| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 01/28/1997 | CA2052543C Ion implantation and surface processing method and apparatus |
| 01/23/1997 | WO1997002220A1 Antioxidants for refractory materials and processes for producing them |
| 01/23/1997 | WO1997000459A3 Optical multiplexing device |
| 01/23/1997 | DE19526775A1 Probes for scanning force microscopy and needles for scanning tunnelling microscopy |
| 01/23/1997 | DE19526600A1 Electron-beam vapour coating installation with substrate trolley |
| 01/22/1997 | EP0755086A2 Magnetoresistive device |
| 01/22/1997 | EP0754932A2 Optical film thickness measurement method, film formation method, and semiconductor laser fabrication method |
| 01/22/1997 | EP0754777A2 Process for producing thin film, and optical instrument including the same |
| 01/22/1997 | EP0754776A2 Method of producing dielectric thin film element |
| 01/22/1997 | CN2245620Y Laser automatic granular removing device for coating system |
| 01/22/1997 | CN2245619Y Metallic film, oxidation film electric resistance high-speed high-quality coater |
| 01/22/1997 | CN1140977A Anti-microbial material |
| 01/22/1997 | CN1140832A Optical film thickness measurement method, film formation method, and semiconductor laser fabrication method |
| 01/21/1997 | US5596673 Evaporation crucible assembly |
| 01/21/1997 | US5596478 Apparatus for neutralizing charged body |
| 01/21/1997 | US5595814 Wear resistant film |
| 01/21/1997 | US5595781 Vapor deposited film, and a geometry measuring method, production process control method, production method, geometry measuring apparatus and production process control apparatus therefor |
| 01/21/1997 | US5595612 Improved adhesion of steels to boride, carbide and nitride coatings |
| 01/21/1997 | US5595600 Low temperature selective growth of silicon or silicon alloys |
| 01/21/1997 | US5595337 Sputtering device and target with cover to hold cooling fluid |
| 01/21/1997 | CA1338864C Process for producing thallium type superconducting thin film |
| 01/18/1997 | CA2177872A1 In situ removal of contaminants from the interior surfaces of an ion beam implanter |
| 01/16/1997 | WO1997001775A1 Bendable mirrors and method of manufacture |
| 01/16/1997 | WO1997001654A1 Adhering metal to glass |
| 01/16/1997 | WO1997001653A2 Sputtering shield |
| 01/16/1997 | DE19525330A1 Schichtwerkstoff Layer material |
| 01/15/1997 | EP0753882A1 Cathode assembly for a target sputtering device |
| 01/15/1997 | EP0753601A2 Coating apparatus |
| 01/15/1997 | EP0753600A1 Small size sputtering target and high vacuum sputtering apparatus using the same |
| 01/15/1997 | EP0753201A1 Sputtering target erosion profile control for collimated deposition |
| 01/15/1997 | EP0753081A1 An electron jet vapor deposition system |
| 01/15/1997 | CN2245066Y Molybdenum boat |
| 01/15/1997 | CN1140207A Apparatus for sputter deposition on substrate |
| 01/15/1997 | CN1140206A Apparatus for deposition of film on substrate |
| 01/14/1997 | US5593742 Fabrication of silicon microclusters and microfilaments |
| 01/14/1997 | US5593740 Method and apparatus for making carbon-encapsulated ultrafine metal particles |
| 01/14/1997 | US5593606 Ultraviolet laser system and method for forming vias in multi-layered targets |
| 01/14/1997 | US5593556 Highly durable electrodes for electrolysis and a method for preparation thereof |
| 01/14/1997 | US5593551 Magnetron sputtering source for low pressure operation |
| 01/14/1997 | US5593511 Method of nitridization of titanium thin films |
| 01/14/1997 | US5593465 Mounting for carrier bodies in an apparatus for the deposition of semiconductor material |
| 01/14/1997 | US5593082 Methods of bonding targets to backing plate members using solder pastes and target/backing plate assemblies bonded thereby |
| 01/14/1997 | CA2052080C Plasma source arrangement for ion implantation |
| 01/09/1997 | WO1997001185A1 Method and apparatus for film formation |
| 01/09/1997 | DE19524662A1 Antioxidantien für feuerfeste Massen und Verfahren zu ihrer Herstellung Antioxidants for refractory compositions and methods for their preparation |
| 01/08/1997 | EP0752482A2 Method and equipment for the application of wear resistant coatings by high vacuum physical vapour deposition |
| 01/08/1997 | EP0752018A1 Surface treatment techniques |
| 01/08/1997 | EP0752017A1 Autoclave bonding of sputtering target assembly |
| 01/08/1997 | EP0751824A1 Porous metal composite body |
| 01/08/1997 | EP0604424B1 Vapour deposition |
| 01/08/1997 | CN1139958A Coated body, its method of production and its use |
| 01/08/1997 | CN1139957A Method and apparatus for thin film coating an article |
| 01/08/1997 | CN1139751A 空调机 Air conditioners |
| 01/07/1997 | US5592316 Method of making an electro-optic display device with porous sub-layer |
| 01/07/1997 | US5591680 Semiconductors |
| 01/07/1997 | US5591515 Magnetic recording medium with a recording layer composed of laminate structure of magnetic films and non-magnetic films, and method for producing the same |
| 01/07/1997 | US5591484 Chemical vapor deposition using amino-borane compounds |
| 01/07/1997 | US5591314 Apparatus for affixing a rotating cylindrical magnetron target to a spindle |
| 01/07/1997 | US5591313 Apparatus and method for localized ion sputtering |
| 01/07/1997 | US5591267 Reduced pressure device |
| 01/07/1997 | US5590994 Chamber, at least for the transport of workpieces, a chamber combination, a vacuum treatment facility as well as a transport method |
| 01/03/1997 | WO1997000459A2 Optical multiplexing device |
| 01/03/1997 | WO1997000458A1 Optical multiplexing device and method |
| 01/03/1997 | WO1997000335A1 Solar selective surface coating |
| 01/03/1997 | CA2216793A1 Optical multiplexing device and method |
| 01/02/1997 | EP0751554A2 Method of in-situ cleaning of deposits from sputter clean chambers |
| 01/02/1997 | EP0751236A1 Process for producing thin films by means of reactive sputtering and device for implementing it |
| 01/02/1997 | EP0751235A1 Flexible metallized products and process for producing the same |
| 01/02/1997 | EP0750525A1 Shell-type catalyst, its use in the preparation of aziridines, and process for preparing aziridines |
| 01/02/1997 | DE19625598A1 Sputter installation and method for exchanging one of its inner chambers |
| 01/02/1997 | DE19617155A1 Sputter coating station esp. for producing data storage discs |
| 01/02/1997 | DE19536131C1 Vehicle diversity antenna plate with multiple connection elements e.g. for FM reception |
| 01/02/1997 | DE19523529A1 Appts. for high-rate electron-beam vapour coating of wide substrates |
| 01/02/1997 | DE19522713A1 Coating for nonlinear optical applications |
| 01/01/1997 | CN2244054Y Controllable electric arc evaporation accelerator |
| 01/01/1997 | CN1139158A Arc source with rotary magneitcally-controlled columnar cathode |
| 12/31/1996 | US5590389 Sputtering target with ultra-fine, oriented grains and method of making same |
| 12/31/1996 | US5590385 Compressing oxide powders; sintering; pulverization |
| 12/31/1996 | US5590051 Process simulation method, process simulator and chemical vapor deposition system employing the same |
| 12/31/1996 | US5589280 Metal on plastic films with adhesion-promoting layer |
| 12/31/1996 | US5589234 Method of manufacturing ultrafine particles of a compound |
| 12/31/1996 | US5589040 Process for producing optical recording medium sputtering method and sputtering target |
| 12/31/1996 | US5589039 In-plane parallel bias magnetic field generator for sputter coating magnetic materials onto substrates |
| 12/31/1996 | US5589000 Fixture for deposition |
| 12/31/1996 | US5588999 Thin film forming device |
| 12/31/1996 | US5588466 Layer of terbium dysprosium ferride is applied to a flexible element |
| 12/27/1996 | WO1996041900A1 Improved parallel ion optics and apparatus for high current low energy ion beams |
| 12/27/1996 | WO1996041899A1 Metallizing machine |
| 12/27/1996 | WO1996041898A1 Coatings for corrosion protection |
| 12/27/1996 | EP0750340A1 Nitrogen gas supply system |
| 12/27/1996 | EP0750056A1 Continuous vacuum evaporation system |
| 12/27/1996 | EP0749354A1 Regulation of pyrocarbon coating |
| 12/27/1996 | EP0632847B1 Process for coating a substrate with a material giving a polished effect |
| 12/27/1996 | EP0562108B1 Multi-layer material for anti-erosion and anti-abrasion coating |
| 12/25/1996 | CN1138746A Treatment unit of gas heat-transfer plasma |
| 12/25/1996 | CN1138744A Method for fabricating semiconductor device |
| 12/24/1996 | US5587587 Ion implanting apparatus and ion implanting method |
| 12/24/1996 | US5587227 Piston ring coating |
| 12/24/1996 | US5587210 Growing and releasing diamonds |
| 12/19/1996 | WO1996041366A1 Plasma processing system with reduced particle contamination |