Patents for G03C 5 - Photographic processes or agents therefor; Regeneration of such processing agents (11,726)
05/2009
05/26/2009US7537871 Method of manufacturing semiconductor device
05/26/2009US7537869 Avoiding image macro-flare by determining the variations of lengths of parallel lines of transparency of two patterns adjacent or overlapping the photoresist film; the second has a larger transparent region than the first which has parallel lines of transparent regions of the same length
05/26/2009US7537866 Patterning a single integrated circuit layer using multiple masks and multiple masking layers
05/26/2009US7537864 Hole pattern design method and photomask
05/26/2009US7537800 Method for producing light-transmitting electromagnetic wave-shielding film, light-transmitting electromagnetic wave-shielding film and plasma display panel using the shielding film
05/21/2009US20090130614 Development device and development method
05/21/2009US20090130613 Silver Halide color photographic light-sensitive material and color image-forming method
05/21/2009US20090130591 Antireflective Coating Composition and Process Thereof
05/21/2009US20090130569 Adjustable Mask Blank Structure for an Euv Phase-Shift Mask
05/20/2009EP2059853A2 Method for separating optical and resist effects in process models
05/19/2009US7534533 Polarization analyzing system, exposure method, and method for manufacturing semiconductor device
05/19/2009US7534369 Method of producing liquid crystal emulsion compositions
05/14/2009US20090123881 Photothermographic material and image formation method
05/13/2009CN101432658A Method and system for controlling critical dimensions of structures formed on a wafer in semiconductor processing
05/12/2009US7533022 Printed media with machine readable markings
05/12/2009US7532307 Focus determination method, device manufacturing method, and mask
05/12/2009US7531292 Method for producing disc overlay proofs
05/12/2009CA2292745C Separating metal ions absorbed on a resin and installation for recycling photographic effluents including an exchanger and an electrolysis vessel
05/07/2009WO2006060504A3 Tri-tone trim mask for alternating phase-shift photolithography
05/07/2009US20090114430 Method for patterning of conductive polymer
05/07/2009US20090114334 Method for manufacturing metallic panel having ripple luster
05/05/2009US7527922 Selenium-sensitized silver chloride content of 90 mole % or above; N-(o-oxyphenyl)-alpha-(cyclo)alkanoyl-alpha-1-cyclicimidoacetamide yellow dye-forming coupler; magenta and cyan dye-forming couplers; light-insensitive hydrophilic colloid layer
05/05/2009US7527921 Treating the pattern with a vapor of ozone and water to remove a hydrophobic group from the photoresist resin, and cleaning with and acid or base to render the pattern water soluble; photoresist is suitable for argon fluoride laser
05/05/2009US7527442 Process for forming resist pattern, and resist coating and developing apparatus
04/2009
04/30/2009WO2007067267A3 Seamless exposure with projection system comprises array of micromirrors with predefined reflectivity variations
04/30/2009US20090111055 Method of forming an image having multiple phases
04/30/2009US20090111037 Protective overcoat transfer compensation
04/30/2009US20090110912 Method for producing light-transmitting electromagnetic wave-shielding film, light-transmitting electromagnetic wave-shielding film and plasma display panel using the shielding film
04/30/2009US20090110878 Methods for fabricating sub-resolution alignment marks on semiconductor structures and semiconductor structures including same
04/30/2009US20090110151 X-ray window and resistive heater
04/28/2009US7524621 Method of preparing silver carboxylate soaps
04/28/2009US7524620 For forming a fine pattern in fabrication of semiconductor integrated circuit devices
04/28/2009US7524615 High speed violet or ultraviolet laser sensitive; exposed plate is preferably developed on a processor with an alkaline developer coupled with a replenisher having higher pH
04/28/2009US7524607 Water soluble negative tone photoresist
04/28/2009US7524595 applies a fluid material onto a substrate and then conducts at least two curing steps; coating with no hole over the overlay mark can improve accuracy of the overlay measurement of lithography
04/28/2009US7524593 semi-transparent film, capable of forming a resist in which a convex portion is not formed in an end portion and the end portion has gentle shape
04/28/2009US7524591 Photomask and manufacturing method thereof, fabrication process of an electron device
04/23/2009US20090105071 using a donor element in a radiation-induced thermal transfer process, an assemblage is provided that includes a donor element and a receiver element, wherein the donor element has a support layer and a transfer layer
04/23/2009US20090104572 Composition and method for providing a patterned metal layer having high conductivity
04/23/2009US20090104564 Patterning process
04/23/2009US20090104549 Method for error reduction in lithography
04/16/2009WO2007035193A3 System and method for increasing efficiency and quality for exposing images on celluloid or other photo sensitive material
04/16/2009WO2005036264A3 Photomask having an internal substantially transparent etch stop layer
04/16/2009US20090098490 Radiation-Sensitive, Wet Developable Bottom Antireflective Coating Compositions and Their Applications in Semiconductor Manufacturing
04/16/2009US20090098473 Photomask, method of lithography, and method for manufacturing the photomask
04/16/2009US20090096676 Durable wideband antenna fabricated on low resistivity silicon substrate
04/16/2009US20090096090 Photolithography Process and Photomask Structure Implemented in a Photolithography Process
04/14/2009US7517632 Silver paste composition, method of forming conductive pattern by using the same, and the conductive pattern formed
04/14/2009US7517621 first point and the second point being symmetric with respect to the center of the illumination, and to a straight line extending through the center of the illumination in a second direction perpendicular to the first direction; patterning the semiconductor
04/09/2009US20090092932 Mixture of photomasks; controlling incline of pattern; lithography; phase shifting; removal of mask by etching
04/09/2009US20090092928 Component fabrication using thermal resist materials
04/09/2009US20090092926 Lithography Systems and Methods of Manufacturing Using Thereof
04/09/2009US20090092922 Imaging Layers, Structures Including Imaging Layers, Methods of Making Imaging Layers, and Imaging Systems
04/09/2009US20090092799 Mixed lithography with dual resist and a single pattern transfer
04/09/2009US20090092226 Apparatus and method for recording radiation image data of an object
04/09/2009US20090090179 Sensor with polymer substrate for use in corrosive liquids
04/09/2009DE102005000734B4 Verfahren zum Einstellen einer Abweichung einer kritischen Abmessung von Mustern Method for adjusting a deviation of a critical dimension of patterns
04/08/2009EP1810206A4 Method and apparatus associated with anisotropic shrink in sintered ceramic items
04/08/2009EP1695143A4 Filling an area of an image marked on a product with a laser
04/08/2009EP1537445A4 Nanocomposites
04/08/2009CN100477058C Unbaked laminate for producing front plate of plasma display device, and method for producing front plate of plasma display device
04/08/2009CN100475803C Heterocycle-bearing onium salts
04/07/2009US7514699 Method and device for irradiating spots on a layer
04/07/2009US7514697 Storage phosphor plate for the storage of X-ray information
04/07/2009US7514477 Low-viscosity radiation-curable composition for making an earpiece
04/07/2009US7514206 Thermally developable materials with buried conductive backside coatings
04/07/2009US7514188 Process for providing marking on security papers
04/07/2009US7514185 Forming a light-absorbing film on a transparent substrate, and irradiating the light-absorbing film with light from a flash lamp; flatness
04/07/2009US7513433 Security feature
04/02/2009WO2005077100A3 High aspect ratio c-mems architecture
04/02/2009US20090089061 Audio Reader Device
04/02/2009US20090087760 Image Forming Device, and Method and Computer Readable Medium Therefor
04/02/2009US20090087663 Free-standing metallic micromechanical structure, method of manufacturing the same, resonator structure using the same, and method of manufacturing a resonator structure using the same
04/01/2009CN101399277A Image sensor having large micro-lenses at the peripheral regions
03/2009
03/31/2009US7510818 Reversible contrast enhancement layer (R-CEL) in optical lithography, lithography mask inspection and writing and optical storage
03/31/2009US7510815 Via solvent selected from alkylene glycol monoalkyl ether carboxylic acid esters, alkoxycarboxylic acid esters and alicyclic ketones, linear amides, cyclic amides, sulfur-containing compounds and cyclic esters; color filters
03/31/2009US7510813 Including a core and a resin coating layer containing a polyhydroxyalkanoate; excellent in durability, environmental stability; used for developing an electrostatic latent image in electrophotography, electrostatic recording, electrostatic printing, or the like
03/26/2009US20090081598 Functionalized carbosilane polymers and photoresist compositions containing the same
03/26/2009US20090081578 prepared from long chain carboxylic acids by sequential addition of at least two different alkali metal hydroxides, one of which is lithium hydroxide, followed by converting the mixture of alkali metal carboxylates to silver carboxylates; Photothermographic materials
03/26/2009US20090081568 Exposure apparatus and method of manufacturing device
03/26/2009US20090081562 Photolithographic method and mask devices utilized for multiple exposures in the field of a feature
03/26/2009US20090080065 Ultra-broadband UV microscope imaging system with wide range zoom capability
03/24/2009US7508515 System and method for manufacturing printed circuit boards employing non-uniformly modified images
03/24/2009US7507508 Variation in the amount of exposure and focal position is quantitatively assessed by forming predetermined assessment pattern including a first pattern having a remaining pattern, and a second pattern which includes a remaining pattern formed in a position lower than the first
03/24/2009US7507506 Uses a low cost high speed laser writer to print less critical chiplets and structures on a reticle, and applies a high cost and low throughput electron beam writer to print the most critical chips; total number photomask susbstrates required to produce integrated circuits is be reduced
03/24/2009US7507505 Fabrication method of extreme ultraviolet radiation mask mirror using atomic force microscope lithography
03/19/2009US20090077530 Design pattern correcting method, design pattern forming method, process proximity effect correcting method, semiconductor device and design pattern correcting program
03/19/2009US20090077529 Design pattern correcting method, design pattern forming method, process proximity effect correcting method, semiconductor device and design pattern correcting program
03/19/2009US20090077528 Pattern correction method, pattern correction system, mask manufacturing method, semiconductor device manufacturing method, recording medium, and designed pattern
03/18/2009EP1849181A4 Replication tools and related fabrication methods and apparatus
03/18/2009CN100470381C A method of patterning photoresist on a wafer using an attenuated phase shift mask
03/17/2009US7504038 Utilizes silicone rubber or polydimethylsiloxane as planarization material for positional accuracy; aligning workpieces in fixture for spincoating, projection lithography, patterning and forming structural features; elastic deformation release; requiring only two manipulations
03/12/2009US20090065843 Semiconductor Constructions, Semiconductor Processing Methods, And Methods Of Forming Flash Memory Structures
03/11/2009EP1546803A4 Wet-developable anti-reflective compositions
03/11/2009CN100468013C Phase shift photomask and method for improving printability of a structure on a wafer
03/10/2009US7501230 To help reduce semiconductor procedure effects, such as undesired line edge roughness, insufficient lithographical resolution, and limited depth of focus problems associated with the removal of a photoresist layer
03/10/2009US7501215 Analyzing front side mark behavior on a substrate during an integrated circuit manufacturing process, without the need of etching global alignment marks; Chemical Mechanical Polishing
03/10/2009US7501214 Semiconductor device fabrication method and fabrication apparatus using a stencil mask
03/10/2009US7501213 Method for forming generating mask data
03/05/2009US20090061352 Imageable elements with improved abrasion resistance
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