Patents for G01B 11 - Measuring arrangements characterised by the use of optical means (73,862) |
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12/30/2003 | CA2122020C Multiple coat measurement and control |
12/25/2003 | WO2003106916A2 Optical metrology of single features |
12/25/2003 | US20030235331 Three-dimensional monitoring apparatus |
12/25/2003 | US20030235330 Position detection apparatus, position detection method, exposure apparatus, device manufacturing method, and substrate |
12/25/2003 | US20030234941 Method of measuring a part with a wide range of surface reflectivities |
12/25/2003 | US20030234939 Alignment apparatus, control method therefor, exposure apparatus, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method |
12/25/2003 | US20030234936 Common-path frequency-scanning interferometer |
12/25/2003 | US20030234920 Device for measuring colour, lustre and undulations on lacquered freeform surfaces |
12/25/2003 | US20030234352 Optical position sensing device |
12/25/2003 | US20030234351 Brightness independent optical position sensor |
12/25/2003 | US20030233760 Rotating swivel unit for sensors of a coordinate measuring apparatus and method for determining corrective parameters of the rotating swivel unit |
12/25/2003 | US20030233758 Vehicle wheel toe-in alignment apparatus and method |
12/24/2003 | WO2003107064A1 Confocal microscope and method for measuring by confocal microscope |
12/24/2003 | WO2003106982A1 Method of measuring chromated conversion coating amount using infrared absorbance |
12/24/2003 | WO2003106925A1 Semiconductor wafer shape evaluating method and shape evaluating device |
12/24/2003 | WO2003106923A1 Method of measuring sol-gel coating thickness using infrared absorbance |
12/24/2003 | WO2003106922A1 Method of measuring anodize coating amount using infrared absorbance |
12/24/2003 | WO2003106921A1 Interferometric optical system and methods providing simultaneously scanned optical path length and focus |
12/24/2003 | WO2003106920A1 Interferometry methods and systems having a coupled cavity geometry for use with an extended source |
12/24/2003 | WO2003106919A2 Interferometry systems involving a dynamic beam-steering assembly |
12/24/2003 | WO2003106918A2 Device for measuring surfaces and method for the mechanical and contactless-optical analysis of object surfaces |
12/24/2003 | WO2003106314A2 Method and apparatus for on-line log diameter measurement and closed-loop control |
12/24/2003 | WO2003081715A3 Wave interrogated near field array system and method for detection of subwavelength scale anomalies |
12/24/2003 | WO2003076871A3 Device and method for measuring geometries of essentially two-dimensional objects |
12/24/2003 | WO2003075041A3 Optical measurements of line edge roughness |
12/24/2003 | WO2003071226A3 Chromatic diffraction range finder |
12/24/2003 | WO2003070090A3 Tracking assisted optical coherence tomography |
12/24/2003 | WO2003064738A3 Multi-measurement / sensor coating consolidation detection method and system |
12/24/2003 | WO2002054849A8 A method and an apparatus for measuring positions of contact elements of an electronic component |
12/24/2003 | DE19942083C2 Werkzeug-, Handhabung- oder Messmaschine Tool, GH or measuring machine |
12/24/2003 | DE10238078C1 Verfahren und Anordnung zur orts- und winkelaufgelösten Reflexionsmessung Method and system for location and angle-resolved reflectance measurement |
12/24/2003 | CN2594840Y Device for detecting, correcting or adjusting angle location of rotary body |
12/24/2003 | CN1463355A Optical appts. for measuring objects having rectiliear profile |
12/24/2003 | CN1463243A Method of determining storage charge of storage rack |
12/24/2003 | CN1463032A Identifying method of mark on semiconductor device |
12/24/2003 | CN1462879A Method and system for measuring qaulity of multi component yarns |
12/24/2003 | CN1132056C Optical device for probing rotating and linear motion |
12/23/2003 | US6668082 Image processing apparatus |
12/23/2003 | US6667806 Process and apparatus for manufacturing semiconductor device |
12/23/2003 | US6667800 Method and device for measuring and quantifying surface defects on a test surface |
12/23/2003 | US6667798 Method and device for determining spatial positions and orientations |
12/23/2003 | US6666855 Methods and systems for laser calibration and eye tracker camera alignment |
12/18/2003 | WO2003105289A2 Methods and systems for laser based real-time structured light depth extraction |
12/18/2003 | WO2003105217A1 Wafer pre-alignment apparatus and method |
12/18/2003 | WO2003104929A2 Use of overlay diagnostics for enhanced automatic process control |
12/18/2003 | WO2003104838A1 Flight parameter measurement system |
12/18/2003 | WO2003104780A1 Label inspection method and label inspection device |
12/18/2003 | WO2003104747A1 Optical measurement of vane ring throat area |
12/18/2003 | WO2003104745A1 Device for measuring external and internal dimensions and distances between measurement objects |
12/18/2003 | WO2003104744A1 Method for obtaining the image of an object, device for carrying out said method and device for delivering low coherent optical radiation |
12/18/2003 | WO2003103898A1 Residual film monitoring device, polishing device, method for manufacturing semiconductor device, and semiconductor device |
12/18/2003 | WO2003103886A2 Laser machining apparatus with automatic focusing |
12/18/2003 | WO2003087710A3 Method and apparatus for stage mirror mapping |
12/18/2003 | WO2003083560A3 Uv compatible programmable spatial filter |
12/18/2003 | WO2003032373A3 Semiconductor device identification apparatus |
12/18/2003 | WO2003009070A3 Method for measuring an object by means of a co-ordinate measuring device with an image processing sensor |
12/18/2003 | US20030233166 Method for locating articles on a support plane |
12/18/2003 | US20030232454 Optical metrology of single features |
12/18/2003 | US20030232448 Surface cleanliness measurement with infrared spectroscopy |
12/18/2003 | US20030232445 Apparatus for detecting dysplasic or cancerous tissues |
12/18/2003 | US20030231793 Scanning apparatus and method |
12/18/2003 | US20030231511 Line generator optical apparatus |
12/18/2003 | US20030231494 Ring illuminator |
12/18/2003 | US20030231319 Frequency splitting laser micrometer |
12/18/2003 | US20030231318 Method and apparatus for on-line log diameter measurement and closed-loop control |
12/18/2003 | US20030231298 System and method for wavefront measurement |
12/18/2003 | US20030230720 Method of measuring chromated conversion coating amount using infrared absorbance |
12/18/2003 | US20030230719 Method of measuring sol-gel coating thickness using infrared absorbance |
12/18/2003 | US20030230718 Method of measuring anodize coating amount using infrared absorbance |
12/18/2003 | DE10242769C1 Position measuring method for robot-guided workpiece using optical sensors in known positions relative to fixed tool |
12/18/2003 | CA2487893A1 Method for obtaining the image of an object, device for carrying out said method and device for delivering low coherent optical radiation |
12/17/2003 | EP1372341A2 Information display system and portable information terminal |
12/17/2003 | EP1372112A2 Combined laser/flir optics system |
12/17/2003 | EP1372040A2 Lithographic apparatus and device manufacturing method |
12/17/2003 | EP1371994A2 Apparatus to measure and control large-size plane elements |
12/17/2003 | EP1371969A1 Sensor alignment method for 3D measurement systems |
12/17/2003 | EP1371956A1 Displacement/quantity of light converter |
12/17/2003 | EP1371943A1 Method for noncontact inspection of dimensions of three-dimensional objects |
12/17/2003 | EP1371942A1 Device for contactless inspection of linear dimensions of three-dimensional objects |
12/17/2003 | EP1371941A2 Method and device for the contactless detection of measurement objects |
12/17/2003 | EP1371940A1 Method to identify objects on a conveyor line |
12/17/2003 | EP1371939A1 A device for measuring in three dimensions a topographical shape of an object |
12/17/2003 | EP1370831A2 Method and arrangement for photographically detecting the spatial form of an object |
12/17/2003 | EP1370828A1 Line profile asymmetry measurement using scatterometry |
12/17/2003 | EP0986732B1 Measurement of grooves and long waves on rails with a longitudinal streak of light |
12/17/2003 | CN1461977A Projection exposure device, position alignment device and position alignment method |
12/17/2003 | CN1461948A Method and device for investigating polarization film |
12/17/2003 | CN1461947A Method and device for investigating polarization film |
12/17/2003 | CN1131441C Coatings, methods and apparatus for reducing reflction from optical substrates |
12/17/2003 | CN1131415C Device and method for calibration of elements |
12/16/2003 | US6665424 Automatic inspection of print quality using an elastic model |
12/16/2003 | US6665079 Method and apparatus for locating electromagnetic imaging and detection systems/devices |
12/16/2003 | US6665078 System and method for simultaneously measuring thin film layer thickness, reflectivity, roughness, surface profile and magnetic pattern in thin film magnetic disks and silicon wafers |
12/16/2003 | US6665077 Method and apparatus for enhanced sensitivity fly height testing and measurement |
12/16/2003 | US6665070 Alignment of a rotatable polarizer with a sample |
12/16/2003 | US6665064 Electrooptical measurement device for ascertaining the relative position of bodies or of surface areas of these bodies |
12/16/2003 | US6665062 Inclinometer with bragg grating |
12/16/2003 | US6665059 Method of measuring an inner stress state of disk substrate |
12/16/2003 | US6664531 Combined stereovision, color 3D digitizing and motion capture system |
12/16/2003 | US6664121 Method and apparatus for position measurement of a pattern formed by a lithographic exposure tool |