Patents for G01B 11 - Measuring arrangements characterised by the use of optical means (73,862)
01/2004
01/27/2004US6683684 Device for measuring relative position error
01/27/2004US6683682 Electronic component inspection equipment
01/27/2004US6683676 Three-dimensional image capturing device
01/27/2004US6683675 Distance measuring apparatus and distance measuring method
01/27/2004US6682810 Fluorescent materials
01/22/2004WO2004008077A1 Optical encoder
01/22/2004WO2004008069A1 Method and apparatus for optically measuring the topography of nearly planar periodic structures
01/22/2004WO2004008068A1 Overlay error detection
01/22/2004WO2004008067A1 Inspection of railway vehicles
01/22/2004WO2003064962A3 Multi-axis interferometer
01/22/2004US20040014395 Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations
01/22/2004US20040014250 Method and apparatus for determining layer thickness and composition using ellipsometric evaluation
01/22/2004US20040013414 Determining the position of an axis of rotation (patient positioning table, radiation therapy) on the basis of an angle of rotation and a chord through a movable mark
01/22/2004US20040013295 Obstacle recognition apparatus and method, obstacle recognition program, and mobile robot apparatus
01/22/2004US20040012794 Two-dimensional scale structures and method usable in an absolute position transducer
01/22/2004US20040012791 Interferometer having a coupled cavity geometry for use with an extended source
01/22/2004US20040012790 Reflection-photometric analytical system
01/22/2004US20040011946 Apparatus for measuring position of fine particle
01/22/2004US20040011120 Device for detecting a running surface and vehicle using same
01/22/2004DE4206281B4 Erfassung von Partikeln mit Durchmessern im Submikron-Bereich unter Verwendung eines Feldes mit hoher Dichte Detection of particles having diameters in the submicron range using an array of high density
01/22/2004DE10254542A1 Vorrichtung und Verfahren zur Detektion der Kontur beliebiger Teile, insbesondere von Gussteilen Apparatus and method for detection of the contour of any parts, in particular of castings
01/22/2004DE10230972A1 Gerät mit Mitteln zur Positionsbestimung von Geräteteilen Device with means for Positionsbestimung of equipment parts
01/22/2004DE10228515A1 Höhenmess- und Anreißgerät Height gauge
01/22/2004DE10006083B4 Verfahren zur quantitativen und/oder qualitativen Bestimmung von Schichtdicken sowie ein Mikroreaktionsgefäß und eine Titerplatte A method for quantitative and / or qualitative determination of layer thickness and a micro reactor and a titer plate
01/21/2004EP1382959A1 Analysis device for reflectance photometry
01/21/2004EP1382940A2 Absolute position transducer
01/21/2004EP1381825A1 Method and apparatus for decreasing thermal loading and roughness sensitivity in a photoacoustic film thickness measurement system
01/21/2004EP1381824A1 Measurement of components that have been micro-galvanically produced, using a sample component by means of photoresist webs
01/21/2004CN1469990A Position detection method, position detection device, exposure method, exposure system, control program, and device production method
01/21/2004CN1469113A Defect detecting apparatus, method and its program
01/21/2004CN1469101A Method for extracting round area from fringe pattern
01/21/2004CN1135072C Method and apparatus for testing cigarette tip
01/20/2004US6680781 Critical dimension measurement method and apparatus capable of measurement below the resolution of an optical microscope
01/20/2004US6679756 Method and apparatus for monitoring polishing state, polishing device, process wafer, semiconductor device, and method of manufacturing semiconductor device
01/20/2004US6679106 Road surface roughness measuring device
01/15/2004WO2004006022A1 System and method for optical metrology of semiconductor wafers
01/15/2004WO2004005955A1 Method and system of triangulating an object
01/15/2004WO2004005902A1 Optical measuring method and device therefor
01/15/2004WO2004005848A1 Laser calibration apparatus
01/15/2004WO2004005052A2 Tyre wear indicator
01/15/2004WO2004004926A1 Apparatus and method for simultaneously coating and measuring parts
01/15/2004US20040008878 Apparatus and method for measuring amount of projection of abrasive grain on grinding tool
01/15/2004US20040008869 Discriminating method for recording medium and recording apparatus
01/15/2004US20040008435 Optical film thickness controlling method, optical film thickness controlling apparatus, dielectric multilayer film manufacturing apparatus, and dielectric multilayer film manufactured using the same controlling apparatus or manufacturing apparatus
01/15/2004US20040008352 Precision size measuring apparatus
01/15/2004US20040008339 Method and apparatus for core alignment between optical components
01/15/2004US20040008337 Spatial tracking system
01/15/2004US20040008297 Liquid crystal display device and inspection method for a transparent substrate
01/15/2004US20040008259 Optical methods for remotely measuring objects
01/15/2004US20040007020 Method and system for positioning a glass plate, and method and system for bending a glass plate
01/15/2004US20040006882 Portable coordinate measurement machine with integrated magnetic mount
01/15/2004DE10322907A1 Device for measuring dimensions, distances has common light source/separate source per slot with light of one or different frequencies or frequency modulated light amplitudes for slots in slotted stop
01/15/2004DE10229818A1 Verfahren zur Fokusdetektion und Abbildungssystem mit Fokusdetektionssystem Method of focus detection and imaging system with focus detection system
01/15/2004DE10229816A1 Vorrichtung zur Erzeugung einer konvergenten Lichtwellenfront und System zur interferometrischen Linsenflächenvermessung An apparatus for generating a convergent optical system for interferometric and front lens surface surveying
01/15/2004DE10229336A1 Verfahren und Vorrichtung zur Kalibrierung von Bildsensorsystemen Method and apparatus for calibration of image sensor systems
01/15/2004DE10227376A1 Verfahren zur Bestimmung von Schichtdickenbereichen A method for determining layer thickness ranges
01/15/2004DE10227345A1 Verfahren zur Bestimmung lokaler Strukturen in optischen Kristallen Method for the determination of local structures in optical crystals
01/15/2004DE10225487A1 Vorrichtung und Verfahren zur Bestimmung der dreidimensionalen Lageabweichung eines Gegenstandes von einer Standardlage Apparatus and method for determining the three-dimensional positional deviation of an object from a standard position
01/15/2004DE10101057B4 Verfahren und Vorrichtung zur Erfassung der Verformung von Objekten Method and apparatus for detecting the deformation of objects
01/14/2004EP1380811A1 Optical distance measuring device
01/14/2004EP1379835A1 Method for automatic adjustment of focus and lighting and for objectivated scanning of edge site in optical precision measuring technique
01/14/2004EP1379834A1 Optical apparatus for measuring objects having a rectilinear profile
01/14/2004EP1379833A1 Method for indicating a point in a measurement space
01/14/2004EP1379832A1 Length sensor
01/14/2004CN2599526Y Two-dimensional grating length-measuring unit
01/14/2004CN2599524Y Dot diffraction interferometer for detecting surface shape
01/14/2004CN1468371A Reduction of error alarm in PCB detection
01/14/2004CN1468367A Differential numerical aperture methods and device
01/14/2004CN1468290A Luminescent paint
01/14/2004CN1467569A Projection exposure equipment
01/14/2004CN1467479A Two dimension coding type zero aligning marker and coding method
01/14/2004CN1467478A Automatic measuring method of optical regulator
01/14/2004CN1467476A Method of assisting sample inclination error adjustment
01/14/2004CN1134663C Apparatus and methods for measurement and classification of generalized cotton like entities in fiber samples
01/14/2004CN1134571C Measuring and control system of pavement straightness for paving machine
01/13/2004US6678433 Apparatus and method for measuring residual stress and photoelastic effect of optical fiber
01/13/2004US6678240 Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements
01/13/2004US6678063 Measuring device for reinforcing steel rods for concrete
01/13/2004US6678062 Automated system with improved height sensing
01/13/2004US6678061 Method of calibrating the optical system of a laser machine for processing electrical circuit substrates
01/13/2004US6678060 Monitoring distance variations
01/13/2004US6678059 Apparatus for measuring 6-degree-of-freedom motions of rigid body by using three-facet mirror
01/13/2004US6678058 Integrated alignment and calibration of optical system
01/13/2004US6678057 Method and device for reduction in noise in images from shiny parts
01/13/2004US6678055 Method and apparatus for measuring stress in semiconductor wafers
01/13/2004US6678047 Method and apparatus for aligning optical axes of optical components
01/13/2004US6677863 Absolute encoder
01/13/2004US6677603 Paper sheet discriminating device
01/13/2004US6677573 Laser sensor having a pinhole for particle measurement
01/13/2004US6677170 Method for determining process layer thickness using scatterometry measurements
01/13/2004US6676717 Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations
01/13/2004CA2284025C Measuring system using laser technique for three-dimensional objects
01/08/2004WO2004003845A1 Device and method for detecting the contour of any part, particularly of cast parts
01/08/2004WO2004003470A1 Thin films measurement method and system
01/08/2004WO2004003463A2 Interferometer system of compact configuration
01/08/2004WO2004002626A1 Delivery of metered amounts of liquid materials
01/08/2004WO2004002593A1 Information processor having input system using stroboscope
01/08/2004WO2003089873A3 Methods and computer program products for characterizing a crystalline structure
01/08/2004WO2003069392A3 Optical rotating transmitter having a free inside diameter
01/08/2004WO2003067246A3 Use of electronic speckle interferometry for defect detection in fabricated devices