| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 05/07/1997 | EP0772223A2 Device for coating a substrate from an electrically conductive target |
| 05/07/1997 | EP0771243A1 Ultraviolet laser system and method for forming vias in multi-layered targets |
| 05/07/1997 | EP0746436A4 Sputtering target with ultra-fine, oriented grains and method of making same |
| 05/07/1997 | EP0608409B1 Surface preparation and deposition method for titanium nitride onto cast iron |
| 05/07/1997 | DE19635425A1 Method for producing conductive patterns for magnetoresistive heads |
| 05/07/1997 | DE19548160C1 Production of organically modified oxide, oxynitride or nitride coatings |
| 05/07/1997 | DE19541236A1 Apparatus for coating the surfaces of substrates shaped as bodies of revolution |
| 05/07/1997 | DE19541014A1 Coating used on glass panes to protect e.g. paintings |
| 05/07/1997 | CN1149085A Method and apparatus for gaseous treatment |
| 05/07/1997 | CN1149084A Manufacturing method of cathode sputtering target or the similar targets |
| 05/06/1997 | US5627012 Method for preparing phase change optical recording medium |
| 05/06/1997 | US5626963 Cutting tool |
| 05/06/1997 | US5626909 Fabrication of brazable in air tool inserts |
| 05/06/1997 | US5626727 Thin films on substrate, magnets and incline targets |
| 05/06/1997 | US5626462 Double-wall airfoil |
| 05/02/1997 | EP0770713A1 Equipment for manufacturing a semiconductor device using a solid source |
| 05/02/1997 | EP0770703A2 A seal and a chamber having a seal |
| 05/02/1997 | EP0770702A1 Process for increasing the corrosion-resistance of TiAl based alloys |
| 05/02/1997 | EP0770701A1 Target for the sputtering cathode of a vacuum coating apparatus and process for its manufacture |
| 05/02/1997 | EP0770700A1 Process for formation of oxide thin film |
| 05/02/1997 | EP0770699A2 Manufacturing of water-repellent coating on optical substrate |
| 05/02/1997 | EP0770692A1 Sealing device for zone outlet/inlet of continuous heat treatment furnace, continuous vacuum evaporation equipment and the like |
| 05/02/1997 | EP0663963A4 Improvements in the method and apparatus of vacuum deposition. |
| 05/01/1997 | WO1997015697A1 Apparatus for affixing a rotating cylindrical magnetron target to a spindle |
| 05/01/1997 | CA2235864A1 Apparatus for affixing a rotating cylindrical magnetron target to a spindle |
| 04/30/1997 | DE19540255A1 Apparatus for film coating a substrate |
| 04/30/1997 | DE19539986A1 Vakuumbeschichtungsanlage mit einem in der Vakuumkammer angeordneten Tiegel zur Aufnahme von zu verdampfendem Material Vacuum coating plant with a vacuum chamber arranged in the crucible for receiving material to be evaporated |
| 04/30/1997 | DE19539530A1 Producing divalent samarium from samarium of other valency |
| 04/30/1997 | DE19531796C1 Flexible metal tubing connection piece |
| 04/30/1997 | CN1148824A Amorphous diamond coating of blades |
| 04/29/1997 | US5625527 Metallized films and capacitors containing the same |
| 04/29/1997 | US5625332 Oxide superconducting wire and superconducting apparatus thereof |
| 04/29/1997 | US5625195 High-energy implantation process using an ion implanter of the low-or medium-current type and corresponding devices |
| 04/29/1997 | US5624725 Protective overcoatings for magnetic-recording disks |
| 04/29/1997 | US5624722 Apparatus and method for depositing films on substrate via on-axis laser ablation |
| 04/29/1997 | US5624721 Method of producing a superalloy article |
| 04/29/1997 | US5624718 Diamond-like carbon based electrocatalytic coating for fuel cell electrodes |
| 04/29/1997 | US5624706 Method for fabricating electron multipliers |
| 04/29/1997 | US5624536 Processing apparatus with collimator exchange device |
| 04/29/1997 | US5624068 Diamond tools for rock drilling, metal cutting and wear part applications |
| 04/29/1997 | CA2089421C High performance, durable, low-e glass and method of making same |
| 04/27/1997 | CA2188902A1 Process for formation of oxide thin film |
| 04/24/1997 | WO1997012074A3 METHODS OF MAKING Cr-Me SPUTTER TARGETS |
| 04/24/1997 | DE19642742A1 Valve operating device for internal combustion engines |
| 04/24/1997 | DE19632410C1 Coating components with thermal insulation layers |
| 04/24/1997 | DE19614600C1 Device for masking central and outer areas of substrate to be sputter coated |
| 04/24/1997 | DE19546900C1 Tin@ cathode in magnetron sputtering apparatus |
| 04/24/1997 | DE19539305A1 Titanium@-aluminium@ alloy parts with improved high temperature corrosion resistance |
| 04/24/1997 | DE19538903A1 Method for ion implantation into conductive and semiconductive workpieces |
| 04/23/1997 | EP0769798A1 Method and apparatus for ion beam formation in an ion implanter |
| 04/23/1997 | EP0769371A2 Metallized polyolefin film |
| 04/23/1997 | EP0769210A1 Epitaxial thallium high temperature superconducting films formed via a nucleation layer |
| 04/23/1997 | CN1148275A Thin film piezoelectric arrays with enhanced coupling and fabrication methods |
| 04/23/1997 | CN1148099A Method and equipment for mfg. belt contg. no metal during film-making process of metal evaporation |
| 04/23/1997 | CN1034680C Elemental sulfur and metal ion composite implantation |
| 04/23/1997 | CN1034679C Full elements ion beam material surface modifying tech. |
| 04/22/1997 | US5623157 Semiconductor device having a lead including aluminum |
| 04/22/1997 | US5622918 Supplying chilled oxidizing gas near heated substrate so that pressure is increased around substrate while high vacuum is maintained around knudsen cell evaporation sources which supply molecular beams of constituent metal atoms |
| 04/22/1997 | US5622635 Method for enhanced inductive coupling to plasmas with reduced sputter contamination |
| 04/22/1997 | US5622608 Depositing copper and magnesium on substrate, annealing to form inert magnesium oxide layer |
| 04/22/1997 | US5622607 Method of forming an oxide insulating film |
| 04/22/1997 | US5622606 Gas inlet arrangement |
| 04/22/1997 | US5622567 Thin film forming apparatus using laser |
| 04/22/1997 | US5622565 Reduction of contaminant buildup in semiconductor apparatus |
| 04/22/1997 | US5622564 Metallizing apparatus |
| 04/21/1997 | CA2188216A1 Colored metallic pigment and preparation thereof |
| 04/20/1997 | CA2184629A1 Method and apparatus for ion beam formation in an ion implanter |
| 04/17/1997 | WO1997013892A1 Improved method for the preparation of nanocrystalline diamond thin films |
| 04/17/1997 | WO1997013885A1 Wiring film, sputter target for forming the wiring film and electronic component using the same |
| 04/17/1997 | DE19538365A1 High purity tin@ alloy target material for sputter coating process |
| 04/17/1997 | DE19538110A1 Process for formation of thin diamond-like carbon@ layers on a substrate |
| 04/17/1997 | DE19538046A1 Process for making metal to ceramic layers |
| 04/16/1997 | EP0768719A2 Passivation of fullerane |
| 04/16/1997 | EP0768387A1 Fine grained sputtering target with a given width-thickness ratio and process for its manufacture |
| 04/16/1997 | EP0768282A2 Die for press-molding optical elements and methods of manufacturing the same |
| 04/16/1997 | EP0768281A2 Die for press-molding optical elements and methods of manufacturing and using the same |
| 04/16/1997 | EP0768280A2 Die for press-molding optical elements and methods of manufacturing and using the same |
| 04/16/1997 | EP0588992B1 Device for processing substrates within a plasma |
| 04/16/1997 | EP0544831B1 Sputtering apparatus and sputtering method of improving ion flux distribution uniformity on a substrate |
| 04/16/1997 | CN1147805A Coating of substrates |
| 04/16/1997 | CN1147690A Method and apparatus for in situ removal of contaminants from ion beam neutralization and implantation apparatuses |
| 04/15/1997 | US5620784 Multilayer structure on substrate consisting of first ferromagnetic layer, nonmagnetic metal film, second ferromagnetic layer having different coercive force than first |
| 04/15/1997 | US5620767 Light reflecting and heat dissipating material and optical information recording medium using the same |
| 04/15/1997 | US5620754 Method of treating and coating substrates |
| 04/15/1997 | US5620578 Sputtering apparatus having an on board service module |
| 04/15/1997 | US5620577 Spring-loaded mount for a rotatable sputtering cathode |
| 04/15/1997 | US5620576 Method of and apparatus for producing a thin layer of a material on a substrate |
| 04/15/1997 | US5620574 Method of fabricating sputter induced, micro-texturing of thin film, magnetic disc media |
| 04/15/1997 | US5620573 Reduced stress tungsten deposition |
| 04/15/1997 | US5620572 Method and apparatus for thin film coating an article |
| 04/15/1997 | US5620512 Diamond film growth from fullerene precursors |
| 04/10/1997 | WO1997013169A1 Durable visible/laser/medium wave infrared composite window |
| 04/10/1997 | WO1997013003A2 Transparent heat protection foil and process for producing the same |
| 04/10/1997 | DE19639240A1 Magnetron sputter source |
| 04/10/1997 | DE19639176A1 Electrode manufacturing method for electronic component e.g. ceramic oscillator |
| 04/10/1997 | DE19546872C1 Small dimensional evaporating vessel |
| 04/10/1997 | DE19537263A1 Transparente Wärmeschutzfolie und Verfahren zu deren Herstellung Transparent heat protection film and processes for their preparation |
| 04/10/1997 | DE19537218A1 Arrangement for transport and turning of balls through vacuum coating station |
| 04/10/1997 | CA2187400A1 Passivation of fullerenes |
| 04/09/1997 | EP0767483A1 Device for coating substrates in vacuum |