Patents for G01B 11 - Measuring arrangements characterised by the use of optical means (73,862)
09/2003
09/11/2003US20030169432 Device for acquiring a three-dimensional shape by optoelectronic process
09/11/2003US20030169431 Image processing type of measuring device, lighting system for the same, lighting system control method, lighting system control program, and a recording medium with the lighting system control program recorded therein
09/11/2003US20030169430 Shape measuring method and apparatus using interferometer
09/11/2003US20030169424 Infrared detection of composite article components
09/11/2003US20030169423 Method and system for overlay measurement
09/11/2003US20030169418 Surface state inspecting method and substrate inspecting apparatus
09/11/2003US20030168614 Apparatus and method for inspecting pre-fastened articles
09/11/2003US20030168596 Microstructured pattern inspection method
09/11/2003US20030168594 Integrated measuring instrument
09/11/2003US20030167647 Portable coordinate measurement machine
09/11/2003DE20208966U1 Interferometric surface inspection system has alternate diffraction structures
09/10/2003EP1343332A2 Stereoscopic image characteristics examination system
09/10/2003EP1342985A1 Method and apparatus for measuring wear of inner surfaces of tubes
09/10/2003EP1342051A1 Calibration of a measuring sensor on an appliance for measuring co-ordinates by means of a ball and two parameter fields
09/10/2003EP1342050A1 Determination of correction parameters of a rotating swivel unit by means of a measuring sensor (device for measuring co-ordinates) over two parameter fields
09/10/2003EP1240572A4 Method of determining distance between two or more electronic devices
09/10/2003CN1441894A Confocal imaging system having divided retroreflector
09/10/2003CN1441294A Base board plying-up device and its method and base board detector
09/10/2003CN1441225A Stepped interference fringe subdividing device
09/09/2003US6618633 Method and apparatus for calibrating a first co-ordinate frame of an indexing means in a second frame of reference of a sensing means
09/09/2003US6618523 Unbalanced fiber optic Michelson interferometer as an optical pick-off
09/09/2003US6618496 Device for determining the position of measuring points of a measurement object relative to a reference system
09/09/2003US6618156 Cell thickness detection method, cell thickness control system, and manufacturing method for liquid crystal device
09/09/2003US6618155 Method and apparatus for scanning lumber and other objects
09/09/2003US6618154 Optical measurement arrangement, in particular for layer thickness measurement
09/09/2003US6618133 Low cost transmitter with calibration means for use in position measurement systems
09/09/2003US6618123 Range-finder, three-dimensional measuring method and light source apparatus
09/09/2003US6617602 Edge detecting apparatus having a control device which selectively operates the light emitting elements
09/09/2003US6617569 Probe opening forming apparatus and near-field optical microscope using the same
09/09/2003US6616543 Apparatus to determine golf ball trajectory and flight
09/09/2003US6615477 Method and apparatus for processing workpiece by using X-Y stage capable of improving position accuracy
09/04/2003WO2003073476A2 Apparatus and methods for optically inspecting a sample for anomalies
09/04/2003WO2003073366A1 Pattern recognition system
09/04/2003WO2003073121A1 Spherically mounted light source with angle measuring device, tracking system, and method for determining coordinates
09/04/2003WO2003073078A2 Method for evaluation of the light-reflecting properties of a surface and device for carrying out the same
09/04/2003WO2003073044A1 Three-dimensional measuring instrument
09/04/2003WO2003073043A1 Device for the contactless measurement of a distance in relation to a surface located in a narrow gap
09/04/2003WO2003073041A1 Low-coherence inferometric device for light-optical scanning of an object
09/04/2003WO2003050472A8 Systems and methods for wavefront measurement
09/04/2003US20030165265 Alignment apparatus, control method thereof, exposure apparatus and method of manufacturing semiconductor device by exposure apparatus controlled by the same control method
09/04/2003US20030165264 Part recognition data creation method and apparatus, electronic part mounting apparatus, and recorded medium
09/04/2003US20030164954 Device for optoelectronically determining the length and/or the width of a body situated on a support
09/04/2003US20030164953 Operation lamp with camera system for 3D referencing
09/04/2003US20030164952 Method and apparatus for three-dimensional optical scanning of interior surfaces
09/04/2003US20030164950 Method for measuring two-dimensional displacement using conjugate optics
09/04/2003US20030164948 Multiple degree of freedom interferometer
09/03/2003EP1341223A1 Polishing progress monitoring method and device thereof, polishing device, semiconductor device production method, and semiconductor device
09/03/2003EP1340799A1 Device and method for measuring width of furnace
09/03/2003EP1340470A1 Operation theatre lighting device with camera system for three-dimensional referencing
09/03/2003EP1340041A1 Method and device for contactless measurement of a linear textile formation such as yarn etc
09/03/2003EP1339570A1 Device and method for detecting an object in a vehicle
09/03/2003EP1339561A1 System and method for monitoring the surrounding area of a vehicle
09/03/2003EP1339522A1 Laser ablation
09/03/2003EP0988620B1 Image segmentation method
09/03/2003CN2570733Y Optical fibre strain transducer
09/03/2003CN2570732Y Precision measuring instrument
09/03/2003CN1440543A Image processing system for use with inspection systems
09/03/2003CN1440541A Part recognition data creation method and apparatus, electronic part mounting apparatus and recorded medium
09/03/2003CN1439864A Laser multiple degree-of-freedom measuring system and method
09/03/2003CN1439863A Variable-accuracy electronic laser two-dimensional dip measuring method and device
09/02/2003US6615112 Method and device for calibrating robot measuring stations, manipulators and associated optical measuring devices
09/02/2003US6614924 Adaptive mask technique for defect inspection
09/02/2003US6614923 Pattern inspecting method and apparatus thereof, and pattern inspecting method on basis of electron beam images and apparatus thereof
09/02/2003US6614540 Method and apparatus for determining feature characteristics using scatterometry
09/02/2003US6614538 Method and apparatus for recording medical objects, in particular for recording models of prepared teeth
09/02/2003US6614537 Measuring apparatus and measuring method
09/02/2003US6614534 Method and apparatus for combined measurement of surface non-uniformity index of refraction variation and thickness variation
09/02/2003US6614530 Method and device for the colorimetric measurement of a colored surface
09/02/2003US6614529 In-situ real-time monitoring technique and apparatus for endpoint detection of thin films during chemical/mechanical polishing planarization
09/02/2003US6614015 Detector of stains on a transparent plate surface
09/02/2003US6614014 Method for selecting the operation of an optical detector and multimode optical detector
09/02/2003US6613041 Device for determining the surface shape of biological tissue
09/02/2003US6612164 Measuring device and sensor for contactlessly measuring tire forces
09/02/2003US6612160 Apparatus and method for isolating and measuring movement in metrology apparatus
08/2003
08/28/2003WO2003071471A1 Overlay metrology and control method
08/28/2003WO2003071234A1 (fiber) optic sensor with proper modulation
08/28/2003WO2003071229A2 Rapid high resolution position sensor for auto steering
08/28/2003WO2003071226A2 Chromatic diffraction range finder
08/28/2003WO2003071224A1 Method of detecting object of detection and device therefor, and method of inspecting object of inspection and device therefor
08/28/2003WO2003070090A2 Tracking assisted optical coherence tomography
08/28/2003WO2003014674A3 Two delay coil sagnac-based sensor array
08/28/2003WO2002071117A3 Optical delay line
08/28/2003US20030161506 Face detection computer program product for redeye correction
08/28/2003US20030161038 Microscope and method for measuring surface topography in a quantitative and optical manner
08/28/2003US20030160974 Measurement of cylindrical objects through laser telemetry
08/28/2003US20030160973 Bearing with oil film thickness measuring device
08/28/2003US20030160972 Method and apparatus for measuring thickness of a thin oxide layer
08/28/2003US20030160970 Method and apparatus for high resolution 3D scanning
08/28/2003US20030160969 Interference measuring device
08/28/2003US20030160968 Phase-shifting interferometry method and system
08/28/2003US20030160960 Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device
08/28/2003US20030160959 Apparatus for analyzing multi-layer thin film stacks on semiconductors
08/28/2003US20030160943 Tracking assisted optical procedure
08/28/2003US20030160942 Tracking assisted optical coherence tomography
08/28/2003US20030160709 Centreline identification in a docking guidance system
08/28/2003US20030160195 Surface position detection apparatus and method, and exposure apparatus and device manufacturing method using said exposure apparatus
08/28/2003US20030160193 Rolling and lathing parameter measuring device by artificial viewing for railway vehicle wheels
08/28/2003US20030160152 Optical sensing circuit and pointing device using the same
08/28/2003US20030159769 Substrate laminating apparatus and method thereof and substrate detecting apparatus
08/28/2003DE19937078C2 Meßeinrichtung zur berührungslosen Messung von Reifenkräften Measuring device for the contactless measurement of tire forces