| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
|---|
| 04/09/1997 | EP0766862A1 Optical information carrier |
| 04/09/1997 | EP0673311A4 C-axis perovskite thin films grown on silicon dioxide. |
| 04/09/1997 | EP0570484B1 System for generating a high density plasma |
| 04/09/1997 | EP0447550B1 Method for producing a metallized film for laminated chip capacitors |
| 04/09/1997 | CN1147278A Sealing device for zone outlet/inlet of continuous heat treatment furnace, continuous vacuum evaporation equipment and the like |
| 04/09/1997 | CN1147144A In situ removal of contaminants from interior surfaces of ion beam implanter |
| 04/08/1997 | US5618639 Magnetic recording medium and magnetic recording apparatus |
| 04/08/1997 | US5618590 Causing arc discharge in process gas comprising nitrogen or carbon using as cathode targets cobalt, nickel, silicon, titanium, vanadium, chromium, iron, zirconium, niobium, tungsten to form nitride or carbide coatings |
| 04/08/1997 | US5618575 Control oxidation of vapor deposition |
| 04/08/1997 | US5618397 High density, large scale integrated circuits |
| 04/08/1997 | US5618390 Iridium oxide film for electrochromic device |
| 04/08/1997 | US5618389 Process for producing transparent carbon nitride films |
| 04/08/1997 | US5618388 Geometries and configurations for magnetron sputtering apparatus |
| 04/03/1997 | WO1997012074A2 METHODS OF MAKING Cr-Me SPUTTER TARGETS |
| 04/03/1997 | DE19606764C1 Substrate handling and transporting appts. |
| 04/03/1997 | DE19606763C1 Apparatus for holding and transporting circular substrates around multifunctional work station |
| 04/03/1997 | DE19605335C1 Controlling a vacuum coating process |
| 04/03/1997 | DE19546826C1 Substrate surface treatment prior to vacuum coating |
| 04/02/1997 | EP0766338A1 Multicontact for window antenna |
| 04/02/1997 | EP0766304A2 Method for coating heterogeneous substrates with homogeneous layers |
| 04/02/1997 | EP0765739A1 Composite barrier film and process for producing the same |
| 04/02/1997 | EP0765531A1 ELECTROCHEMICAL HYDROGEN STORAGE ALLOYS AND BATTERIES FABRICATED FROM Mg CONTAINING BASE ALLOYS |
| 04/01/1997 | US5617275 Thin film head having a core comprising Fe-N-O in a specific atomic composition ratio |
| 04/01/1997 | US5616921 Method of modifying an integrated circuit specimen |
| 04/01/1997 | US5616370 Artificial multilayer and method of manufacturing the same |
| 04/01/1997 | US5616369 Vapor deposition of silicon oxide film by reacting organosilicon compounds and oxygen plasma in an evacuated chamber |
| 04/01/1997 | US5616362 Process and apparatus for the coating of metal |
| 04/01/1997 | US5616226 Cathode assembly |
| 04/01/1997 | US5616225 Use of multiple anodes in a magnetron for improving the uniformity of its plasma |
| 04/01/1997 | US5616224 Apparatus for reducing the intensity and frequency of arcs which occur during a sputtering process |
| 04/01/1997 | US5616218 Modification and selection of the magnetic properties of magnetic recording media through selective control of the crystal texture of the recording layer |
| 04/01/1997 | US5616208 Vacuum processing apparatus, vacuum processing method, and method for cleaning the vacuum processing apparatus |
| 03/27/1997 | WO1997011587A1 Method and device for measuring ion flow in a plasma |
| 03/26/1997 | EP0764973A2 Processing system |
| 03/26/1997 | EP0764221A1 Apparatus for deposition of thin-film, solid state batteries |
| 03/26/1997 | EP0674805B1 Process for carrying out stable low pressure discharge processes |
| 03/26/1997 | EP0666934B1 Plasma-assisted reactive electron-jet vaporisation process |
| 03/26/1997 | EP0571481B1 Bearings |
| 03/26/1997 | EP0428682B1 Magnetic structure for electron-beam heated evaporation source |
| 03/26/1997 | CN1146070A Method for fabricating semiconductor device having fine contact holes |
| 03/26/1997 | CN1145986A Pivot thrust bearing system |
| 03/26/1997 | CN1034350C Prepn. of gradient Ni, Co., Cr, Al, Si Hf, Yt/Al cladding |
| 03/25/1997 | US5615385 Method and apparatus for zero extension and bit shifting to preserve register parameters in a microprocessor utilizing register renaming |
| 03/25/1997 | US5614446 Holding apparatus, a metal deposition system, and a wafer processing method which preserve topographical marks on a semiconductor wafer |
| 03/25/1997 | US5614294 Coating for minimizing thermal gradients in an article |
| 03/25/1997 | US5614291 Semiconductor device and method of manufacturing the same |
| 03/25/1997 | US5614273 Process and apparatus for plasma-activated electron beam vaporization |
| 03/25/1997 | US5614248 Correlation of optical properties with mechanical properties, in situ measurement, process control |
| 03/25/1997 | US5614114 Laser system and method for plating vias |
| 03/25/1997 | US5614071 Sputtering shield |
| 03/25/1997 | US5614070 Sputtering apparatus for forming metal lines |
| 03/25/1997 | US5614055 High density plasma CVD and etching reactor |
| 03/25/1997 | CA1339019C Process for preparing a superconducting thin film |
| 03/20/1997 | DE19535845A1 Transition mode reactive d.c. sputtering process |
| 03/19/1997 | EP0763388A2 Method for producing a thin film resin matrix |
| 03/19/1997 | EP0762943A1 Radiation cured island coating system |
| 03/18/1997 | US5612887 Automation of pulsed laser deposition |
| 03/18/1997 | US5612801 Monolithic optical compensation device for improved viewing angle in liquid crystal displays |
| 03/18/1997 | US5612571 Semiconductor wires and electrodes |
| 03/18/1997 | US5612133 Magneto-optical recording medium having a refelecting layer of a silver-magnesium alloy having a magnesium oxide coating |
| 03/18/1997 | US5612099 Method and apparatus for coating a substrate |
| 03/18/1997 | US5612098 Method of forming a thin film magnetic structure having ferromagnetic and antiferromagnetic layers |
| 03/18/1997 | US5612090 Iron-based material having excellent oxidation resistance at elevated temperatures and process for the production thereof |
| 03/18/1997 | US5611899 Device for suppressing flashovers in cathode sputtering installations |
| 03/18/1997 | US5611864 Microwave plasma processing apparatus and processing method using the same |
| 03/18/1997 | US5611861 Rotary type apparatus for processing semiconductor wafers and method of processing semiconductor wafers |
| 03/18/1997 | US5611858 Apparatus for transporting discoidal substrates in a vacuum coating apparatus |
| 03/18/1997 | US5611655 Vacuum process apparatus and vacuum processing method |
| 03/18/1997 | CA2044321C Process for controlling alloy fractionation |
| 03/13/1997 | WO1997009715A1 Data carrier, layer forming method and systems therefor |
| 03/13/1997 | WO1997009462A1 Substrate fixture |
| 03/13/1997 | WO1997009461A1 Device comprising a photoionic micro-head |
| 03/13/1997 | WO1997009460A1 Discrete track media produced by underlayer laser ablation |
| 03/13/1997 | WO1997009321A1 Method for the selective hydrogenation of vinyl oxirane to butylene oxide |
| 03/13/1997 | DE19533402A1 Device for holding plate-shaped body in frame passing before coating unit |
| 03/13/1997 | CA2230710A1 Substrate fixture |
| 03/12/1997 | EP0762471A1 Magnetic field generator for magnetron plasma |
| 03/12/1997 | EP0762469A1 Method and apparatus for in situ removal of contaminants from ion beam neutralization and implantation apparatuses |
| 03/12/1997 | EP0762406A1 Information carrier, manufacturing method for a layer and apparatus therefor |
| 03/12/1997 | EP0761840A1 Apparatus for gripping and holding a flat substrate |
| 03/12/1997 | EP0761839A1 Apparatus for gripping and holding a flat substrate |
| 03/12/1997 | EP0761838A1 Sputtering target and method for its manufacturing |
| 03/12/1997 | EP0761372A1 Preparation and bonding of workpieces to form sputtering targets and other assemblies |
| 03/12/1997 | EP0761011A1 Method of manufacturing an electronic multilayer component |
| 03/12/1997 | EP0662024B1 Tool for working the surfaces of components |
| 03/11/1997 | US5610103 Ultrasonic wave assisted contact hole filling |
| 03/11/1997 | US5610097 Method for forming electrode on semiconductor |
| 03/11/1997 | US5609739 Sputtering apparatus |
| 03/11/1997 | US5609737 Semiconductors |
| 03/11/1997 | US5609690 Vacuum plasma processing apparatus and method |
| 03/11/1997 | US5609689 Vacuum process apparaus |
| 03/06/1997 | WO1997008359A1 Target, process for production thereof, and method of forming highly refractive film |
| 03/06/1997 | WO1997008358A1 A process for manufacturing ito alloy articles |
| 03/06/1997 | WO1997008357A1 Anti-reflective coating |
| 03/06/1997 | WO1997007992A1 Method of applying a coating selectively to parts of a transparent plate |
| 03/06/1997 | DE19532645A1 Verfahren zur selektiven Hydrierung von Vinyloxiran zu Butylenoxid Process for the selective hydrogenation of vinyloxirane to butylene oxide |
| 03/06/1997 | DE19532071A1 Vapour deposition unit with several evaporation boats |
| 03/06/1997 | DE19531590A1 Verfahren zum selektiven, bereichsweise Beschichten einer transparenten Trägerplatte mit einer Wirkschicht unter Verwendung einer zwischengeschalteten Abdeckfolie A method of selectively, partially coating a transparent carrier plate with an active layer using an intermediate cover |
| 03/05/1997 | EP0760400A2 Process for producing bismuth compounds, and bismuth compounds |
| 03/05/1997 | EP0760160A1 Soft plasma ignition in plasma processing chambers |