Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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04/18/2007 | EP1774571A2 In-line heater for use in semiconductor wet chemical processing and method of manufacturing the same |
04/18/2007 | EP1774055A2 Ion implanter operating in pulsed plasma mode |
04/18/2007 | EP1774054A1 Variable quadruple electromagnet array, particularly used in a multi-step process for forming a metal barrier in a sputter reactor |
04/18/2007 | EP1774053A1 Method for producing a coat on a piston ring and piston ring |
04/18/2007 | EP1773734A1 Boron-containing layer system comprising a boron carbide layer, a b-c-n layer, and a carbon-modified hexahedral boron nitride layer, and method for the production of such a layer system |
04/18/2007 | EP1670968A4 Apparatus for low temperature semiconductor fabrication |
04/18/2007 | EP1540047A4 Oh and h resistant silicon material |
04/18/2007 | EP1390557A4 System and method for making thin-film structures using a stepped profile mask |
04/18/2007 | CN2890082Y Wafer chip positioning and controlling system |
04/18/2007 | CN2890081Y Wafer platform scanning device |
04/18/2007 | CN2890080Y Wide range current detection automatic gearshift device of ion implantation machine |
04/18/2007 | CN2890079Y Magnetron sputtering device |
04/18/2007 | CN2890078Y Multistage planetary work rest for vacuum coating machine |
04/18/2007 | CN1950922A Apparatus for metal plasma vapor deposition and re-sputter with source and bias power frequencies applied through the workpiece |
04/18/2007 | CN1950541A Method and apparatus for vacuum deposition by vaporizing metals and metal alloys |
04/18/2007 | CN1950540A Vacuum deposition method |
04/18/2007 | CN1950539A Method and device for the continuous coating of flat substrates with optically active layer systems |
04/18/2007 | CN1950538A Variable quadruple electromagnet array, particularly used in a multi-step process for forming a metal barrier in a sputter reactor |
04/18/2007 | CN1950537A Evaporator, vapor deposition apparatus, and method of switching evaporator in vapor deposition apparatus |
04/18/2007 | CN1950536A Organic material evaporation source and organic vapor deposition device |
04/18/2007 | CN1950535A Thermal vacuum deposition method and device |
04/18/2007 | CN1950534A MSVD coating process |
04/18/2007 | CN1950165A Tool of surface-coated cubic boron nitride sintered compact and process for producing the same |
04/18/2007 | CN1949459A Method for directly preparing Cr-Si silicide resistance film on surface of monocrystalline silicon substrate |
04/18/2007 | CN1948549A Capping technology for electron beam physical gaseous phase deposition coating using strong flow pulse ionic beam |
04/18/2007 | CN1948548A Magnetic mirror field constrained bitarget non balancing magnetron sputtering method |
04/18/2007 | CN1948547A Power source method for ultra high power pulse non balancing megnetron sputtering |
04/18/2007 | CN1948546A Medium frequency twin magnetron sputtering device for cooling metal gallium target |
04/18/2007 | CN1948545A Single target sputter method for preparing bismuth telluride thin film using powder target material |
04/18/2007 | CN1311570C Combined mask, method and equipment for producing organic electroluminescent device using said mask |
04/18/2007 | CN1311508C Extraction and deceleration of low energy beam with low beam divergence |
04/18/2007 | CN1311286C Functional film improved optical property and electrical property |
04/18/2007 | CN1311096C Manganese alloy sputtering target and method for producing the same |
04/18/2007 | CN1310772C Laser thermal transfer donor contg separated adulterant coating |
04/17/2007 | US7205662 Dielectric barrier layer films |
04/17/2007 | US7205620 Highly reliable amorphous high-k gate dielectric ZrOxNy |
04/17/2007 | US7205552 Monatomic boron ion source and method |
04/17/2007 | US7205240 HDP-CVD multistep gapfill process |
04/17/2007 | US7205056 First crystal layer having a Bi-based perovskite structure is intermittently formed in a surface direction of the ceramic film, and second crystal layer having a lower melting point composed of ABO-type oxides in which Bi is in an A-site and Si or Ge is in a B-site is between the first crystals |
04/17/2007 | US7205020 Multilayer; nonmagnetic undercoating, magnetism layer containing ferromagnetic grains and protective coatings |
04/17/2007 | US7204921 Vacuum apparatus and vacuum processing method |
04/17/2007 | US7204915 Patterned medium, method for fabricating same and method for evaluating same |
04/17/2007 | US7204013 Method of manufacturing a magnetoresistive sensor |
04/12/2007 | WO2007041705A1 Effect materials |
04/12/2007 | WO2007041425A2 Very long cylindrical sputtering target and method for manufacturing |
04/12/2007 | WO2007041081A1 Sputtering target, low resistivity, transparent conductive film, method for producing such film and composition for use therein |
04/12/2007 | WO2007040763A1 Reflector with non-uniform metal oxide layer surface |
04/12/2007 | WO2007040161A1 Electrode for electric discharge surface treatment, method of electric discharge surface treatment, and coating |
04/12/2007 | WO2007040141A1 Photogravure engraving roll and production method thereof |
04/12/2007 | WO2007040014A1 Sputtering target |
04/12/2007 | WO2007039180A1 Method for the production of a reflective membrane, and membrane produced therewith |
04/12/2007 | WO2007038967A1 Down-stream plasma etching with deflectable plasma beam |
04/12/2007 | WO2007011331A3 Water-soluble polymeric substrate having metallic nanoparticle coating |
04/12/2007 | WO2006132806A3 Multiple scanning magnetrons |
04/12/2007 | WO2006130817A3 Deposition of uniform layer of desired material |
04/12/2007 | WO2006119367A3 Target assemblies, targets backing plates, and methods of target cooling |
04/12/2007 | WO2006118851A3 Method of making scratch resistant coated glass article including layer(s) resistant to fluoride-based etchant(s) |
04/12/2007 | WO2006083363A3 Pentaborane(9) storage and delivery |
04/12/2007 | WO2006022997A3 Method and system for substrate temperature profile control |
04/12/2007 | US20070083269 Method of producing endosseous implants or medical prostheses by means of ion implantation and endosseous implant or medical prosthesis thus obtained |
04/12/2007 | US20070082224 consists of titanium oxide, ytterbium oxide, and gadolinium oxide and/or dysprosium oxide; for eyeglasses, lenses, cameras |
04/12/2007 | US20070082222 Corrosion and abrasion resistant decorative coating |
04/12/2007 | US20070082214 Stainless steel strip coated with aluminium |
04/12/2007 | US20070082133 Method of metallizing a silicone rubber substrate |
04/12/2007 | US20070082129 Metal composite diamond-like carbon (DLC) film, method and apparatus for forming the same, and slide member |
04/12/2007 | US20070080059 Sputtering device |
04/12/2007 | US20070080056 Method and apparatus for cylindrical magnetron sputtering using multiple electron drift paths |
04/12/2007 | US20070080055 Reagent suitable for use as a catalyst comprises a first metal species substrate having a second reduced metal species coated thereon, the second reduced metal species being less electropositive than the first; for use at lower temperatures and under atmospheric pressure; cost effective |
04/12/2007 | US20070080053 Method and apparatus for deposition of films of coating materials, in particular of superconductive oxides |
04/12/2007 | DE102005048482A1 Method for coating electrically insulating surfaces by CVD or PVD e.g. for materials research, involves forming micro-heating elements on ceramic substrate |
04/12/2007 | CA2624484A1 Method for the production of a reflective membrane, and membrane produced therewith |
04/12/2007 | CA2623404A1 Sputtering target, low resistivity, transparent conductive film, method for producing such film and composition for use therein |
04/11/2007 | EP1772594A1 Method of masking holes of a component in a process and a ceramic composition containing polysiloxane |
04/11/2007 | EP1772532A1 Metal composite diamond-like carbon (DLC) film. Method and apparatus for forming the same and slide member making use of it. |
04/11/2007 | EP1772531A1 Method and apparatus for internal coating. |
04/11/2007 | EP1772529A1 Dry chemical composition, use thereof to form a layer system and method for coating |
04/11/2007 | EP1772512A2 Sliding structure and sliding method |
04/11/2007 | EP1772216A1 Surface coating cutting tool with coating film having intensity distribution of compression stress |
04/11/2007 | EP1771674A1 Method for the production of wear-resistant edges for a keystone ring for internal combustion engines |
04/11/2007 | EP1771602A2 Highly oxidation resistant hard coating materials for cutting tools |
04/11/2007 | EP1771600A2 Vacuum-coating installation and method |
04/11/2007 | EP1771592A1 Method and apparatus of plasma processing. |
04/11/2007 | EP1592823B1 A method of manufacturing a sputter target |
04/11/2007 | CN2888786Y Novel planar linear array radiation heater which can resist active oxygen corrosion |
04/11/2007 | CN2887889Y Omnidirectional ion implantation and deposition surface treatment device with multi-arc plasma |
04/11/2007 | CN2887888Y Vacuum vaporization coating device |
04/11/2007 | CN1946874A Plasma coating system for non-planar substrates |
04/11/2007 | CN1946873A Substrate dome rotating mechanism |
04/11/2007 | CN1946872A Vaporizing device and method for vaporizing coating material |
04/11/2007 | CN1946871A Device equipped with cooling means and cooling method |
04/11/2007 | CN1946870A 中和器 Neutralizer |
04/11/2007 | CN1946869A Vacuum device where power supply mechanism is mounted and power supply method |
04/11/2007 | CN1946868A Vacuum deposition method and sealed-type evaporation source apparatus for vacuum deposition |
04/11/2007 | CN1946507A Method of making sputtering target |
04/11/2007 | CN1945807A Apparatus for controlling temperature of a substrate |
04/11/2007 | CN1945793A Apparatus and method for treating a substrate with plasma, and facility for manufacturing semiconductor devices |
04/11/2007 | CN1944707A Permanent magnet gun target device for magnetic control sputtering film coating machine |
04/11/2007 | CN1944706A Method for preparing Fe-6.5 wt% Si thin plate using continuous magnetic control sputtering physical gas phase depositing |
04/11/2007 | CN1944705A Method for preparing ZnO:Al transparent conductive film by direct magnetic control co-sputtering method |
04/11/2007 | CN1944704A Method to coat insulation film on aluminum body of electrolytic capacitor |