Patents for H01J 27 - Ion beam tubes (3,716) |
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10/12/1982 | US4354113 Ion sources |
08/24/1982 | US4346301 Ion implantation system |
08/10/1982 | US4344019 Penning discharge ion source with self-cleaning aperture |
08/04/1982 | EP0056899A1 Gas ion source |
07/13/1982 | US4339691 Discharge apparatus having hollow cathode |
06/30/1982 | EP0054621A1 High temperature ion beam source |
05/11/1982 | US4329586 Electron energy recovery system for negative ion sources |
05/11/1982 | US4328667 Field-emission ion source and ion thruster apparatus comprising such sources |
05/04/1982 | US4328443 Apparatus for providing improved characteristics of a broad area electron beam |
04/13/1982 | US4325005 Ion accelerator and a method for increasing its efficiency |
03/30/1982 | US4322661 Cross-field plasma mode electric conduction control device |
03/02/1982 | US4318030 Liquid metal ion source |
03/02/1982 | US4318029 Liquid metal ion source |
03/02/1982 | US4318028 Ion generator |
02/16/1982 | US4316090 Microwave plasma ion source |
02/02/1982 | US4314180 High density ion source |
01/12/1982 | US4310765 Neutron accelerator tube having improved ionization section |
12/01/1981 | CA1113612A1 Method and means for dynamic correction of electrostatic deflector for electron beam tube |
11/17/1981 | US4301391 Dual discharge plasma device |
11/03/1981 | US4298817 Ion-electron source with channel multiplier having a feedback region |
11/03/1981 | US4298798 Method and apparatus for producing negative ions |
11/03/1981 | CA1111801A1 Negative ion extractor |
10/20/1981 | US4296330 Flowing gas discharge source of vacuum ultra-violet line radiation system |
10/20/1981 | US4296327 Multi-stage collective field charged particle accelerator |
10/14/1981 | EP0037455A2 Ion source |
10/06/1981 | US4293794 Generation of intense, high-energy ion pulses by magnetic compression of ion rings |
09/30/1981 | EP0036665A1 Ion generating apparatus |
09/08/1981 | US4288716 Ion source having improved cathode |
08/18/1981 | CA1107234A1 Method and apparatus for rejuvenating ion sources |
08/04/1981 | US4282436 Intense ion beam generation with an inverse reflex tetrode (IRT) |
07/15/1981 | EP0032100A2 High pressure and very high temperature ionized gas generator |
07/14/1981 | US4277939 Ion beam profile control apparatus and method |
07/07/1981 | US4277304 Perpendicular magnetic and electrical fields to ionize gas |
06/09/1981 | CA1102931A1 Plasma discharge ion source |
05/13/1981 | EP0028303A2 Plasma and ion source |
04/28/1981 | US4264813 High intensity ion source using ionic conductors |
03/31/1981 | US4259145 Ion source for reactive ion etching |
02/24/1981 | US4253026 Low temperature ion source for calutrons |
01/20/1981 | US4246481 Contact ionization apparatus |
01/07/1981 | EP0021204A1 Ion generator |
01/07/1981 | EP0021140A1 Ion source in a vacuum chamber and method for its operation |
01/07/1981 | EP0020899A1 Ion generator |
12/16/1980 | US4240007 Microchannel ion gun |
12/16/1980 | US4240005 Apparatus for the generation of primary electrons from a cathode |
11/25/1980 | US4236097 Ion source having fluid-cooled supply conductors |
08/19/1980 | US4218633 Hydrogen hollow cathode ion source |
07/22/1980 | US4214187 Ion source producing a dense flux of low energy ions |
07/09/1980 | EP0012838A1 Ion source, especially for ion implantation apparatus |
07/01/1980 | US4210701 Method and apparatus for depositing film on a substrate, and products produced thereby |
06/10/1980 | US4207489 Movable extraction electrode for an ion source |
04/22/1980 | US4199685 Laser beam activated ion source |
03/18/1980 | US4194139 Reflex tetrode for producing an efficient unidirectional ion beam |
03/04/1980 | US4191888 Self-shielding small hole accel grid |
03/04/1980 | CA1072913A1 Device for providing high-intensity ion or electron beam |
07/31/1979 | US4163153 Ion beam means |
07/11/1979 | EP0002726A2 Process and apparatus for reactive ion etching |
06/26/1979 | US4159423 Chemical ionization ion source |
06/19/1979 | US4158589 Negative ion extractor for a plasma etching apparatus |
06/13/1979 | EP0002407A1 Mobile extraction electrode for an ion source |
06/13/1979 | EP0002406A1 Ion source, in particular for an ion implantation device |
06/12/1979 | US4158139 Isotopically selective excitation from plural low levels to distinct excited levels |
06/05/1979 | US4157471 High temperature ion source for an on-line isotope separator |
05/22/1979 | US4156159 Self crossed field type ion source |
02/27/1979 | US4142132 Method and means for dynamic correction of electrostatic deflector for electron beam tube |
02/27/1979 | US4141405 Method of fabricating a funnel-shaped miniature electrode for use as a field ionization source |
02/21/1979 | EP0000843A1 Plasma discharge ion source |
02/20/1979 | US4140943 Plasma generating device with hairpin-shaped cathode filaments |
02/13/1979 | US4139773 Method and apparatus for producing bright high resolution ion beams |
02/13/1979 | US4139772 Plasma discharge ion source |
02/07/1979 | EP0000586A1 Method for rejuvenating ion sources |
01/16/1979 | US4135094 Method and apparatus for rejuvenating ion sources |
01/16/1979 | US4135093 Use of predissociation to enhance the atomic hydrogen ion fraction in ion sources |
11/21/1978 | US4126806 Intense ion beam producing reflex triode |
11/07/1978 | US4124801 Apparatus and process for separating materials |
10/31/1978 | US4123686 Ion generating source |
10/24/1978 | US4122347 Ion source |
10/10/1978 | US4119881 Ion beam generator having concentrically arranged frustoconical accelerating grids |
10/03/1978 | CA1039860A1 Double chamber ion source |
09/26/1978 | CA1039363A1 Ion-plasma gun for ion-milling machine |
08/15/1978 | US4107350 Method for depositing film on a substrate |
08/08/1978 | US4104875 Ion prime mover |
07/25/1978 | US4103042 Hot filament, arc type ion source and method |
06/06/1978 | US4093858 Cesium injection system for negative ion duoplasmatrons |
05/09/1978 | US4088919 Ion source including a pointed solid electrode and reservoir of liquid material |
05/02/1978 | US4087721 Ion source using a hollow cathode discharge arrangement and in particular a particle accelerator comprising such a source |
05/02/1978 | US4087720 Multi-beam, multi-aperture ion sources of the beam-plasma type |
03/21/1978 | US4080549 Plasma reflex discharge device |
02/28/1978 | US4076993 Ion source for high intensity ion beam |
01/24/1978 | US4070595 Apparatus for the acceleration of ions in the virtual cathode of an intense relativistic electron beam |
01/24/1978 | US4069665 Gas ionizing apparatus for improving the operation of an internal combustion engine |
11/15/1977 | US4058748 Microwave discharge ion source |
10/25/1977 | US4055782 Method of enhancing cyclotron beam intensity |
10/18/1977 | US4054810 Field emission ion source having heated anode |
09/06/1977 | US4046666 Device for providing high-intensity ion or electron beam |
08/30/1977 | US4045677 Intense ion beam generator |
06/07/1977 | US4028579 High current density ion source |
03/15/1977 | US4011719 Anode for ion thruster |
12/21/1976 | US3999072 Beam-plasma type ion source |
12/21/1976 | US3998718 Ion milling apparatus |
11/30/1976 | US3995186 Ion-plasma gun for ion-milling machine |