Patents
Patents for G01B 9 - Instruments as specified in the subgroups and characterised by the use of optical measuring means (14,810)
11/2004
11/16/2004US6819434 Multi-axis interferometer
11/16/2004US6819432 Coherent detecting receiver using a time delay interferometer and adaptive beam combiner
11/16/2004US6819431 Polymer retarder
11/11/2004US20040223161 Alignment method for optimizing extinction ratios of coated polarizing beam splitters
11/10/2004EP1475606A1 Method for studying an object and an optical interferometer for carrying out said method
11/10/2004EP1474648A2 Systems and methods for inspection of ophthalmic lenses
11/10/2004EP1360538B1 Scanning near-field optical microscope
11/10/2004CN2655175Y High-precise angle displacement measurer based on F-P plate sine phase modulation
11/10/2004CN1544966A Mach-Zehnder interference type sensing device based on micro curved transmission waveguide
11/09/2004US6816267 Apparatus and method for calibrating an interferometer using a selectively rotatable sphere
11/09/2004US6816265 Passive tilt correction on two axes
11/09/2004US6816264 Systems and methods for amplified optical metrology
11/09/2004US6816263 Interferometric measurement apparatus for wavelength calibration
11/09/2004US6816252 Apparatus for determining an overlay error and critical dimensions in a semiconductor structure by means of scatterometry
11/09/2004US6816247 Moiré method and a system for measuring the distortion of an optical imaging system
11/04/2004WO2004094940A1 Interferometer system, signal processing method in interferometer system, stage using the signal processing method
11/04/2004WO2004085978A3 Mehtod and device for opto-acoustical imagery
11/04/2004WO2004042319A3 Compensation of refractivity perturbations in an intererometer path
11/04/2004US20040218280 Optical element that is adjustable for optimizing extinction ratios
11/04/2004US20040218279 Light altering device
11/04/2004US20040218278 Light altering device
11/04/2004US20040218191 Microscope with fixed-element autocollimator for tilt adjustment
11/04/2004US20040218189 Interferometers for optical coherence domain reflectometry and optical coherence tomography using nonreciprocal optical elements
11/04/2004US20040218188 Optical phase standard
11/03/2004EP1473540A1 Method and device for determining the level of a plurality of measuring points
11/03/2004EP1472531A2 Use of electronic speckle interferometry for defect detection in fabricated devices
11/03/2004CN1542400A X-ray double frequency holographic interferometer
11/02/2004US6813401 Gas phase condensation of p-xylene directly onto surface without using adhesive; conformity, uniform thickness
11/02/2004US6813029 Interferometric measuring device for form measurement
11/02/2004US6813028 Calibration methodology and system for optical network analyzer
10/2004
10/28/2004WO2004093272A2 System and method for measuring physical, chemical and biological stimuli using vertical cavity surface emitting lasers with integrated tuner
10/28/2004WO2004092832A2 Determination of center of focus by parameter variability analysis
10/28/2004US20040212809 Beam delivery methods, and systems, and wafer edge exposure apparatus delivering a plurality of laser beams
10/27/2004EP1470410A2 APPARATUS AND METHOD FOR RANGINGS AND NOISE REDUCTION OF LOW COHERENCE INTERFEROMETRY LCI AND OPTICAL COHERENCE TOMOGRAPHY (OCT) SIGNALS BY PARALLEL DETECTION OF SPECTRAL BANDS
10/27/2004EP1470387A1 Interferometry method based on changing frequency
10/27/2004EP1419360A4 Tilted interferometer
10/27/2004CN2651771Y Optical path difference high-speed rotating mirror controlling systems
10/27/2004CN1540282A Method for measuring position of zero optical path difference in dual beam interference of wideband light source
10/27/2004CN1540281A Multifunctional electronic speckle interferometer including semiconductor pump and total solid laser
10/27/2004CN1172778C Integral tpe microdisplacement, force three-dimension flexible driving amplifying and steering mechanism
10/26/2004US6809827 Self referencing mark independent alignment sensor
10/21/2004WO2004090507A2 Apparatus and method for correcting errors generated by a laser with non-ideal tuning characteristics
10/21/2004WO2004090466A2 Apparatus and method for measurement of fields of backscattered and forward scattered/reflected beams by an object in interferometry
10/21/2004WO2004090465A2 Apparatus and method for joint measurement of fields of scattered/reflected or transmitted orthogonally polarized beams by an object in interferometry
10/21/2004WO2003067246A9 Use of electronic speckle interferometry for defect detection in fabricated devices
10/21/2004US20040207856 Design system of alignment marks for semiconductor manufacture
10/20/2004EP1469351A1 Lithographic apparatus and device manufacturing method
10/20/2004EP1468245A2 Apparatus for low coherence ranging
10/20/2004EP1468244A2 Interferometric optical system
10/20/2004EP1446698A4 An interferometer system for a semiconductor exposure system
10/20/2004CN1538245A Lithographic apparats, apparatus manufacturing method and computer program
10/19/2004US6807497 Laser measurement system with digital delay compensation
10/19/2004US6806964 Optical recording and/or reproduction apparatus, tracking method, and optical recording medium
10/19/2004US6806963 Method and device for measuring the optical properties of at least two regions located at a distance from one another in a transparent and/or diffuse object
10/19/2004US6806962 Tilted interferometer
10/19/2004US6806961 Interferometric cyclic error compensation
10/19/2004US6806960 Compact beam re-tracing optics to eliminate beam walk-off in an interferometer
10/19/2004US6806958 Microforce measurement method and apparatus
10/14/2004WO2004088241A2 Method and apparatus for imaging internal structures of transparent and translucent materials
10/14/2004WO2004086948A2 A confocal microscope system for real-time simultaneous temporal measurements of metachronal wave period and ciliary beat frequency
10/14/2004US20040202400 System and method for measuring physical stimuli using vertical cavity surface emitting lasers with integrated tuning means
10/14/2004US20040202399 System and method for measuring physical, chemical and biological stimuli using vertical cavity surface emitting lasers with integrated tuner
10/14/2004US20040201855 Method and apparatus for dark field interferometric confocal microscopy
10/14/2004US20040201854 Longitudinal differential interferometric confocal microscopy
10/14/2004US20040201853 Transverse differential interferometric confocal microscopy
10/14/2004DE10360991A1 Kubuswinkelreflektor, der eine enge Strahlenbündelbeabstandung und eine minimale Wellenfrontverzerrung in einem Mehrachseninterferrometer ermöglicht Cube corner reflector, which enables close Strahlenbündelbeabstandung and a minimum wavefront distortion in a multi-axis interferometer
10/14/2004DE10316123A1 Phase difference interferometry system for wave front measurement for optical imaging system uses mask structure on object side and grating structure on image side
10/13/2004EP1466205A1 Method and device for microscopic display with local probes of a three-dimensional object
10/13/2004CN2648401Y Height measuring and correcting device with magnetic-suspension micro-moving platform
10/12/2004US6804011 Apparatus and method(s) for reducing the effects of coherent artifacts in an interferometer
10/12/2004US6804010 Optical coating thickness optimization for fly height test media
10/07/2004WO2004085978A2 Mehtod and device for opto-acoustical imagery
10/07/2004WO2004065897A3 Interferometric measuring device
10/07/2004US20040196565 Light altering device
10/07/2004US20040196564 Light altering device
10/07/2004US20040196468 Method and arrangement for topographically characterizing a surface of a hard disk with distortion due to disk modes removed
10/07/2004US20040196467 Apparatus and method for correcting errors generated by a laser with non-ideal tuning characteristics
10/07/2004US20040194328 Light altering device
10/07/2004DE10311390A1 Speckle interferometry measurement method for testing female screw thread uses series of images captured by camera arranged at different angles relative to thread axis
10/06/2004CN1170143C Temperature compensation Fabry-perot optical fiber strain sensor specially for concrete
10/06/2004CN1170119C Photoelectric detection method and device based on orthogonal dual polarized light beams for rolled angle
10/06/2004CN1170117C Method for improving measurements by laser interferometer
10/05/2004US6801324 Interferometer control and laser frequency locking
10/05/2004US6801323 Methods and apparatus for interferometric dimensional metrology
10/05/2004US6801318 Apparatus and method for measuring intensity and phase of a light pulse with an interferometric asymmetric single-shot autocorrelator
09/2004
09/30/2004WO2004083908A2 Optical pulse characterization for telecommunications applications
09/30/2004WO2004083793A2 Method and device for the generation of a carrier for an interferogramme
09/30/2004WO2004083775A1 Single point laser measurement reference
09/30/2004WO2004038322A3 Two-wavelength confocal interferometer for measuring multiple surfaces
09/30/2004US20040190003 Interferometric method and system
09/30/2004US20040190002 Interferometer system, method for recording an interferogram and method for providing and manufacturing an object having a target surface
09/30/2004US20040190001 Three dimensional imaging by projecting interference fringes and evaluating absolute phase mapping
09/30/2004US20040189999 Profiling complex surface structures using scanning interferometry
09/30/2004US20040189998 Interferometric servo control system for stage metrology
09/30/2004US20040189997 Signal processing for passive interferometry
09/30/2004DE10309284A1 Dilatometer uses optical measurement involving passing measurement beam to very close to specimen in vacuum to eliminate errors caused by atmosphere density changes and turbulence
09/29/2004EP1064517B1 Method and device for measuring absolute interferometric length
09/29/2004EP0892909B1 Diffraction management for grazing incidence interferometer
09/28/2004US6798551 Gires-Tournois interferometer with faraday rotators for optical signal interleaver
09/28/2004US6798523 Sensor and method for detecting fiber optic faults