Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2010
03/24/2010CN101681828A Method for manufacturing semiconductor element
03/24/2010CN101681827A Process for treatment of substrates with water vapor or steam
03/24/2010CN101681826A 干式蚀刻方法 Dry etching method
03/24/2010CN101681825A Metal film polishing pad and method for polishing metal film using the same
03/24/2010CN101681824A Substrate cleaning solution for semiconductor device and method for manufacturing semiconductor device
03/24/2010CN101681823A Method for grinding semiconductor wafer, and resin composition and protective sheet used for the method
03/24/2010CN101681822A Working method for cutting
03/24/2010CN101681821A Method of forming a semiconductor device featuring a gate stressor and semiconductor device
03/24/2010CN101681820A Techniques for forming shallow junctions
03/24/2010CN101681819A Method for trapping implant damage in a semiconductor substrate
03/24/2010CN101681818A Process for forming an isolated electrically conductive contact through a metal package
03/24/2010CN101681817A Compound-type thin film, method for compound-type thin film formation, and electronic apparatus using the thin film
03/24/2010CN101681816A Twin target sputter system for thin film passivation and method of forming film using the same
03/24/2010CN101681815A Method for crystallizing thin film, process for producing thin-film semiconductor device, process for producing elctronic equipment, and process for producing display device
03/24/2010CN101681814A Plasma spraying of semiconductor grade silicon
03/24/2010CN101681813A Nitride nanowires and method of producing the same
03/24/2010CN101681812A Pitch multiplication using self-assembling materials
03/24/2010CN101681811A Methods of isolating array features during pitch doubling processes and semiconductor device structures having isolated array features
03/24/2010CN101681810A Moving body driving method and apparatus, exposure method and apparatus, pattern forming method and apparatus, and device manufacturing method
03/24/2010CN101681809A Exposure apparatus, moving body driving system, pattern forming apparatus, exposure method and device manufacturing method
03/24/2010CN101681808A Regenerating process and regenerating system to regenerate waste slurry from semiconductor wafer manufacturing process
03/24/2010CN101681807A Manufacturing method of semiconductor substrate and semiconductor device
03/24/2010CN101681806A Data display, data display method, and program
03/24/2010CN101681805A Soi wafer manufacturing method
03/24/2010CN101681804A sealed lighting units
03/24/2010CN101681803A Diffusion bonded fluid flow apparatus useful in semiconductor manufacturing
03/24/2010CN101681802A Method and apparatus for reducing the effects of window clouding on a viewport window in a reactive environment
03/24/2010CN101681801A Method of forming a guard ring or contact to an soi substrate
03/24/2010CN101681800A Print processing for patterned conductor, semiconductor and dielectric materials
03/24/2010CN101681799A Erosion resistance enhanced quartz used in plasma etch chamber
03/24/2010CN101681782A Techniques for improving the performance and extending the lifetime of an ion source with gas mixing
03/24/2010CN101681721A Intertwined finger capacitors
03/24/2010CN101681131A Agent for stripping resist film on electroconductive polymer, method for stripping resist film, and substrate with patterned electroconductive polymer
03/24/2010CN101681130A Methods for stripping material for wafer reclamation
03/24/2010CN101681129A Photoresist remover composition
03/24/2010CN101681113A Composition for antireflection film formation and method for resist pattern formation using the composition
03/24/2010CN101681112A Composition for antireflection film formation and method for resist pattern formation using the composition
03/24/2010CN101681110A Positive photosensitive resin composition and method of forming cured film therefrom
03/24/2010CN101681109A patterned photoacid etching and articles therefrom
03/24/2010CN101681104A Photosensitive adhesive composition, film-like adhesive, adhesive sheet, method for forming adhesive pattern, semiconductor wafer with adhesive layer, semiconductor device and method for manufacturing
03/24/2010CN101681101A Photosensitive adhesive resin composition, adhesive film and light-receiving device
03/24/2010CN101681095A Pattern forming method, pattern formed thereby, mold, processing apparatus, and processing method
03/24/2010CN101681092A Photomask substrate, photomask substrate forming member, photomask substrate manufacturing method, photomask, and exposure method using photomask
03/24/2010CN101681009A Optical element holding device, lens barrel, exposure device, and device manufacturing method
03/24/2010CN101681008A Optical element driver, lens-barrel and exposure apparatus and method for fabricating device
03/24/2010CN101680928A Test plate pocket for electronic handler
03/24/2010CN101680848A Inspection device, inspection method, and program
03/24/2010CN101680783A Moving body system, pattern forming device, exposure apparatus, measuring instrument, and device manufacturing method
03/24/2010CN101680747A Moving body driving system, pattern forming apparatus, exposure apparatus, exposure method and device manufacturing method
03/24/2010CN101680746A Moving body device, exposure device, pattern formation device, and device manufacturing method
03/24/2010CN101680561A Fluid control apparatus
03/24/2010CN101680109A Apparatus and method for manufacturing compound semiconductor single crystal
03/24/2010CN101680107A Method for restructuring semiconductor layers
03/24/2010CN101680091A Reactive flow deposition and synthesis of inorganic foils
03/24/2010CN101680088A Method and apparatus for production of metal oxide thin film
03/24/2010CN101679817A Heat-releasable pressure-sensitive adhesive sheet
03/24/2010CN101679811A 粘结剂组合物 Binder composition
03/24/2010CN101679810A An aqueous slurry composition for chemical mechanical polishing and chemical mechanical polishing method
03/24/2010CN101679809A Dispersion comprising cerium oxide, silicon dioxide and amino acid
03/24/2010CN101679808A Dispersion comprising cerium oxide, sheet silicate and amino acid
03/24/2010CN101679800A An antireflective coating composition comprising fused aromatic rings
03/24/2010CN101679721A Resin composition, embedding material, insulating layer, and semiconductor device
03/24/2010CN101679568A Photocurable composition and process for producing molded object having fine pattern in surface
03/24/2010CN101678970A substrate supporting mechanism
03/24/2010CN101678968A Apparatus for handling a glass sheet
03/24/2010CN101678665A Novel methods for making and using halosilylgermanes
03/24/2010CN101678569A Method for producing an opto-electronic component and opto-electronic component
03/24/2010CN101678563A Cutting method and wire saw device
03/24/2010CN101678533A Synthetic grindstone
03/24/2010CN101678527A Cushion for polishing pad and polishing pad using the cushion
03/24/2010CN101678510A Method for producing a component using asymmetrical energy input along the parting or predetermined breaking line
03/24/2010CN101677370A Solid-state imaging device, method of manufacturing solid-state imaging device, and electronic apparatus
03/24/2010CN101677120A Method of producing light emitting diode
03/24/2010CN101677116A Encapsulating method and encapsulating module for LED chip
03/24/2010CN101677111A Semiconductor device, electronic device, and method of manufacturing semiconductor device
03/24/2010CN101677110A Method for improving transistor performance through reducing the salicide interface resistance
03/24/2010CN101677109A Semiconductor device and method for making the same
03/24/2010CN101677106A Pixel cell, image sensor including a pixel cell, system having the same, and method of forming a pixel cell
03/24/2010CN101677103A Structure and method for forming high density trench field effect transistor
03/24/2010CN101677100A Capacitor element and manufacturing method thereof
03/24/2010CN101677099A Semiconductor device
03/24/2010CN101677094A Thin film transistor (TFT) performance testing device, manufacturing method thereof and TFT performance testing method
03/24/2010CN101677090A Integrated circuit package
03/24/2010CN101677089A Nonvolatile memory device and method of manufacturing the same
03/24/2010CN101677088A Method for fabricating a semiconductor device
03/24/2010CN101677087A Method of fabricating a semiconductor device
03/24/2010CN101677086A A semiconductor device and method for fabricating the semiconductor device
03/24/2010CN101677085A Metal gate stress film for mobility enhancement in finfet device
03/24/2010CN101677084A Method for including decoupling capacitors into semiconductor circuit having logic circuit therein and semiconductor circuit thereof
03/24/2010CN101677083A Method for producing a semiconductor device
03/24/2010CN101677082A CMOS image sensor and method for fabricating the same
03/24/2010CN101677081A Phase change memory cell array with self-converged bottom electrode and method for manufacturing
03/24/2010CN101677080A Memory cell array manufacture method and memory device
03/24/2010CN101677079A Ion implantation method, method of producing solid-state imaging device, solid-state imaging device, and electronic apparatus
03/24/2010CN101677078A Substrate positioning device
03/24/2010CN101677077A Manipulator and wafer processing process
03/24/2010CN101677076A Vacuum lock in semiconductor transmitting system
03/24/2010CN101677075A System and method for handling materials on an automated basis
03/24/2010CN101677074A Front-open type disc plate box with bolt structure
03/24/2010CN101677073A Front opening type wafer box with elliptic latch structure
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