Patents for G01B 11 - Measuring arrangements characterised by the use of optical means (73,862)
12/2003
12/30/2003CA2122020C Multiple coat measurement and control
12/25/2003WO2003106916A2 Optical metrology of single features
12/25/2003US20030235331 Three-dimensional monitoring apparatus
12/25/2003US20030235330 Position detection apparatus, position detection method, exposure apparatus, device manufacturing method, and substrate
12/25/2003US20030234941 Method of measuring a part with a wide range of surface reflectivities
12/25/2003US20030234939 Alignment apparatus, control method therefor, exposure apparatus, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method
12/25/2003US20030234936 Common-path frequency-scanning interferometer
12/25/2003US20030234920 Device for measuring colour, lustre and undulations on lacquered freeform surfaces
12/25/2003US20030234352 Optical position sensing device
12/25/2003US20030234351 Brightness independent optical position sensor
12/25/2003US20030233760 Rotating swivel unit for sensors of a coordinate measuring apparatus and method for determining corrective parameters of the rotating swivel unit
12/25/2003US20030233758 Vehicle wheel toe-in alignment apparatus and method
12/24/2003WO2003107064A1 Confocal microscope and method for measuring by confocal microscope
12/24/2003WO2003106982A1 Method of measuring chromated conversion coating amount using infrared absorbance
12/24/2003WO2003106925A1 Semiconductor wafer shape evaluating method and shape evaluating device
12/24/2003WO2003106923A1 Method of measuring sol-gel coating thickness using infrared absorbance
12/24/2003WO2003106922A1 Method of measuring anodize coating amount using infrared absorbance
12/24/2003WO2003106921A1 Interferometric optical system and methods providing simultaneously scanned optical path length and focus
12/24/2003WO2003106920A1 Interferometry methods and systems having a coupled cavity geometry for use with an extended source
12/24/2003WO2003106919A2 Interferometry systems involving a dynamic beam-steering assembly
12/24/2003WO2003106918A2 Device for measuring surfaces and method for the mechanical and contactless-optical analysis of object surfaces
12/24/2003WO2003106314A2 Method and apparatus for on-line log diameter measurement and closed-loop control
12/24/2003WO2003081715A3 Wave interrogated near field array system and method for detection of subwavelength scale anomalies
12/24/2003WO2003076871A3 Device and method for measuring geometries of essentially two-dimensional objects
12/24/2003WO2003075041A3 Optical measurements of line edge roughness
12/24/2003WO2003071226A3 Chromatic diffraction range finder
12/24/2003WO2003070090A3 Tracking assisted optical coherence tomography
12/24/2003WO2003064738A3 Multi-measurement / sensor coating consolidation detection method and system
12/24/2003WO2002054849A8 A method and an apparatus for measuring positions of contact elements of an electronic component
12/24/2003DE19942083C2 Werkzeug-, Handhabung- oder Messmaschine Tool, GH or measuring machine
12/24/2003DE10238078C1 Verfahren und Anordnung zur orts- und winkelaufgelösten Reflexionsmessung Method and system for location and angle-resolved reflectance measurement
12/24/2003CN2594840Y Device for detecting, correcting or adjusting angle location of rotary body
12/24/2003CN1463355A Optical appts. for measuring objects having rectiliear profile
12/24/2003CN1463243A Method of determining storage charge of storage rack
12/24/2003CN1463032A Identifying method of mark on semiconductor device
12/24/2003CN1462879A Method and system for measuring qaulity of multi component yarns
12/24/2003CN1132056C Optical device for probing rotating and linear motion
12/23/2003US6668082 Image processing apparatus
12/23/2003US6667806 Process and apparatus for manufacturing semiconductor device
12/23/2003US6667800 Method and device for measuring and quantifying surface defects on a test surface
12/23/2003US6667798 Method and device for determining spatial positions and orientations
12/23/2003US6666855 Methods and systems for laser calibration and eye tracker camera alignment
12/18/2003WO2003105289A2 Methods and systems for laser based real-time structured light depth extraction
12/18/2003WO2003105217A1 Wafer pre-alignment apparatus and method
12/18/2003WO2003104929A2 Use of overlay diagnostics for enhanced automatic process control
12/18/2003WO2003104838A1 Flight parameter measurement system
12/18/2003WO2003104780A1 Label inspection method and label inspection device
12/18/2003WO2003104747A1 Optical measurement of vane ring throat area
12/18/2003WO2003104745A1 Device for measuring external and internal dimensions and distances between measurement objects
12/18/2003WO2003104744A1 Method for obtaining the image of an object, device for carrying out said method and device for delivering low coherent optical radiation
12/18/2003WO2003103898A1 Residual film monitoring device, polishing device, method for manufacturing semiconductor device, and semiconductor device
12/18/2003WO2003103886A2 Laser machining apparatus with automatic focusing
12/18/2003WO2003087710A3 Method and apparatus for stage mirror mapping
12/18/2003WO2003083560A3 Uv compatible programmable spatial filter
12/18/2003WO2003032373A3 Semiconductor device identification apparatus
12/18/2003WO2003009070A3 Method for measuring an object by means of a co-ordinate measuring device with an image processing sensor
12/18/2003US20030233166 Method for locating articles on a support plane
12/18/2003US20030232454 Optical metrology of single features
12/18/2003US20030232448 Surface cleanliness measurement with infrared spectroscopy
12/18/2003US20030232445 Apparatus for detecting dysplasic or cancerous tissues
12/18/2003US20030231793 Scanning apparatus and method
12/18/2003US20030231511 Line generator optical apparatus
12/18/2003US20030231494 Ring illuminator
12/18/2003US20030231319 Frequency splitting laser micrometer
12/18/2003US20030231318 Method and apparatus for on-line log diameter measurement and closed-loop control
12/18/2003US20030231298 System and method for wavefront measurement
12/18/2003US20030230720 Method of measuring chromated conversion coating amount using infrared absorbance
12/18/2003US20030230719 Method of measuring sol-gel coating thickness using infrared absorbance
12/18/2003US20030230718 Method of measuring anodize coating amount using infrared absorbance
12/18/2003DE10242769C1 Position measuring method for robot-guided workpiece using optical sensors in known positions relative to fixed tool
12/18/2003CA2487893A1 Method for obtaining the image of an object, device for carrying out said method and device for delivering low coherent optical radiation
12/17/2003EP1372341A2 Information display system and portable information terminal
12/17/2003EP1372112A2 Combined laser/flir optics system
12/17/2003EP1372040A2 Lithographic apparatus and device manufacturing method
12/17/2003EP1371994A2 Apparatus to measure and control large-size plane elements
12/17/2003EP1371969A1 Sensor alignment method for 3D measurement systems
12/17/2003EP1371956A1 Displacement/quantity of light converter
12/17/2003EP1371943A1 Method for noncontact inspection of dimensions of three-dimensional objects
12/17/2003EP1371942A1 Device for contactless inspection of linear dimensions of three-dimensional objects
12/17/2003EP1371941A2 Method and device for the contactless detection of measurement objects
12/17/2003EP1371940A1 Method to identify objects on a conveyor line
12/17/2003EP1371939A1 A device for measuring in three dimensions a topographical shape of an object
12/17/2003EP1370831A2 Method and arrangement for photographically detecting the spatial form of an object
12/17/2003EP1370828A1 Line profile asymmetry measurement using scatterometry
12/17/2003EP0986732B1 Measurement of grooves and long waves on rails with a longitudinal streak of light
12/17/2003CN1461977A Projection exposure device, position alignment device and position alignment method
12/17/2003CN1461948A Method and device for investigating polarization film
12/17/2003CN1461947A Method and device for investigating polarization film
12/17/2003CN1131441C Coatings, methods and apparatus for reducing reflction from optical substrates
12/17/2003CN1131415C Device and method for calibration of elements
12/16/2003US6665424 Automatic inspection of print quality using an elastic model
12/16/2003US6665079 Method and apparatus for locating electromagnetic imaging and detection systems/devices
12/16/2003US6665078 System and method for simultaneously measuring thin film layer thickness, reflectivity, roughness, surface profile and magnetic pattern in thin film magnetic disks and silicon wafers
12/16/2003US6665077 Method and apparatus for enhanced sensitivity fly height testing and measurement
12/16/2003US6665070 Alignment of a rotatable polarizer with a sample
12/16/2003US6665064 Electrooptical measurement device for ascertaining the relative position of bodies or of surface areas of these bodies
12/16/2003US6665062 Inclinometer with bragg grating
12/16/2003US6665059 Method of measuring an inner stress state of disk substrate
12/16/2003US6664531 Combined stereovision, color 3D digitizing and motion capture system
12/16/2003US6664121 Method and apparatus for position measurement of a pattern formed by a lithographic exposure tool