Patents
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
03/1996
03/13/1996EP0700534A1 Partially polymerized resins
03/13/1996EP0641250B1 Inorganic membrane for microfiltration, and a process for production of such an inorganic membrane
03/13/1996CN1118629A Colored photosensitive resin composition
03/13/1996CN1118457A Photo mask, method for producing the same, pattern forming method, method of manufacturing semiconductor device and mask pattern design system
03/12/1996US5499282 Efficient narrow spectral width soft-X-ray discharge sources
03/12/1996US5499137 Exposure method and apparatus therefor
03/12/1996US5499100 Photo-lithography apparatus and method of correcting off-telecentricity of the apparatus caused by shift of effective illumination source
03/12/1996US5499099 Alignment method and alignment system
03/12/1996US5499076 For projecting a pattern
03/12/1996US5498878 Method and apparatus for detecting positional deviation by using diffraction gratings with a compensation delay determining unit
03/12/1996US5498877 Method of manufacturing semiconductor device using measurement mark pattern
03/12/1996US5498772 Reversible heat-sensitive recording material
03/12/1996US5498769 Method for thermally treating resist film and forming undercut pattern
03/12/1996US5498765 Positive photoresist composition containing photoacid generator and use thereof
03/12/1996US5498641 Photopolymerization
03/12/1996US5498579 Method of producing semiconductor device layer layout
03/12/1996US5498514 Lithographic double-coated patterning plate with undercoat levelling layer
03/12/1996US5498506 Positive-acting radiation-sensitive mixture and recording material produced therewith
03/12/1996US5498504 Process for the preparation of an image using only dry steps
03/12/1996US5498501 Manufacturing semiconductors
03/12/1996US5498500 Overlay measurement mark and method of measuring an overlay error between multi patterns in a semiconductor device using the measurement mark
03/12/1996US5498498 Photosensitive resin composition used in a method for forming a light-shielding film
03/12/1996US5498449 Photoresist film coating method
03/12/1996US5498308 Plasma asher with microwave trap
03/12/1996US5498118 Apparatus for and method of carrying a substrate
03/07/1996WO1996007075A1 Corrector plate correction of extant imaging systems for approaching diffraction limit
03/07/1996WO1996006694A1 Surface modification processing of flat panel device substrates
03/07/1996WO1996006693A1 Photo reactive cleaning of critical surfaces in cd manufacturing
03/07/1996WO1996006692A1 Cleaning of printed circuit boards
03/07/1996DE19532358A1 Alkoxyphenyl-substituierte Bisacylphosphinoxide Alkoxyphenyl-substituted bisacylphosphine
03/06/1996EP0699961A1 Photosensitive composition, photosensitive rubber plate and process for producing the plate, and flexographic plate and process for producing the plate
03/06/1996EP0699960A1 Photosensitive composition
03/06/1996EP0699959A1 A bislactone compound and a process for producing the same
03/06/1996EP0648349B1 Solid state imager
03/06/1996CN2221792Y Synchronous optical overprinting synthetic equipment for picture, characters image
03/06/1996CN1118200A Support element for an automatic loading tray of an exposure unit for silicon wafers
03/06/1996CN1118193A Novel matrix resin for high-temperature stable photoimageable compositions
03/06/1996CN1117921A Lithographic printing plates
03/06/1996CN1031227C Welding mask coating capable of exposure-imaging
03/05/1996US5497008 Use of a Kumakhov lens in analytic instruments
03/05/1996US5496903 Photpolymerizable coating
03/05/1996US5496685 Manufacturing a printing plate
03/05/1996US5496684 Photosensitive compositions and elements for flexographic printing
03/05/1996US5496683 Method of and apparatus for optically shaping photo-setting resin
03/05/1996US5496682 Three dimensional sintered inorganic structures using photopolymerization
03/05/1996US5496679 Imaging element and method for making lithographic printing plates according to the silver salt diffusion transfer process
03/05/1996US5496678 Photosensitive compositions containing a polymer with carboxyl and hydroxyphenyl groups, a compound with multiple ethylenic unsaturation and a photo-acid generator
03/05/1996US5496677 Presensitized plate for use in making lithographic printing plate comprising a mat layer and coating layer on the back face of the substrate
03/05/1996US5496669 System for detecting a latent image using an alignment apparatus
03/05/1996US5496668 Formation of microstructures using a preformed photoresist sheet
03/05/1996US5496667 Forming film of x-ray absorber by sputtering in inert gas containing nitrogen using a target of tungsten with or without added titanium; lithography; low internal stress, high dimensional accuracy
03/05/1996US5496666 Contact hole mask for semiconductor fabrication
03/05/1996US5496504 Halomethyl-1,3,5-triazines containing a monomeric moiety
03/05/1996US5496491 For photoresists, amine salt reaction product
03/05/1996US5496438 Method of removing photo resist
03/05/1996US5496432 Method and device for peeling a film
03/05/1996CA2050070C Optical memory device
03/03/1996CA2157342A1 Alkoxyphenyl-substituted bisacylphosphine oxides
02/1996
02/29/1996WO1996006382A1 Process and apparatus for rejuvenating developer in printing plate development
02/29/1996WO1996006369A2 Improving resolution in scanned optical systems
02/29/1996WO1996006121A1 Metal ion reduction in novolak resin solution using an anion exchange resin
02/29/1996WO1996005915A1 Emulsion coating apparatus
02/29/1996DE19530856A1 Vorrichtung zum Laden und Entladen einer Zwischenmaske Apparatus for loading and unloading a reticle
02/29/1996DE19530545A1 Aromatic hydroxy-carboxylic acid resins, partial ester(s) and metal chelates
02/29/1996CA2197224A1 Process and apparatus for rejuvenating developer in printing plate development
02/28/1996EP0698916A2 Method of optical lithography using phase shift masking
02/28/1996EP0698826A1 Off axis alignment system for scanning photolithography
02/28/1996EP0698825A1 An energy sensitive resist material and a process for device fabrication using the resist material
02/28/1996EP0698824A2 Pattern formation method and method and apparatus for production of a semiconductor device using said method
02/28/1996EP0698823A1 Antireflective coating for microlithography
02/28/1996EP0698822A2 Lithographic printing plate precursor with a flexible support and method for making a lithographic printing plate therewith
02/28/1996EP0698821A1 High resolution phase edge lithography without the need for a trim mask
02/28/1996EP0698498A2 Device for making stamps
02/28/1996EP0698233A1 Process and device for coating printed circuit boards
02/28/1996EP0698232A1 Process and device for coating printed circuit boards
02/28/1996EP0698230A1 Chemically amplified photoresist
02/28/1996EP0697967A1 Thermosensitive recording material
02/28/1996CN1117652A Vernier
02/28/1996CN1117599A Developer for photoresist layers
02/28/1996CN1031116C Solid imaging system using differential tension elastomeric film
02/28/1996CN1031115C Improved solid imaging method and apparatus
02/28/1996CN1031114C Method and apparatus for fabricating three dimensional objects from photoformed precursor sheets
02/27/1996US5495328 Apparatus and method for calibrating and normalizing a stereolithographic apparatus
02/27/1996US5495280 Illumination device using a pulsed laser source a Schlieren optical system, and a matrix addressable surface light modulator for producing images with undiffracted light
02/27/1996US5495279 Method and apparatus for exposure of substrates
02/27/1996US5495029 Photopolymerizable; coatings, adhesives, photoresists, solder masks
02/27/1996US5494944 Hardenable composition and its use
02/27/1996US5494943 A two-component initiator system for curing an epoxy monomer comprising a metallocene catalyst and a stabilizer; storage stability; coatings; adhesives; abrasive binders; magnetic recording media
02/27/1996US5494785 High ortho-ortho bonded novolak binder resins and their use in a process for forming positive resist patterns
02/27/1996US5494784 Method of pattern formation utilizing radiation-sensitive resin composition containing monooxymonocarboxylic acid ester solvent
02/27/1996US5494780 Accurately forming circuit patterns of electroconductive materials on three-dimensiuonal molded substrates
02/27/1996US5494777 Radiation sensitive resin composition
02/27/1996US5494774 Microporous crosslinked silicated surface comprising a colloidal silica crosslinked by a coupling agent; photopolymer layer
02/27/1996US5494773 Positive photoresist composition comprising a novolak resin having a cycloalkylidene-bisphenol group
02/27/1996US5494618 Increasing the useful range of cationic photoinitiators in stereolithography
02/27/1996CA1338095C Photopolymerizable composition
02/24/1996CA2156781A1 Print making device
02/22/1996WO1996005539A1 Water-less lithographic plates
02/22/1996WO1996005249A2 Acrylic syrup curable to a crosslinked viscoelastomeric material
02/22/1996DE19527314A1 Fabrication of silicon membrane with predefined parameters