Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
01/2007
01/11/2007US20070009652 Continuous OLED coating machine
01/11/2007US20070007131 Variable thickness plate for forming variable wall thickness physical vapor deposition target
01/11/2007US20070007130 Enhanced magnetron sputtering target
01/11/2007US20070007129 Universal vacuum coupling for cylindrical target
01/11/2007US20070007128 Silicon film forming apparatus
01/11/2007US20070007125 Coated article with transparent conductive oxide film doped to adjust Fermi level, and method of making same
01/11/2007US20070007124 Back-biased face target sputtering based memory with low oxygen flow rate
01/11/2007US20070007123 Silicon dot forming method and silicon dot forming apparatus
01/11/2007US20070007122 System and method for forming thin film metal layers in vias
01/11/2007DE102005031567A1 Coating magnesium (alloy) substrate, e.g. sheet for use in automobile bodywork, by cleaning, applying coating of metal, e.g. zinc, and heat treating to give corrosion resistant intermetallic phase
01/11/2007DE102005030900A1 Verfahren zur Herstellung eines Fahrzeugspiegels A process for manufacturing a vehicle mirror
01/10/2007EP1741802A1 Film-forming apparatus and film-forming method
01/10/2007EP1741801A2 Method for forming amorphous carbon film
01/10/2007EP1741794A2 Surface strengthening method
01/10/2007EP1741505A1 Tool of surface-coated cubic boron nitride sintered compact and process for producing the same
01/10/2007EP1740737A1 Method for coating a base body, device for carrying out said method, and coated base body
01/10/2007EP1606103A4 Rapid generation of nanoparticles from bulk solids at room temperature
01/10/2007EP1563116B1 Device for carrying out a surface treatment of substrates under vacuum
01/10/2007EP1399967B1 Method of making full color display panels
01/10/2007EP1332239A4 Deposition of thin films by laser ablation
01/10/2007CN2856063Y Heater with oxide membrane substrate
01/10/2007CN2855555Y Combination of rotary-disc and hanging-frame
01/10/2007CN1894446A Large area, uniformly low dislocation density GaN substrate and process for making the same
01/10/2007CN1893822A 抗微生物复合材料 Antimicrobial composite
01/10/2007CN1892980A Chamber isolation valve RF grounding
01/10/2007CN1891861A Process kit design particle generation
01/10/2007CN1891854A Apparatus and method for partial implantation using wide beam
01/10/2007CN1891853A Sputtering target, optical thin film and manufacturing method thereof using the sputtering target, and optical recording medium
01/10/2007CN1891852A Sputtering equipment
01/10/2007CN1891851A Sputter ion pump
01/10/2007CN1891850A Vacuum evaporation apparatus and method of producing electro-optical device
01/10/2007CN1891849A Optical filter coating method
01/10/2007CN1891848A Optical coating device
01/10/2007CN1891663A Indium oxide-tin oxide powder and sputtering target using the same and method for producing the indium oxide-tin oxide powder
01/10/2007CN1891662A Method for producing sputtering target
01/10/2007CN1294615C Method of fabricating coated process chamber component
01/10/2007CN1294614C Ion source, ion injection equipment, manufacturing method of semiconductor device
01/09/2007US7161286 Substrate overcoated with nanparticle alloy catalyst; low temperature annealing
01/09/2007US7161211 Low electrical resistance, smoothness, high strength, stress resistance
01/09/2007US7161174 Field-effect transistors having doped aluminum oxide dielectrics
01/09/2007US7161110 Melting and vaporizing apparatus and method
01/09/2007US7160765 Method for manufacturing a semiconductor device
01/09/2007US7160672 Forming a thin ceramic protective coating applied at relatively low temperature by selective coating of ceramic on an electrical or magnetic biocompatible implant; metallization; photolithographic polyamide coating; scribing and dissolving away polymerized polyamide and a ceramic mask; batch processing
01/09/2007US7160616 DLC layer system and method for producing said layer system
01/09/2007US7160393 Vacuum chamber assembly
01/09/2007US7160352 can be used facing blades or wipers made of titanium alloy without it being necessary to have recourse to a protective coating on the tips thereof
01/09/2007US7159537 Device for fixing a gas showerhead or target plate to an electrode in plasma processing systems
01/09/2007US7159302 Method for manufacturing a perpendicular write head
01/09/2007CA2332900C Apparatus and method for producing plane-parallel flakes
01/04/2007WO2007002402A2 An apparatus and method for growing a synthetic diamond
01/04/2007WO2007002369A2 Method for manufacture and coating of nanostructured components
01/04/2007WO2007002330A1 Sputtering target with slow-sputter layer under target material
01/04/2007WO2007001022A1 Method and apparatus for forming metal film
01/04/2007WO2007000878A1 Gallium oxide-zinc oxide sputtering target, method for forming transparent conductive film, and transparent conductive film
01/04/2007WO2007000867A1 Gallium oxide-zinc oxide sputtering target, method of forming transparent conductive film and transparent conductive film
01/04/2007WO2007000271A1 Reinforced micromechanical part
01/04/2007WO2006118903A3 Microporous article having metallic nanoparticle coating
01/04/2007WO2006114227A3 Process and device for coating disk-shaped substrates for optical data carriers
01/04/2007WO2006041562A3 Bipolar plate with enhanced stability
01/04/2007WO2005123382A3 Refractive index coated embossable film
01/04/2007US20070004133 Capacitor for a semiconductor device and method of fabricating same
01/04/2007US20070004111 Method and apparatus for forming a crystalline silicon thin film
01/04/2007US20070003469 Carbon nanohorn producing device and carbon nanohorn producing method
01/04/2007US20070002103 Structure of piezoelectric element and liquid discharge recording head, and method of manufacture therefor
01/04/2007US20070000881 Plasma processing installation, influenced by a magnetic field, for processing a continuous material or a workpiece
01/04/2007US20070000772 Method for operating a pulsed arc source
01/04/2007US20070000771 Method for manufacturing vehicle mirrors
01/04/2007US20070000770 Method for forming amorphous carbon film
01/04/2007US20070000437 Porous structure treatment system
01/04/2007DE212005000023U1 Mobiles PVD/CVD-Beschichtungszentrum Mobile PVD / CVD coating center
01/04/2007DE102005030862A1 Erstbenetzungshilfsmaterial für einen Verdampferkörper Initial wetting for an evaporator body
01/04/2007DE102004024137B4 Schutzblech und Blende für Rezipienten von Vakuumbeschichtungsanlagen Fender and hood for recipients of vacuum coating systems
01/04/2007CA2613349A1 Antistatic coating for surfaces made of metal materials and dielectric materials or of dielectric materials only and method of application
01/04/2007CA2611345A1 Sputtering target with slow-sputter layer under target material
01/03/2007EP1739205A2 A method for manufacturing vehicle mirrors
01/03/2007EP1739196A1 Rare earth metal member of high surface purity and making method
01/03/2007EP1738395A1 Method for depositing carbide coatings of high-fusion metals
01/03/2007EP1737997A2 Device for coating both sides of a substrate with a hydrophobic layer
01/03/2007EP1737996A1 High chromium ferritic steel with 0.5 atomic % hafnium, part of which is ion implanted
01/03/2007EP1737801A2 Photocatalytic substrate active under a visible light
01/03/2007EP1737583A1 Antisoiling coatings for antireflective substrates
01/03/2007EP1587894B1 Controlled sulfur species deposition process
01/03/2007EP1254081B1 Method for transporting glass panels through a coating installation and device for transporting said glass panels
01/03/2007CN1890400A Growth of in-situ thin films by reactive evaporation
01/03/2007CN1890399A Mechanism for varying the spacing between sputter magnetron and target
01/03/2007CN1890398A A layered structure
01/03/2007CN1889309A Method for producing connector
01/03/2007CN1889285A Non-volatile memory component based on RbAg4I5 film and producing method thereof
01/03/2007CN1888131A Reaction and magnetically controlled sputtering process of preparing hard nanometer layered TiN/SiO2 coating
01/03/2007CN1888130A Prepn process of extreme ultraviolet and soft X-ray filtering metal film
01/03/2007CN1888129A Electrode carbonization preventer for plasma polymerization apparatus
01/03/2007CN1888128A ZnO:Zn film preparing process
01/03/2007CN1888127A Molecular beam epitaxy process of growing GaAs-base InSb film
01/03/2007CN1888126A Boron nitride pyrolyzing crucible coating method and apparatus
01/03/2007CN1888125A Nanometer layered VN/SiO2 coating and its prepn
01/03/2007CN1888124A Hard nanometer layered ZrO2/TiN coating
01/03/2007CN1888123A Magnetically controlled opposite target sputtering process of preparing gas-sensitive WO3 film sensor
01/03/2007CN1293664C Method for manufacturing electrochemical element
01/03/2007CN1293641C 电子电路 Electronic circuit
01/03/2007CN1293621C Substrate processing device and substrate processing method