Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2014
10/02/2014WO2014158320A1 Wet cleaning of chamber component
10/02/2014WO2014158312A1 Lattice mismatched heterojunction structures and devices made therefrom
10/02/2014WO2014158253A2 Thermal treated sandwich structure layer to improve adhesive strength
10/02/2014WO2014158250A1 Stacked wafer with coolant channels
10/02/2014WO2014158198A1 Transistor architecture having extended recessed spacer and source/drain regions and method of making same
10/02/2014WO2014158187A1 Substrate imprinted with a pattern for forming isolated device regions
10/02/2014WO2014158178A1 High stability spintronic memory
10/02/2014WO2014157883A1 Method for forming seed layer on high-aspect ratio via and semiconductor device having high-aspect ratio via formed thereby
10/02/2014WO2014157882A1 Tsv measuring apparatus and tsv measuring method
10/02/2014WO2014157881A1 Resist underlayer composition and method for forming pattern using same
10/02/2014WO2014157835A1 Apparatus for processing substrate
10/02/2014WO2014157834A1 Apparatus for processing substrate
10/02/2014WO2014157827A1 Chamber-type high-speed atomic layer deposition device
10/02/2014WO2014157821A1 Thin-film transistor, method for manufacturing the same and display device including the same
10/02/2014WO2014157814A1 Thin-film transistor, method for manufacturing the same and display device including the same
10/02/2014WO2014157735A1 Planarization method, substrate processing system, and memory manufacturing method
10/02/2014WO2014157734A1 Handle substrate for compound substrate for use with semiconductor
10/02/2014WO2014157733A1 Coating liquid for forming metal oxide film, metal oxide film, field-effect transistor, and method for producing field-effect transistor
10/02/2014WO2014157573A1 Pattern forming method, active light-sensitive or radiation-sensitive resin composition, resist film, method for manufacturing electronic device using pattern forming method, and electronic device
10/02/2014WO2014157571A1 Electrostatic chuck
10/02/2014WO2014157520A1 Protective film formation composite sheet, protective film-equipped chip, and method for fabricating protective film-equipped chip
10/02/2014WO2014157471A1 Adhesive tape and wafer-processing tape
10/02/2014WO2014157440A1 Laminate for temporary bonding in semiconductor device manufacture, and semiconductor device manufacturing method
10/02/2014WO2014157439A1 Laminate for temporary bonding in semiconductor device manufacture, and semiconductor device manufacturing method
10/02/2014WO2014157430A1 Handle substrate for compound substrate for use with semiconductor
10/02/2014WO2014157426A1 Composite sheet for forming protective film
10/02/2014WO2014157358A1 Substrate processing apparatus, semiconductor device manufacturing method, and recording medium
10/02/2014WO2014157332A1 Method for manufacturing silicon carbide semiconductor substrate
10/02/2014WO2014157329A1 Method for manufacturing semiconductor chips
10/02/2014WO2014157321A1 Carrying stand and plasma processing device
10/02/2014WO2014157306A1 Temporary adhesive for producing semiconductor device, adhesive support including same, and process for producing semiconductor device
10/02/2014WO2014157262A1 Mark forming method, mark detecting method, and device manufacturing method
10/02/2014WO2014157228A1 Composition, cured product, stacked body, production method for underlayer film, pattern formation method, pattern, and production method for semiconductor resist
10/02/2014WO2014157227A1 Laminate for temporary bonding in semiconductor device manufacture, and semiconductor device manufacturing method
10/02/2014WO2014157226A1 Underlayer-film-forming composition for imprinting, and pattern formation method
10/02/2014WO2014157211A1 Substrate-processing apparatus, method for manufacturing semiconductor device, and recording medium
10/02/2014WO2014157210A1 Semiconductor device manufacturing method, substrate processing device, and recording medium
10/02/2014WO2014157180A1 Substrate processing device and substrate processing method
10/02/2014WO2014157179A1 Substrate processing apparatus and substrate processing method
10/02/2014WO2014157134A1 Mounting method and mounting device
10/02/2014WO2014157124A1 Substrate processing device
10/02/2014WO2014157123A1 Substrate testing apparatus and substrate temperature adjustment method
10/02/2014WO2014157122A1 Probe device
10/02/2014WO2014157121A1 Probe device
10/02/2014WO2014157120A1 Probe device
10/02/2014WO2014157082A1 Attachment method
10/02/2014WO2014157071A1 Substrate processing device, method for manufacturing semiconductor device, and method for processing substrate
10/02/2014WO2014157054A1 Sputtering silicide target and method for producing same
10/02/2014WO2014157051A1 Method for producing pattern structure
10/02/2014WO2014157026A1 Light exposure device and light exposure method
10/02/2014WO2014157019A1 Semiconductor device
10/02/2014WO2014157014A1 Chuck apparatus
10/02/2014WO2014157000A1 Carbon-doped zinc oxide film and method for producing same
10/02/2014WO2014156999A1 Irradiation control method and irradiation controller
10/02/2014WO2014156987A1 Bonding device and method for manufacturing bonded substrate
10/02/2014WO2014156923A1 Manufacturing method for semiconductor device
10/02/2014WO2014156919A1 Semiconductor device and method for manufacturing same
10/02/2014WO2014156918A1 Niobium sputtering target
10/02/2014WO2014156914A1 Method for processing group-iii nitride substrate and method for manufacturing epitaxial substrate
10/02/2014WO2014156910A1 Composition, method for producing substrate having pattern formed thereon, film and method for producing same, and compound
10/02/2014WO2014156883A1 Sealing sheet, method for producing semiconductor device, and substrate provided with sealing sheet
10/02/2014WO2014156882A1 Underfill material, sealing sheet, and method for producing semiconductor device
10/02/2014WO2014156853A1 Method for adjusting vapor-phase growth apparatus
10/02/2014WO2014156849A1 Semiconductor device
10/02/2014WO2014156840A1 Polishing pad and polishing method
10/02/2014WO2014156837A1 Hollow sealing resin sheet and production method for hollow package
10/02/2014WO2014156818A1 Laser annealing device
10/02/2014WO2014156794A1 Movable jig for electronic component
10/02/2014WO2014156791A1 Semiconductor device and manufacturing method for semiconductor device
10/02/2014WO2014156754A1 Substrate processing device and substrate processing method
10/02/2014WO2014156696A1 Method for manufacturing optical semiconductor device, system, manufacturing conditions determination device, and manufacturing management device
10/02/2014WO2014156692A1 Laser machining device and laser machining method
10/02/2014WO2014156690A1 Laser machining device and laser machining method
10/02/2014WO2014156689A1 Laser machining device and laser machining method
10/02/2014WO2014156688A1 Laser machining device and laser machining method
10/02/2014WO2014156687A1 Laser machining device and laser machining method
10/02/2014WO2014156685A1 Anisotropic conductive film
10/02/2014WO2014156681A1 Etching method
10/02/2014WO2014156628A1 Photo-irradiation device
10/02/2014WO2014156619A1 Electrostatic chuck device
10/02/2014WO2014156616A1 Method for manufacturing complex, and composition
10/02/2014WO2014156543A1 Cooling plate, method for producing same and member for semiconductor manufacturing apparatus
10/02/2014WO2014156492A1 Nitride semiconductor element
10/02/2014WO2014156394A1 Silicon carbide epitaxial wafer, method for manufacturing silicon carbide epitaxial wafer, device for manufacturing silicon carbide epitaxial wafer, and silicon carbide semiconductor element
10/02/2014WO2014156381A1 Polishing composition
10/02/2014WO2014156380A1 Method for producing annealing processed body, laser annealed base, and laser annealing processing device
10/02/2014WO2014156374A1 Inorganic film forming composition for multilayer resist processes, and pattern forming method
10/02/2014WO2014156317A1 Substrate processing device and substrate processing device-use coupling member
10/02/2014WO2014156262A1 Defect inspection method and defect inspection device
10/02/2014WO2014156186A1 Protective film etching method, method for producing template, and template produced using said methods
10/02/2014WO2014156171A1 Circuit substrate reliably operating when controlling plurality of electron beams
10/02/2014WO2014156170A1 Electron beam irradiation device
10/02/2014WO2014156134A1 Electronic device and production method for electronic device
10/02/2014WO2014156133A1 Electronic device and production method for electronic device
10/02/2014WO2014156127A1 Production method for laminate film, laminate film, and production method for semiconductor device employing same
10/02/2014WO2014156123A1 Compound semiconductor stack and semiconductor device
10/02/2014WO2014156071A1 Semiconductor device and semiconductor device manufacturing method
10/02/2014WO2014156035A1 Manufacturing method for semiconductor package, semiconductor chip support carrier and chip mounting device
10/02/2014WO2014155998A1 Thin-film transistor array and image display device
10/02/2014WO2014155959A1 Power semiconductor element
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