| Patents for G21K 5 - Irradiation devices (9,144) |
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| 01/28/2004 | CN1470944A Photoetching apparatus and device manufacturing method |
| 01/27/2004 | US6683936 EUV-transparent interface structure |
| 01/27/2004 | US6683411 Discharge lamp, ultraviolet ray irradiation apparatus and method of using the apparatus |
| 01/27/2004 | US6683319 System and method for irradiation with improved dosage uniformity |
| 01/27/2004 | US6683318 Ion beam therapy system and a method for operating the system |
| 01/27/2004 | US6682981 Stress controlled dielectric integrated circuit fabrication |
| 01/27/2004 | CA2189019C Positioning device and method for radiation treatment |
| 01/22/2004 | WO2004008475A1 Ion beam device and ion beam processing method, and holder member |
| 01/22/2004 | WO2004008464A1 Aerosol particle charging equipment |
| 01/22/2004 | WO2003060950A3 Amalgam-doped mercury low-pressure irradiator |
| 01/22/2004 | WO2003049510A3 X-ray source assembly having enhanced output stability, and fluid stream analysis applications thereof |
| 01/22/2004 | US20040013237 Radiotherapy apparatus and collimator set therefor |
| 01/22/2004 | US20040013233 High-energy x-ray imaging device and method therefor |
| 01/22/2004 | US20040013230 Device for radiation therapy |
| 01/22/2004 | US20040013226 Lithographic apparatus and device manufacturing method |
| 01/22/2004 | US20040013225 Systems and methods for imaging large field-of-view objects |
| 01/21/2004 | EP1382300A1 Method and system for positioning a patient in a medical diagnostic or treating device |
| 01/21/2004 | EP1381919A1 Euv-transparent interface structure |
| 01/21/2004 | EP1332651B1 Target for production of x-rays |
| 01/21/2004 | EP1166317B1 Method and apparatus for prolonging the life of an x-ray target |
| 01/21/2004 | EP0792530B1 Low cost, high average power, high brightness solid state laser |
| 01/21/2004 | CN1470061A Radiotherapy apparatus and collimator set therefor |
| 01/21/2004 | CN1135569C Method for measuring distribution of charged particle beam and its relative method |
| 01/20/2004 | US6680482 Cartridge product irradiator |
| 01/20/2004 | US6680473 Atomic beam control apparatus and method |
| 01/15/2004 | WO2004006270A1 Apparatus and method for radiation therapy where the collimatorhelmet comprises slidable plates for controlling the collimator openings |
| 01/15/2004 | WO2004004832A1 Device for irradiating a target with a hadron-charged beam, use in hadrontherapy |
| 01/15/2004 | US20040008310 Apparatus and method for irradiating a substrate |
| 01/15/2004 | US20040007990 Light generation apparatus, exposure apparatus, and device manufacturing method |
| 01/15/2004 | US20040007671 Imaging X-ray detector based on direct conversion |
| 01/14/2004 | EP1381256A1 X-ray generator |
| 01/14/2004 | EP1380873A2 Apparatus and method for irradiating a substrate |
| 01/14/2004 | EP1380260A1 X-Ray Bone Densitometry |
| 01/13/2004 | US6678348 Integral lens for high energy particle flow, method for producing such lenses use thereof in analysis devices and devices for radiation therapy and lithography |
| 01/13/2004 | US6677600 EUV radiation source |
| 01/13/2004 | US6677597 Device and method for controlling a raster scanner in ion-beam therapy |
| 01/08/2004 | WO2004003964A2 Discharge radiation source, in particular uv radiation |
| 01/08/2004 | US20040005026 X-ray microscope apparatus |
| 01/08/2004 | US20040004062 Plasma-assisted joining |
| 01/07/2004 | EP1378782A2 Deformable mirror with passive and active actuators |
| 01/07/2004 | EP1378266A1 Charged particle beam apparatus |
| 01/07/2004 | EP1378265A1 Charged particle beam apparatus |
| 01/07/2004 | EP1378148A2 Method and apparatus for measuring the position, shape, size and intensity distribution of the effective focal spot of an x-ray tube |
| 01/07/2004 | EP1377998A1 A dual fluid cooling system for high power x-ray tubes |
| 01/07/2004 | CN1466860A Method and apparatus for generating X-ray or EUV radiation |
| 01/06/2004 | US6674829 Having as second radiation filter between first filter and output of radiation tube, plate of metallic lithium enriched in isotope li6, about 2 cm thick, which filters off neutrons in epithermal spectrum from low energetic neutron beams |
| 01/06/2004 | US6674229 Electron beam emitter |
| 01/02/2004 | EP1376105A2 Method and apparatus for X-ray imaging |
| 01/02/2004 | EP1374650A1 Method and device for producing extreme ultraviolet radiation and soft x-radiation |
| 01/02/2004 | EP1374274A1 X-ray irradiation apparatus |
| 01/02/2004 | EP1374273A1 Exit window for electron beam emitter |
| 01/02/2004 | EP1133784B1 X-ray tube providing variable imaging spot size |
| 01/01/2004 | US20040001295 Plasma generation and processing with multiple radiation sources |
| 01/01/2004 | US20040000650 Partcle beam irradiation system and method of adjusting irradiation apparatus |
| 12/30/2003 | US6670618 Method of checking an isocentre and a patient-positioning device of an ion beam therapy system |
| 12/25/2003 | US20030235972 Thermal processing method and thermal processing apparatus for substrated employing photoirradiation |
| 12/25/2003 | US20030235271 Collimation system for dual slice EBT scanner |
| 12/24/2003 | WO2003107037A2 Scatter spectra method for x-ray fluorescent analysis with optical components |
| 12/24/2003 | CN1463465A Discharge lamp and ultraviolet irradiation system and operation method therefor |
| 12/23/2003 | US6668037 X-ray projection exposure apparatus and a device manufacturing method |
| 12/23/2003 | US6667484 Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 12/18/2003 | WO2003105159A1 Scanner for x-ray inspection comprising a chopper wheel with differently sized apertures |
| 12/18/2003 | WO2003104848A2 Methods for sem inspection of fluid containing samples |
| 12/18/2003 | WO2003104846A2 A sample enclosure for a scanning electron microscope and methods of use thereof |
| 12/18/2003 | WO2003104829A1 Sensor and method for measuring a current of charged particles |
| 12/18/2003 | WO2003087867A3 Extreme ultraviolet light source |
| 12/18/2003 | WO2003085418A3 Chemical analysis of test objects using neutrons that are generated by concentrically accelerated deuterium ions |
| 12/18/2003 | US20030231739 3D X-ray system adapted for high speed scanning of large articles |
| 12/18/2003 | US20030230732 Ion irradiation system |
| 12/17/2003 | EP1371970A2 Method and apparatus of 3D X-ray imaging for high speed scanning of large articles |
| 12/17/2003 | EP1371390A1 Charged particle beam irradiation system and method of adjusting it |
| 12/17/2003 | EP1371079A2 Miniature x-ray device and method of its manufacture |
| 12/16/2003 | US6664554 Self-cleaning optic for extreme ultraviolet lithography |
| 12/16/2003 | US6664548 Ion source and coaxial inductive coupler for ion implantation system |
| 12/11/2003 | WO2003103346A1 X-ray tube |
| 12/10/2003 | EP1369897A2 Electron beam exposure apparatus and method, and device manufacturing method |
| 12/10/2003 | EP1369896A2 Electron beam exposure apparatus and method and device manufacturing method |
| 12/10/2003 | EP1369895A2 Electron beam exposure apparatus and method, and device manufacturing method |
| 12/10/2003 | CN2591710Y Scattering screen type electronic beam irradiation device |
| 12/10/2003 | CN1461426A EUV-transparent interface structure |
| 12/10/2003 | CN1461036A Ion source, operating method of ion source, and ion source system |
| 12/10/2003 | CN1460895A Processing method, mfg. method and processing device for semiconductor |
| 12/10/2003 | CN1130243C Electron beam radiation device |
| 12/09/2003 | US6661871 System and method for optimizing radiation treatment with an intensity modulating multi-leaf collimator by minimizing junctions |
| 12/09/2003 | US6661868 Radiation inspection apparatus and radiation inspection method |
| 12/09/2003 | US6659641 X-ray system having a moveable carrier attached to a patient table |
| 12/04/2003 | WO2003100814A1 Particle beam processing apparatus and materials treatable using the apparatus |
| 12/04/2003 | WO2003099380A1 Inverse planning for intensity-modulated radiotherapy |
| 12/04/2003 | WO2003043388A3 Article irradiation system with multiple beam paths |
| 12/04/2003 | US20030223547 X-ray inspection apparatus and method |
| 12/04/2003 | US20030223546 Gasdynamically-controlled droplets as the target in a laser-plasma extreme ultraviolet light source |
| 12/04/2003 | US20030223544 High-luminosity EUV-source devices for use in extreme ultraviolet (soft X-ray) lithography systems and other EUV optical systems |
| 12/04/2003 | US20030223543 Linear filament array sheet for EUV production |
| 12/04/2003 | US20030223542 Droplet target delivery method for high pulse-rate laser-plasma extreme ultraviolet light source |
| 12/04/2003 | US20030223541 Target steering system for EUV droplet generators |
| 12/04/2003 | US20030222225 High reflectivity to incident X-radiation independently of the angle of incidence and without significantly compromising optical performance. Also disclosed are X-ray optical systems and microlithography apparatus comprising such mirrors. |
| 12/03/2003 | EP1367867A1 Target steering system for a droplet generator in a EUV plasma source |
| 12/03/2003 | EP1367866A1 Droplet target delivery method for high pulse-rate laser-plasma extreme ultraviolet light source |
| 12/03/2003 | EP1367605A1 Multilayer-film reflective mirrors and optical systems comprising same |
| 12/03/2003 | EP1367445A1 Linear filament array sheet for EUV production |