Patents
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
02/1996
02/21/1996EP0697632A2 Chemically amplified radiation-sensitive composition
02/21/1996EP0697631A1 Photosensitive recording material, photosensitive recording medium, and process for producing hologram using this photosensitive recording medium
02/21/1996EP0697630A1 X-ray mask support
02/21/1996EP0697025A1 Compositions of matter
02/21/1996CN1117148A Method of providing sacrificial spacer for micro-mechanical devices
02/20/1996US5493402 EGA alignment method using a plurality of weighting coefficients
02/20/1996US5493184 Electrodeless lamp with improved efficiency
02/20/1996US5493177 For forming a microstructure
02/20/1996US5492987 Reacting photoinitiator group substituted unsaturated monomer with fluorine substituted unsaturated monomer
02/20/1996US5492942 Pyran derivative, photosensitive resin composition, and hologram recording medium using it
02/20/1996US5492861 Process for applying structured layers using laser transfer
02/20/1996US5492793 Photoresist composition
02/20/1996US5492791 Photosensitive material and method for making color-proofing films
02/20/1996US5492790 Gas sensors, color filters
02/20/1996US5492789 Process for producing microcapsules containing a diazonium salt compound and a photofixation thermal recording material employing the same
02/18/1996CA2155045A1 Off axis alignment system for scanning photolithography
02/15/1996WO1996004592A1 Method of repetitively imaging a mask pattern on a substrate
02/15/1996WO1996004577A1 High resolution x-ray dispersive and reflective structure
02/15/1996WO1996004346A1 Acrylic syrup curable to a crosslinked viscoelastomeric material
02/15/1996CA2196169A1 Acrylic syrup curable to a crosslinked viscoelastomeric material
02/14/1996EP0696816A2 Emission device with a cadmium lamp
02/14/1996EP0696762A1 Exposing apparatus with mask alignment system and method of aligning, exposing, and transferring work
02/14/1996EP0696761A1 Flexographic printing plates from photocurable elastomer compositions
02/14/1996EP0696518A1 Heat sensitive ink sheet and image forming method
02/14/1996EP0696515A1 Ink jet printing process
02/14/1996EP0696245A1 Laser-induced thermal transfer process
02/14/1996CN2220084Y Enlarging photomechanical copying apparatus
02/14/1996CN1116731A 曝光掩模 Exposure mask
02/14/1996CN1116730A Method for making photograph name card
02/13/1996US5491707 Low cost, high average power, high brightness solid state laser
02/13/1996US5491534 Exposure apparatus and microdevice manufacturing method using the same
02/13/1996US5491047 Method of removing a silylated or germanium implanted photoresist
02/13/1996US5491046 Method of imaging a lithographic printing plate
02/13/1996US5490896 Etching resistance; semiconductor devices
02/08/1996WO1996003641A1 Scanning probe microscope assembly
02/08/1996DE19527681A1 Irradiation projection method for mask exposure in e.g. DRAM chip prodn.
02/08/1996DE19525777A1 Dye soln. for non-dampening silicone rubber layered printing plates
02/08/1996DE19521390A1 Focusing method for step and repeat photoengraving on semiconductor chips using miniature projection lens
02/08/1996DE19519856A1 Verfahren und Vorrichtung zum Abtrennen eines Films Method and apparatus for separating a film
02/07/1996EP0695971A1 Photosensitive lithographic printing plate
02/07/1996EP0695740A1 Quinonediazine sulfonic acid esters and positive photoresist compositions comprising the same
02/07/1996EP0695438A1 Method and apparatus for process control
02/07/1996EP0695437A1 Photocurable compositions
02/06/1996US5489804 Flexible preformed planar structures for interposing between a chip and a substrate
02/06/1996US5489678 Photolabile nucleoside and peptide protecting groups
02/06/1996US5489623 Applying polymer to surface, exposing to incident photonicradiation to render portions less soluble or dispersible
02/06/1996US5489621 Process for forming colored partial picture element and light-shielding light-sensitive resin composition used therefor
02/06/1996US5489505 On a support atleast one silver halide emulsion and atleast one methine dye; storage stability and high sensitivity
02/06/1996US5489499 Photosensitive trihalomethyl-s-triazine compound and photopolymerizable composition
02/06/1996US5489361 Monitoring electrical characteristics between two electrodesin etchant bath
02/01/1996WO1996002491A1 Positive photoactive compounds based on 2,6-dinitrobenzyl groups
02/01/1996DE19527683A1 Verfahren zur Herstellung einer Fotomaske für die Fertigung einer Halbleitervorrichtung A process for the manufacture of a photomask for manufacturing a semiconductor device
02/01/1996DE19520741A1 Developer for positive lithographic printing plates
01/1996
01/31/1996EP0694817A2 An exposure apparatus
01/31/1996EP0694811A1 Image receiving layer for use in a silver salt diffusion transfer process
01/31/1996EP0693978A1 Removal of surface contaminants by irradiation
01/31/1996CN2218647Y Positioning exposure device for continuous copying and printing board mark
01/31/1996CN1115958A Method and device for peeling a film
01/31/1996CN1115876A Method of optical lithography using phase shift masking
01/31/1996CN1115875A Ablative flashlamp imaging
01/31/1996CN1115874A Colour ink-jetting plate-making system
01/31/1996CN1115871A Optical guiding device with unit for driving lens system for temperature revising in optical axis
01/30/1996US5488514 Method of mounting an optical element
01/30/1996US5488246 Semiconductor device and method of manufacturing the same
01/30/1996US5488229 Deep ultraviolet microlithography system
01/30/1996US5488182 Phenol compounds containing methoxymethyl group or hydroxymethyl group
01/30/1996US5487967 Multilayer element for images with silanes with exposure and development
01/30/1996US5487966 Photosensitive compositions
01/30/1996US5487852 Polyamides, polyester ethers or polyimides for sheets
01/30/1996CA2129198A1 Photosensitive polymer composition
01/30/1996CA2070257C Optical pellicle holder
01/25/1996WO1996002021A1 Original form for lithographic plate and process for preparing lithographic plate
01/25/1996WO1996002020A1 Method of removing surface stickiness of relief printing plate made from photosensitive resin
01/25/1996DE19525221A1 Light-sensitive material useful as photoresist with short wavelength light
01/24/1996EP0693711A1 Initiating the delamination of an image suited for dry processing
01/24/1996CN1115496A Anti-reflective layer and method for manufacturing semiconductor device using the same
01/24/1996CN1115419A Pattern alignment mark of semiconductor device
01/24/1996CN1115416A Reticle and method for measuring rotation error of reticle by use of the reticle
01/24/1996CN1115415A A reticle and a method for measuring blind setting accuracy using the same
01/24/1996CN1115414A Photomask for the measurement of resolution of exposure equipment
01/24/1996CN1115413A Reticle
01/24/1996CN1115412A Method for fabricating a phase shift mask
01/24/1996CN1115410A Photo mask provided with development rate measuring pattern and method for measuring development rate uniformity
01/24/1996CN1115409A Method for forming photoresist patterns
01/23/1996US5486919 Inspection method and apparatus for inspecting a particle, if any, on a substrate having a pattern
01/23/1996US5486896 Exposure apparatus
01/23/1996US5486851 Illumination device using a pulsed laser source a Schlieren optical system and a matrix addressable surface light modulator for producing images with undifracted light
01/23/1996US5486701 Method and apparatus for measuring reflectance in two wavelength bands to enable determination of thin film thickness
01/23/1996US5486449 Photomask, photoresist and photolithography for a monolithic IC
01/23/1996US5486447 Heat resistance, storage stability
01/23/1996US5486424 Silylated photoresist layer and planarizing method
01/23/1996US5486267 Method for applying photoresist
01/23/1996CA1337979C Method of making electrically conductive patterns
01/18/1996DE4424236A1 Process for structuring a component surface, esp. a plate, made of a polymer
01/18/1996DE19525745A1 Verfahren zur Bildung eines Abdeckungsmusters A method for forming a resist pattern
01/17/1996EP0692741A1 Device for making a printing screen
01/17/1996EP0692740A1 Process and apparatus for the manufacture of an optical component
01/17/1996EP0691990A1 Amphoteric copolymer derived from vinylpyridine & acetoxystyrene
01/17/1996CN1115187A Waterless lithographic plate
01/17/1996CN1030739C Autodeposition emulsion and method of using thereof to selectively protect metallic surfaces