Patents for H01J 27 - Ion beam tubes (3,716)
03/1989
03/14/1989US4811690 Thin film deposition apparatus
03/01/1989EP0304525A1 Pulsed microfocused ion beams
01/1989
01/31/1989US4801849 Ion source operating by surface ionization in particular for providing an ion probe
01/25/1989EP0300566A1 Liquid metal ions source with a vacuum arc
01/25/1989EP0300105A2 Electrostatic ion accelerator
01/24/1989US4800281 Compact penning-discharge plasma source
01/12/1989WO1988009562A3 Enhanced-wetting, boron-based liquid-metal ion source and method
01/11/1989EP0298577A2 Charged particle source of large current with high energy
01/11/1989CN1030327A Improved ion source
01/10/1989US4797597 Microwave ion source
01/10/1989CA1248643A1 Process and apparatus for igniting an ultra-high frequency ion source
01/05/1989DE3826432A1 Radio-frequency plasma source and ion source for continuous operation
01/03/1989US4795942 Hollow cathode discharge device with front shield
12/1988
12/27/1988US4794298 Ion source
12/27/1988US4793961 Short extraction passageways
12/21/1988EP0295743A1 Ion source with four electrodes
12/20/1988US4792687 Freeman ion source
12/13/1988US4791273 Vaporizer system for ion source
12/08/1988DE3817604A1 Ion beam generator for semiconductor processing
12/01/1988WO1988009562A2 Enhanced-wetting, boron-based liquid-metal ion source and method
11/1988
11/29/1988US4788473 Plasma generating device with stepped waveguide transition
11/29/1988EP0263815A4 Semiconductor dopant vaporizer.
11/23/1988EP0292180A1 Method of operating an ion trap mass spectrometer
11/22/1988US4786844 Wire ion plasma gun
11/22/1988US4786478 Method and apparatus for isotope separation
11/17/1988EP0291341A1 Vaporizer system for ion source
11/17/1988EP0291185A2 Improved ion source
11/15/1988US4785220 Multi-cathode metal vapor arc ion source
11/08/1988US4783595 Solid-state source of ions and atoms
11/03/1988WO1988008659A1 Method and apparatus for processing with plasma
11/01/1988US4782235 Source of ions with at least two ionization chambers, in particular for forming chemically reactive ion beams
10/1988
10/27/1988DE3807867A1 Method and device for compressing a plasma jet (plasma beam) for producing an ion beam
10/25/1988US4780642 Electron cyclotron resonance ion source with coaxial injection of electromagnetic waves
10/20/1988WO1988008198A1 Plasma focus apparatus with field distortion elements
10/19/1988EP0286656A1 Ion implantation
10/18/1988US4778561 Electron cyclotron resonance plasma source
10/12/1988EP0286191A1 Vacuum arc ion source
10/04/1988US4775818 Vaporized alloy
10/04/1988US4775789 Method and apparatus for producing neutral atomic and molecular beams
09/1988
09/28/1988EP0283519A1 Ion generation apparatus, thin film formation apparatus using the ion generation apparatus, and ion source
09/28/1988EP0270667A4 Dual plasma microwave apparatus and method for treating a surface.
09/27/1988US4774437 Inverted re-entrant magnetron ion source
09/27/1988US4774433 Apparatus for generating metal ions
09/27/1988US4774414 Liquid metal ion source
09/27/1988US4774413 Ion emmissive head and ion beam irradiation device incorporating the same
09/22/1988WO1988007259A1 High-frequency ion source
09/21/1988EP0282677A1 Multi-cathode metal arc ion source
09/14/1988EP0282467A1 Hollow cathode ion sources
09/13/1988US4771212 High voltage gas isolator
08/1988
08/31/1988EP0279952A1 Charged particle source
08/18/1988DE3703207A1 High-frequency (radio-frequency) ion source
08/18/1988DE3702397A1 Ion source for a cyclotron
08/10/1988EP0277203A1 System for controlling the respective emission currents from a plurality of cathodes of an ion source device and ion propulsion motor.
08/09/1988US4762975 Method and apparatus for making submicrom powders
07/1988
07/26/1988US4760263 Ion implant using tetrafluoroborate
07/26/1988US4760262 Ion source
07/12/1988US4757237 Electron cyclotron resonance negative ion source
07/05/1988US4755683 Liquid-metal ion beam source substructure
07/05/1988US4755344 Method and apparatus for the production of cluster ions
06/1988
06/28/1988US4754200 Systems and methods for ion source control in ion implanters
06/23/1988EP0232330A4 Generating a coherent beam of bosons.
06/22/1988CN87105372A Emitting current control system of multi-hollow cathodes
06/21/1988US4752692 Liquid metal ion source
06/21/1988US4752667 Apparatus and particularly duoplasmatron usable for ionizing a gas and process for using said apparatus
06/21/1988CA1238415A1 Microwave ion source
06/15/1988EP0270667A1 Dual plasma microwave apparatus and method for treating a surface.
06/07/1988US4749912 Ion-producing apparatus
06/07/1988US4749911 Ion plasma electron gun with dose rate control via amplitude modulation of the plasma discharge
06/07/1988US4749910 Electron beam-excited ion beam source
05/1988
05/24/1988US4746799 Atomic jet radiation source
05/19/1988WO1988003742A1 Dynamic electron emitter
05/10/1988US4743767 Systems and methods for ion implantation
05/03/1988US4742232 Ion generator and ion application system
04/1988
04/27/1988EP0265365A1 End-hall ion source
04/27/1988EP0264709A2 Hollow-anode ion-electron source
04/20/1988EP0263849A1 Liquid metal ion source and alloy.
04/20/1988EP0263815A1 Semiconductor dopant vaporizer
04/19/1988US4739214 Dynamic electron emitter
04/19/1988US4739169 Ion source
04/12/1988US4737688 Wide area source of multiply ionized atomic or molecular species
04/07/1988WO1988002548A1 Ion implantation
04/07/1988WO1988002546A1 Ion generation apparatus, thin film formation apparatus using the ion generation apparatus, and ion source
03/1988
03/30/1988EP0261338A2 Inductively excited ion source
03/29/1988US4733530 Emission current control system for multiple hollow cathode devices
03/22/1988US4733134 Liquid metal ion source with pulse generator control
03/15/1988US4731562 Electrohydrodynamically driven large-area liquid ion sources
02/1988
02/23/1988US4727550 Radiation source
02/23/1988US4727293 Plasma generating apparatus using magnets and method
02/11/1988WO1988001020A1 Emission current control system for multiple hollow cathode devices
02/02/1988CA1232375A1 Electron cyclotron resonance ion source
01/1988
01/26/1988US4721889 Uniform insulation applied-B ion diode
01/26/1988US4721878 Charged particle emission source structure
01/13/1988EP0252845A1 Electron cyclotron resonance ion source
01/12/1988US4719355 Ion source for an ion implanter
01/05/1988USH414 Surface ionization source
12/1987
12/29/1987US4716491 High frequency plasma generation apparatus
12/29/1987US4716295 Ion beam generator
12/23/1987EP0249658A2 Ion source device
12/22/1987US4714860 Ion beam generating apparatus
12/22/1987US4714834 Method and apparatus for generating ion beams
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