Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2012
01/03/2012US8088686 Method of remedying deterioration of insulating film
01/03/2012US8088685 Integration of bottom-up metal film deposition
01/03/2012US8088684 Apparatus and method for semiconductor wafer bumping via injection molded solder
01/03/2012US8088683 Sequential deposition and anneal of a dielectic layer in a charge trapping memory device
01/03/2012US8088682 Method for fabricating integrated circuit with gate electrode level region including two side-by-side ones of at least three linear-shaped conductive structures electrically connected to each other through non-gate level
01/03/2012US8088681 Method for fabricating integrated circuit including separated diffusion regions of different type each having four gate electrodes with each of two complementary gate electrode pairs formed from respective linear condcutive segment
01/03/2012US8088680 Method for fabricating integrated circuit having at least three linear-shaped gate electrode level conductive features of equal length positioned side-by-side at equal pitch
01/03/2012US8088679 Method for fabricating integrated circuit with gate electrode level portion including at least two complementary transistor forming linear conductive segments and at least one non-gate linear conductive segment
01/03/2012US8088677 Method of manufacturing semiconductor device, and semiconductor device
01/03/2012US8088676 Metal-induced crystallization of amorphous silicon, polycrystalline silicon thin films produced thereby and thin film transistors produced therefrom
01/03/2012US8088675 Methods of making an emitter having a desired dopant profile
01/03/2012US8088674 Method of growing, on a dielectric material, nanowires made of semi-conductor materials connecting two electrodes
01/03/2012US8088673 Semiconductor chip having island dispersion structure and method for manufacturing the same
01/03/2012US8088672 Producing a transferred layer by implanting ions through a sacrificial layer and an etching stop layer
01/03/2012US8088671 Defectivity of post thin layer separation by modification of its separation annealing
01/03/2012US8088670 Method for manufacturing bonded substrate with sandblast treatment
01/03/2012US8088669 Method for manufacturing substrate of semiconductor device
01/03/2012US8088668 Method for manufacturing capacitor lower electrodes of semiconductor memory
01/03/2012US8088667 Method of fabricating vertical capacitors in through-substrate vias
01/03/2012US8088666 Semiconductor device manufacture method including process of implanting impurity into gate electrode independently from source/drain and semiconductor device manufactured by the method
01/03/2012US8088665 Method of forming self-aligned low resistance contact layer
01/03/2012US8088664 Method of manufacturing integrated deep and shallow trench isolation structures
01/03/2012US8088663 SRAM cell having a rectangular combined active area planar pass gate and planar pull-down NFETS
01/03/2012US8088662 Fabrication method of trenched metal-oxide-semiconductor device
01/03/2012US8088660 Method for producing a plug in a semiconductor body
01/03/2012US8088659 Method of forming capacitors
01/03/2012US8088658 Thin film capacitor and method of fabrication thereof
01/03/2012US8088657 Integrated circuit using FinFETs and having a static random access memory (SRAM)
01/03/2012US8088656 Fabricating ESD devices using MOSFET and LDMOS
01/03/2012US8088655 Thin film transistor and manufacturing method thereof
01/03/2012US8088654 Semiconductor device and manufacturing method thereof
01/03/2012US8088653 Thin-film transistor, method of manufacturing the same, liquid crystal display panel having the same and electro-luminescence display panel having the same
01/03/2012US8088652 Electron device using oxide semiconductor and method of manufacturing the same
01/03/2012US8088651 System and method for providing access to an encapsulated device
01/03/2012US8088650 Method of fabricating chip package
01/03/2012US8088649 Radiation-emitting semiconductor body with carrier substrate and method for the producing the same
01/03/2012US8088648 Method of manufacturing a chip stack package
01/03/2012US8088647 Bumping free flip chip process
01/03/2012US8088646 Check valve package for PB-free, single piece electronic modules
01/03/2012US8088645 3D smart power module
01/03/2012US8088643 Resistance variable memory device with nanoparticle electrode and method of fabrication
01/03/2012US8088642 Thin-filmed field effect transistor and making method
01/03/2012US8088641 Process for producing photovoltaic device
01/03/2012US8088640 Thermal management and method for large scale processing of CIS and/or CIGS based thin films overlying glass substrates
01/03/2012US8088639 Solid-state image pickup device
01/03/2012US8088638 MEMS DC to DC switching converter
01/03/2012US8088637 Method of manufacturing a semiconductor device including a superlattice strain relief layer
01/03/2012US8088636 LED packaging using injection molding method
01/03/2012US8088635 Vertical geometry light emitting diode package aggregate and production method of light emitting device using the same
01/03/2012US8088633 Optical alignment methods for forming LEDs having a rough surface
01/03/2012US8088632 Elemental analysis method and semiconductor device manufacturing method
01/03/2012US8088565 Exposure system and pattern formation method
01/03/2012US8088309 Solution-based fabrication of photovoltaic cell
01/03/2012US8088308 Resin composition and semiconductor device produced by using the same
01/03/2012US8088299 Multiple zone carrier head with flexible membrane
01/03/2012US8088248 Gas switching section including valves having different flow coefficients for gas distribution system
01/03/2012US8088247 Plasma processing apparatus
01/03/2012US8088225 Substrate support system for reduced autodoping and backside deposition
01/03/2012US8087419 Substrate holding rotating mechanism, and substrate processing apparatus
01/03/2012US8087379 Localized plasma processing
01/03/2012CA2628566C In-mold chip attach
01/03/2012CA2595518C Semiconductor device
01/03/2012CA2524482C Substrate transfer device for thin-film deposition apparatus
01/03/2012CA2514858C Gas gate for isolating regions of differing gaseous pressure
01/03/2012CA2511832C Components for a film-forming device and method for cleaning the same
12/2011
12/29/2011WO2011163599A2 Metal coating for indium bump bonding
12/29/2011WO2011163455A2 Pre-clean chamber with reduced ion current
12/29/2011WO2011163441A2 Methods of operating of a wire bonding machine
12/29/2011WO2011163429A2 Ferro-electric capacitor modules, methods of manufacture and design structures
12/29/2011WO2011163344A2 Low voltage pnpn protection device
12/29/2011WO2011163329A2 Extending the lifetime of a deep uv laser in a wafer inspection tool
12/29/2011WO2011163171A1 Transistor with threshold voltage set notch and method of fabrication thereof
12/29/2011WO2011163153A1 Metal sulfide deposition using alkylated thioureas
12/29/2011WO2011163149A2 Wafer dicing using femtosecond-based laser and plasma etch
12/29/2011WO2011163037A2 Plasma-enhanced chemical vapor deposition of crystalline germanium
12/29/2011WO2011162977A2 Delta monolayer dopants epitaxy for embedded source/drain silicide
12/29/2011WO2011162909A1 Methods of forming a multi-doped junction with porous silicon
12/29/2011WO2011162890A2 Mask design and opc for device manufacture
12/29/2011WO2011162778A1 Method and apparatus for removing a reversibly mounted device wafer from a carrier substrate
12/29/2011WO2011162770A1 Integrated processing and critical point drying systems for semiconductor and mems devices
12/29/2011WO2011162715A1 Substrate with buffer layer for oriented nanowire growth
12/29/2011WO2011162430A1 Insert for handler
12/29/2011WO2011162408A1 Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition and resist film
12/29/2011WO2011162394A1 IMPURITIES DIFFUSION LAYER FORMING COMPOSITION, n-TYPE DIFFUSION LAYER FORMING COMPOSITION, METHOD FOR MANUFACTURING n-TYPE DIFFUSION LAYER, p-TYPE DIFFUSION LAYER FORMING COMPOSITION, METHOD FOR MANUFACTURING p-TYPE DIFFUSION LAYER, AND METHOD FOR MANUFACTURING SOLAR CELL ELEMENTS
12/29/2011WO2011162332A1 Method for manufacturing semiconductor light emitting element, semiconductor light emitting element, electronic device, and machine device
12/29/2011WO2011162325A1 Sample stage device
12/29/2011WO2011162303A1 Radiation-sensitive composition
12/29/2011WO2011162297A1 Film-forming apparatus, and method for maintaining film-forming apparatus
12/29/2011WO2011162282A1 Manufacturing method for radiation detectors, and radiation detector
12/29/2011WO2011162278A1 Gas for plasma reactions and uses thereof
12/29/2011WO2011162265A1 Composition for polishing silicon carbide substrate and method for polishing silicon carbide substrate
12/29/2011WO2011162261A1 Suction apparatus, semiconductor device observation device, and semiconductor device observation method
12/29/2011WO2011162255A1 Process for production of barrier film, and process for production of metal wiring film
12/29/2011WO2011162243A1 Semiconductor device
12/29/2011WO2011162242A1 Semiconductor device and process for production thereof
12/29/2011WO2011162219A1 Vapor deposition apparatus
12/29/2011WO2011162177A1 Semiconductor device, liquid crystal display device including semiconductor device, and process for producing semiconductor device
12/29/2011WO2011162147A1 Semiconductor device
12/29/2011WO2011162136A1 Film formation method, semiconductor-device fabrication method, insulating film and semiconductor device
12/29/2011WO2011162104A1 Semiconductor device and method for driving the same