Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2009
05/13/2009CN101430509A Immersion lithography fluids
05/13/2009CN101430502A Method of correcting mask pattern, photo mask, method of manufacturing semiconductor device, and semiconductor device
05/13/2009CN101430499A Storage container for photomask-forming synthetic quartz glass substrate
05/13/2009CN101430472A Active matrix device, method for manufacturing switching element, electro-optical display device, and electronic apparatus
05/13/2009CN101430471A Active-matrix device, electro-optical display device, and electronic apparatus
05/13/2009CN101430470A Active-matrix device, electro-optical display device, and electronic apparatus
05/13/2009CN101430469A Active-matrix device, electro-optical display device, and electronic apparatus
05/13/2009CN101430463A LCD device and method for producing the same
05/13/2009CN101429651A Multi-port pumping system for substrate processing chambers
05/13/2009CN101429650A Method for in-situ preparation of self-supporting gallium nitride underlay
05/13/2009CN101429649A Producing method of semiconductor device and substrate processing apparatus
05/13/2009CN101429338A Method for forming interlayer dielectric film for semiconductor device by using polyhedral molecular silsesquioxane
05/13/2009CN101429048A Chemical vapor deposited silicon carbide articles
05/13/2009CN101428752A Growth method of group III nitrides
05/13/2009CN101428403A Improved chemical mechanical polishing pad and methods of making and using same
05/13/2009CN101428398A 磨削装置 Grinding apparatus
05/13/2009CN101428284A In-situ chamber cleaning method
05/13/2009CN101428256A Nozzle apparatus and semiconductor processing apparatus employing the nozzle apparatus
05/13/2009CN100488339C Method for forming fine copper particle sintered product type of electric conductor having fine shape
05/13/2009CN100487933C Light-emitting diode package structure and its package method
05/13/2009CN100487928C Conductive and insulating quasi gallium nitride base growing substrate and manufacturing method thereof
05/13/2009CN100487927C Conductice and insulation quasi gallium nitride base growing substrate and its technology and process
05/13/2009CN100487922C Gallium arsenide hbt having increased performance and method for its fabrication
05/13/2009CN100487921C Display device and a method for manufacturing the same
05/13/2009CN100487920C Thin film transistor (TFT) and flat panel display including the tft and their methods of manufacture
05/13/2009CN100487919C Thin film transistor and process for fabricating the same
05/13/2009CN100487918C TFT, display device having the same and method of manufacturing donor sheet
05/13/2009CN100487917C Field effect transistor and its forming method
05/13/2009CN100487915C Semiconductor device having super junction structure and method for manufacturing the same
05/13/2009CN100487914C MOS transistor and a semiconductor integrated circuit apparatus having the same
05/13/2009CN100487913C Semiconductor device and manufacturing method thereof
05/13/2009CN100487912C Semiconductor device and its manufacturing method
05/13/2009CN100487911C Bimetallic grid transistor for CMOS procedure
05/13/2009CN100487910C Heterojunction bipolar transistor and manufacturing method thereof
05/13/2009CN100487909C Heterogeneous p-n nano-line array, its production and use
05/13/2009CN100487908C Transistor with silicon and carbon layer in the channel region
05/13/2009CN100487906C Organic luminescent display board
05/13/2009CN100487904C Image sensor device and manufacturing method of the same
05/13/2009CN100487903C CMOS image sensor and method for fabricating the same
05/13/2009CN100487901C Angled implant for trench isolation
05/13/2009CN100487897C Thin film transistor array panel and manufacturing method thereof
05/13/2009CN100487896C Method of making a semiconductor device, and semiconductor device made thereby
05/13/2009CN100487894C Multi-crystal silicon-insulation layer-metal structure capacitance and its making method
05/13/2009CN100487893C Semiconductor chip and its manufacturing method
05/13/2009CN100487891C Making method for semiconductor part and semiconductor tube core
05/13/2009CN100487890C Systems and methods for removing operating heat from a light emitting diode
05/13/2009CN100487889C Chip packing structure, chip structure and method for forming chip
05/13/2009CN100487888C Semiconductor device, semiconductor crystal wafer, semiconductor assembly and manufacturing method for semiconductor device
05/13/2009CN100487887C Thin film transistor array panel and a manufacturing method thereof
05/13/2009CN100487886C Method of manufacturing bit-line in a semiconductor device
05/13/2009CN100487885C Method for manufacturing silicon of insulator
05/13/2009CN100487884C Gantry positioning system
05/13/2009CN100487883C Au alloy bonding wire
05/13/2009CN100487882C Integrated circuit and heat radiation member connecting method
05/13/2009CN100487881C Method for return repairing image sensing mould set and clamp therewith
05/13/2009CN100487880C Process for forming dual metal gate structures
05/13/2009CN100487879C Semiconductor nano-wire, making method thereof and semiconductor device provided with that nano-wire
05/13/2009CN100487878C Method of fabricating semiconductor device and semiconductor fabricated by the same method
05/13/2009CN100487877C Semiconductor device producing method
05/13/2009CN100487876C Semiconductor structure with different lattice constant materials and method for forming the same
05/13/2009CN100487875C Self-aligned bipolar transistor without spacers and method for fabricating same
05/13/2009CN100487874C Etch with uniformity control
05/13/2009CN100487873C Method of making a semiconductor device using treated photoresist
05/13/2009CN100487872C System and method for plasma induced modification and improvement of critical dimension uniformity
05/13/2009CN100487871C Etching method
05/13/2009CN100487870C Cmp polishing system and abrasive solution
05/13/2009CN100487869C Laser processing method
05/13/2009CN100487868C Laser beam machining method and semiconductor chip
05/13/2009CN100487867C Device manufacturing method and substrate
05/13/2009CN100487866C Method for forming a mask pattern for ion-implantation
05/13/2009CN100487865C Semiconductor substrate, semiconductor device and method of manufacturing a semiconductor substrate
05/13/2009CN100487864C Broad spectrum indium arsenide/gallium indium arsenide/ gallium arsenide quanta point material growth method
05/13/2009CN100487863C Method for transferring plates
05/13/2009CN100487862C Method for forming polycrystalline silicon thin film
05/13/2009CN100487861C Plasma etching method and apparatus
05/13/2009CN100487860C Stage system, exposure apparatus and exposure method
05/13/2009CN100487859C Wet cleaning device, and method for cleaning substrate
05/13/2009CN100487858C Array type electron beam etching device and etching method
05/13/2009CN100487857C In-situ dry clean chamber for front end of line fabrication
05/13/2009CN100487856C Method for preparing IIB group semiconductor sulfide nano-material
05/13/2009CN100487855C Workpiece processing system
05/13/2009CN100487829C Paste dispenser and method for controlling the same
05/13/2009CN100487587C Substrate type developing device
05/13/2009CN100487586C Method of manufacturing semiconductor device
05/13/2009CN100487583C Method and system for lithographic process window optimization
05/13/2009CN100487582C Lithographic apparatus and device manufacturing method
05/13/2009CN100487581C Lithographic apparatus and device manufacturing method
05/13/2009CN100487580C Lithographic apparatus, device manufacturing method, and device manufactured thereby
05/13/2009CN100487579C Lithographic apparatus, method of calibrating, and device manufacturing method
05/13/2009CN100487578C Lighographic processing method and device made therefrom
05/13/2009CN100487577C Position correction in y of mask object shift due to Z offset and non-perpendicular illumination
05/13/2009CN100487576C Transferring equipment used for transferring matter and its use method and photoetching projection equipment containing said transferring equipment
05/13/2009CN100487575C Photoetching apparatus and device manufacturing method
05/13/2009CN100487574C Method for making optical projection apparatus and device
05/13/2009CN100487573C Method for detemining photoetching projection parameter, device producing method and device
05/13/2009CN100487572C Photoetching projector with multi-suppressing silk screen and method for manufacturing the integrated structure
05/13/2009CN100487531C Combined structure and its assembling method
05/13/2009CN100487471C Automatic test system, device and method for ICs and overall system
05/13/2009CN100487462C 探头片单元 Probe sheet unit
05/13/2009CN100487157C Organic-molecular beam depositer for producing organic/inorganic thin film