Patents
Sitemap › G21 - Nuclear physics; Nuclear engineering › G21K - Techniques for handling particles or ionising radiation not otherwise provided for; Irradiation devices; Gamma ray or x-ray microscopes › G21K 5 - Irradiation devices
Patents for G21K 5 - Irradiation devices (9,144)
12/2003
12/03/2003EP1367441A2 Gasdynamically-controlled droplets as the target in a laser-plasma extreme ultraviolet light source
12/03/2003EP1367386A1 X-ray inspection apparatus and method
12/03/2003EP1046134B1 X-ray examination apparatus with dose control
12/03/2003CN2590132Y Built-in ion pump type scanning device
12/03/2003CN1459275A Diaphragm regulating method of computer lamination contrast and computer lamination contrast apparatus
12/02/2003US6658084 Illumination system with variable adjustment of the illumination
12/02/2003US6658083 Weight compensation apparatus, stage apparatus using the same, and exposure apparatus
12/02/2003US6657703 Exposure apparatus, maintenance method therefor, semiconductor device manufacturing method, and semiconductor manufacturing factory
12/02/2003US6657213 High temperature EUV source nozzle
12/02/2003US6657206 Ultraviolet lamp system and methods
12/02/2003US6657193 Scanning electron microscope
11/2003
11/27/2003WO2003098538A1 Method and apparatus for emission computed tomography using temporal signatures
11/27/2003WO2003098349A2 Illumination system for microlithography
11/27/2003WO2003098269A2 Irradiation facility control system
11/27/2003WO2002075747A3 Electron beam irradiation apparatus
11/27/2003US20030219098 Inverse planning for intensity-modulated radiotherapy
11/27/2003US20030219097 X-ray microscope having an X-ray source for soft X-ray
11/27/2003US20030219092 Method for diaphragm regulation in a computed tomography apparatus, and computed tomography apparatus with diaphragm regulation
11/27/2003US20030218429 Ion source, method of operating the same, and ion source system
11/27/2003US20030218414 Electron accelerator having a wide electron beam
11/27/2003US20030218182 Strees-controlled dielectric integrated circuit
11/27/2003US20030218142 Irradiation facility control system
11/26/2003EP1365636A1 Extreme ultraviolet generating device, exposure device using the generating device, and semiconductor manufacturing method
11/26/2003EP1364375A1 Radiotherapeutic apparatus
11/26/2003EP1364231A2 A self-cleaning optic for extreme ultraviolet lithography
11/25/2003US6653641 Bulk material irradiation system and method
11/25/2003US6653632 Scanning-type instrument utilizing charged-particle beam and method of controlling same
11/25/2003US6653628 Electron spectroscopic analyzer using X-rays
11/25/2003US6652143 Method and apparatus for measuring the position, shape, size and intensity distribution of the effective focal spot of an x-ray tube
11/20/2003WO2003096774A1 Plasma catalyst
11/20/2003WO2003096773A1 Plasma-assisted joining
11/20/2003WO2003096772A1 Plasma-assisted decrystallization
11/20/2003WO2003096771A1 Plasma generation and processing with multiple radiation sources
11/20/2003WO2003096770A1 Plasma-assisted coating
11/20/2003WO2003096768A1 Plasma assisted dry processing
11/20/2003WO2003096764A1 Method and arrangement for producing radiation
11/20/2003WO2003096763A1 X-ray generator
11/20/2003WO2003096749A1 Plasma-assisted heat treatment
11/20/2003WO2003096747A2 Plasma heating apparatus and methods
11/20/2003WO2003096383A2 Cavity shapes for plasma-assisted processing
11/20/2003WO2003096382A2 Methods and apparatus for plasma processing control
11/20/2003WO2003096381A2 Plasma-assisted processing in a manufacturing line
11/20/2003WO2003096380A2 Plasma-assisted nitrogen surface-treatment
11/20/2003WO2003096370A1 Methods and apparatus for forming and using plasma jets
11/20/2003WO2003096369A1 Plasma-assisted gas production
11/20/2003WO2003095807A1 Plasma-assisted engine exhaust treatment
11/20/2003WO2003095699A1 Plasma-assisted enhanced coating
11/20/2003WO2003095591A1 Plasma-assisted doping
11/20/2003WO2003095130A1 Plasma-assisted sintering
11/20/2003WO2003095090A1 Plasma-assisted carburizing
11/20/2003WO2003095089A1 Plasma-assisted formation of carbon structures
11/20/2003WO2003095058A2 Plasma-assisted multi-part processing
11/20/2003WO2003049499A3 Ultraviolet radiation generation with flame and electrical discharge
11/20/2003WO2003039213A3 3D STEREOSCOPIC X-ray SYSTEM WITH TWO DIFFERENT OBJECT TRAJECTORIES
11/20/2003US20030216014 Monatomic boron ion source and method
11/20/2003CA2485195A1 Plasma catalyst
11/19/2003EP1363138A2 Real time monitoring of electron beam radiation dose
11/18/2003US6649921 Apparatus and method providing substantially two-dimensionally uniform irradiation
11/18/2003US6649859 Electron beam irradiation system and electron beam irradiation method
11/18/2003US6649225 Treating moving carbon fibers using high intensity ultraviolet light between 160 and 500 nm without higher wavelengths and ozone; treatment enhances strength and bondability of the fiber
11/18/2003US6648976 Apparatus and method for plasma processing
11/18/2003US6648973 Process for the treatment of a fiber
11/13/2003WO2003092813A1 Method for performing in vivo dosimetry
11/13/2003WO2003020196A3 Antiprotons for imaging and termination of undesirable cells
11/13/2003US20030210760 Method and apparatus for emission computed tomography using temporal signatures
11/13/2003US20030210002 Deceleration of hadron beams in synchrotrons designed for acceleration
11/13/2003US20030209677 Integral lens for high energy particle flow, method for producing such lenses and use thereof in analysis devices and devices for radiation therapy and lithography
11/13/2003US20030209673 Electrooptic system array, charged-particle beam exposure apparatus using the same, and device manufacturing method
11/12/2003EP1360550A1 Collimator arrangement
11/11/2003US6647094 X-ray source provided with a liquid metal target
11/11/2003US6647088 Production of a dense mist of micrometric droplets in particular for extreme UV lithography
11/11/2003US6647086 X-ray exposure apparatus
11/11/2003US6646382 Microminiature microwave electron source
11/11/2003US6646278 Irradiating device
11/11/2003US6645231 Apparatus for the controlled generation of ultraviolet rays for focused micro stimulation of cells
11/06/2003WO2003092056A1 Exposure apparatus and device fabrication method using the same
11/06/2003WO2003092033A1 Polynuclear metal molecular beam apparatus
11/06/2003WO2003091699A2 Gas-target neutron generation and applications
11/06/2003US20030205680 Ion source and coaxial inductive coupler for ion implantation system
11/05/2003EP1359602A2 Detection apparatus, detection method and electron beam irradiation apparatus
11/05/2003EP1358657A1 Gantry system for transport and delivery of a high energy ion beam in a heavy ion cancer therapy facility
11/05/2003EP1358656A1 Apparatus for generating and selecting ions used in a heavy ion cancer therapy facility
11/05/2003CN1454314A X-ray measuring and testing system
11/04/2003US6642527 Lamps arranged diagonally to flow direction; improved hydrodynamics; lower maintanence cost
10/2003
10/30/2003US20030202449 Detection apparatus, detection method and electron beam irradiation apparatus
10/30/2003US20030201737 Method for the stabilization of the radiation output of a gas discharge-coupled radiation source in pulsed operation
10/30/2003US20030201401 Article irradiation system with multiple beam paths
10/30/2003US20030201400 Article irradiation system with multiple beam paths
10/30/2003US20030201399 Device and method for photoengraving integrated circuits
10/30/2003US20030201397 Method and apparatus for simultaneously depositing and observing materials on a target
10/30/2003DE10161705C2 Anordnung zur Bestrahlung von Objekten mit einer langgestreckten Strahlungsquelle sowie Vorrichtung zu deren Lagerung und Energieübertragung Arrangement for irradiation of objects with an elongated radiation source and apparatus for its storage and energy transfer
10/29/2003EP1356770A1 Method and apparatus of modulating the filtering of radiation during radiographic imaging
10/29/2003EP1356495A2 X-ray tube for ct applications
10/29/2003EP1355678A2 System for, and method of, irradiating article with x-ray beam
10/28/2003US6639969 Open type X-ray generating apparatus
10/28/2003US6639320 Reticle for creating resist-filled vias in a dual damascene process
10/28/2003US6639234 Method for checking beam steering in an ion beam therapy system
10/28/2003US6639221 Annular illumination method for charged particle projection optics
10/23/2003WO2003087867A2 Extreme ultraviolet light source
10/23/2003WO2003043026A3 Article irradiation system shielding
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