H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2011
12/28/2011	EP2400527A1 Silicon carbide substrate and method for production thereof
12/28/2011	EP2400526A2 Apparatus for manufacturing semiconductor devices
12/28/2011	EP2400046A1 Method and apparatus for growing submicron group III nitride structures utilizing HVPE techniques
12/28/2011	EP2399864A1 Method for sealing two elements by low-temperature thermocompression
12/28/2011	EP2399287A2 Cross-point memory structures, and methods of forming memory arrays
12/28/2011	EP2399286A1 Formation of thin layers of semiconductor materials
12/28/2011	EP2399285A2 Method and apparatus for measuring shape or thickness information of a substrate
12/28/2011	EP2399284A2 Semiconductor chip with reinforcement layer
12/28/2011	EP2399283A2 Modulation-doped halo in quantum well field-effect transistors, apparatus made therewith, and methods of using same
12/28/2011	EP2399282A1 Insulation material for integrated circuits and use of said integrated circuits
12/28/2011	EP2399281A1 Process for electrodeposition of copper chip to chip, chip to wafer and wafer to wafer interconnects in through-silicon vias (tsv)
12/28/2011	EP2399280A1 Preparation unit for lithogrpahy machine
12/28/2011	EP2399279A1 Substrate support structure, clamp preparation unit, and lithography system
12/28/2011	EP2399278A1 Method of clamping a substrate and clamp preparation unit
12/28/2011	EP2399277A1 Autotuned screen printing process
12/28/2011	EP2399273A1 Charged particle lithography apparatus and method of generating vacuum in a vacuum chamber
12/28/2011	EP2399272A1 A method and arrangement for realizing a vacuum in a vacuum chamber
12/28/2011	EP2399271A1 Lithography machine and substrate handling arrangement
12/28/2011	EP2399171A1 Organic solvent development or multiple development pattern-forming method using electron beams or euv rays
12/28/2011	EP2399169A2 Acid-sensitive, developer-soluble bottom anti-reflective coatings
12/28/2011	EP2399168A1 Chemical amplification resist composition, and mold preparation method and resist film using the same
12/28/2011	EP2398733A1 Device for grasping and active release of micro and nano objects
12/28/2011	EP2398723A1 Device for separating disc-shaped elements
12/28/2011	EP2398722A1 Substrate inverting system
12/28/2011	EP2398647A1 Method and apparatus for screen printing a multiple layer pattern
12/28/2011	EP2177487B1 Method of removing contaminant from surface of glass substrate
12/28/2011	EP1936005B1 HIGH-PURITY Ru ALLOY TARGET, PROCESS FOR PRODUCING THE SAME AND SPUTTERED FILM
12/28/2011	EP1799877B1 Sioc:h coated substrates and methods for their preparation
12/28/2011	EP1771885B1 Semiconductor device and method of manufacturing the same
12/28/2011	EP1743364B1 Process for metallic contamination reduction in silicon wafers
12/28/2011	EP1661176B1 Implantation method for a vertical transistor
12/28/2011	EP1636653B1 Adhesion method using gray-scale photolithography
12/28/2011	EP1583154B1 P-type nitride semiconductor structure and bipolar transistor
12/28/2011	EP1550158B1 Method for making a detachable semiconductor substrate and for obtaining a semiconductor element
12/28/2011	EP1470580B1 Method for bilayer HDP CVD / PE CVD cap in advanced BEOL interconnect structures
12/28/2011	EP1435116B1 Combined etching and doping substances
12/28/2011	EP1325522B1 Silicon carbide power mosfets having a shorting channel and methods of fabricating them
12/28/2011	EP1229578B1 Linear actuator with dustproof mechanism
12/28/2011	EP1212475B1 Protective gas shield apparatus
12/28/2011	CN202094108U Transferring device in combing operation
12/28/2011	CN202094107U 石英舟 Quartz boat
12/28/2011	CN202094106U 晶元翻转治具 Epistar flipping jigs
12/28/2011	CN202094105U 一种igbt模块的igbt芯片和电极定位注浆模具 One kind igbt igbt chip and electrode positioning grouting mold module
12/28/2011	CN202094104U 热转化连接装置 Thermal conversion connecting device
12/28/2011	CN202094103U 分架式晶圆清洗装置 Sub-frame wafer cleaning device
12/28/2011	CN202094102U Soaking barrel
12/28/2011	CN202094101U Pickling board
12/28/2011	CN202094100U Testing, printing and forming integrated machine for diodes
12/28/2011	CN202094099U 一种smif及其锁紧装置 One kind smif and locking device
12/28/2011	CN202094098U Coloring device for diode silicon chip
12/28/2011	CN202094097U Anti-fall collecting device for diodes
12/28/2011	CN202094096U 一种kbp晶粒摇盘装填装置 One kind of grain swaying tray loading device kbp
12/28/2011	CN202094095U 真空炉保温系统防氧化处理结构 Vacuum furnace insulation systems architecture oxidation treatment
12/28/2011	CN202094094U 新型二极管一贯机 The new diode consistent machine
12/28/2011	CN202094093U 基板清洗设备 Substrate cleaning equipment
12/28/2011	CN202094092U 连接结构 Connecting structure
12/28/2011	CN202093551U Piecework system operation manual counter
12/28/2011	CN202091608U 气动水阀 Pneumatic valve
12/28/2011	CN202089455U 玻璃基板用容器 A container for a glass substrate
12/28/2011	CN202088090U 一种抛光机 A polishing machine
12/28/2011	CN202088088U 研磨头和研磨装置 Polishing head and polishing apparatus
12/28/2011	CN1885160B 基板处理装置 Substrate processing apparatus
12/28/2011	CN1879268B 高频信号传输光学模块及其制造方法 High-frequency signal transmitting optical module and its manufacturing method
12/28/2011	CN1868046B 半导体器件及制造此类半导体器件的方法 Semiconductor device and method of manufacturing such a semiconductor device
12/28/2011	CN1841204B 外围曝光装置 Peripheral exposure device
12/28/2011	CN102301548A 半导体发光装置及其制造方法 The semiconductor light emitting device and manufacturing method thereof
12/28/2011	CN102301485A 用于形成光伏器件的组合物和方法 The compositions and methods for forming a photovoltaic device
12/28/2011	CN102301484A 非对称结型场效应晶体管及其制造方法 Asymmetric junction field effect transistor and manufacturing method thereof
12/28/2011	CN102301483A 高速度低功率消耗的隔离模拟互补金属氧化物半导体单元 Isolated analog high-speed low-power consumption of complementary metal oxide semiconductor unit
12/28/2011	CN102301481A 欧姆电极及其形成方法 Ohmic electrode and method for forming
12/28/2011	CN102301480A 纳米线网格器件及其制备方法 Nanowire mesh device and its preparation method
12/28/2011	CN102301475A 光电转换装置和成像系统 Photoelectric conversion device and imaging systems
12/28/2011	CN102301472A 用于在芯片内放置有源和无源装置的技术 Active and passive techniques for placing the device in the chip
12/28/2011	CN102301469A 具有焊球和管脚的集成电路附接结构 IC attachment structure with balls and pins
12/28/2011	CN102301466A 划线穿硅通孔 Crossed through silicon vias
12/28/2011	CN102301465A 贯穿衬底的通路 Through the passage of the substrate
12/28/2011	CN102301464A 绝缘体上硅soi型的基板的修整方法 Silicon-on-insulator trimming method soi-type substrate
12/28/2011	CN102301463A 产生有图案的材料的方法 Generating method for a patterned material
12/28/2011	CN102301462A 半导体晶片测试装置 The semiconductor wafer testing apparatus
12/28/2011	CN102301461A 批处理式基板处理装置 Batch-type substrate processing apparatus
12/28/2011	CN102301460A 成膜装置和气体排出部件 Film forming means and gas exhaust member
12/28/2011	CN102301459A 用于在半导体装置上形成共形氧化层的方法 The method of conformal oxide layer is formed on a semiconductor device for
12/28/2011	CN102301458A 用于蚀刻的方法和设备 Method and apparatus for etching
12/28/2011	CN102301457A 电浆蚀刻装置 Plasma etching apparatus
12/28/2011	CN102301456A 基于带的外延剥离设备和方法 Epitaxial stripping apparatus and method based on band
12/28/2011	CN102301455A 包含形成图案的结构区域的化学机械平坦化垫 The chemical mechanical structure comprising a patterned region of planarization pad
12/28/2011	CN102301454A 成膜方法和等离子体成膜装置 Plasma film forming apparatus and film forming method
12/28/2011	CN102301453A 使用高透明电极改善撷取的离子束的品质的技术 High transparent electrode to improve the quality of the captured ion beam technique
12/28/2011	CN102301452A 半导体基板的制造方法及半导体基板 The method of manufacturing a semiconductor substrate and a semiconductor substrate
12/28/2011	CN102301451A 晶圆处理沉积屏蔽部件 Wafer processing deposition shield member
12/28/2011	CN102301450A 用于外延剥离的多个堆栈沉积 For more than one stack of epitaxial deposition peel
12/28/2011	CN102301449A 转印材料用固化性组合物和含有（甲基）丙烯酰基的脲化合物 For transfer materials containing a curable composition and a urea compound (meth) acryloyl group
12/28/2011	CN102301448A 半导体制造设备批次控制的背景条件偏差估计方法和系统 Semiconductor manufacturing equipment and background batch control bias estimation method and system
12/28/2011	CN102301447A 用于提高包括半导体材料的结构的质量的方法 For improving the quality of a structure of a semiconductor material comprising a method
12/28/2011	CN102301446A 材料片的操作系统和加工方法 Material sheet operating system and processing method
12/28/2011	CN102301445A 通过蚀刻来制造元件的方法 Method of manufacturing an element by etching
12/28/2011	CN102301283A 抗蚀剂剥离剂组合物以及使用该组合物的抗蚀剂剥离方法 Resist stripping compositions and use of the composition of a resist lift-off method
12/28/2011	CN102301279A 正型感光性绝缘树脂组合物及使用该组合物的图形形成方法 The positive photosensitive insulating resin composition and the use of the graphical method of forming the composition
12/28/2011	CN102301043A 外延碳化硅单晶基板及其制造方法 An epitaxial silicon carbide single crystal substrate and manufacturing method
12/28/2011	CN102301042A 基板及其制造方法 Substrate and manufacturing method

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