Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2014
09/25/2014WO2014150800A1 Two step transparent conductive film deposition method and gan nanowire devices made by the method
09/25/2014WO2014150643A1 Gold containing die bond sheet preform spot-welded to a semiconductor bond site on a semiconductor package and corresponding manufacturing method
09/25/2014WO2014150564A1 Package-on-package structure with reduced height
09/25/2014WO2014150400A1 Reduction of basal plane dislocations in epitaxial sic using an in-situ etch process
09/25/2014WO2014150260A1 Process load lock apparatus, lift assemblies, electronic device processing systems, and methods of processing substrates in load lock locations
09/25/2014WO2014150237A1 Buffer layers for metal oxide semiconductors for tft
09/25/2014WO2014150234A1 Processing systems, apparatus, and methods adapted to process substrates in electronic device manufacturing
09/25/2014WO2014150091A1 Epi-poly etch stop for out of plane spacer defined electrode
09/25/2014WO2014150089A1 Passivation layer for harsh environments and methods of fabrication thereof
09/25/2014WO2014149962A1 Apparatus for coupling a hot wire source to a process chamber
09/25/2014WO2014149957A1 Susceptors for enhanced process uniformity and reduced substrate slippage
09/25/2014WO2014149883A1 Chamber design for semiconductor processing
09/25/2014WO2014149862A1 Processing systems and methods for halide scavenging
09/25/2014WO2014149755A1 Design of disk/pad clean with wafer and wafer edge/bevel clean module for chemical mechanical polishing
09/25/2014WO2014149682A1 Multilayer passivation or etch stop tft
09/25/2014WO2014149678A1 Substrate support chuck cooling for deposition chamber
09/25/2014WO2014149662A1 A method of forming a gate contact
09/25/2014WO2014149656A1 Nh3 containing plasma nitridation of a layer of a three dimensional structure on a substrate
09/25/2014WO2014149638A1 Non-volatile memory cells with enhanced channel region effective width, and method of making same
09/25/2014WO2014149587A1 Spacer enabled poly gate
09/25/2014WO2014149584A1 Forming fence conductors using spacer pattern transfer
09/25/2014WO2014149582A1 Forming fence conductors in trenches formed by a spacer etching technique
09/25/2014WO2014149580A1 Forming fence conductors in an integrated circuit
09/25/2014WO2014149579A1 Insulated top side bump connection for a power device, for example for gate, source and drain contacts of a power field effect transistor
09/25/2014WO2014149412A1 In-situ temperature measurement in a noisy environment
09/25/2014WO2014149394A1 Apparatus and methods for photo-excitation processes
09/25/2014WO2014149378A1 Replacement gate electrode with a self-aligned dielectric spacer
09/25/2014WO2014149369A1 Reflective liners
09/25/2014WO2014149351A1 Compact device for enhancing the mixing of gaseous species
09/25/2014WO2014149340A1 Substrate position aligner
09/25/2014WO2014149338A1 Multi-chip module with self-populating positive features
09/25/2014WO2014149336A1 Apparatus and methods for pulsed photo-excited deposition and etch
09/25/2014WO2014149330A1 Dynamic residue clearing control with in-situ profile control (ispc)
09/25/2014WO2014149307A1 Magnetic shielding for plasma process chambers
09/25/2014WO2014149281A1 Layer-by-layer deposition of carbon-doped oxide films
09/25/2014WO2014149274A1 Methods and structures to facilitate through-silicon vias
09/25/2014WO2014149259A1 Apparatus and method for tuning a plasma profile using a tuning ring in a processing chamber
09/25/2014WO2014149258A1 Apparatus and method for tuning a plasma profile using a tuning electrode in a processing chamber
09/25/2014WO2014149245A1 Electrochemical deposition processes for semiconductor wafers
09/25/2014WO2014149213A1 Optical acoustic substrate assessment system and method
09/25/2014WO2014149197A1 Detecting defects on a wafer using defect-specific and multi-channel information
09/25/2014WO2014149182A1 Methods and apparatus for electrostatic chuck repair and refurbishment
09/25/2014WO2014149180A1 Chip mode isolation and cross-talk reduction through buried metal layers and through-vias
09/25/2014WO2014149175A1 An amorphous carbon deposition process using dual rf bias frequency applications
09/25/2014WO2014149143A1 Enhanced productivity for an etch system through polymer management
09/25/2014WO2014149128A1 Metal gate structures for field effect transistors and method of fabrication
09/25/2014WO2014148893A1 Substrate processing apparatus
09/25/2014WO2014148857A1 Device and method for transferring substrate and substrate-transferring tray
09/25/2014WO2014148856A1 Device and method for transferring flexible substrate
09/25/2014WO2014148832A1 Fine pattern forming system and fine pattern forming method
09/25/2014WO2014148831A1 Fine pattern forming system and fine pattern forming method
09/25/2014WO2014148669A1 Ultra slim positioning device
09/25/2014WO2014148642A1 Protective film-forming film and protective film-forming composite sheet
09/25/2014WO2014148588A1 Tungsten-sintered-body sputtering target and method for producing same
09/25/2014WO2014148587A1 Magnetic memory and manufacturing method thereof
09/25/2014WO2014148586A1 Magnetoresistive element and manufacturing method thereof
09/25/2014WO2014148561A1 Semiconductor device manufacturing method
09/25/2014WO2014148551A1 Semiconductor device manufacturing method, substrate processing device and recording medium
09/25/2014WO2014148490A1 Substrate processing apparatus, and method for manufacturing semiconductor device
09/25/2014WO2014148424A1 Ti-Al ALLOY SPUTTERING TARGET
09/25/2014WO2014148423A1 Semiconductor device and method for producing same
09/25/2014WO2014148400A1 Semiconductor device
09/25/2014WO2014148399A1 Polishing composition, method for producing polishing composition, and kit for preparing polishing composition
09/25/2014WO2014148351A1 Substrate processing apparatus, substrate processing method, and computer storage medium
09/25/2014WO2014148336A1 Dielectric layer and manufacturing method of dielectric layer, and solid-state electronic device and manufacturing method of solid-state electronic device
09/25/2014WO2014148308A1 Method for producing substrate for semiconductor element mounting
09/25/2014WO2014148255A1 Nitride semiconductor device and method for manufacturing nitride semiconductor device
09/25/2014WO2014148210A1 Electronic-device manufacturing support system, manufacturing support method, and manufacturing support program
09/25/2014WO2014148206A1 Metal oxide film, method for manufacturing same, thin film transistor, display apparatus, image sensor, and x-ray sensor
09/25/2014WO2014148194A1 Heterojunction bipolar transistor
09/25/2014WO2014148182A1 Annealed semiconductor substrate manufacturing method, scanning device, and laser processing device
09/25/2014WO2014148180A1 Method for manufacturing organic semiconductor element
09/25/2014WO2014148131A1 Silicon-carbide semiconductor device
09/25/2014WO2014148130A1 Silicon-carbide semiconductor device and manufacturing method therefor
09/25/2014WO2014148119A1 Adhering apparatus and method for manufacturing electronic apparatus
09/25/2014WO2014148096A1 Program for correcting charged particle radiation location, device for calculating degree of correction of charged particle radiation location, charged particle radiation system, and method for correcting charged particle radiation location
09/25/2014WO2014148082A1 Sealing sheet container
09/25/2014WO2014147992A1 Thin film transistor array
09/25/2014WO2014147990A1 Thin film transistor array
09/25/2014WO2014147969A1 Template assembly and method for manufacturing template assembly
09/25/2014WO2014147964A1 Thin film semiconductor substrate, light emitting panel, and method for manufacturing thin film semiconductor substrate
09/25/2014WO2014147876A1 Method for preventing by-product from solidifying and accumulating inside dry vacuum pump, and nitrogen-gas temperature elevating device
09/25/2014WO2014147706A1 Semiconductor device
09/25/2014WO2014147677A1 Semiconductor device
09/25/2014WO2014147355A1 Flip-chip assembly process comprising pre-coating interconnect elements
09/25/2014WO2014147290A1 An apparatus for processing two or more substrates in a batch process
09/25/2014WO2014147185A1 Method for doping silicon sheets
09/25/2014WO2014146965A1 Micromechanical sensor device and corresponding production method
09/25/2014WO2014146528A1 Manufacturing method for ge-based mos device of graphene-modulated high-k metal gate
09/25/2014WO2014146418A1 Preparation method for germanium-based schottky junction
09/25/2014WO2014146417A1 Short-gate tunnelling field-effect transistor of vertical non-uniform doped channel and preparation method therefor
09/25/2014WO2014146380A1 Thin film transistor and manufacturing method therefor, array substrate, and display apparatus
09/25/2014WO2014146363A1 Thin-film transistor and preparation method therefor, array substrate and display device
09/25/2014WO2014146362A1 Array substrate and preparation method thereof, and display panel
09/25/2014WO2014146358A1 Array substrate, method for manufacturing array substrate, and display device
09/25/2014WO2014146355A1 Array substrate, manufacturing method therefor and display apparatus thereof
09/25/2014WO2014146344A1 Array substrate and manufacturing method therefor, and display panel
09/25/2014WO2014146318A1 Solar module
09/25/2014WO2014146291A1 Method for manufacturing thin film transistor and pixel units thereof
09/25/2014WO2014107649A9 Buried hard mask for embedded semiconductor device patterning
1 ... 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 ... 6590