| Patents for H01J 27 - Ion beam tubes (3,716) |
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| 03/14/1989 | US4811690 Thin film deposition apparatus |
| 03/01/1989 | EP0304525A1 Pulsed microfocused ion beams |
| 01/31/1989 | US4801849 Ion source operating by surface ionization in particular for providing an ion probe |
| 01/25/1989 | EP0300566A1 Liquid metal ions source with a vacuum arc |
| 01/25/1989 | EP0300105A2 Electrostatic ion accelerator |
| 01/24/1989 | US4800281 Compact penning-discharge plasma source |
| 01/12/1989 | WO1988009562A3 Enhanced-wetting, boron-based liquid-metal ion source and method |
| 01/11/1989 | EP0298577A2 Charged particle source of large current with high energy |
| 01/11/1989 | CN1030327A Improved ion source |
| 01/10/1989 | US4797597 Microwave ion source |
| 01/10/1989 | CA1248643A1 Process and apparatus for igniting an ultra-high frequency ion source |
| 01/05/1989 | DE3826432A1 Radio-frequency plasma source and ion source for continuous operation |
| 01/03/1989 | US4795942 Hollow cathode discharge device with front shield |
| 12/27/1988 | US4794298 Ion source |
| 12/27/1988 | US4793961 Short extraction passageways |
| 12/21/1988 | EP0295743A1 Ion source with four electrodes |
| 12/20/1988 | US4792687 Freeman ion source |
| 12/13/1988 | US4791273 Vaporizer system for ion source |
| 12/08/1988 | DE3817604A1 Ion beam generator for semiconductor processing |
| 12/01/1988 | WO1988009562A2 Enhanced-wetting, boron-based liquid-metal ion source and method |
| 11/29/1988 | US4788473 Plasma generating device with stepped waveguide transition |
| 11/29/1988 | EP0263815A4 Semiconductor dopant vaporizer. |
| 11/23/1988 | EP0292180A1 Method of operating an ion trap mass spectrometer |
| 11/22/1988 | US4786844 Wire ion plasma gun |
| 11/22/1988 | US4786478 Method and apparatus for isotope separation |
| 11/17/1988 | EP0291341A1 Vaporizer system for ion source |
| 11/17/1988 | EP0291185A2 Improved ion source |
| 11/15/1988 | US4785220 Multi-cathode metal vapor arc ion source |
| 11/08/1988 | US4783595 Solid-state source of ions and atoms |
| 11/03/1988 | WO1988008659A1 Method and apparatus for processing with plasma |
| 11/01/1988 | US4782235 Source of ions with at least two ionization chambers, in particular for forming chemically reactive ion beams |
| 10/27/1988 | DE3807867A1 Method and device for compressing a plasma jet (plasma beam) for producing an ion beam |
| 10/25/1988 | US4780642 Electron cyclotron resonance ion source with coaxial injection of electromagnetic waves |
| 10/20/1988 | WO1988008198A1 Plasma focus apparatus with field distortion elements |
| 10/19/1988 | EP0286656A1 Ion implantation |
| 10/18/1988 | US4778561 Electron cyclotron resonance plasma source |
| 10/12/1988 | EP0286191A1 Vacuum arc ion source |
| 10/04/1988 | US4775818 Vaporized alloy |
| 10/04/1988 | US4775789 Method and apparatus for producing neutral atomic and molecular beams |
| 09/28/1988 | EP0283519A1 Ion generation apparatus, thin film formation apparatus using the ion generation apparatus, and ion source |
| 09/28/1988 | EP0270667A4 Dual plasma microwave apparatus and method for treating a surface. |
| 09/27/1988 | US4774437 Inverted re-entrant magnetron ion source |
| 09/27/1988 | US4774433 Apparatus for generating metal ions |
| 09/27/1988 | US4774414 Liquid metal ion source |
| 09/27/1988 | US4774413 Ion emmissive head and ion beam irradiation device incorporating the same |
| 09/22/1988 | WO1988007259A1 High-frequency ion source |
| 09/21/1988 | EP0282677A1 Multi-cathode metal arc ion source |
| 09/14/1988 | EP0282467A1 Hollow cathode ion sources |
| 09/13/1988 | US4771212 High voltage gas isolator |
| 08/31/1988 | EP0279952A1 Charged particle source |
| 08/18/1988 | DE3703207A1 High-frequency (radio-frequency) ion source |
| 08/18/1988 | DE3702397A1 Ion source for a cyclotron |
| 08/10/1988 | EP0277203A1 System for controlling the respective emission currents from a plurality of cathodes of an ion source device and ion propulsion motor. |
| 08/09/1988 | US4762975 Method and apparatus for making submicrom powders |
| 07/26/1988 | US4760263 Ion implant using tetrafluoroborate |
| 07/26/1988 | US4760262 Ion source |
| 07/12/1988 | US4757237 Electron cyclotron resonance negative ion source |
| 07/05/1988 | US4755683 Liquid-metal ion beam source substructure |
| 07/05/1988 | US4755344 Method and apparatus for the production of cluster ions |
| 06/28/1988 | US4754200 Systems and methods for ion source control in ion implanters |
| 06/23/1988 | EP0232330A4 Generating a coherent beam of bosons. |
| 06/22/1988 | CN87105372A Emitting current control system of multi-hollow cathodes |
| 06/21/1988 | US4752692 Liquid metal ion source |
| 06/21/1988 | US4752667 Apparatus and particularly duoplasmatron usable for ionizing a gas and process for using said apparatus |
| 06/21/1988 | CA1238415A1 Microwave ion source |
| 06/15/1988 | EP0270667A1 Dual plasma microwave apparatus and method for treating a surface. |
| 06/07/1988 | US4749912 Ion-producing apparatus |
| 06/07/1988 | US4749911 Ion plasma electron gun with dose rate control via amplitude modulation of the plasma discharge |
| 06/07/1988 | US4749910 Electron beam-excited ion beam source |
| 05/24/1988 | US4746799 Atomic jet radiation source |
| 05/19/1988 | WO1988003742A1 Dynamic electron emitter |
| 05/10/1988 | US4743767 Systems and methods for ion implantation |
| 05/03/1988 | US4742232 Ion generator and ion application system |
| 04/27/1988 | EP0265365A1 End-hall ion source |
| 04/27/1988 | EP0264709A2 Hollow-anode ion-electron source |
| 04/20/1988 | EP0263849A1 Liquid metal ion source and alloy. |
| 04/20/1988 | EP0263815A1 Semiconductor dopant vaporizer |
| 04/19/1988 | US4739214 Dynamic electron emitter |
| 04/19/1988 | US4739169 Ion source |
| 04/12/1988 | US4737688 Wide area source of multiply ionized atomic or molecular species |
| 04/07/1988 | WO1988002548A1 Ion implantation |
| 04/07/1988 | WO1988002546A1 Ion generation apparatus, thin film formation apparatus using the ion generation apparatus, and ion source |
| 03/30/1988 | EP0261338A2 Inductively excited ion source |
| 03/29/1988 | US4733530 Emission current control system for multiple hollow cathode devices |
| 03/22/1988 | US4733134 Liquid metal ion source with pulse generator control |
| 03/15/1988 | US4731562 Electrohydrodynamically driven large-area liquid ion sources |
| 02/23/1988 | US4727550 Radiation source |
| 02/23/1988 | US4727293 Plasma generating apparatus using magnets and method |
| 02/11/1988 | WO1988001020A1 Emission current control system for multiple hollow cathode devices |
| 02/02/1988 | CA1232375A1 Electron cyclotron resonance ion source |
| 01/26/1988 | US4721889 Uniform insulation applied-B ion diode |
| 01/26/1988 | US4721878 Charged particle emission source structure |
| 01/13/1988 | EP0252845A1 Electron cyclotron resonance ion source |
| 01/12/1988 | US4719355 Ion source for an ion implanter |
| 01/05/1988 | USH414 Surface ionization source |
| 12/29/1987 | US4716491 High frequency plasma generation apparatus |
| 12/29/1987 | US4716295 Ion beam generator |
| 12/23/1987 | EP0249658A2 Ion source device |
| 12/22/1987 | US4714860 Ion beam generating apparatus |
| 12/22/1987 | US4714834 Method and apparatus for generating ion beams |