Patents
Patents for G01R 3 - Apparatus or processes specially adapted for the manufacture of measuring instruments (2,138)
03/2004
03/18/2004US20040051519 Method of and apparatus for controlling probe tip sanding in semiconductor device testing equipment
03/17/2004EP1218757B1 Method for making a probe card with multiple contact tips for testing integrated circuits with microsphere contacts
03/11/2004US20040046582 Contacting component, method of producing the same, and test tool having the contacting component
03/11/2004US20040046579 High performance probe system
03/04/2004US20040041581 Method of measuring contact resistance of probe and method of testing semiconductor device
03/04/2004US20040040149 Probe card , e.g., for testing microelectronic components, and methods for making same
02/2004
02/26/2004US20040038560 Methods of fabricating and using shaped springs
02/26/2004US20040035706 Method for manufacturing probes of a probe card
02/25/2004EP1391265A1 Contactor cleaning sheet, and contactor cleaning method
02/19/2004WO2004015762A1 Anisotropic conductivity connector, probe member, wafer inspecting device, and wafer inspecting method
02/19/2004US20040034839 Methods for making contact device for making connection to an electronic circuit device and methods of using the same
02/19/2004US20040032272 Contactor having contact electrodes formed by laser processing
02/18/2004CN1476068A Contactor having contact electrode formed by laser
02/12/2004US20040027146 Sensor probe for use in board inspection and manufacturing method thereof
02/12/2004US20040027143 Apparatus and method for inspecting electronic circuits
02/12/2004US20040027142 Apparatus and method for inspecting electronic circuits
02/05/2004US20040022042 Construction structures and manufacturing processes for integrated circuit wafer probe card assemblies
02/05/2004US20040020514 For cleaning the probes of a probe device (e.g., a probe card) used to electrical characteristics of electrical devices, such as integrated circuits on a semiconductor wafer
02/03/2004US6685817 Controlling thickness of plating over a width of a substrate
01/2004
01/29/2004WO2004010153A2 Probe device cleaner and method
01/29/2004WO2004010152A1 Method of making microelectronic spring contact array
01/29/2004WO2003100445A3 Probe for testing a device under test
01/29/2004US20040018752 Method for manufacturing electrical contact element for testing electro device and electrical contact element thereby
01/29/2004US20040017215 High input/output density optoelectronic probe card for wafer-level test of electrical and optical interconnect components, methods of fabrication, and methods of use
01/29/2004US20040016119 Method of making microelectronic spring contact array
01/22/2004WO2004008492A2 Mosaic decal probe
01/22/2004US20040012405 Probe card with full wafer contact configuration
01/20/2004US6680536 Probe unit having resilient metal leads
01/15/2004US20040008045 Mosaic decal probe
01/14/2004CN1467806A Contactor block and apparatus for electrical connection
01/14/2004CN1134667C Microelectronic spring contact element
01/13/2004US6677552 System and method for laser micro-machining
01/13/2004US6677245 Contact structure production method
01/13/2004US6676438 Contact structure and production method thereof and probe contact assembly using same
01/08/2004US20040004491 Probe for testing a device under test
01/08/2004US20040004489 Needle fixture of a probe card in semiconductor inspection equipment and needle fixing method thereof
01/07/2004CN1466182A Apparatus and method for cleaning probe card contacts
01/06/2004US6674627 Needle-card adjusting device for planarizing needle sets on a needle card
01/06/2004US6672877 Contactor block and apparatus for electrical connection
01/06/2004US6672875 Spring interconnect structures
01/02/2004EP1376140A2 Probe card contact block and apparatus for electrical connection
01/01/2004US20040000325 Method and device to clean probes
12/2003
12/31/2003WO2004001807A2 Construction structures and manufacturing processes for probe card assemblies and packages having wafer level springs
12/30/2003US6669489 Interposer, socket and assembly for socketing an electronic component and method of making and using same
12/25/2003US20030234657 Method for producing a probe, mask for producing the probe, and probe
12/23/2003US6667629 Electrical test probes and methods of making the same
12/18/2003WO2003081725A3 A miniaturized contact spring
12/11/2003US20030226578 Removal residues from electrical contactors; silicon substrate with groove surfaces; pressurized contactors
12/09/2003US6661244 Nickel alloy probe card frame laminate
12/09/2003US6659847 Polishing surface of probe pin of probe card by moving cleaning wafer to contact surface of pin with first acceleration rate for plurality of times, smoothing surface by moving cleaning wafer with second, faster, acceleration rate
12/09/2003US6658728 Method for fabricating a spring structure on a substrate
12/04/2003WO2003101163A1 Wiring substrate, method for producing the same, and semiconductor chip inspection equipment utilizing it
12/04/2003WO2003100446A2 High performance probe system for testing semiconductor wafers
12/04/2003WO2003100445A2 Probe for testing a device under test
12/04/2003US20030224635 Contactor block and apparatus for electrical connection
12/04/2003US20030222668 Micro-fabrication forms a plurality of stiff vertical micro probes on the front surface of a ceramic substrate and a plurality of contacts on the back surface of the ceramic substrate. Photolithography, various etching technologies and
11/2003
11/27/2003US20030218244 Miniaturized contact spring
11/26/2003EP1365250A1 Contact probe, method of manufacturing the contact probe, and device and method for inspection
11/25/2003US6651325 Method for forming cantilever beam probe card and probe card formed
11/20/2003US20030214045 Miniaturized contact spring
11/19/2003EP1362005A2 Method for forming microelectronic spring structures on a substrate
11/18/2003US6650131 Electrical test probe wedge tip
11/13/2003US20030210065 Method for fabricating microelectronic fabrication electrical test apparatus electrical probe tip
11/13/2003US20030210063 Contact probe with guide unit and fabrication method thereof
11/12/2003CN1455259A Method for producing probe, mask used therefor and probe therefrom
11/11/2003US6647351 Method of detecting the position of an inner surface of a workpiece on a machine tool, and machine tool implementing such a method
11/11/2003US6646455 Test probe for semiconductor devices, method of manufacturing of the same, and member for removing foreign matter
11/06/2003US20030206030 Universal wafer carrier for wafer level die burn-in
11/04/2003US6642731 Probe structure and manufacturing method thereof
11/04/2003US6642728 Holder of electroconductive contactor, and method for producing the same
11/04/2003US6641430 Contact structure and production method thereof and probe contact assembly using same
11/04/2003US6640432 Method of fabricating shaped springs
11/04/2003US6640415 Segmented contactor
10/2003
10/30/2003WO2002068321A3 Forming tool for forming a contoured microelectronic spring mold
10/30/2003US20030203683 Probe card
10/30/2003US20030203521 Semiconductor device and manufacturing method thereof including a probe test step and a burn-in test step
10/29/2003EP1357385A1 Contact probe, mask and fabrication method thereof
10/29/2003EP1356307A1 Nickel alloy probe card frame laminate
10/28/2003US6639418 Microelectronic fabrication die electrical probe apparatus electrical test method providing enhanced microelectronic fabrication die electrical test accuracy and efficiency
10/22/2003CN1451179A Shaped springs and methds of fabricating and using shaped springs
10/21/2003US6636063 Probe card with contact apparatus and method of manufacture
10/16/2003US20030192476 Sputtered spring films with low stress anisotropy
10/16/2003US20030192183 Method for constructing a membrane probe using a depression
10/16/2003US20030192181 Method of making an electronic contact
10/16/2003US20030192176 Re-assembly process for MEMS structures
10/15/2003EP1353443A2 Spring contact
10/15/2003CN1449009A Contactor, method of producing the same, and method of testing using the same
10/14/2003US6633175 Temperature compensated vertical pin probing device
10/09/2003US20030189439 Semiconductor inspection apparatus
10/09/2003US20030189438 Electrical test probe wedge tip
10/08/2003EP1351060A2 Method of manufacturing a test probe for semiconductor devices
10/07/2003US6630839 Contactor, a method of manufacturing the contactor and a device and method of testing electronic component using the contactor
10/07/2003US6630451 Benzimidazolone peptidometics as thrombin receptor antagonist
10/02/2003WO2003081725A2 A miniaturized contact spring
10/02/2003US20030186566 Contactor, method for manufacturing such contactor, and testing method using such contactor
10/02/2003US20030184330 Probe card and method for manufacturing probe card
10/01/2003EP1010014B1 Magnet core
09/2003
09/30/2003US6628127 Probe card for testing semiconductor integrated circuit and method of manufacturing the same
09/25/2003WO2003079110A1 Method for producing micro probe tips
09/25/2003US20030179064 Method of making photolithographically-patterned out-of-plane coil structures
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