Patents for C30B 15 - Single-crystal growth by pulling from a melt, e.g. czochralski method (9,854) |
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10/01/2002 | US6458203 System for manufacturing a single-crystal ingot employing czochralski technique, and method of controlling the system |
10/01/2002 | US6458202 Process for preparing single crystal silicon having uniform thermal history |
10/01/2002 | US6458201 Apparatus for producing single crystals and method for producing single crystals |
10/01/2002 | US6458199 Crystallization apparatus and method using non-vacuum process |
09/26/2002 | WO2002075025A2 Process for preparing low defect density silicon using high growth rates |
09/26/2002 | WO2002059401A8 Energy pathway arrangement |
09/26/2002 | US20020134302 Heat shield assembly for crystal puller |
09/26/2002 | DE10114698A1 Component made from quartz glass e.g. crucible having high thermal stability comprises a mold, part of which is provided with a stabilizing layer having a higher softening temperature than quartz glass |
09/24/2002 | US6454851 Method for preparing molten silicon melt from polycrystalline silicon charge |
09/19/2002 | WO2002072926A1 Hybrid crucible susceptor |
09/19/2002 | US20020129760 Method of and apparatus for pulling up crystal |
09/19/2002 | US20020129759 Method for producing silicon single crystal |
09/19/2002 | DE10111953A1 Steuerbare Kristallunterstützung Controllable crystal support |
09/19/2002 | DE10110635A1 Automatic control of crystal pulling device comprises initially lowering seed crystal into melt in crucible, and pulling from melt at speed of crystal growth to form crystal block |
09/18/2002 | EP1241282A1 Method of and apparatus for pulling up crystal |
09/18/2002 | EP1241141A2 Silica crucibles and methods for making the same |
09/17/2002 | US6451110 Process for producing a planar body of an oxide single crystal |
09/17/2002 | US6451108 Method for manufacturing dislocation-free silicon single crystal |
09/17/2002 | US6451107 Method for simulating the shape of the solid-liquid interface between a single crystal and a molten liquid, and the distribution of point defects of the single crystal |
09/14/2002 | CA2375384A1 Method of and apparatus for pulling up crystal |
09/12/2002 | WO2002070414A1 Method for producing a quartz glass crucible |
09/12/2002 | US20020124795 Crystal support |
09/12/2002 | US20020124792 Crystal puller and method for growing single crystal semiconductor material |
09/12/2002 | US20020124791 Silicon wafer and method for producing the same |
09/11/2002 | EP1090168B1 Electrical resistance heater for crystal growing apparatus and its method of use |
09/11/2002 | CN2510507Y Low-oxy-carbon monocrystal-silicon composite feeding-material self-unloading mechanism |
09/10/2002 | US6447603 Process and apparatus for producing oxide single crystals |
09/10/2002 | US6447602 Crystal growth apparatus and method |
09/10/2002 | US6447601 Crystal puller and method for growing monocrystalline silicon ingots |
09/06/2002 | WO2002068733A1 Manufacturing a cerium-doped lutetium oxyorthosilicate scintillator boule |
09/06/2002 | WO2002068732A1 Recharge pipe for solid multicrystal material, and single crystal producing method using the same |
09/05/2002 | US20020122286 Energy pathway arrangement |
09/05/2002 | US20020121238 Process for preparing single crystal silicon having improved gate oxide integrity |
09/05/2002 | US20020121237 Magnetic field furnace and a method of using the same to manufacture semiconductor substrates |
09/04/2002 | EP1084286B1 Electrical resistance heater for crystal growing apparatus |
09/04/2002 | EP0973964B1 Low defect density, self-interstitial dominated silicon |
09/04/2002 | EP0751242B1 Process for bulk crystal growth |
09/03/2002 | US6444028 Charging material and holding system for the charging material |
08/29/2002 | WO2002066714A2 Process for preparing single crystal silicon having improved gate oxide integrity |
08/29/2002 | US20020117106 Crystal holding apparatus |
08/22/2002 | WO2002064866A1 Method for fabricating silicon single crystal |
08/22/2002 | WO2000022198A9 Thermally annealed, low defect density single crystal silicon |
08/22/2002 | US20020113265 Silicon on insulator structure having a low defect density device layer and a process for the preparation thereof |
08/22/2002 | US20020112658 Process for monitoring the gaseous environment of a crystal puller for semiconductor growth |
08/22/2002 | DE10102126A1 Verfahren und Vorrichtung zum Herstellen eines Einkristalls aus Silicium Method and apparatus for producing a single crystal of silicon |
08/21/2002 | CN1365403A Silicom wafer and method for producing silicon wafer crystal |
08/15/2002 | WO2002063074A1 Susceptorless reactor for growing epitaxial layers on wafers by chemical vapor deposition |
08/15/2002 | US20020110168 Method for generating laser light and laser crystal |
08/15/2002 | US20020108558 Method for increasing charge size for single crystal silicon production |
08/15/2002 | US20020108557 Rod replenishment system for use in single crystal silicon production |
08/14/2002 | EP1231301A1 Epitaxial silicon wafer |
08/14/2002 | EP1230447A1 Method of controlling growth of a semiconductor crystal |
08/14/2002 | EP1127175B1 Process for preparing defect free silicon crystals which allows for variability in process conditions |
08/13/2002 | US6432538 Carbon fiber reinforced carbon composite and useful as components for pulling single crystal apparatus |
08/13/2002 | US6432198 Method for growing a semiconductor crystal from a semiconductor melt |
08/13/2002 | US6432197 Process for the preparation of non-oxygen precipitating Czochralski silicon wafers |
08/08/2002 | WO2002060827A2 Method for quartz crucible fabrication |
08/08/2002 | US20020106826 Susceptorless reactor for growing epitaxial layers on wafers by chemical vapor deposition |
08/08/2002 | US20020104475 Method of growing large-diameter dislocation-free<110> crystalline ingots |
08/08/2002 | DE10103691A1 Elektrische Energieversorgung für eine elektrische Heizung Electric power supply for electric heating |
08/07/2002 | EP1229155A1 Silicon wafer, silicon epitaxial wafer, anneal wafer and method for producing them |
08/07/2002 | CN1362545A Lithium niobate crysal with near stoichiometric ratio and its growth process |
08/07/2002 | CN1362544A Forming process of seed crystal bar chuck |
08/07/2002 | CN1362543A Growth process of magnesium silicate crystal with doped quadrivalent chromium |
08/06/2002 | US6428618 Providing seed crystal having first diameter at least as great as solid solution alloy crystal to be formed, forming solid solution alloy crystal from a liquid, the liquid having a concentration including at least one alloy element |
08/06/2002 | US6428617 Method and apparatus for growing a single crystal in various shapes |
08/06/2002 | CA2217705C Laser material |
08/01/2002 | WO2002059401A2 Energy pathway arrangement |
08/01/2002 | WO2002059400A2 Low defect density silicon substantially free of oxidation induced stacking faults having a vacancy-dominated core |
08/01/2002 | WO2002059399A2 Magnetic field furnace and a method of using the same to manufacture semiconductor substrates |
08/01/2002 | WO2002059061A1 Method for making a carbon/carbon crucible holder and resulting crucible stand |
08/01/2002 | US20020100410 Low defect density silicon having a vacancy-dominated core substantially free of oxidation induced stacking faults |
08/01/2002 | CA2432396A1 Magnetic field furnace and a method of using the same to manufacture semiconductor substrates |
07/31/2002 | EP1226291A1 Growth of bulk single crystals of aluminum |
07/31/2002 | CN2503077Y Seed rod centering controller |
07/31/2002 | CN1361834A Growth of bulk single crystals of aluminum |
07/30/2002 | US6426133 Graphite material coated with silicon carbide |
07/25/2002 | WO2002057519A1 Process for monitoring the gaseous environment of a crystal puller for semiconductor growth |
07/25/2002 | WO2002057518A2 Apparatus and process for the preparation of low-iron_contamination single crystal silicon |
07/25/2002 | WO2001063022A3 Controlled neck growth process for single crystal silicon |
07/25/2002 | US20020098358 Silicon seed crystal and method for producing silicon single crystal |
07/25/2002 | US20020096109 Apparatus for growing a single crystalline ingot |
07/25/2002 | DE10102081A1 Crystal pulling device comprises an evacuated boiler and a lifting unit having a gripper connected to an oven boiler component to lift it with a sluice chamber |
07/24/2002 | EP1225255A1 Process and apparatus for producing silicon single crystal |
07/24/2002 | EP1224671A1 A device for generating a variable magnetic field |
07/24/2002 | EP1224492A1 Titanium-indiffusion waveguides |
07/23/2002 | US6423615 Silicon wafers for CMOS and other integrated circuits |
07/23/2002 | US6423285 Method for producing silicon single crystal and production apparatus therefor, as well as single crystal and silicon wafer produced by the method |
07/23/2002 | US6423137 Single crystal material supplying apparatus and single crystal material supplying method |
07/23/2002 | US6423135 Method for manufacturing a single crystal |
07/18/2002 | WO2002056341A2 Highly p-doped vacancy dominated silicon wafers substantially free of oxidation induced stacking |
07/18/2002 | WO2002055765A2 Crystal puller and method for growing single crystal semiconductor material |
07/18/2002 | WO2002055443A2 Apparatus for silica crucible manufacture |
07/18/2002 | WO2002015284A8 Method for manufacturing solar cell and solar cell |
07/18/2002 | US20020092465 Binary and ternary crystal purification and growth method and apparatus |
07/18/2002 | US20020092461 Process and apparatus for producing a silicon single crystal |
07/18/2002 | US20020092460 Process for growth of defect free silicon crystals of arbitrarily large diameters |
07/17/2002 | EP1222325A1 Method for producing czochralski silicon free of agglomerated self-interstitial defects |
07/17/2002 | EP1222324A1 Czochralski process for growing single crystal silicon by controlling the cooling rate |
07/17/2002 | CN1358884A Apparatus and method for making single crystal |