Patents
Sitemap › H01 - Basic electric elements › H01J - Electric discharge tubes or discharge lamps › H01J 27 - Ion beam tubes
Patents for H01J 27 - Ion beam tubes (3,716)
12/1987
12/17/1987WO1987007760A1 Dual plasma microwave apparatus and method for treating a surface
12/16/1987EP0248914A1 Liquid metal ion source
12/15/1987US4713585 Ion source
12/15/1987US4713548 Electron attachment apparatus and method
12/08/1987US4712012 Charge conversion unit for negative ion source
12/01/1987US4710283 For sputtering, deposition of thin films
11/1987
11/05/1987WO1987006407A3 Liquid metal ion source and alloy
11/05/1987WO1987006390A3 Liquid metal ion source and alloy for ion emission of multiple ionic species
10/1987
10/27/1987US4703222 Hall accelerator with preionization discharge
10/27/1987US4703180 Microwave discharge type ion source for ion injection devices
10/22/1987WO1987006407A2 Liquid metal ion source and alloy
10/22/1987WO1987006390A2 Liquid metal ion source and alloy for ion emission of multiple ionic species
10/22/1987WO1987006389A1 Semiconductor dopant vaporizer
10/14/1987EP0241362A1 Device, particularly a duoplasmatron, for ionizing a gas, and method of using this device
10/07/1987EP0240173A2 Method and apparatus for producing neutral atomic and molecular beams
09/1987
09/29/1987US4697085 Apparatus and method for producing ions
09/23/1987EP0238397A1 Electronic cyclotron resonance ion source with coaxial injection of electromagnetic waves
09/22/1987CA1227289A1 Method and apparatus for generating ion beams
09/08/1987US4692627 Ion beam generator
09/08/1987US4691662 Dual plasma microwave apparatus and method for treating a surface
09/08/1987EP0221056A4 Ion beam implant system.
09/01/1987US4691109 Apparatus and method for producing ions
09/01/1987US4690744 Method of ion beam generation and an apparatus based on such method
08/1987
08/19/1987EP0232651A1 Ion source operating at the electron cyclotron resonance
08/19/1987EP0232330A1 Generating a coherent beam of bosons
08/18/1987US4687938 Ion source
08/11/1987US4686414 Enhanced wetting of liquid metal alloy ion sources
08/11/1987CA1225229A1 Alloys for liquid metal ion sources
07/1987
07/29/1987EP0230290A2 Extraction grid for an ion source and method of manufacturing the same
07/16/1987DE3700625A1 Device for increasing the availability of ion sources of the Rene-Bernas type
07/14/1987US4680507 Liquid metal ion source
06/1987
06/23/1987US4675145 Magnetically insulated diode for generating pulsed neutron and gamma ray emissions
06/18/1987WO1987003739A1 Liquid metal ion source
06/02/1987US4670685 Liquid metal ion source and alloy for ion emission of multiple ionic species
06/02/1987US4670064 Generating high purity ions by non-thermal excimer laser processing
05/1987
05/13/1987EP0221056A1 Ion beam implant system
04/1987
04/28/1987US4661710 Negative ion source
04/21/1987US4659899 Vacuum-compatible air-cooled plasma device
04/14/1987US4658143 Ion source
04/08/1987EP0217361A2 Ion source
03/1987
03/31/1987US4654183 Production of intense negative hydrogen beams with polarized nuclei by selective neutralization of negative ions
03/26/1987WO1987001873A1 Radiation source
03/25/1987EP0215626A2 Systems and methods for ion source control in ion implanters
03/25/1987EP0215618A2 Ion sources
03/24/1987US4652795 External plasma gun
03/11/1987EP0214031A1 Ion diode incorporating a magnetic mirror
03/10/1987US4649279 Negative ion source
03/10/1987US4649278 Generation of intense negative ion beams
02/1987
02/25/1987EP0211079A1 Soft multi-chamber capsule and method of and apparatus for manufacturing same
02/25/1987CN86105630A Macroscopic apparatus
02/10/1987US4642523 Precision tunable resonant microwave cavity
02/10/1987US4642522 Wire-ion-plasma electron gun employing auxiliary grid
02/03/1987US4641031 Ion source apparatus
02/03/1987CA1217532A1 Ion beam machining device
01/1987
01/29/1987WO1987000681A1 Generating a coherent beam of bosons
01/20/1987US4638217 Fused metal ion source with sintered metal head
01/20/1987US4638216 Electron cyclotron resonance ion source
01/20/1987US4638210 Liquid metal ion source
01/20/1987US4638209 Ion beam generating apparatus
12/1986
12/23/1986US4631448 Ion source
12/23/1986US4631438 Multicharged ion source with several electron cyclotron resonance zones
12/23/1986US4630566 Microwave or UHF plasma improved apparatus
12/16/1986US4629931 Liquid metal ion source
12/16/1986US4629930 Plasma ion source
12/10/1986EP0204297A2 Charged particle emission source structure
12/03/1986EP0203573A2 Electron beam-excited ion beam source
11/1986
11/26/1986EP0202685A2 Liquid metal ion source
11/25/1986US4624833 Liquid metal ion source and apparatus
11/25/1986CA1214592A1 Polymeric liquid crystals
11/20/1986WO1986006874A1 Ion beam implant system
11/05/1986EP0200651A1 Triode-type ion source with a single high frequency ionization chamber and with multiple magnetic confinement
10/1986
10/29/1986EP0199625A1 Electron cyclotron resonance negative ion source
10/28/1986US4620102 Electron-impact type of ion source with double grid anode
10/23/1986WO1986006210A1 Manufacture of liquid metal ion source
10/14/1986US4617203 Corrosion resistant wetting
10/07/1986US4616157 Injector for negative ions
09/1986
09/09/1986US4611121 Magnet apparatus
08/1986
08/26/1986US4608513 Dual filament ion source with improved beam characteristics
08/14/1986WO1986004501A1 Soft multi-chamber capsule and method of and apparatus for manufacturing same
08/12/1986US4605485 Charge injection device
08/06/1986CN85100610A Equipment for generating multiple metal and gas particles beams
07/1986
07/22/1986US4602161 Negative ion source with low temperature transverse divergence optical system
07/01/1986US4598231 Microwave ion source
06/1986
06/18/1986EP0184812A2 High frequency plasma generation apparatus
06/11/1986EP0184475A1 Method and apparatus for igniting a hyperfrequency ion source
05/1986
05/13/1986US4588952 Arc discharge abnormality detecting system
05/06/1986US4587430 Ion implantation source and device
04/1986
04/29/1986US4585668 Ultrahigh frequency, integrated circuits
04/15/1986US4582997 Ionic current regulating device
04/08/1986US4581195 Dissoliation, diffusion through solid state device, resonance transition by active electrons
04/01/1986US4580120 Ferromagnetic structure of an ion source produced by permanent magnets and solenoids
03/1986
03/18/1986US4577135 Liquid metal ion sources
03/12/1986EP0174058A2 Hall accelerator with preionization discharge
03/04/1986US4574179 Ion beam machining device
02/1986
02/11/1986US4570106 Plasma electron source for cold-cathode discharge device or the like
02/04/1986US4568509 Ion beam device
01/1986
01/29/1986EP0169744A2 Ion source
01/28/1986US4567398 Liquid metal ion source
01/21/1986CA1199736A1 Thermally regulated ion generation
01/16/1986WO1986000465A1 Wire-ion-plasma electron gun employing auxiliary grid
1 ... 25 26 27 28 29 30 31 32 33 34 35 36 37 38