline insulation film made of perovskite type oxide |
| 05/05/2009 | US7527918 Pattern forming method and method for manufacturing a semiconductor device |
| 05/05/2009 | US7527909 Resist composition |
| 05/05/2009 | US7527901 Exposing upper and side surfaces of phase shift pattern of mask, selectively forming a passivation layer, cleaning phase shift mask; repairing is carried out in the midst of a series of photolithographic exposure; photomask can be cleaned without damaging the phase shift pattern of the mask |
| 05/05/2009 | US7527831 Method of making a molecule-surface interface |
| 05/05/2009 | US7527827 Substrate processing apparatus and substrate processing method |
| 05/05/2009 | US7527826 Coating a substrate surface with a sacrificial organic acid layer; and exposing it to a metal precursor and a reducing agent to deposit the metal or alloy and to remove completely the acid layer; excellent adhesion; forming integrated circuits |
| 05/05/2009 | US7527822 Ferroelectric thin film formation composition, ferroelectric thin film and method of fabricating ferroelectric thin film |
| 05/05/2009 | US7527743 Apparatus and method for etching insulating film |
| 05/05/2009 | US7527723 Ion exchanger; surface smoothness; removal residues from workpiece |
| 05/05/2009 | US7527722 Electrochemical mechanical planarization |
| 05/05/2009 | US7527706 Plasma processing apparatus, process vessel for plasma processing apparatus and dielectric plate for plasma processing apparatus |
| 05/05/2009 | US7527704 Forming a SiO2 layer on a silicon substrate; applying a heat-curable conductive adhesive layer; laminating the single crystal plate on the adhesive; heat curing; and polishing, polarizing and etching the crystal plate; fabrication of many electric or electronic devices including a microactuator |
| 05/05/2009 | US7527698 Method and apparatus for removing a liquid from a surface of a substrate |
| 05/05/2009 | US7527694 Substrate gripping apparatus |
| 05/05/2009 | US7527690 Ferroelectric ceramic compound, a ferroelectric ceramic single crystal, and preparation processes thereof |
| 05/05/2009 | US7527676 Unit for separating gas |
| 05/05/2009 | US7527662 Resin structure and abrasive grains, wherein a critical surface tension of the resin is within a specified range; for chemical mechanical polishing; polishing efficiency, quality without any slurry |
| 05/05/2009 | US7527658 Method of manufacturing displays and apparatus for manufacturing displays |
| 05/05/2009 | US7527442 Process for forming resist pattern, and resist coating and developing apparatus |
| 05/05/2009 | US7527205 Automated package dimensioning system |
| 05/05/2009 | US7527188 Self-encapsulated silver alloys for interconnects |
| 05/05/2009 | US7527141 System for transporting substrate carriers |
| 05/05/2009 | US7527016 Plasma processing apparatus |
| 05/05/2009 | US7526948 Device and method for detecting foreign material on the surface of plasma processing apparatus |
| 05/05/2009 | US7526858 Apparatus for making electronic devices |
| 05/05/2009 | CA2322595C Method of making an ohmic contact to p-type silicon carbide, comprising titanium carbide and nickel silicide |
| 05/02/2009 | CA2609840A1 Micropillar array electrospray chip |
| 04/30/2009 | WO2009055834A2 Cyclic nucleation process |
| 04/30/2009 | WO2009055572A2 Semiconductor structure and method of manufacture |
| 04/30/2009 | WO2009055570A2 Semiconductor structure and method of manufacture |
| 04/30/2009 | WO2009055565A2 Semiconductor structure and method of manufacture |
| 04/30/2009 | WO2009055431A1 Plasma doping system with in-situ chamber condition monitoring |
| 04/30/2009 | WO2009055384A1 Selective silicide formation using resist etch back |
| 04/30/2009 | WO2009055340A1 Methods for forming a silicon oxide layer over a substrate |
| 04/30/2009 | WO2009055317A2 Process for removing ion-implanted photoresist |