Patents
Patents for G01B 9 - Instruments as specified in the subgroups and characterised by the use of optical measuring means (14,810)
09/2005
09/21/2005CN1670468A Dual wavelength two-dimensional space phase shifting electronic speckle interferometer
09/21/2005CN1220030C Method for analyzing low-coherence fringe
09/20/2005US6947621 Robust heterodyne interferometer optical gauge
09/20/2005US6947148 Interferometric apparatus and method with phase shift compensation
09/15/2005WO2005085896A1 Passive positioning sensors
09/15/2005WO2005085754A1 Interferometric measuring arrangement
09/15/2005WO2005085748A1 Optical readhead
09/15/2005WO2005008198A3 Method and apparatus for compact birefringent interference imaging spectrometer
09/15/2005US20050201663 Hydrophone mandrel for precise placement of gratings
09/15/2005US20050200856 Interferometry systems and methods
09/15/2005DE102004057020A1 Design method of base e.g. for attaching distance-measuring interferometer to metrology frame, by positioning center of expansion of base on center line defined by centers of expansion of child part and bond connection
09/14/2005EP1574885A1 Optical delay line
09/14/2005CN2725854Y Objective lens converter for light cross-section microscope
09/14/2005CN1219187C Magnetic suspension motion platform height measuring and calibrating method and apparatus thereof
09/14/2005CN1219186C Multiple free degree positioning cutter angle measuring microscope
09/13/2005US6943897 Method of fabricating and inspecting a transparent optical element having a parabolic optical-quality lateral surface
09/13/2005US6943896 Reconfigurable interferometer system
09/13/2005US6943895 Interferometric measuring device
09/13/2005US6943894 Laser distance measuring system and laser distance measuring method
09/13/2005US6943892 Instrument having a multi-mode optical element and method
09/13/2005US6943890 Compact interferometer and use in wavelength monitoring
09/13/2005US6943889 Athermal interferometric device
09/13/2005US6943881 Measurements of optical inhomogeneity and other properties in substances using propagation modes of light
09/13/2005US6943870 Deformation measuring method and apparatus using electronic speckle pattern interferometry
09/13/2005CA2267558C Fourier-transform spectrometer configuration optimized for self emission suppression and simplified radiometric calibration
09/09/2005WO2005082046A2 Method of full-color optical coherence tomography
09/09/2005CA2556865A1 Method of full-color optical coherence tomography
09/08/2005US20050195404 Interferometers and systems using interferometers
09/08/2005US20050195403 Optical fiber sensors for harsh environments
09/08/2005US20050195402 Crystalline optical fiber sensors for harsh environments
09/08/2005US20050195401 Wavelength meter
09/08/2005US20050195400 Fabre-perot interferometer
09/07/2005CN2723958Y Broad frequency white light interferometer of wave band sheet structure
09/06/2005US6940607 Method for absolute calibration of an interferometer
09/06/2005US6940605 Method for measuring interference and apparatus for measuring interference
09/06/2005US6940602 Method and device for high-speed interferential microscopic imaging of an object
09/01/2005WO2005080912A1 Device and method for measuring the contrast of the fringes in a michelson interferometer and system for examination of the eye comprising such a device
09/01/2005WO2005080911A1 High resolution lateral and axial tomography of the retina
09/01/2005WO2005079657A2 Device and method for compensation of corneal birefringence of the eye
09/01/2005WO2005062941A3 Multi-channel laser interferometric method and apparatus for detection of ultrasonic motion from a surface
09/01/2005WO2005008200A3 Method and apparatus for compact dispersive imaging spectrometer
09/01/2005US20050190988 Passive positioning sensors
09/01/2005US20050190378 Exposure apparatus mounted with measuring apparatus
09/01/2005US20050190377 Point diffraction interferometer and exposure apparatus and method using the same
09/01/2005US20050190376 Device and method for the determination of imaging errors and microlithography projection exposure system
09/01/2005US20050190375 Stage apparatus and control method therefor
09/01/2005US20050190374 Optical image measuring apparatus
09/01/2005US20050190373 Optical remote sensor with differential Doppler motion compensation
09/01/2005US20050190371 Low-coherence inferometric device for light-optical scanning of an object
09/01/2005DE10393244T5 Interferometrisches Verfahren für ellipsometrische, reflektometrische und streulichtanalytische Messungen, einschließlich der Charakterisierung von Dünnfilmstrukturen Interferometric method for ellipsometric, reflectometric and scattering light analytical measurements, including the characterization of thin film structures
09/01/2005DE10393243T5 Messung und Fehlerausgleichung bei Interferometern Measurement and error evaluation equation with interferometers
09/01/2005CA2553743A1 Device and method for measuring the contrast of the fringes in a michelson interferometer and system for examination of the eye comprising such a device
08/2005
08/31/2005EP1568981A2 Physical quantity measuring method using brillouin optical fiber sensor
08/31/2005EP1568976A1 Exposure apparatus mounted with measuring apparatus
08/31/2005EP1568963A2 Interferometric apparatus for measuring shapes
08/31/2005EP1567826A1 A surface profiling apparatus
08/31/2005CN1662790A Device for measuring in three dimensions a topographical shape of an object
08/31/2005CN1661770A Method to predict and identify defocus wafers and system thereof
08/31/2005CN1661358A Optical image measuring apparatus
08/31/2005CN1661333A Physical quantity measuring method using brillouin optical fiber sensor
08/30/2005US6937351 Non-destructive method of measuring the thickness of a semiconductor wafer
08/30/2005US6937347 Small-beam lateral-shear interferometer
08/30/2005US6937345 Measuring system for measuring performance of imaging optical system
08/30/2005US6937343 Laser scanner with amplitude and phase detection
08/25/2005WO2005078526A1 A system for positioning a product
08/25/2005WO2005078382A1 Apparatus and method for super-resolution optical microscopy
08/25/2005WO2005077255A1 Compact high resolution imaging apparatus
08/25/2005WO2005024379A3 Fiber optic sensor system
08/25/2005WO2005010474A3 Method and apparatus for multiwavelength imaging spectrometer
08/25/2005US20050185192 Method of full-color optical coherence tomography
08/25/2005US20050185191 Laser vibrometry with coherent detection
08/25/2005US20050185190 Active control of two orthogonal polarizations for heterodyne beam delivery
08/25/2005US20050185189 Fiber Optic Sensor
08/25/2005US20050185187 Method and apparatus for the direct characterization of the phase of an optical signal
08/25/2005US20050185170 Method to predict and identify defocus wafers
08/25/2005DE10392754T5 Interferometrisches optisches System und Verfahren, die eine optische Pfadlänge und einen Fokus bzw. Brennpunkt liefern, die gleichzeitig abgetastet werden Interferometric optical system and method which provide an optical path length and a focus or focal point, which are sampled at the same time
08/25/2005CA2553761A1 High efficiency low coherence interferometry
08/24/2005CN2720458Y Distance-measuring instrument
08/24/2005CN1657947A Optical movement information detector, movement information detection system, electronic equipment and encoder
08/24/2005CN1216271C X-ray double-frequency holographic interometer
08/23/2005US6934038 Method for optical system coherence testing
08/23/2005US6934036 Configuration measuring apparatus and method
08/23/2005US6934035 System and method for measuring optical distance
08/23/2005US6934027 Interferometric measuring device
08/18/2005WO2005074789A1 Short-coherence interferometric measurement of length on the eye
08/18/2005WO2005074525A2 Entangled-photon fourier transform spectroscopy
08/18/2005WO2005045361A3 Scanning interferometry for thin film thickness and surface measurements
08/18/2005WO2005001522A3 Measurements of optical inhomogeneity and other properties in substances using propagation modes of light
08/18/2005US20050179912 Calibration feedback-control circuit for diffraction light devices
08/18/2005US20050179911 Aspheric diffractive reference for interferometric lens metrology
08/18/2005US20050179909 Lithographic apparatus, device manufacturing method, and method for determining z-displacement
08/18/2005US20050179908 Optical movement information detector, movement information detection system, electronic equipment and encoder
08/18/2005US20050179907 Laser scanner with amplitude and phase detection
08/18/2005US20050179906 Interferometer
08/18/2005US20050179879 Lithographic apparatus, interferometer and device manufacturing method
08/18/2005DE10356829B3 Measurement standard for calibrating interferometric systems has opaque layer with surface roughness in atomic range, at least one structure of defined geometry with at least one edge; layer is joined to transmissive substrate
08/18/2005DE102004055637A1 Vielstrahltaster bzw. -messkopf mit justierbarem Strahlwinkel Much beam scanner or -messkopf with adjustable beam angle
08/17/2005CN1656353A Interferometric measuring device
08/17/2005CN1654921A Self-mixed interference HeNe laser displacement transducer with direction recognition function
08/16/2005US6931618 Feed forward process control using scatterometry for reticle fabrication