| Patents for G01B 9 - Instruments as specified in the subgroups and characterised by the use of optical measuring means (14,810) |
|---|
| 08/16/2005 | US6930782 End point detection with imaging matching in semiconductor processing |
| 08/11/2005 | US20050177339 Precision surface measurement |
| 08/11/2005 | US20050174576 Gas discharge MOPA laser spectral analysis module |
| 08/11/2005 | US20050174566 Apparatus and method for measuring eccentricity of aspherical surface |
| 08/11/2005 | US20050174565 Optical testing method and apparatus |
| 08/11/2005 | DE202005008892U1 Middle frequency interpolator e.g. for carrier frequency interferometer, connected to input of reference channel and uses mode spacing frequency of laser light as reference signal |
| 08/11/2005 | DE10330363B4 Fabry-Pérot-Faserinterferometer Fabry-Perot fiber interferometer |
| 08/10/2005 | CN1653314A Surface profiling apparatus |
| 08/10/2005 | CN1651854A Mach-Zender phase shift vector shear interferometer |
| 08/10/2005 | CN1214300C Apparatus and method for recording off-axis hologram |
| 08/09/2005 | US6927860 Optical mapping apparatus with optimized OCT configuration |
| 08/04/2005 | WO2005070286A1 Interferometric device |
| 08/04/2005 | WO2005070166A2 Method and system for optically tracking a target using an interferometric technique |
| 08/04/2005 | US20050168791 System and method for calibrating a spatial light modulator array using shearing interferometry |
| 08/04/2005 | US20050168755 Spatial filtering in interferometry |
| 08/04/2005 | US20050168754 Cyclic error reduction in average interferometric position measurements |
| 08/04/2005 | US20050168752 Waveguide-based optical interferometer |
| 08/04/2005 | US20050168748 System and method for investigating photon or particle trajectory and interference pattern formation in double slit experiments |
| 08/03/2005 | EP1558904A1 Load dependent analyzing optical components |
| 08/03/2005 | EP1558190A2 Method and system for determining the position and alignment of a surface of an object in relation to a laser beam |
| 08/03/2005 | CN1650200A Polarizing beamsplitter |
| 08/03/2005 | CN1648700A Method for structuring feedback delay of optical fiber line and full light fiber white light interference system made thereof |
| 08/03/2005 | CN1213279C Multifunctional electronic speckle interferometer including semiconductor pump and total solid laser |
| 08/02/2005 | US6924898 Phase-shifting interferometry method and system |
| 08/02/2005 | US6924895 Sensor for optically sensing air borne acoustic waves |
| 08/02/2005 | US6924894 Temperature compensated interferometer |
| 07/28/2005 | WO2005069082A1 Differential critical dimension and overlay metrology apparatus and measurement method |
| 07/28/2005 | WO2005067579A2 Multi-axis interferometers and methods and systems using multi-axis interferometers |
| 07/28/2005 | WO2005033643A3 Rugged fabry-perot pressure sensor |
| 07/28/2005 | WO2004068088A3 Optical characterization of surfaces and plates |
| 07/28/2005 | US20050166118 Cyclic error compensation in interferometry systems |
| 07/28/2005 | US20050162664 Compensation for errors in off-axis interferometric measurements |
| 07/28/2005 | US20050162662 Method and device for measuring wall thickness of a pipe in a pipe-rolling mill |
| 07/28/2005 | US20050162659 Optical interferometer |
| 07/28/2005 | US20050162658 Terahertz modulation spectrometer |
| 07/28/2005 | DE10392876T5 Mehrstufige Datenverarbeitung für Frequenzabtastinterferometer Multilevel Data processing Frequenzabtastinterferometer |
| 07/28/2005 | DE10361522A1 Optisches System Optical system |
| 07/28/2005 | DE10360570A1 Optisches Meßsystem und optisches Meßverfahren An optical measurement system and optical measurement technique |
| 07/28/2005 | DE10317826B4 Verfahren und Vorrichtung zur interferometrischen Messung Method and apparatus for interferometric measurement |
| 07/27/2005 | EP1556930A2 Laser system using ultrashort laser pulses |
| 07/27/2005 | EP1556666A2 Two-wavelength confocal interferometer for measuring multiple surfaces |
| 07/27/2005 | CN1645036A Self-mixed interference displacement sensor based on two-way laser |
| 07/26/2005 | US6922250 Optical multiplex short coherence interferometry on the eye |
| 07/26/2005 | US6922249 Beam masking to reduce cyclic error in beam launcher of interferometer |
| 07/21/2005 | WO2005066998A1 Interference instrument |
| 07/21/2005 | WO2004068554A3 Analysis and monitoring of stresses in embedded lines and vias integrated on substrates |
| 07/21/2005 | US20050157953 Method and system for size calibration |
| 07/21/2005 | US20050157313 Shear inducing beamsplitter for interferometric image processing |
| 07/21/2005 | US20050157311 Scanning interferometer for aspheric surfaces and wavefronts |
| 07/21/2005 | US20050157310 Method and apparatus for simultaneously measuring displacement and angular variations |
| 07/21/2005 | US20050157281 Off-axis levelling in lithographic projection apparatus |
| 07/21/2005 | US20050156100 Method and system for optically tracking a target using an interferometric technique |
| 07/21/2005 | DE10392828T5 Interferometrieverfahren und -systeme mit gekoppelter Hohlraumgeometrie zur Verwendung mit einer erweiterten Quelle Interferometry and systems with coupled cavity geometry for use with an extended source |
| 07/21/2005 | DE10360078A1 Optische Messvorrichtung Optical measuring device |
| 07/21/2005 | DE10301607B4 Interferenzmesssonde Interference measuring probe |
| 07/20/2005 | EP1554539A2 Imaging systems |
| 07/20/2005 | EP1554538A1 Interferometer monitoring |
| 07/20/2005 | CN1643338A Optical displacement sensor |
| 07/14/2005 | WO2005062941A2 Multi-channel laser interferometric method and apparatus for detection of ultrasonic motion from a surface |
| 07/14/2005 | WO2005008334A3 Apparatus and method for high speed scan for detection and measurement of properties of sub-wavelength defects and artifacts in semiconductor and mask metrology |
| 07/14/2005 | US20050152030 Orientation independent differential interference contrast microscopy technique and device |
| 07/14/2005 | US20050151975 Fabry-perot fiber optic sensing device and method |
| 07/14/2005 | DE202004020220U1 Abstandsmessgerät mit Laseranzeigeeinrichtung Distance meter with laser display device |
| 07/14/2005 | DE19738900B4 Interferometrische Meßvorrichtung zur Formvermessung an rauhen Oberflächen Interferometric measurement device for shape measurement on rough surfaces |
| 07/14/2005 | DE10392881T5 Frequenzabtast-Interferometer mit nicht spiegelnder Referenzoberfläche Frequency sample interferometer with non-reflective reference surface |
| 07/14/2005 | DE102004042812A1 Phasenkompensierte Würfelecke bei der Laserinterferometrie Phase-compensated cube corner by the laser interferometry |
| 07/12/2005 | US6917432 Interferometers for measuring changes in optical beam direction |
| 07/07/2005 | WO2005062103A1 Optical system with a cameras device for viewing several objects arranged remotely from each other |
| 07/07/2005 | WO2005061986A1 Optical measuring device for heterodyn interferometric surface measurements |
| 07/07/2005 | WO2005060823A1 Optical measuring system and optical measuring method |
| 07/07/2005 | WO2005060677A2 Interferometric microscopy using reflective optics for complex surface shapes |
| 07/07/2005 | US20050146796 Polarizing beamsplitter |
| 07/07/2005 | US20050146730 Coherent beam device for observing and measuring sample |
| 07/07/2005 | US20050146727 Multi-axis interferometers and methods and systems using multi-axis interferometers |
| 07/06/2005 | EP1549904A1 Device for measuring an optical path length difference |
| 07/06/2005 | CN1635395A Two-photon-confocal optical manufacturing equipment for 3D micromachining or high-density information storage and method thereof |
| 07/06/2005 | CN1635332A 改进型迈克尔逊干涉仪 Modified Michelson interferometer |
| 07/05/2005 | US6914682 Interferometer and position measuring device |
| 07/05/2005 | US6914681 Interferometric optical component analyzer based on orthogonal filters |
| 06/30/2005 | WO2005043073A3 Reconfigureable interferometer system |
| 06/30/2005 | US20050140986 Lithographic apparatus, overlay detector, device manufacturing method, and device manufactured thereby |
| 06/30/2005 | US20050140983 Device for high-accuracy measurement of dimensional changes |
| 06/30/2005 | US20050140982 Method and apparatus for performing second harmonic optical coherence tomography |
| 06/30/2005 | US20050140981 Measurement of optical properties |
| 06/29/2005 | EP1546768A2 Laser system |
| 06/29/2005 | EP1546647A1 Laser interferometer for repeatable mounting on the wall of a vacuum chamber |
| 06/29/2005 | EP1546646A1 Interferometric measuring device |
| 06/29/2005 | EP1546645A2 Interferometric measuring device |
| 06/29/2005 | EP1206675B1 Fabrication of fabry-perot polymer film sensing interferometers |
| 06/29/2005 | CN1633582A Systems and methods for inspection of ophthalmic lenses |
| 06/29/2005 | CN1632451A Composite coding multiresolution three-dimensional digital imaging method |
| 06/29/2005 | CN1632450A X-ray speckle device and application thereof in microdisplacement measurement |
| 06/28/2005 | US6912055 Spherical form measuring and analyzing method |
| 06/28/2005 | US6912053 Ring laser scatterometer |
| 06/28/2005 | US6912052 Gas discharge MOPA laser spectral analysis module |
| 06/23/2005 | WO2005057128A1 Device for interaction-free measurements |
| 06/23/2005 | US20050134863 Interferometric microscopy using reflective optics for complex surface shapes |
| 06/23/2005 | US20050134862 Characterization and compensation of errors in multi-axis interferometry systems |
| 06/22/2005 | EP1543292A1 Interferometer optical element alignment |
| 06/21/2005 | US6909512 Method and apparatus for estimating piston using a grism |