Patents
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
04/1996
04/03/1996EP0704763A1 Photoactive compound, preparation thereof and use thereof in resist for x-ray or electron beam lithography
04/03/1996EP0704762A1 Resist material and pattern formation
04/03/1996EP0704761A1 Process for forming a colored image
04/03/1996EP0704718A1 Positive photosensitive composition for forming lenses
04/03/1996EP0704145A1 Method of manufacturing a device, by irradiating some parts of the surface of the device directly through a mask, and other parts indirectly through the mask and via a reflecting surface, thereby producing a pattern
04/03/1996EP0703937A1 Stabilized cationically-curable compositions
04/03/1996EP0465669B1 Photocurable resin composition
04/03/1996CN1119731A Temperature control apparatus and method with recirculated coolant
04/03/1996CN1119584A Device for producing a screen printing stencil
04/02/1996USH1525 Method and system for high speed photolithography
04/02/1996US5504830 Optical fibers
04/02/1996US5504793 Magnification correction for 1-X proximity X-Ray lithography
04/02/1996US5504627 Projection exposure system
04/02/1996US5504596 Exposure method and apparatus using holographic techniques
04/02/1996US5504515 Laser exposure apparatus for printing forms to be imagewise exposed
04/02/1996US5504407 Stage driving system
04/02/1996US5504391 Excimer lamp with high pressure fill
04/02/1996US5504339 Method of repairing a pattern using a photomask pattern repair device
04/02/1996US5504338 Apparatus and method using low-voltage and/or low-current scanning probe lithography
04/02/1996US5504035 Process for solder ball interconnecting a semiconductor device to a substrate using a noble metal foil embedded interposer substrate
04/02/1996US5503964 Comprises step of evenly hardening resist by treating it in a far-ultraviolet-ray irradiation process and a baking process before injecting a high dose of ions
04/02/1996US5503961 Applying photosensitive polyimide precursor on substrate, exposing, inhibiting photosensitivity, applying second layer of precursor, exposing, developing
04/02/1996US5503959 Lithographic technique for patterning a semiconductor device
04/02/1996US5503958 Method for forming a circuit pattern
04/02/1996US5503950 Reflection type mask and manufacture of microdevices using the same
04/02/1996US5503902 Light control material
04/02/1996US5503897 Shaped articles and method of making same
04/02/1996US5503751 Treatment with chemicals, precipitation, filtration
04/02/1996US5503732 Method for manufacturing a substrate having window-shaped and frame-shaped coating films on the surface thereof
04/02/1996US5503708 Method of and apparatus for removing an organic film
04/02/1996US5503074 Photosensitive lithographic printing plate requiring no fountain solution
04/02/1996US5502899 Staging apparatus
03/1996
03/31/1996CA2158915A1 Liquid photoimageable resist
03/28/1996WO1996009571A1 Protective mask for pellicle
03/28/1996WO1996009289A1 Photopolymerizable composition containing squarylium compound
03/28/1996WO1996009128A1 Selective removal of material by irradiation
03/28/1996WO1996005249A3 Acrylic syrup curable to a crosslinked viscoelastomeric material
03/28/1996DE4435022A1 Grey tone mask for lithographic micro-structuring of optical device
03/28/1996DE4434009A1 Stepped microstructure arrangement with preformed edge surfaces not damaged during reactive ion etching
03/28/1996CA2200199A1 Selective removal of material by irridiation
03/28/1996CA2176931A1 Photopolymerizable composition containing squarylium compound
03/27/1996EP0703500A1 Process for the manufacture of a planographic printing form
03/27/1996EP0703499A1 Top coats for shoot and run printing plates
03/27/1996EP0703498A1 Photosensitive resin composition and method for forming a photoresist pattern
03/27/1996EP0702806A1 Method of photolithographically metallizing at least the inside of holes arranged in accordance with a pattern in a plate of an electrically insulating material
03/27/1996EP0624263B1 Method for the dry development of a silicon-containing lacquer film sensitive to uv and/or electron-beam radiation
03/27/1996EP0482051B1 Laser machining
03/27/1996CN1119404A Method and apparatus for removing film
03/27/1996CN1119340A Method for forming resist patterns
03/27/1996CN1119323A Method of manufacturing an optical information carrier, arrangement for carrying out the method, and optical information carrier obtained by means of the method
03/26/1996US5502654 Method for analyzing light intensity distribution in projection systems
03/26/1996US5502581 Hologram manufacturing method and apparatus
03/26/1996US5502313 Exposure apparatus and method having a measuring unit for measuring distances between a mask surface and a projection optical system
03/26/1996US5502311 Method of and apparatus for detecting plane position
03/26/1996US5501944 Ablative imaging by proximity lithography
03/26/1996US5501943 Tetramethoxysilane, tetraisopropoxy titanate
03/26/1996US5501942 Crosslinkable acrylate polymers
03/26/1996US5501941 Polymers for microelectronics from hexafluoroisopropylidenebis phthalic acid, polymethylphenylenediamines and benzophenone tetracarboxylic acids
03/26/1996US5501940 Process for protecting a binary image with a siloxane durable layer that is not removable by hexane, isopropanol or water
03/26/1996US5501939 Spectrally sensitized prefogged direct-positive silver halide photographic material
03/26/1996US5501936 Positive-working quinonediazide photoresist composition containing a cyclohexyl-substituted triphenylmethane compound
03/26/1996US5501870 Method and apparatus for hydrophobic treatment
03/26/1996US5501824 Thermal stereolithography
03/26/1996US5501150 Process for the production of a printing plate by inkjet
03/26/1996CA1338178C Positive and negative working radiation sensitive mixtures and production of relief patterns
03/26/1996CA1338177C Radiation sensitive mixture and production of relief patterns
03/21/1996WO1996008751A1 Photolithographic method of producing structural features
03/21/1996WO1996008750A1 Photolithographic method of producing structural features
03/21/1996WO1996008749A2 Method of producing a three-dimensional component or group of components
03/21/1996WO1996008525A1 Process for producing photosensitive resin and liquid photosensitive resin composition
03/21/1996WO1996008472A1 Negative-type radiation-sensitive resin composition and method of forming resin pattern therefrom
03/21/1996WO1996008360A1 Process for producing a three-dimensional object
03/21/1996DE4433118A1 Verfahren zur Herstellung eines dreidimensionalen Objektes A process for preparing a three dimensional object
03/20/1996EP0702272A1 Exposure apparatus and exposure method
03/20/1996EP0702271A1 Positive working printing plate
03/20/1996EP0702270A2 Photosensitive polyimide resin composition
03/20/1996EP0702269A1 Process for producing a cutting die
03/20/1996EP0702042A1 Epoxy resin, process for producing the same, and photocurable resin composition and powder coating resin composition both containing said resin
03/20/1996EP0504431B1 Method of removing organic coating
03/20/1996CN1118936A Method for forming submicroscopic patterns
03/20/1996CN1118886A Waterborne photoresists having associate thickeners
03/19/1996US5500453 (Oxo)sulfonium complex, polymerizable composition containing the complex, and method of polymerizing the composition
03/19/1996US5500327 Photopolymerization
03/19/1996US5500326 Method of producing master and working pattern plates for etching and photolithographic apparatus therefor
03/19/1996US5500315 An article comprising an image pattern on a substrate
03/19/1996US5500073 Semiconductor wafers, electrodes in etch bath but not contacting wafers, monitoring impedance, capacitance, resistance, etc
03/19/1996US5499733 Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment
03/14/1996WO1996007954A1 Microstructures and methods for manufacturing microstructures
03/14/1996WO1996007662A1 Novel acylphosphine oxides
03/14/1996DE4442712C1 Filtration of photographic developer solution
03/14/1996CA2198865A1 Microstructures and methods for manufacturing microstructures
03/14/1996CA2197787A1 Novel acylphosphine oxides
03/13/1996EP0701174A1 Alignment mark and exposure process using the same
03/13/1996EP0701173A1 Method for producing lithographic plates with imaging elements comprising a photosensitive acid precusor
03/13/1996EP0701172A1 A method for making imaging elements suitable for use in the silver salt diffusion transfer process
03/13/1996EP0701171A1 Resist compositions
03/13/1996EP0701170A2 Photosensitive lithographic printing plate requiring no fountain solution and process for producing the same
03/13/1996EP0701169A1 Radiation-sensitive compositions containing fully substituted novolak polymers
03/13/1996EP0700909A1 Photosensitive bis(halomethyloxadiazole) compound and photosensitive transfer sheet using the same
03/13/1996EP0700752A1 Method of patterning a coating on a substrate