| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 07/18/2007 | EP1808876A2 Electrodes, membranes, printing plate precursors and other articles including multi-strata porous coatings, and method for their manufacture |
| 07/18/2007 | EP1808509A1 Ion beam sputtering equipment and method for forming multilayer film for reflective mask blank for euv lithography |
| 07/18/2007 | EP1808186A2 Method for fabricating a medical implant component and such component. |
| 07/18/2007 | EP1807546A1 Coating of displacer components (tooth components) for providing a displacer unit with chemical resistance and tribological protection against wear |
| 07/18/2007 | EP1628923B1 Small glass cutter wheel |
| 07/18/2007 | EP1506324A4 Replaceable target sidewall insert with texturing |
| 07/18/2007 | EP1423552A4 Process and apparatus for organic vapor jet deposition |
| 07/18/2007 | EP1204507A4 Arc-free electron gun |
| 07/18/2007 | CN2923741Y Multi-work-position rotary sample table |
| 07/18/2007 | CN2923740Y Target pole system of surface film coating apparatus |
| 07/18/2007 | CN2923739Y Back board heating device |
| 07/18/2007 | CN2923738Y Anti-leakage apparatus of vacuum film plating machine |
| 07/18/2007 | CN1327304C Zirconium oxide matrix product, method for obtaining same and use thereof |
| 07/18/2007 | CN1327029C Disk-like member holding device |
| 07/18/2007 | CN101002295A Semiconductor device manufacturing apparatus and a method of controlling a semiconductor device manufacturing process |
| 07/18/2007 | CN101002256A Method of producing a magnetic recording medium |
| 07/18/2007 | CN101001974A Single piece coil support assemblies, coil constructions and methods of assembling coil constructions |
| 07/18/2007 | CN101001973A Barrier film for flexible copper substrate and sputtering target for forming barrier film |
| 07/18/2007 | CN101001972A Method for sticking metallic thin sheet to frame, and device therefor |
| 07/18/2007 | CN101000845A Method for improving emission property of deposited carbon nano-tube thin film electronic field by electrophorisis method |
| 07/18/2007 | CN100999822A Preparation method of high silicon orientation silicon steel thin plate |
| 07/18/2007 | CN100999816A Process of preparing anatase crystal phase titanium dioxide film at low temp. |
| 07/18/2007 | CN100999815A Loading pressure sputtering mfg. process of antobiosis textile material and its products |
| 07/18/2007 | CN100999814A Multifunctional sputtering system and process |
| 07/18/2007 | CN100999813A Vacuum evaporation equipment and adhesion-proof structure thereof |
| 07/18/2007 | CN100999812A Chromium-doped non-crystalline graphite ware reducing coating layer and preparation process thereof |
| 07/18/2007 | CN100999811A Mask, film forming method, light-emitting device, and electronic apparatus |
| 07/18/2007 | CN100999388A Preparation method of polycrystalline silicon film of decorated and coated solution on surface with induction crystallization |
| 07/17/2007 | US7244670 Enhanced step coverage of thin films on patterned substrates by oblique angle PVD |
| 07/17/2007 | US7244521 Overcomes corrosion problems by stopping and/or inhibiting moisture from penetrating through the carbon layer into the magnetic layer by diffusion |
| 07/17/2007 | US7244467 Process for a beta-phase nickel aluminide overlay coating |
| 07/17/2007 | US7244367 Metal alloy elements in micromachined devices |
| 07/17/2007 | US7244344 Physical vapor deposition plasma reactor with VHF source power applied through the workpiece |
| 07/17/2007 | US7244343 Sputtering apparatus |
| 07/17/2007 | US7244341 forming spin valves; preoxygen exposure; ion beam sputtering; copper deposits |
| 07/17/2007 | US7244086 Apparatus for vacuum treating two dimensionally extended substrates and method for manufacturing such substrates |
| 07/12/2007 | WO2007078556A1 Rotatable aperture mask assembly and deposition system |
| 07/12/2007 | WO2007078376A1 Sputtering method and apparatus |
| 07/12/2007 | WO2007077890A1 Spin isolation device, spin asymmetric material manufacturing method, current source, and signal processing method |
| 07/12/2007 | WO2007077612A1 Porous valve metal thin film, method for production thereof and thin film capacitor |
| 07/12/2007 | WO2007077136A1 Easy-to-clean, mechanically stable coating composition for metallic surfaces with increased chemical resistance and process for coating a substrate using said composition |
| 07/12/2007 | WO2007060062A8 Layered system comprising a gadolinium mixed crystal pyrochlore phase |
| 07/12/2007 | WO2007058775A3 Deposition system using sealed replenishment container |
| 07/12/2007 | WO2007054369A3 Sputtering target and method of its fabrication |
| 07/12/2007 | WO2007053586A3 Reactive sputter deposition processes and equipment |
| 07/12/2007 | WO2007053532A3 Vapor deposition apparatus and method |
| 07/12/2007 | WO2007021520A3 Substrate support for increasing substrate temperature in plasma reactors |
| 07/12/2007 | WO2006019565B1 Method and system for coating internal surfaces of prefabricated process piping in the field |
| 07/12/2007 | US20070160846 Irradiating a thermotropic liquid crystal polymer exhibiting optical anisotropy and having a melting point of 250-350 degrees C. with a pulsed laser to evaporate the polymer, and depositing and solidifying the evaporant on a surface; protects organic electronic device from oxygen and moisture |
| 07/12/2007 | US20070160773 Liquid crystal dropping apparatus for liquid crystal display device |
| 07/12/2007 | US20070160436 Coated bore cutting tools |
| 07/12/2007 | US20070158188 Metal foam shield for sputter reactor |
| 07/12/2007 | US20070158187 Cathode for a vacuum sputtering system |
| 07/12/2007 | US20070158186 Apparatus for rotating magnet cathode sputtering with uniform process gas distribution |
| 07/12/2007 | US20070158183 Methods and apparatus for purging a substrate carrier |
| 07/12/2007 | US20070158182 Silicon dot forming method and apparatus |
| 07/12/2007 | US20070158181 Method & apparatus for cathode sputtering with uniform process gas distribution |
| 07/12/2007 | US20070158180 Magnetron sputtering method and magnetron sputtering apparatus |
| 07/12/2007 | US20070158179 Method and apparatus for improving symmetry of a layer deposited on a semiconductor substrate |
| 07/12/2007 | US20070158178 Method and apparatus for deposition of low-k dielectric materials |
| 07/12/2007 | US20070158177 Monitoring the coating area density of a predetermined layer thickness in a simple manner with the aid of the integral measuring technique, x-ray fluorescence, of an an auxiliary substrate arranged between the first coating source and an area into which a substrate to be coated is to be received |
| 07/12/2007 | US20070157884 Organosiloxane copolymer film, production method and deposition apparatus for said copolymer film, and semiconductor device using said copolymer film |
| 07/12/2007 | US20070157883 Device For Coating Both Sides of Substrates With A Hydrophobic Layer |
| 07/12/2007 | US20070157668 Method for cleaning a substrate |
| 07/12/2007 | US20070157525 Method for coating abrasives |
| 07/12/2007 | DE60121768T2 Verfahren zur herstellung eines halbleiterbauelements mit nitridzusammensetzung der gruppe iii A method for manufacturing a semiconductor device with nitride composition of the group iii |
| 07/12/2007 | DE10359508B4 Verfahren und Vorrichtung zum Magnetronsputtern Method and apparatus for magnetron sputtering |
| 07/12/2007 | DE10201492B4 Optisches Schichtsystem Optical layer system |
| 07/12/2007 | DE102006002428A1 Production of structured layers of transparent conducting oxides on semiconductor layers or carbon modifications used in opto-electronic components comprises structuring the semiconductor layer and sputtering the conducting oxide |
| 07/12/2007 | DE102005020945B4 Keramische Verdampferschiffchen, Verfahren zu ihrer Herstellung und ihre Verwendung Ceramic evaporator boats, processes for their preparation and their use |
| 07/12/2007 | DE102004051290B4 Einrichtung zum Beschichten von Substraten durch Aufdampfen in einer evakuierbaren Bearbeitungskammer Means for coating substrates by evaporation in an evacuated processing chamber |
| 07/12/2007 | DE10102493B4 Rohrförmiges Target und Verfahren zur Herstellung eines solchen Targets Tubular target and process for producing such a target |
| 07/12/2007 | CA2633604A1 Easy-to-clean, mechanically stable coating composition for metallic surfaces with increased chemical resistance and process for coating a substrate using said composition |
| 07/11/2007 | EP1806801A1 Fuel cell separator and method for manufacturing the same |
| 07/11/2007 | EP1806438A1 Method of surface reconstruction for silicon carbide substrate |
| 07/11/2007 | EP1806425A1 Method and apparatus for coating a substrate |
| 07/11/2007 | EP1806424A1 Physical vapor deposition process and apparatus therefor |
| 07/11/2007 | EP1806385A1 Easy-to-clean, mechanically stable coating composition for metallic surfaces with increased chemical resistance and process for coating a substrate using said composition |
| 07/11/2007 | EP1805819A2 Protected polymeric film |
| 07/11/2007 | EP1805342A1 Method for producing a steel sheet protected against corrosion |
| 07/11/2007 | CN2922119Y 晶圆片承载模组 Wafer carrier module |
| 07/11/2007 | CN2922117Y Crystal chip platform angle adjusting device |
| 07/11/2007 | CN2921039Y Fast air extraction device for large vacuum equipment |
| 07/11/2007 | CN2921038Y High vacuum rolling film-coating mechanism |
| 07/11/2007 | CN1998062A Methods for stable and repeatable plasma ion implantation |
| 07/11/2007 | CN1997779A Thin film material and method of manufacturing the same |
| 07/11/2007 | CN1997768A Multi-track magnetron exhibiting more uniform deposition and reduced rotational asymmetry |
| 07/11/2007 | CN1997767A Metalization method and plant |
| 07/11/2007 | CN1996055A High-temperature-resistant optical film doped with stabilized zirconia and method for preparing same |
| 07/11/2007 | CN1995450A Magnetron sputtering method for preparing HA/YSZ/polyimide bioactive composite material |
| 07/11/2007 | CN1995449A Magnetron sputtering method for preparing HA/YSZ/Ti6Al4V gradient bioactive composite material |
| 07/11/2007 | CN1995448A Rotary plating assistant device |
| 07/11/2007 | CN1995447A Anti-pollution superhigh vacuum magnetron sputtering film-plating device |
| 07/11/2007 | CN1995446A Transparent obstructive alumina film production process |
| 07/11/2007 | CN1995445A Vacuum evaporation source device of vacuum evaporation machine and its vacuum evaporation method |
| 07/11/2007 | CN1995444A Rotary disk for film electroplating and film electroplating machine |
| 07/11/2007 | CN1995443A Production method of cobalt base alloy target for vertical magnetic recording medium soft magnetization bottom |
| 07/11/2007 | CN1995442A Method for producing surface antibiotic product using physical gas phase deposition technology |
| 07/11/2007 | CN1326154C Oxide sintered body |
| 07/11/2007 | CN1326121C Magnetic recording medium and method for manufacturing the same |