| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 03/28/2007 | EP1590305B1 Transparent titanium oxide-aluminum and/or aluminum oxide coating with rutile structure |
| 03/28/2007 | EP1140720B1 Protective layer for coated substrate |
| 03/28/2007 | CN2883398Y Digital optical film thickness control instrument |
| 03/28/2007 | CN1938813A A tubular magnet assembly |
| 03/28/2007 | CN1938449A Ionized physical vapor deposition(IPVD) process |
| 03/28/2007 | CN1938448A Method for gettering oxygen and water during vacuum deposition of sulfide films |
| 03/28/2007 | CN1938447A Film-forming apparatus and film-forming method |
| 03/28/2007 | CN1938446A Method for manufacturing ultra-hydrophilic thin film coated metal product, and ultra-hydrophilic thin film coated metal product |
| 03/28/2007 | CN1938445A Method for manufacturing ultra-hydrophilic thin film coated metal product, and ultra-hydrophilic thin film coated metal product |
| 03/28/2007 | CN1938444A Method for manufacturing ultra-hydrophilic thin film coated metal product, and ultra-hydrophilic thin film coated metal product |
| 03/28/2007 | CN1938239A Coating stack comprising a layer of barrier coating |
| 03/28/2007 | CN1937280A Method for removing organic electroluminescent residues from a substrate |
| 03/28/2007 | CN1937279A Method for preparingorganic electroluminescent device electronic injection layer |
| 03/28/2007 | CN1937201A Substrate processing system and method |
| 03/28/2007 | CN1936072A Substrate carrier |
| 03/28/2007 | CN1936071A Substrate carrier |
| 03/28/2007 | CN1936070A Preparation method for improving silicon film compactness |
| 03/28/2007 | CN1936069A Method for preparing different refractivity film layer |
| 03/28/2007 | CN1936068A Article having patterned decorative coating |
| 03/28/2007 | CN1307297C Method for cleaning chamber of deposition apparatus for organic EL device production |
| 03/27/2007 | US7195928 Method of manufacturing ferroelectric substance thin film and ferroelectric memory using the ferroelectric substance thin film |
| 03/27/2007 | US7195808 System and method for identifying substrate side |
| 03/27/2007 | US7195801 High purity evaporation; reuse |
| 03/27/2007 | US7195797 Using a high-yield fixture assembly and a moving electron gun assembly which allows symmetry between the substrates and deposition source to be maintained |
| 03/27/2007 | US7194801 Thin-film battery having ultra-thin electrolyte and associated method |
| 03/27/2007 | CA2191114C Electrochemical hydrogen storage alloys and batteries fabricated from mg containing base alloys |
| 03/22/2007 | WO2007033060A1 Targets and processes for fabricating same |
| 03/22/2007 | WO2007032858A1 Large-area magnetron sputtering chamber with individually controlled sputtering zones |
| 03/22/2007 | WO2007032855A2 Thermally conductive dielectric bonding of sputtering targets using diamond powder filler or thermally conductive ceramic fillers |
| 03/22/2007 | WO2007032780A2 Back-biased face target sputtering based memory device and programmable logic device |
| 03/22/2007 | WO2007032303A1 Method and apparatus for producing protective film |
| 03/22/2007 | WO2007032302A1 Protective film-forming method and protective film-forming apparatus |
| 03/22/2007 | WO2007032297A1 Vacuum film forming apparatus and vacuum film forming method |
| 03/22/2007 | WO2007032166A1 Deposition preventing plate for film forming apparatus, and film forming apparatus |
| 03/22/2007 | WO2007031317A2 Method for applying a porous glass layer |
| 03/22/2007 | WO2007015023A3 Method for deposition of an anti-scratch coating |
| 03/22/2007 | WO2006063855A3 Fine-laminar barrier protection layer |
| 03/22/2007 | US20070065679 Hard, ductile coating system |
| 03/22/2007 | US20070065635 Object with a stratified composite material |
| 03/22/2007 | US20070065595 Micro-structure formed of thin films |
| 03/22/2007 | US20070062911 Method and device for supplying at least one machining station for a workpiece |
| 03/22/2007 | US20070062810 Sputtering system using silver-based alloy |
| 03/22/2007 | US20070062809 Rotary sputtering target, apparatus for manufacture, and method of making |
| 03/22/2007 | US20070062808 Sputtering Target for Phase-Change Memory, Film for Phase Change Memory formed by using the Target, and Method for Producing the Target |
| 03/22/2007 | US20070062807 Tantalum Sputtering Target and Method for Preparation Thereof |
| 03/22/2007 | US20070062806 crystal structure; melting, casting; improved uniformity |
| 03/22/2007 | US20070062805 Sputtering target with bonding layer of varying thickness under target material |
| 03/22/2007 | US20070062804 Device and method of manufacturing sputtering targets |
| 03/22/2007 | US20070062803 Device and method of manufacturing sputtering targets |
| 03/22/2007 | US20070062802 System and method for managing a plasma process and method for manufacturing an electronic device |
| 03/22/2007 | US20070062452 Coil and coil support for generating a plasma |
| 03/22/2007 | US20070062449 Enhanced magnetic shielding for plasma-based semiconductor processing tool |
| 03/22/2007 | US20070062167 Semiconductor manufacturing facility utilizing exhaust recirculation |
| 03/22/2007 | DE102006027502A1 Verschleißfeste Beschichtung und Verfahren zur Herstellung derselben Wear-resistant coating and method of producing same |
| 03/22/2007 | DE102005044522A1 Verfahren zum Aufbringen einer porösen Glasschicht A method for applying a porous glass layer |
| 03/21/2007 | EP1764425A1 Apparatus and method for producing a flexible tape for packages provided with a transparent coating |
| 03/21/2007 | EP1764174A1 Surface-coated cutting tool having film with compressive stress intensity distribution |
| 03/21/2007 | EP1763593A1 Single piece coil support assemblies, coil constructions and methods of assembling coil constructions |
| 03/21/2007 | EP1763592A1 Fastening unit for ignition units, and device for eliminating carbon |
| 03/21/2007 | EP1537763B1 Silicon oxynitride passivated rare earth activated thioaluminate phosphors for electroluminescent displays |
| 03/21/2007 | EP1501671A4 Silver alloy thin film reflector and transparent electrical conductor |
| 03/21/2007 | EP1436442A4 Amorphous hydrogenated carbon film |
| 03/21/2007 | EP1393601A4 Method and system for improving the effectiveness of medical devices by adhering drugs to the surface thereof |
| 03/21/2007 | EP1292975B1 Method for making substrates and resulting substrates |
| 03/21/2007 | CN2880852Y Protecting apparatus for preventing sputtered article deforming in sputtering procedure |
| 03/21/2007 | CN1934914A Plasma generator |
| 03/21/2007 | CN1934680A Method and equipment for forming crystalline silicon thin film |
| 03/21/2007 | CN1934679A Method and apparatus for forming silicon dots |
| 03/21/2007 | CN1934286A Process for producing material film and material film production apparatus |
| 03/21/2007 | CN1934285A Silicon film forming equipment |
| 03/21/2007 | CN1934284A Method for vaporizing fluidized organic materials |
| 03/21/2007 | CN1933099A Method for manufacturing semiconductor device |
| 03/21/2007 | CN1932457A Rotating workpiece surface colour determining apparatus and applicating method thereof |
| 03/21/2007 | CN1932081A Method for restoring portion of turbine component |
| 03/21/2007 | CN1932080A Prepn process of boron strontium titanate film material |
| 03/21/2007 | CN1932073A Efficient lining heat resisting active oxygen corrosion |
| 03/21/2007 | CN1932072A Coating machine and method for operating a coating machine |
| 03/21/2007 | CN1932071A Target material with multilayer metal film |
| 03/21/2007 | CN1306570C Method for oxidizing a silicon chip at low temperatures and apparatus using the same |
| 03/21/2007 | CN1306061C Planar magnetic sputtering-multi-station film coating apparatus |
| 03/21/2007 | CN1306060C Method for treating tin soldering wettability by using cathode electric arc ion plating technology |
| 03/20/2007 | US7194197 Nozzle-based, vapor-phase, plume delivery structure for use in production of thin-film deposition layer |
| 03/20/2007 | US7194066 Apparatus and method for light weight high performance target |
| 03/20/2007 | US7192824 Lanthanide oxide / hafnium oxide dielectric layers |
| 03/20/2007 | US7192663 high area recording density exhibiting low noise; soft magnetic film in the perpendicular magnetic recording medium with an easy axis substantially directed in a transverse direction to a traveling direction of a read-write head |
| 03/20/2007 | US7192648 Low emisisons; multilayer overcoating on glass substrate |
| 03/20/2007 | US7192647 one or more infrared-reflective layers each positioned between two or more dielectric layers |
| 03/20/2007 | US7192625 Manufacturing method of barrier-forming film |
| 03/20/2007 | US7192623 Thin layer of hafnium oxide and deposit process |
| 03/20/2007 | US7192622 Process of masking cooling holes of a gas turbine component |
| 03/20/2007 | CA2451682C Installation for coating parts using electron beams |
| 03/20/2007 | CA2188235C Metalized polyolefin film |
| 03/15/2007 | WO2007030824A2 Flow-formed chamber component having a textured surface |
| 03/15/2007 | WO2007030406A2 Method of making sputtering target and target |
| 03/15/2007 | WO2007030202A2 Preparation of membranes using solvent-less vapor deposition followed by in-situ polymerization |
| 03/15/2007 | WO2007029743A1 Method for formation of film of molecular substance and apparatus for said method |
| 03/15/2007 | WO2007029735A1 Vapor deposition apparatus, vapor deposition method, optical element, and chiral sensor |
| 03/15/2007 | WO2007029711A1 Semiconductor light-emitting device and method for manufacturing same |
| 03/15/2007 | WO2007029671A1 Film forming apparatus, film forming system, film forming method, and method for manufacturing electronic device or organic electroluminescence element |
| 03/15/2007 | WO2007029586A1 Method for manufacturing organic electroluminescent device |