Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2014
10/07/2014US8852970 Method for mounting luminescent device
10/07/2014US8852969 Fabrication of compact opto-electronic component packages
10/07/2014US8852968 STI CMP under polish monitoring
10/07/2014US8852967 Dissolution rate monitor
10/07/2014US8852966 Heat treatment method and heat treatment apparatus of thin film
10/07/2014US8852965 Method of making semiconductor having superhydrophilic principal surface and method of arranging particles thereon
10/07/2014US8852964 Controlling CD and CD uniformity with trim time and temperature on a wafer by wafer basis
10/07/2014US8852963 Method for making a current-perpendicular-to-the-plane (CPP) magnetoresistive sensor having a low-coercivity reference layer
10/07/2014US8852962 Apparatus and methods for silicon oxide CVD resist planarization
10/07/2014US8852961 Semiconductor device and method for manufacturing the same
10/07/2014US8852960 Method of fabricating semiconductor device and apparatus for fabricating the same
10/07/2014US8852959 Low temperature resistor for superconductor circuits
10/07/2014US8852857 Substrate treatment method
10/07/2014US8852855 Upper surface antireflective film forming composition and pattern forming method using same
10/07/2014US8852851 Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same
10/07/2014US8852726 Photosensitive polymer composition, method of producing pattern and electronic parts
10/07/2014US8852698 Laser beam machining method, laser beam machining apparatus, and laser beam machining product
10/07/2014US8852696 Method for vapor deposition
10/07/2014US8852686 Method of forming phase change material layer using Ge(II) source, and method of fabricating phase change memory device
10/07/2014US8852674 Method for segregating the alloying elements and reducing the residue resistivity of copper alloy layers
10/07/2014US8852467 Method of manufacturing a printable composition of a liquid or gel suspension of diodes
10/07/2014US8852451 Silicon etching fluid and method for producing transistor using same
10/07/2014US8852448 Method for fabricating 3D structure having hydrophobic surface by dipping method
10/07/2014US8852417 Electrolytic process using anion permeable barrier
10/07/2014US8852411 Sputtering apparatus
10/07/2014US8852407 Electron beam sculpting of tunneling junction for nanopore DNA sequencing
10/07/2014US8852391 Method and apparatus for removing a reversibly mounted device wafer from a carrier substrate
10/07/2014US8852390 Substrate processing apparatus
10/07/2014US8852389 Plasma processing apparatus and plasma processing method
10/07/2014US8852388 Plasma processor
10/07/2014US8852387 Plasma processing apparatus and shower head
10/07/2014US8852386 Plasma processing apparatus
10/07/2014US8852385 Plasma etching apparatus and method
10/07/2014US8852384 Method and apparatus for detecting plasma unconfinement
10/07/2014US8852383 Wet processing using a fluid meniscus apparatus
10/07/2014US8852349 Wafer processing hardware for epitaxial deposition with reduced auto-doping and backside defects
10/07/2014US8852348 Heat exchange pedestal with coating of diamond-like material
10/07/2014US8852346 Mask frame assembly for thin layer deposition and organic light emitting display device
10/07/2014US8852344 Large area deposition in high vacuum with high thickness uniformity
10/07/2014US8852342 Formation of a vicinal semiconductor-carbon alloy surface and a graphene layer thereupon
10/07/2014US8851886 Substrate processing apparatus and method of manufacturing semiconductor device
10/07/2014US8851875 Semiconductor package molding system and molding method thereof
10/07/2014US8851821 Substrate processing apparatus and substrate conveying apparatus for use in the same
10/07/2014US8851820 Substrate container storage system
10/07/2014US8851819 Substrate processing apparatus
10/07/2014US8851817 Universal modular wafer transport system
10/07/2014US8851769 Substrate processing method
10/07/2014US8851385 Card lamination
10/07/2014US8851133 Method and apparatus of holding a device
10/07/2014US8851106 Gas supplying apparatus, cylinder cabinet provided with the same, valve box, and substrate process apparatus
10/07/2014US8851092 Cleaning apparatus and cleaning method, coater/developer and coating and developing method, and computer readable storing medium
10/07/2014US8851011 Coating treatment method, coating treatment apparatus, and computer-readable storage medium
10/07/2014US8851008 Parallel substrate treatment for a plurality of substrate treatment lines
10/07/2014US8850980 Tessellated patterns in imprint lithography
10/07/2014US8850704 Heat sink
10/07/2014US8850700 Wiring board and method for making the same
10/07/2014US8850698 Method for the sealed assembly of an electronic housing
10/02/2014WO2014160774A1 Packaging insert
10/02/2014WO2014160731A1 Statistical model-based metrology
10/02/2014WO2014160726A1 Mos transistor structures with elongated contacts
10/02/2014WO2014160545A1 Semiconductor-on-insulator integrated circuit with interconnect below the insulator
10/02/2014WO2014160467A1 Hydrogen plasma cleaning of germanium oxide surfaces
10/02/2014WO2014160460A1 Atomic layer deposition of reduced-leakage post-transition metal oxide films
10/02/2014WO2014160439A1 Anisotropic dielectric layers with orientationally matched substrate
10/02/2014WO2014160437A1 Susceptor support portion and epitaxial growth apparatus including susceptor support portion
10/02/2014WO2014160400A1 Electroplating processor with vacuum rotor
10/02/2014WO2014160382A1 Detecting electrolyte meniscus in electroplating processors
10/02/2014WO2014160239A1 Three-terminal printed devices interconnected as circuits
10/02/2014WO2014160225A2 Printing complex electronic circuits
10/02/2014WO2014160162A1 Double sided si(ge)/sapphire/iii-nitride hybrid structure
10/02/2014WO2014159946A1 Mems device having a getter
10/02/2014WO2014159786A1 Single die inspection on a dark field inspection tool
10/02/2014WO2014159611A1 Method and apparatus for semiconductor testing at low temperature
10/02/2014WO2014159530A1 Method of implementing low dose implant in a plasma system
10/02/2014WO2014159481A1 Partially isolated fin-shaped field effect transistors
10/02/2014WO2014159464A1 Multi-layer mask including non-photodefinable laser energy absorbing layer for substrate dicing by laser and plasma etch
10/02/2014WO2014159459A1 Film-growth model using level sets
10/02/2014WO2014159427A1 Resist hardening and development processes for semiconductor device manufacturing
10/02/2014WO2014159408A1 Techniques to mitigate straggle damage to sensitive structures
10/02/2014WO2014159391A1 Dielectric void etched in finfet sacrificial layer
10/02/2014WO2014159222A1 Methods and apparatus for processing a substrate using a selectively grounded and movable process kit ring
10/02/2014WO2014159202A1 System and method for modeling epitaxial growth in a 3-d virtual fabrication environment
10/02/2014WO2014159168A1 Methods for fabricating and cutting flexible glass and polymer composite structures and apparatus
10/02/2014WO2014159160A1 Metal oxide semiconductor (mos) isolation schemes with continuous active areas separated by dummy gates and related methods
10/02/2014WO2014159144A1 Uv-assisted reactive ion etch for copper
10/02/2014WO2014159033A1 Vth control method of multiple active layer metal oxide semiconductor tft
10/02/2014WO2014158955A1 Pinhole evaluation method of dielectric films for metal oxide semiconductor tft
10/02/2014WO2014158915A1 Process corner sensor for bit-cells
10/02/2014WO2014158886A1 Method and apparatus for plasma dicing a semi-conductor wafer
10/02/2014WO2014158752A1 Monolithic integrated circuit (mmic) structure and method for forming such structure
10/02/2014WO2014158608A1 Composite resistors
10/02/2014WO2014158548A1 Substrate precession mechanism for cmp polishing head
10/02/2014WO2014158462A1 Layer-by-layer deposition of carbon-doped oxide films through cyclical silylation
10/02/2014WO2014158457A1 Indexed gas jet injector for substrate processing system
10/02/2014WO2014158448A1 Enhancing uv compatibility of low k barrier film
10/02/2014WO2014158410A1 Acoustically-monitored semiconductor substrate processing systems and methods
10/02/2014WO2014158408A1 Uv curing process to improve mechanical strength and throughput on low-k dielectric films
10/02/2014WO2014158390A1 Electroplating processor with wafer heating or cooling
10/02/2014WO2014158370A2 Temperature measurement in multi-zone heater
10/02/2014WO2014158351A1 Post treatment for constant reduction with pore generation on low-k dielectric films
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