Patents for G01B 11 - Measuring arrangements characterised by the use of optical means (73,862) |
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12/16/2003 | US6664012 Projection imaging of microelectronics using mask and substrate mounted on scanning platform; optical path from light source, refractive elements, reverser, reflector, lens and fold mirror |
12/16/2003 | US6663391 Spotlighted position detection system and simulator |
12/16/2003 | US6662623 Apparatus and method for glide height calibration of disk surfaces by use of dual-zone laser texture |
12/11/2003 | WO2003102853A1 Selection of wavelengths for integrated circuit optical metrology |
12/11/2003 | WO2003102503A1 Method and device for measuring wheel alignment of car |
12/11/2003 | WO2003102502A1 Method and device for determining the thickness of a layer applied to a carrier, and monitoring system |
12/11/2003 | WO2003102501A1 Franking system and method |
12/11/2003 | WO2003102500A1 Method of obtaining 3-d coordinates |
12/11/2003 | WO2003102498A1 “tracking torsional eye orientation and position” |
12/11/2003 | WO2003102495A2 Metrology system for precision 3d motion |
12/11/2003 | WO2003067351A3 Stabilisation and control of aircraft and other objects |
12/11/2003 | WO2003019184A9 Biometric quality control process |
12/11/2003 | US20030229413 System for analysis of fabric surface |
12/11/2003 | US20030229279 Determination of deformations of surgical tools |
12/11/2003 | US20030228070 Method of measuring rotational amount of body having curved surface and direction of rotational axis thereof, apparatus of measuring rotational amount thereof and direction of rotational axis thereof, and method of specifying three-dimensional posture thereof |
12/11/2003 | US20030228069 Optical measurement of vane ring throat area |
12/11/2003 | US20030228066 Image data processing unit for use in a visual inspection device |
12/11/2003 | US20030227636 Method and apparatus for detecting the presence and thickness of carbon and oxide layers on EUV reflective surfaces |
12/11/2003 | US20030227635 Device and method for the optical detection of objects |
12/11/2003 | US20030227633 Method of assisting sample inclination error adjustment |
12/11/2003 | US20030227632 Apparatus and method for measuring digital imager, package and wafer bow and deviation from flatness |
12/11/2003 | US20030227617 Method and apparatus for detecting pattern defects |
12/11/2003 | US20030227616 Spherically mounted light source with angle measuring device, tracking system, and method for determining coordinates |
12/11/2003 | US20030227615 Apparatus for and method of aligning a structure |
12/11/2003 | US20030227614 Laser machining apparatus with automatic focusing |
12/11/2003 | US20030227604 Lithographic apparatus, alignment method and device manufacturing method |
12/11/2003 | US20030227440 Device and a method for producing information about the properties of an environment |
12/11/2003 | US20030226956 Optical non-contact measuring probe |
12/11/2003 | US20030226268 Light projecting goniometer |
12/11/2003 | DE20315895U1 Illumination device for optical testing of surface geometry of material with coating, using camera, has polarization filter with refractive index corresponding to that of coating material |
12/11/2003 | DE20314939U1 Tire test apparatus for interferometric examination, has carriers on which tire hangs vertically, and measurement head arranged near tire wall |
12/11/2003 | DE20122024U1 Optoelectrical arrangement for measurement of a workpiece dimension, whereby a divergent point type light source is used in conjunction with a linear photoelectrical detector, so that wide optical components are not required |
12/10/2003 | EP1369663A1 Method of calibration of a stereo microscope and a calibratable stereo microscope |
12/10/2003 | EP1368614A2 Laser mirror vision |
12/10/2003 | EP0837649B1 Diagnostic tomographic laser imaging apparatus |
12/10/2003 | CN1461403A Level and/or verticality indicator using laser beams |
12/10/2003 | CN1461402A A local track pitch measuring apparatus and method |
12/10/2003 | CN1461045A Method and device for semiconductor crystallization by laser beam |
12/10/2003 | CN1130549C Raster system for generating shift and position signals by two optical sensors |
12/09/2003 | US6661931 Image processing method, image processing system, and modifying-data producing method |
12/09/2003 | US6661911 Automatic inspecting apparatus by image processing |
12/09/2003 | US6661748 Position control for plunge mechanism |
12/09/2003 | US6661523 Method for determining and designing optical elements |
12/09/2003 | US6661522 Interference system and semiconductor exposure apparatus having the same |
12/09/2003 | US6661505 Method and system for measuring caster trail |
12/09/2003 | US6661502 Method and apparatus for measuring the diameter and/or eccentricity of a coating layer of a coated optical fiber |
12/09/2003 | US6661449 Object recognizing apparatus for vehicle and the method thereof |
12/09/2003 | US6661446 Parallel-processing, optical distance-measuring device |
12/09/2003 | US6660998 Timing device for positioning machine parts moving on a straight or circular path |
12/09/2003 | US6659842 Method and apparatus for optical monitoring in chemical mechanical polishing |
12/09/2003 | US6659386 Method and apparatus for contactless yarn monitoring in a spinning or bobbin winding machine |
12/09/2003 | US6658751 Target system for use with position determination system |
12/09/2003 | US6658750 Method and measurement device for measurement of a two-wheeled vehicle frame |
12/09/2003 | US6658749 3D machine vision measuring system with vehicle position adjustment mechanism for positioning vehicle |
12/04/2003 | WO2003100403A1 Method and apparatus for determining a surface quality of a substrate sample using a differential interference contrast microscope |
12/04/2003 | WO2003083522A3 System and method of broad band optical end point detection for film change indication |
12/04/2003 | WO2003075042A3 Optical measurements of patterned structures |
12/04/2003 | WO2003069266A3 An articulated arm for a portable coordinate measurement machine |
12/04/2003 | WO2003006919A3 System and method for obtaining animal and carcass measurements |
12/04/2003 | WO2002066922A3 Method for measuring and/or machining a workpiece |
12/04/2003 | US20030225712 Billing system and method for determining transportation charges for packages |
12/04/2003 | US20030225536 Self-calibrating, multi-camera machine vision measuring system |
12/04/2003 | US20030225535 Selection of wavelengths for integrated circuit optical metrology |
12/04/2003 | US20030224610 Fabrication process for bonded wafer precision layer thickness control and its non-destructructive measurement method |
12/04/2003 | US20030224540 Recognition method of a mark provided on a semiconductor device |
12/04/2003 | US20030224264 Projection exposure device and position alignment device and position alignment method |
12/04/2003 | US20030224261 Due to the symmetry of the structure, the overlay accuracy in the first direction may be determined on the basis of the same reference data as used for the second, so that establishing libraries is simplified. |
12/04/2003 | US20030223632 Repetitive inspection system with intelligent tools |
12/04/2003 | US20030223631 Apparatus and method for defect detection and program thereof |
12/04/2003 | US20030223630 Overlay metrology and control method |
12/04/2003 | US20030223087 Method and its apparatus for measuring size and shape of fine patterns |
12/04/2003 | US20030223086 Method and apparatus for measuring wall thickness of plastic container |
12/04/2003 | US20030223085 Position recognizing device and position recognizing method |
12/04/2003 | US20030223084 Method and appraratus for using spatial patterns for measuring mirror tilt angles in digital mirror devices |
12/04/2003 | US20030223083 Method and apparatus for generating structural pattern illumination |
12/04/2003 | US20030223082 Methods and apparatus for measuring a surface contour of an object |
12/04/2003 | US20030223081 Method for calibrating a radius test bench |
12/04/2003 | US20030223079 Interferometry system error compensation in twin stage lithography tools |
12/04/2003 | US20030223078 Metrology system for precision 3D motion |
12/04/2003 | US20030223077 Compensation for geometric effects of beam misalignments in plane mirror interferometers |
12/04/2003 | US20030223076 Interferometer, exposure apparatus, exposure method and interference length measurement method |
12/04/2003 | US20030223075 Compact interference measuring apparatus detecting plurality of phase difference signals |
12/04/2003 | US20030223066 Overlay metrology using scatterometry profiling |
12/04/2003 | US20030223065 Method and a device for determining the radiation-damage resistance of an optical material |
12/04/2003 | US20030223057 Wireless substrate-like sensor |
12/04/2003 | US20030223053 Methods and devices for charge management for three-dimensional and color sensing |
12/04/2003 | US20030223037 Methods and systems for tracking a torsional orientation and position of an eye |
12/04/2003 | US20030222784 Detecting damage to a structural member |
12/04/2003 | US20030222049 Methods and apparatuses for trench depth detection and control |
12/04/2003 | US20030221326 Portable coordinate measurement machine having on-board power supply |
12/03/2003 | EP1367447A2 Projection exposure device and position alignment device and position alignment method |
12/03/2003 | EP1367384A1 Apparatus for displaying an image of all the chromosomes of a human cell |
12/03/2003 | EP1367361A1 Methods and apparatus for measuring a surface contour of an object |
12/03/2003 | EP1366860A1 Non-destructive method for measuring the thickness of a bonded wafer |
12/03/2003 | EP1365894A1 Co-ordinate measuring device with a video probehead |
12/03/2003 | CN2589935Y Portable grating projection three-dimensional profile measuring instrument |
12/03/2003 | CN2589934Y High accuracy laser scanning and path detecting controller |
12/03/2003 | CN2589933Y Laser orientation adjusting device of heterodyne interferometer |
12/03/2003 | CN1460174A Light-emitting/receiving combined unit and displacement sensor using same |
12/03/2003 | CN1129794C Apparatus for detecting characters of entities in airflow |