Patents
Patents for G01B 9 - Instruments as specified in the subgroups and characterised by the use of optical measuring means (14,810)
01/2006
01/05/2006US20060001887 Interferometric optical assemblies and systems including interferometric optical assemblies
01/05/2006US20060001886 Precision retroreflector positioning apparatus
01/05/2006US20060001876 Systems and methods for chiroptical heterodyning
01/05/2006US20060001862 Lens meter
01/05/2006US20060001861 Measuring method and measuring system for measuring the imaging quality of an optical imaging system
01/04/2006EP1611411A2 Method and apparatus for imaging internal structures of transparent and translucent materials
01/04/2006CN2750287Y Large range nano detection optical system
01/04/2006CN1235052C Method measuring movement of material sheet and optical sensor for carrying out said method
01/03/2006US6982796 Wavefront splitting element for EUV light and phase measuring apparatus using the same
01/03/2006US6982790 Coherent imaging in turbid media
12/2005
12/29/2005WO2005124322A1 Phase sensitive heterodyne coherent anti-stokes raman scattering micro-spectroscopy and microscopy systems and methods
12/29/2005WO2005124275A2 Improved wavefront sensor using hybrid optical/electronic heterodyne techniques
12/29/2005WO2005124274A2 Calibrating method, measuring method, optical measuring device and operating method for a transmitter arrangement
12/29/2005WO2004114211A3 Full-field optical coherence tomography and its application to multiple-layer information decoding
12/29/2005WO2004088241A3 Method and apparatus for imaging internal structures of transparent and translucent materials
12/29/2005US20050286057 Load dependent analyzing optical components
12/29/2005US20050286055 Optical measurements of properties in substances using propagation modes of light
12/29/2005DE102004022341A1 Vorrichtung und Verfahren zur kombinierten interferometrischen und abbildungsbasierten Geometrieerfassung insbesondere in der Mikrosystemtechnik Apparatus and method for combined interferometric and abstract geometry-based detection especially in microsystem technology
12/28/2005EP1610088A1 Device for optically measuring an object
12/28/2005EP1608934A2 Apparatus and method for joint measurement of fields of scattered/reflected or transmitted orthogonally polarized beams by an object in interferometry
12/28/2005EP1608933A2 Apparatus and method for measurement of fields of backscattered and forward scattered/reflected beams by an object in interferometry
12/28/2005CN2748867Y Novel electronic angle gauge
12/28/2005CN1233982C Method for measuring position of zero optical path difference in dual beam interference of wideband light source
12/28/2005CN1233981C Cutter angle measuring microscope
12/27/2005US6980299 Systems and methods for imaging a sample
12/27/2005US6980297 Wavelength monitor
12/22/2005WO2005121696A1 Method for evaluating signals in optical coherence tomography (oct)
12/22/2005US20050280830 Apparatus for optical measurement of an object
12/22/2005US20050280828 Systems and methods for imaging a sample
12/22/2005US20050280827 Phase sensitive heterodyne coherent anti-Stokes Raman scattering micro-spectroscopy and microscopy systems and methods
12/22/2005US20050280802 Distance measuring device with laser indicating device
12/22/2005US20050280687 Sheet-type detection device
12/22/2005DE102005014455A1 Differenzinterferometer mit verbesserter zyklischer Nichtlinearität Differential interferometer with improved cyclic nonlinearity
12/22/2005DE102005009064A1 Systeme, die polarisationsmanipulierende Retroreflektoren verwenden Systems that use polarization-retroreflectors
12/22/2005DE102005009062A1 Heterodynlaserinterferometer zum Messen einer Waferstufentranslation Heterodynlaserinterferometer for measuring a wafer stage translation
12/22/2005DE102004026193A1 Messverfahren zur Formmessung Measurement method for measuring the shape
12/22/2005DE102004017229A1 Interferometrisches System für den Einsatz von Sonderoptiken Interferometric System for the use of special optics
12/22/2005DE102004014095B4 Laser goniometer e.g. for angle measurement, has laser to control equipment and energy source attached and detector unit and between laser and detector unit optical deflecting system is supported by plate
12/21/2005EP1606575A2 Leaky guided-wave modes used in interferometric confocal microscopy to measure properties of trenches
12/21/2005CN1710376A Method for calibrating space resolution ratio of high-resolution digital interference instrument
12/21/2005CN1232846C Mach-Zehnder interference type sensing device based on micro curved transmission waveguide
12/20/2005US6977731 Method and apparatus for enhancing the resolving power of a tunable optical filter
12/20/2005US6977730 Method and apparatus for alignment of a precision optical assembly
12/15/2005WO2005119362A2 Laser interferometer mirror assembly
12/15/2005WO2005119169A2 Beam profile complex reflectance system and method for thin film and critical dimension measurements
12/15/2005WO2005117534A2 Process, system and software arrangement for a chromatic dispersion compensation using reflective layers in optical coherence tomography (oct) imaging
12/15/2005WO2005095918A3 Simple high efficiency optical coherence domain reflectometer design
12/15/2005WO2005051187A3 Rotated measuring device
12/15/2005WO2005001445A3 Systems and methods for phase measurements
12/15/2005US20050275849 Method of calibrating an interferometer and method of manufacturing an optical element
12/15/2005US20050275848 Apparatus and methods for overlay, alignment mark, and critical dimension metrologies based on optical interferometry
12/15/2005US20050275846 Device for measuring an optical path length difference
12/15/2005US20050274894 Tomography imaging apparatus
12/15/2005DE102004026275A1 Test body length measurement system has internal pressure of compensation body adjustable by feeding gas in or out of compensation body independently of vacuum in measurement body to reduce required drive forces
12/14/2005EP1604248A2 Method and device for opto-acoustical imagery
12/14/2005EP1604169A2 Characterizing and profiling complex surface structures using scanning interferometry
12/14/2005EP1604168A2 Profiling complex surface structures using scanning interferometry
12/14/2005CN1707229A Wavefront-measuring interferometer apparatus, and light beam measurement apparatus and method thereof
12/13/2005US6975406 Glitch filter for distance measuring interferometry
12/13/2005US6975405 Method and apparatus for measuring flatness and/or relative angle between top and bottom surfaces of a chip
12/13/2005US6973739 Rigger-spread measuring instruments
12/08/2005WO2005116578A2 Shape measurement method
12/08/2005WO2004083908A3 Optical pulse characterization for telecommunications applications
12/08/2005US20050271395 Multi-pulse heterodyne sub-carrier interrogation of interferometric sensors
12/08/2005US20050270544 Variable dispersion step-phase interferometers
12/08/2005US20050270543 Wavefront-measuring interferometer apparatus, and light beam measurement apparatus and method thereof
12/08/2005US20050270542 Direct combination of fiber optic light beams
12/08/2005US20050270539 Method of generating interferometric information
12/08/2005DE102005014190A1 Sensorkabel mit leicht änderbarer Gesamtlänge, das fehlerfreie und Hochgeschwindigkeits-Signalübertragung ermöglicht, selbst wenn die Gesamtlänge vergrößert wird, und vom Verstärker getrennter Sensortyp mit dem Kabel Sensor cables with modifiable total length, error-free and high-speed signal transmission possible even if the total length is increased, and the amplifier separate type of sensor with cable
12/08/2005DE102005013903A1 Method for processing optical element of interferometer optics, involves determining deviation of optical surface of optical element from target shape based on interferometric measurement and property of interferometer optics
12/07/2005EP1601939A2 Spherical light-scatter and far-field phase measurement
12/07/2005EP1601930A2 Device for the generation of a carrier for an interferogramme
12/07/2005EP1407308B1 Microscope lens and the use of a microscope lens of this type in a microscope
12/07/2005CN1705867A Wave front aberration measuring device
12/06/2005US6972849 Scanning interferometer for aspheric surfaces and wavefronts
12/06/2005US6972848 Semiconductor fabricating apparatus with function of determining etching processing state
12/06/2005US6972846 Multi-beam heterodyne laser doppler vibrometer
12/06/2005CA2407151C Gravity and differential gravity sensor, and system and method for monitoring reservoirs using same
12/01/2005WO2005114352A2 Fiberoptic fabry-perot optical processor
12/01/2005WO2005114150A1 Low coherence interferometric system for optical metrology
12/01/2005WO2005114149A1 Low coherence interferometry utilizing phase
12/01/2005WO2005114096A2 Methods and systems for determining optical properties using low-coherence interference signals
12/01/2005WO2005114095A2 Apparatus and methods for overlay, alignment mark, and critical dimension metrologies based on optical interferometry
12/01/2005WO2005114094A1 Method and system of low coherence interferometry for analyzing biological samples
12/01/2005US20050264827 Interferometric measuring device and projection exposure installation comprising such measuring device
12/01/2005US20050264826 Diffraction grating based interferometric systems and methods
12/01/2005US20050264823 Systems using polarization-manipulating retroreflectors
12/01/2005US20050264822 Differential interferometer with improved cyclic nonlinearity
12/01/2005US20050264821 Heterodyne laser interferometer using heterogenous mode helium-neon laser and super heterodyne phase measuring method
12/01/2005US20050264820 Optical mapping apparatus with optimized OCT configuration
12/01/2005US20050264795 Method for displaying result of measurement of eccentricity
11/2005
11/30/2005CN2743788Y Precise measuring optical projector
11/30/2005CN1703646A Laser system
11/30/2005CN1703609A Laser interferometer for repeatable mounting on the wall of a vacuum chamber
11/30/2005CN1702442A Method for displaying result of measurement of eccentricity
11/30/2005CN1702428A Differential interferometer with improved cyclic nonlinearity
11/29/2005US6970252 Low-coherence interferometric device for depth scanning an object
11/29/2005US6970251 Method for vibration measurement and interferometer
11/24/2005WO2005111557A1 Interferometer and fourier transform spectrometer
11/24/2005WO2005008214A3 Apparatus and method for ellipsometric measurements with high spatial resolution
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