Patents
Patents for G01B 9 - Instruments as specified in the subgroups and characterised by the use of optical measuring means (14,810)
11/2005
11/24/2005US20050259769 Quadrature phase shift interferometer (QPSI) decoder and method of decoding
11/24/2005US20050259270 Fiberoptic fabry-perot optical processor
11/24/2005US20050259269 Shearing interferometer with dynamic pupil fill
11/24/2005US20050259268 Heterodyne laser interferometer for measuring wafer stage translation
11/24/2005US20050259265 Methods and systems for determining optical properties using low-coherence interference signals
11/24/2005DE10341585B4 Verfahren und Vorrichtung zur Belastungsprüfung an einer Stützkonstruktion eines Behälters Method and apparatus for load test of a supporting structure of a container
11/24/2005DE102004020059A1 Measuring device, for discontinuous absolute measurement of displacements, has fiber interferometer and determines displacement based on measured reflected light
11/23/2005EP1598648A2 Shearing interferometer with dynamic pupil fill
11/23/2005EP1598647A1 Interferometer and fourier transform spectrometer
11/23/2005EP1598635A1 Interferometric signal conditioner for measurement of displacements of a Fabry-Pérot interferometer
11/23/2005EP1597591A1 Gas velocity sensor
11/23/2005EP1597536A2 Interferometric measuring device
11/23/2005EP1021699B1 Determining the location of a separation in a deformable structure ( tyre )
11/23/2005CN1700099A Shearing interferometer with dynamic pupil fill
11/23/2005CN1699914A Heterodyne laser interferometer for measuring wafer stage translation
11/22/2005US6968038 Apparatus and method for generating high-order harmonic X-ray, and point-diffraction interferometer using high-order harmonic X-ray
11/22/2005US6967723 Interferometric measuring device
11/17/2005WO2005108915A1 Device and method for a combined interferometry and image-based determination of geometry, especially for use in microsystems technology
11/17/2005WO2005108914A2 Apparatus and methods for measurement of critical dimensions of features and detection of defects in uv, vuv, and euv lithography masks
11/17/2005WO2005108913A1 Polarising interferometer with removal or separation of error beam caused by leakage of polarised light
11/17/2005WO2005047849A3 Methods and apparatus for the improved measurment of circular and linear dichroism and uses thereof
11/17/2005WO2004068554A8 Analysis and monitoring of stresses in embedded lines and vias integrated on substrates
11/17/2005WO2004003464A3 Frequency-scanning interferometer with non-specular reference surface
11/17/2005US20050254063 Apparatus and method for measurement of critical dimensions of features and detection of defects in UV, VUV, and EUV lithography masks
11/17/2005US20050254061 Low coherence interferometry for detecting and characterizing plaques
11/17/2005US20050254060 Low coherence interferometry for detecting and characterizing plaques
11/17/2005US20050254059 Low coherence interferometric system for optical metrology
11/17/2005US20050254058 Low coherence interferometry utilizing magnitude
11/17/2005US20050254057 Low coherence interferometry utilizing phase
11/17/2005US20050254041 Tilted edge for optical-transfer-function measurement
11/17/2005US20050254040 Apparatus and process for the determination of static lens field curvature
11/17/2005DE10252314B4 Detektorsystem, Interferenz-Meßsystem und optisches Meßverfahren Detector system, interference measurement system and optical measurement technique
11/16/2005EP1595108A2 Longitudinal differential interferometric confocal microscopy
11/16/2005EP1595107A2 Method and apparatus for dark field interferometric confocal microscopy
11/16/2005EP1595106A2 Transverse differential interferometric confocal microscopy
11/16/2005EP1509747A4 Metrology system for precision 3d motion
11/16/2005EP1350081B1 Fiber optic displacement sensor
11/16/2005CN2740998Y Laser detector by workpiece projecting size
11/16/2005CN1227618C Optical input device for measuring finger movement
11/16/2005CN1227617C Method and apparatus for measuring movement of input device
11/16/2005CN1227520C Long-distance scattered micro vibrating signal measurement and fidelity pickup interferometer
11/15/2005US6965436 System and method for calibrating a spatial light modulator array using shearing interferometry
11/15/2005US6965435 Interferometer system for measuring surface shape
11/15/2005CA2367785C Monolithic optical assembly
11/10/2005WO2005106635A1 An optical input device and method of measuring relative movement of an object and an optical input device
11/10/2005WO2005106634A1 Relative movement sensor
11/10/2005WO2005106593A2 Method and apparatus for measurement of exit pupil transmittance
11/10/2005WO2005106386A2 Vibration resistant interferometry
11/10/2005WO2005106383A2 Interferometry systems and methods of using interferometry systems
11/10/2005WO2005106382A2 Optical transducer for detecting liquid level and electronic circuit therefor
11/10/2005WO2004068065A3 Leaky guided-wave modes used in interferometric confocal microscopy to measure properties of trenches
11/10/2005US20050249107 Multi-layer Optical Disc And System
11/10/2005US20050248773 Beam profile complex reflectance system and method for thin film and critical dimension measurements
11/10/2005US20050248772 Interferometry systems and methods of using interferometry systems
11/10/2005US20050248771 Lithographic interferometer system
11/10/2005US20050248770 Interferometric apparatus and method for surface profile detection
11/10/2005DE102004033187B3 Interferometrische Vorrichtung The interferometric device
11/08/2005US6963408 Method and apparatus for point diffraction interferometry
11/08/2005US6963407 Process end point detection apparatus and method, polishing apparatus, semiconductor device manufacturing method, and recording medium recorded with signal processing program
11/08/2005US6963406 Fused off-axis object illumination direct-to-digital holography with a plurality of illumination sources
11/08/2005US6963405 Laser counter-measure using fourier transform imaging spectrometers
11/08/2005CA2240727C Sensing method and apparatus
11/03/2005WO2005104311A2 Duv light source optical element improvements
11/03/2005WO2005103790A1 Dual technology (confocal and intererometric) optical profilometer for the inspection and three-dimensional measurement of surfaces
11/03/2005US20050244096 Interferometric signal conditioner for measurement of absolute static displacements and dynamic displacements of a fabry-perot interferometer
11/03/2005US20050243327 Compact Optical Apparatus
11/03/2005US20050243326 Imaginary polarizing measuring method for simultaneously measuring the optical crystal thickness and the optic axis direction
11/03/2005US20050243324 Entangled photon spectroscopy for stand-off detection and characterization
11/03/2005US20050243323 Method and apparatus for automatic registration and visualization of occluded targets using ladar data
11/02/2005EP1591751A2 Method and apparatus for measuring micro-structure, and micro-structure analytical system
11/02/2005EP1590696A2 Full-filled optical measurements of surface properties of panels, substrates and wafers
11/02/2005EP1590626A2 Compensation for effects of mismatch in indices of refraction at a substrate-medium interface in non-confocal, confocal, and interferometric confocal microscopy
11/02/2005EP1590625A2 Interferometer
11/02/2005EP1590624A1 Interferometer alignment
11/02/2005CN1692269A Fringe pattern discriminator for grazing incidence interferometer
11/02/2005CN1692268A Interferometry method based on changing frequency
11/01/2005US6961132 Interference system and semiconductor exposure apparatus having the same
11/01/2005US6961130 Heterodyne beam delivery with active control of two orthogonal polarizations
11/01/2005US6961129 Active control of two orthogonal polarizations for heterodyne interferometry
11/01/2005US6961116 Alignment system uses a self-referencing interferometer that produces two overlapping and relatively rotated images of an alignment markers.
10/2005
10/27/2005WO2005082046A3 Method of full-color optical coherence tomography
10/27/2005WO2005079657A3 Device and method for compensation of corneal birefringence of the eye
10/27/2005US20050237538 Optical mems cavity having a wide scanning range for measuring a sensing interferometer
10/27/2005US20050237537 Determination of thin film topograhpy
10/27/2005US20050237536 Interferometry systems and methods of using interferometry systems
10/27/2005US20050237535 Vibration resistant interferometry
10/27/2005US20050237534 Vibration resistant interferometry
10/27/2005US20050237533 Multi-beam heterodyne laser doppler vibrometer
10/27/2005US20050237512 Method and apparatus for measurement of exit pupil transmittance
10/27/2005US20050237068 Sensor cable having easily changeable entire length and allowing accurate and high speed signal transmission even when entire length is made longer, and amplifier-separated type sensor with the cable
10/27/2005US20050236592 Optical transducer for detecting liquid level and electrical circuit therefor
10/27/2005US20050236591 Optical transducer for detecting liquid level
10/27/2005DE10297689T5 Verfahren und Gerät zur Bestimmung von atherosklerotischem Belag durch Messung von optischen Gewebeeigenschaften Method and apparatus for determination of atherosclerotic plaque by measurement of tissue optical properties
10/26/2005EP1588254A2 Analysis and monitoring of stresses in embedded lines and vias integrated on substrates
10/26/2005EP1588203A2 Interferometer having a scanning mirror
10/26/2005EP1588199A2 Scannable mirror arrangement for an interferometer
10/26/2005EP1588122A1 Single point laser measurement reference
10/26/2005EP1588120A2 Interferometric confocal microscopy incorporating a pihnole array beam-splitter
10/26/2005EP1588119A2 Apparatus and method for joint measurements of conjugated quadratures of fields of reflected/scattered and transmitted beams by an object in interferometry
10/26/2005CN1688945A Content-based fused off-axis illumination direct-to-digital holography