Patents for H01J 27 - Ion beam tubes (3,716)
10/1982
10/12/1982US4354113 Ion sources
08/1982
08/24/1982US4346301 Ion implantation system
08/10/1982US4344019 Penning discharge ion source with self-cleaning aperture
08/04/1982EP0056899A1 Gas ion source
07/1982
07/13/1982US4339691 Discharge apparatus having hollow cathode
06/1982
06/30/1982EP0054621A1 High temperature ion beam source
05/1982
05/11/1982US4329586 Electron energy recovery system for negative ion sources
05/11/1982US4328667 Field-emission ion source and ion thruster apparatus comprising such sources
05/04/1982US4328443 Apparatus for providing improved characteristics of a broad area electron beam
04/1982
04/13/1982US4325005 Ion accelerator and a method for increasing its efficiency
03/1982
03/30/1982US4322661 Cross-field plasma mode electric conduction control device
03/02/1982US4318030 Liquid metal ion source
03/02/1982US4318029 Liquid metal ion source
03/02/1982US4318028 Ion generator
02/1982
02/16/1982US4316090 Microwave plasma ion source
02/02/1982US4314180 High density ion source
01/1982
01/12/1982US4310765 Neutron accelerator tube having improved ionization section
12/1981
12/01/1981CA1113612A1 Method and means for dynamic correction of electrostatic deflector for electron beam tube
11/1981
11/17/1981US4301391 Dual discharge plasma device
11/03/1981US4298817 Ion-electron source with channel multiplier having a feedback region
11/03/1981US4298798 Method and apparatus for producing negative ions
11/03/1981CA1111801A1 Negative ion extractor
10/1981
10/20/1981US4296330 Flowing gas discharge source of vacuum ultra-violet line radiation system
10/20/1981US4296327 Multi-stage collective field charged particle accelerator
10/14/1981EP0037455A2 Ion source
10/06/1981US4293794 Generation of intense, high-energy ion pulses by magnetic compression of ion rings
09/1981
09/30/1981EP0036665A1 Ion generating apparatus
09/08/1981US4288716 Ion source having improved cathode
08/1981
08/18/1981CA1107234A1 Method and apparatus for rejuvenating ion sources
08/04/1981US4282436 Intense ion beam generation with an inverse reflex tetrode (IRT)
07/1981
07/15/1981EP0032100A2 High pressure and very high temperature ionized gas generator
07/14/1981US4277939 Ion beam profile control apparatus and method
07/07/1981US4277304 Perpendicular magnetic and electrical fields to ionize gas
06/1981
06/09/1981CA1102931A1 Plasma discharge ion source
05/1981
05/13/1981EP0028303A2 Plasma and ion source
04/1981
04/28/1981US4264813 High intensity ion source using ionic conductors
03/1981
03/31/1981US4259145 Ion source for reactive ion etching
02/1981
02/24/1981US4253026 Low temperature ion source for calutrons
01/1981
01/20/1981US4246481 Contact ionization apparatus
01/07/1981EP0021204A1 Ion generator
01/07/1981EP0021140A1 Ion source in a vacuum chamber and method for its operation
01/07/1981EP0020899A1 Ion generator
12/1980
12/16/1980US4240007 Microchannel ion gun
12/16/1980US4240005 Apparatus for the generation of primary electrons from a cathode
11/1980
11/25/1980US4236097 Ion source having fluid-cooled supply conductors
08/1980
08/19/1980US4218633 Hydrogen hollow cathode ion source
07/1980
07/22/1980US4214187 Ion source producing a dense flux of low energy ions
07/09/1980EP0012838A1 Ion source, especially for ion implantation apparatus
07/01/1980US4210701 Method and apparatus for depositing film on a substrate, and products produced thereby
06/1980
06/10/1980US4207489 Movable extraction electrode for an ion source
04/1980
04/22/1980US4199685 Laser beam activated ion source
03/1980
03/18/1980US4194139 Reflex tetrode for producing an efficient unidirectional ion beam
03/04/1980US4191888 Self-shielding small hole accel grid
03/04/1980CA1072913A1 Device for providing high-intensity ion or electron beam
07/1979
07/31/1979US4163153 Ion beam means
07/11/1979EP0002726A2 Process and apparatus for reactive ion etching
06/1979
06/26/1979US4159423 Chemical ionization ion source
06/19/1979US4158589 Negative ion extractor for a plasma etching apparatus
06/13/1979EP0002407A1 Mobile extraction electrode for an ion source
06/13/1979EP0002406A1 Ion source, in particular for an ion implantation device
06/12/1979US4158139 Isotopically selective excitation from plural low levels to distinct excited levels
06/05/1979US4157471 High temperature ion source for an on-line isotope separator
05/1979
05/22/1979US4156159 Self crossed field type ion source
02/1979
02/27/1979US4142132 Method and means for dynamic correction of electrostatic deflector for electron beam tube
02/27/1979US4141405 Method of fabricating a funnel-shaped miniature electrode for use as a field ionization source
02/21/1979EP0000843A1 Plasma discharge ion source
02/20/1979US4140943 Plasma generating device with hairpin-shaped cathode filaments
02/13/1979US4139773 Method and apparatus for producing bright high resolution ion beams
02/13/1979US4139772 Plasma discharge ion source
02/07/1979EP0000586A1 Method for rejuvenating ion sources
01/1979
01/16/1979US4135094 Method and apparatus for rejuvenating ion sources
01/16/1979US4135093 Use of predissociation to enhance the atomic hydrogen ion fraction in ion sources
11/1978
11/21/1978US4126806 Intense ion beam producing reflex triode
11/07/1978US4124801 Apparatus and process for separating materials
10/1978
10/31/1978US4123686 Ion generating source
10/24/1978US4122347 Ion source
10/10/1978US4119881 Ion beam generator having concentrically arranged frustoconical accelerating grids
10/03/1978CA1039860A1 Double chamber ion source
09/1978
09/26/1978CA1039363A1 Ion-plasma gun for ion-milling machine
08/1978
08/15/1978US4107350 Method for depositing film on a substrate
08/08/1978US4104875 Ion prime mover
07/1978
07/25/1978US4103042 Hot filament, arc type ion source and method
06/1978
06/06/1978US4093858 Cesium injection system for negative ion duoplasmatrons
05/1978
05/09/1978US4088919 Ion source including a pointed solid electrode and reservoir of liquid material
05/02/1978US4087721 Ion source using a hollow cathode discharge arrangement and in particular a particle accelerator comprising such a source
05/02/1978US4087720 Multi-beam, multi-aperture ion sources of the beam-plasma type
03/1978
03/21/1978US4080549 Plasma reflex discharge device
02/1978
02/28/1978US4076993 Ion source for high intensity ion beam
01/1978
01/24/1978US4070595 Apparatus for the acceleration of ions in the virtual cathode of an intense relativistic electron beam
01/24/1978US4069665 Gas ionizing apparatus for improving the operation of an internal combustion engine
11/1977
11/15/1977US4058748 Microwave discharge ion source
10/1977
10/25/1977US4055782 Method of enhancing cyclotron beam intensity
10/18/1977US4054810 Field emission ion source having heated anode
09/1977
09/06/1977US4046666 Device for providing high-intensity ion or electron beam
08/1977
08/30/1977US4045677 Intense ion beam generator
06/1977
06/07/1977US4028579 High current density ion source
03/1977
03/15/1977US4011719 Anode for ion thruster
12/1976
12/21/1976US3999072 Beam-plasma type ion source
12/21/1976US3998718 Ion milling apparatus
11/1976
11/30/1976US3995186 Ion-plasma gun for ion-milling machine
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