| Patents for C30B 15 - Single-crystal growth by pulling from a melt, e.g. czochralski method (9,854) |
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| 01/07/2003 | US6503563 Method of producing polycrystalline silicon for semiconductors from saline gas |
| 01/07/2003 | US6503322 Electrical resistance heater and method for crystal growing apparatus |
| 01/07/2003 | US6502422 Method for quartz crucible fabrication |
| 01/03/2003 | WO2003000962A1 Silicon single crystal substrate, epitaxial wafer, and method for manufacturing them |
| 01/02/2003 | EP1270769A1 Method for producing silicon single crystal having no flaw |
| 01/01/2003 | CN2528782Y Multi-pipe structure of single crystal growing furnace |
| 01/01/2003 | CN1388368A Real-time measuring method of solid-liquid interface structure in high-temperature melt process of crystal growth and high-temperature heating stage |
| 12/31/2002 | US6500255 Process for growing silicon crystals which allows for variability in the process conditions while suppressing the formation of agglomerated intrinsic point defects |
| 12/27/2002 | WO2002103092A1 Production device for semiconductor single crystal and production method for semiconductor single crystal using it |
| 12/27/2002 | WO2002103091A1 SILICON SINGLE CRYSTAL WAFER HAVING VOID DENUDED ZONE ON THE SUFRACE AND DIAMETER OF AVOBE 300 mm AND ITS PRODUCTION METHOD |
| 12/26/2002 | US20020195045 Crystal puller and method for growing monocrystalline silicon ingots |
| 12/25/2002 | CN1097028C Hoist apparatus for annular member |
| 12/24/2002 | US6498288 Thermoelectric element; stability, noncracking |
| 12/24/2002 | US6497765 Multi piece swivel chuck for holding conical shaped work |
| 12/24/2002 | US6497761 Apparatus and method of growing single crystal of semiconductor |
| 12/19/2002 | WO2002100797A1 Method for densification and anticorrosive treatment of a thermostructural composite material |
| 12/19/2002 | US20020192409 Multilayer structured quartz glass crucible and method for producing the same |
| 12/19/2002 | US20020191667 Apparatus for growing a silicon ingot |
| 12/19/2002 | US20020189528 Non-oxygen precipitating Czochralski silicon wafers |
| 12/19/2002 | DE10219387A1 Aus Kohlenfaser-verstärktem Kohlenstoffkompositmaterial hergestellter Schmelztiegel für ein Einkristallziehgerät Made of carbon fiber-reinforced carbon composite crucible for a Einkristallziehgerät |
| 12/18/2002 | EP1266982A2 Method for production of zinc oxide single crystal |
| 12/18/2002 | EP1266251A1 Ion exchange waveguides and methods of fabrication |
| 12/18/2002 | EP1125009B1 Method for accurately pulling a crystal |
| 12/18/2002 | CN1096506C Surface treated crucible for improving undisclocation performance |
| 12/12/2002 | US20020185061 Crucible made of carbon fiber-reinforced carbon composite material for single crystal pulling apparatus |
| 12/12/2002 | US20020185055 Method for production of zinc oxide single crystal |
| 12/10/2002 | US6491971 Release coating system for crucibles |
| 12/10/2002 | US6491752 Enhanced n-type silicon material for epitaxial wafer substrate and method of making same |
| 12/05/2002 | US20020182394 Pyrolytic boron nitride crucible and method |
| 12/05/2002 | US20020179003 Silicon wafer, silicon epitaxial wafer, anneal wafer and method for producing them |
| 12/05/2002 | US20020179002 Inp single crystal substrate |
| 12/04/2002 | CN1382841A Melt method for growing sosoloid monocrystal of lead lead-titanate niobium-zincate |
| 12/04/2002 | CN1382840A Method and appts. for pulling crystal |
| 12/04/2002 | CN1095505C Vertical pulling and zone melting process of producing monmocrystalline silicon |
| 12/03/2002 | US6489027 High purity carbon fiber reinforced carbon composites and manufacturing apparatus for use thereof |
| 12/03/2002 | US6488768 Method and apparatus for treating discharge gas from a Czochralski crystal growing chamber utilizing water spray |
| 11/29/2002 | CA2349144A1 Mixed vanadate single crystal |
| 11/28/2002 | US20020174823 Chucking systems and methods |
| 11/28/2002 | DE10124899A1 Lifting device used in a crystal pulling arrangement comprises a winding roller for winding and unwinding a support element to support a load and having a torque sensor for continuously determining the driving torque of the winding roller |
| 11/27/2002 | EP1260357A2 Pyrolytic boron nitride crucible and method |
| 11/27/2002 | EP1259664A2 Controlled neck growth process for single crystal silicon |
| 11/26/2002 | US6485807 Silicon wafers having controlled distribution of defects, and methods of preparing the same |
| 11/21/2002 | WO2002092885A1 Electrically conductive crystal seed chuck assembly |
| 11/21/2002 | WO2002092525A1 Quartz glass component and method for the production thereof |
| 11/21/2002 | WO2002059400A3 Low defect density silicon substantially free of oxidation induced stacking faults having a vacancy-dominated core |
| 11/21/2002 | US20020170492 Single crystal pulling apparatus |
| 11/21/2002 | US20020170485 Low defect density epitaxial wafer and a process for the preparation thereof |
| 11/20/2002 | EP1257697A1 Process for producing a silicon melt |
| 11/19/2002 | US6482263 Heat shield assembly for crystal pulling apparatus |
| 11/19/2002 | US6482261 Magnetic field furnace |
| 11/19/2002 | US6482260 Silicon single crystal wafer and a method for producing it |
| 11/14/2002 | US20020166503 Hybrid crucible susceptor |
| 11/14/2002 | US20020166499 Method for growing single crystal of semiconductor |
| 11/14/2002 | US20020166341 Technique for quartz crucible fabrication having reduced bubble content in the wall |
| 11/14/2002 | US20020166340 Silica crucibles and methods for making the same |
| 11/13/2002 | CN1379127A Process for preparing chemical-specific Mg-doped lithium niobate crystal with periodic polarizing microstructure |
| 11/13/2002 | CN1379125A Non-linear optical crystal of magnesium zinc bromophosphate and its preparing process and application |
| 11/12/2002 | US6479108 Protective layer for quartz crucibles used for silicon crystallization |
| 11/12/2002 | US6478883 Silicon single crystal wafer, epitaxial silicon wafer, and methods for producing them |
| 11/07/2002 | WO2001061081A9 Process for producing a silicon melt |
| 10/31/2002 | US20020157602 Catch pan for melt leakage in apparatus for pulling single crystal |
| 10/31/2002 | US20020157600 Method for preparing silicon single crystal and silicon single crystal |
| 10/31/2002 | US20020157598 Silicon wafer and method for producing silicon single crystal |
| 10/31/2002 | DE10119947A1 Verfahren zum Steuern einer Kristallziehanlage und Kristallziehanlage zu seiner Durchführung Method for controlling a crystal puller and crystal puller for its implementation |
| 10/30/2002 | EP1252375A1 Method for controlling growth of a silicon crystal to minimize growth rate and diameter deviations |
| 10/30/2002 | CN2518874Y Seed holder |
| 10/29/2002 | US6472040 Semi-pure and pure monocrystalline silicon ingots and wafers |
| 10/29/2002 | US6471768 Method of and apparatus for growing ribbon of crystal |
| 10/24/2002 | WO2002059399A3 Magnetic field furnace and a method of using the same to manufacture semiconductor substrates |
| 10/24/2002 | US20020152950 Method and device for controlling a crystal pulling apparatus |
| 10/23/2002 | CN1093181C Silicon feed system |
| 10/22/2002 | US6468881 Method for producing a single crystal silicon |
| 10/17/2002 | WO2002081786A1 Method and apparatus for preparing molten silicon melt from polycrystalline silicon charge |
| 10/17/2002 | WO2002081073A1 Stabilised zirconium oxide for an observation window |
| 10/17/2002 | WO2002081044A2 Efg crystal growth apparatus and method |
| 10/17/2002 | US20020148402 Growing of homogeneous crystals by bottom solid feeding |
| 10/15/2002 | US6464777 Single crystal of lithium niobate or tantalate and its optical element, and process and apparatus for producing an oxide single crystal |
| 10/10/2002 | WO2000000674A3 Process for growth of defect free silicon crystals of arbitrarily large diameters |
| 10/10/2002 | US20020146510 Release coating system for crucibles |
| 10/10/2002 | US20020144649 EFG crystal growth apparatus and method |
| 10/10/2002 | US20020144648 Vapor controlled czochralski (VCZ) single crystal growth apparatus |
| 10/10/2002 | US20020144642 Apparatus and process for the preparation of low-iron single crystal silicon substantially free of agglomerated intrinsic point defects |
| 10/10/2002 | US20020144641 Apparatus for pulling single crystal by CZ method |
| 10/09/2002 | EP1247882A1 Vapor controlled czochralski (VCZ) single crystal growth apparatus |
| 10/09/2002 | EP1169497B1 Method and system of controlling taper growth in a semiconductor crystal growth process |
| 10/08/2002 | US6461582 Single-crystal rod and process for its production |
| 10/08/2002 | US6461447 Substrate for epitaxial growth |
| 10/08/2002 | US6461427 Barium doping of molten silicon for use in crystal growing process |
| 10/08/2002 | US6461426 Method of supplying silicon raw material, method of producing silicon single crystal, and poly-silicon |
| 10/03/2002 | WO2002077330A1 Heat shield assembly for crystal puller |
| 10/03/2002 | WO2002060827A3 Method for quartz crucible fabrication |
| 10/03/2002 | US20020142566 Silicon wafers for CMOS and other integrated circuits |
| 10/03/2002 | US20020142171 Silicon single crystal, silicon wafer, and epitaxial wafer |
| 10/03/2002 | US20020142170 Nitrogen doping; sequestering; integrated circuits |
| 10/03/2002 | US20020139298 production device for high-quality silicon single crystals |
| 10/03/2002 | US20020139294 Low defect density regions of self-interstitial dominated silicon |
| 10/03/2002 | US20020139143 Method of producing a quartz glass crucible |
| 10/02/2002 | DE10139648A1 Verfahren zur Herstellung eines Quarzglastiegels A method for producing a quartz glass crucible |
| 10/02/2002 | CN1372604A Process for preparing single crystal silicon having uniform thermal history |
| 10/01/2002 | US6458204 Method of producing high-quality silicon single crystals |