| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 04/26/2007 | WO2006132382A3 Method of manufacturing a film |
| 04/26/2007 | WO2006094821A3 Method for producing a thin magnesium oxide layer |
| 04/26/2007 | WO2006019565A3 Method and system for coating internal surfaces of prefabricated process piping in the field |
| 04/26/2007 | US20070092717 Gas-barrier material |
| 04/26/2007 | US20070092651 Substrate processing apparatus and substrate processing method |
| 04/26/2007 | US20070092431 On a flat surface such as silicon wafer; transferring to polymer film to harvest |
| 04/26/2007 | US20070092233 Evaporation device with receptacle for receiving material to be evaporated |
| 04/26/2007 | US20070091421 Multilayer reflective film coated substrate, manufacturing method thereof, reflective mask blank, and reflective mask |
| 04/26/2007 | US20070089986 Sputtering target and method/apparatus for cooling the target |
| 04/26/2007 | US20070089985 Sputtering target and method/apparatus for cooling the target |
| 04/26/2007 | US20070089984 blending the molybdenum and titanium powders to produce a blended powder, optionally, consolidating the blended powder, encapsulating the consolidated powder, compacting while heating to produce a MoTi target plate; no beta (Ti, Mo) phase |
| 04/26/2007 | US20070089983 Cathode incorporating fixed or rotating target in combination with a moving magnet assembly and applications thereof |
| 04/26/2007 | US20070089982 Sputtering target and method/apparatus for cooling the target |
| 04/26/2007 | US20070089852 Heating and cooling apparatus, and vacuum processing apparatus equipped with this apparatus |
| 04/26/2007 | US20070089676 Arrangement for the vapor deposition on substrates |
| 04/26/2007 | US20070089672 Substrate placing mechanism |
| 04/26/2007 | US20070089670 Substrate-supporting device |
| 04/26/2007 | US20070089385 Film deposition apparatus having hole-like rotary filter plate for capturing fine particles and film deposition method |
| 04/26/2007 | US20070089288 Method for repairing photoresist layer defects using index matching overcoat |
| 04/26/2007 | DE102005050424A1 Sputtertarget aus mehrkomponentigen Legierungen und Herstellverfahren Sputtering target multicomponent alloys and manufacturing |
| 04/25/2007 | EP1777324A1 Thin film material and method for manufacturing the same |
| 04/25/2007 | EP1777321A1 Sputtering target, transparent conductive oxide, and process for producing the sputtering target |
| 04/25/2007 | EP1777320A2 Apparatus and method for depositing thin films |
| 04/25/2007 | EP1777319A1 MgO DEPOSITION MATERIAL |
| 04/25/2007 | EP1777318A1 MgO DEPOSITION MATERIAL |
| 04/25/2007 | EP1777250A1 Process for preventing or reducing biofilms on a substrate |
| 04/25/2007 | EP1777203A1 Ceramic film and method of manufacturing the same, ferroelectric capacitor, semiconductor device, and other element |
| 04/25/2007 | EP1776488A1 Method for producing a metal wire coated with a layer of brass. |
| 04/25/2007 | EP1776229A2 Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates |
| 04/25/2007 | EP1513964B1 Composite material for producing an electric contact surface, in addition a method for creating a lubricated, corrosion-free electric contact surface |
| 04/25/2007 | EP1503966B1 Components having crystalline coatings of the aluminum oxide/silicon oxide system and method for the production thereof |
| 04/25/2007 | EP1372897A4 Bipolar plasma source, plasma sheet source, and effusion cell utilizing a bipolar plasma source |
| 04/25/2007 | CN2892882Y 真空锁系统 Vacuum lock system |
| 04/25/2007 | CN1954093A Methods and apparatuses for transferring articles through a load lock chamber under vacuum |
| 04/25/2007 | CN1954092A Vacuum treatment device and method of manufacturing optical disk |
| 04/25/2007 | CN1954091A Vacuum processing apparatus |
| 04/25/2007 | CN1953640A A glueless soft circuit substrate |
| 04/25/2007 | CN1953229A Germanium-titanium base memory material for phase transition memory and its manufacture method |
| 04/25/2007 | CN1952209A Copper and nickel preprocessing technology in ion implantation before polymer surface chemical plating |
| 04/25/2007 | CN1952208A Process for processing low-melting metal and back board for use in magnetron sputtering coating |
| 04/25/2007 | CN1952207A Enhanced multi-component oxide-containing sputter target alloy compositions |
| 04/25/2007 | CN1952206A Apparatus and method for depositing thin films |
| 04/25/2007 | CN1952205A Arc ion plating apparatus |
| 04/25/2007 | CN1952204A Preprocessed optical coating materials and preprocessed method thereof |
| 04/25/2007 | CN1952203A Device for cleaning and air-drying solar heat collecting pipe |
| 04/25/2007 | CN1312782C Position mask part of combine mask provided for producing organic luminous diode |
| 04/25/2007 | CN1312734C Method for preparing beta-FeSi2 semiconductor film by femtosecond pulsed laser |
| 04/25/2007 | CN1312325C Method for developping monocrystalline iron nanometer thread on silicon substrate |
| 04/25/2007 | CN1312318C Method of manufacturing inorganic nanotube |
| 04/25/2007 | CN1312317C Vacuum ionic film coater with gas ionic source arrangement |
| 04/24/2007 | US7208878 Method of manufacturing a rotation-magnetron-in-magnetron (RMIM) electrode |
| 04/24/2007 | US7208787 Semiconductor device and a process for manufacturing a complex oxide film |
| 04/24/2007 | US7208411 A transfer module, a supercritical processing module, a vacuum module, and a metal deposition module; electrodeposition of metals for semiconductors with a desorb step at nonexcessive temperatures, and a preclean method that uses a chelation compound and an acid or amine |
| 04/24/2007 | US7208396 Permanent adherence of the back end of a wafer to an electrical component or sub-assembly |
| 04/24/2007 | US7208204 Generating magnetic nanoclusters in gas phase;heating the magnetic nanoclusters;crystallizing the magnetic nanoclusters; anddepositing the magnetic nanoclusters onto a substrate to form a thin film of magnetic particles |
| 04/24/2007 | US7208196 Oxidation of silicon nitride; overcoating metal substrate; high temperature superconductivity |
| 04/24/2007 | US7208195 Providing a vapor including at least one selected vapor phase component into evacuated chamber; condensing vapor onto a heated substrate to form a liquid phase deposit, cooling liquid deposit to form a solid phase film |
| 04/24/2007 | US7208067 Method and system for monitoring RF impedance to determine conditions of a wafer on an electrostatic chuck |
| 04/24/2007 | CA2413649C High temperature corrosion resistant alloy, thermal barrier coating material, and gas turbine using high temperature corrosion resistant alloy |
| 04/19/2007 | WO2007044814A1 Methods and equipment for depositing high quality reflective coatings |
| 04/19/2007 | WO2007044344A2 Method and apparatus for cylindrical magnetron sputtering using multiple electron drift paths |
| 04/19/2007 | WO2007043488A1 Method for depositing multilayer film of mask blank for euv lithography and method for producing mask blank for euv lithography |
| 04/19/2007 | WO2007043476A1 Magnetron sputtering apparatus |
| 04/19/2007 | WO2007043471A1 Gravure printing roll and method for manufacture thereof |
| 04/19/2007 | WO2007043215A1 HIGH-PURITY Ru ALLOY TARGET, PROCESS FOR PRODUCING THE SAME AND SPUTTERED FILM |
| 04/19/2007 | WO2007043102A1 Electrode for discharge surface treatment, discharge surface treatment method, and film |
| 04/19/2007 | WO2007042394A1 A method to deposit a coating by sputtering |
| 04/19/2007 | WO2007042392A1 Dry composition, use of its layer system and coating process |
| 04/19/2007 | WO2007041983A1 Heat insulating layer |
| 04/19/2007 | WO2007041730A1 Tube target |
| 04/19/2007 | WO2006136310A3 Powder-fiber adhesive |
| 04/19/2007 | WO2006114228A3 Process and device for coating substrates |
| 04/19/2007 | WO2006111400A3 Method and device for producing electronic components |
| 04/19/2007 | WO2006069921A3 Device for the vaporisation of condensed materials |
| 04/19/2007 | WO2005047369A3 Fine particle hard molded bodies for abrasion-resistant polymer matrices |
| 04/19/2007 | US20070087576 Substrate susceptor for receiving semiconductor substrates to be deposited upon |
| 04/19/2007 | US20070087541 Method and apparatus for deposition & formation of metal silicides |
| 04/19/2007 | US20070087230 Method and apparatus for integrated-circuit battery devices |
| 04/19/2007 | US20070087227 Granular magnetic recording media with improved corrosion resistance by cap layer + pre-covercoat etching |
| 04/19/2007 | US20070087224 Hard film and hard film-coated tool |
| 04/19/2007 | US20070087034 Drug delivery system and method of manufacturing thereof |
| 04/19/2007 | US20070086881 Dual substrate loadlock process equipment |
| 04/19/2007 | US20070085470 Electroluminescent material and electroluminescent element using the same |
| 04/19/2007 | US20070084720 Magnetron sputtering system for large-area substrates having removable anodes |
| 04/19/2007 | US20070084719 Inertial bonding method of forming a sputtering target assembly and assembly made therefrom |
| 04/19/2007 | US20070084717 Back-biased face target sputtering based high density non-volatile caching data storage |
| 04/19/2007 | US20070084716 Back-biased face target sputtering based high density non-volatile data storage |
| 04/19/2007 | US20070084715 Method for the production of a substrate |
| 04/19/2007 | US20070084546 Method and apparatus for colorant transfer |
| 04/19/2007 | US20070084401 Device for carrying out a surface treatment of substrates under vacuum |
| 04/19/2007 | DE112005001190T5 Verfahren und Vorrichtung zur Vakuumbeschichtung durch Metall- und Legierungsverdampfung Method and apparatus for vacuum coating metal and alloy by evaporation |
| 04/19/2007 | DE102006048609A1 Electron discharge window manufacturing method, involves applying vapor depositing layer by vapor depositing process on substrate, and removing substrate with upper surface that is made up of flexible polymer material |
| 04/19/2007 | DE102005049906A1 Verfahren und Vorrichtung zur Verdampfung von Verdampfungsmaterial Method and apparatus for the vaporization of the evaporation material |
| 04/19/2007 | DE102005049328A1 Materialmischung, Sputtertarget, Verfahren zu seiner Herstellung sowie Verwendung der Materialmischung Material mixture, a sputtering target, a process for its production and use of the material mixture |
| 04/19/2007 | DE102005049266A1 Vorrichtung und Verfahren zur Plasmabehandlung von Objekten Apparatus and method for plasma treatment of objects |
| 04/19/2007 | CA2624692A1 Methods and equipment for depositing high quality reflective coatings |
| 04/19/2007 | CA2624542A1 Method and apparatus for cylindrical magnetron sputtering using multiple electron drift paths |
| 04/18/2007 | EP1775353A1 Coating apparatus and method for operating a coating apparatus |
| 04/18/2007 | EP1775352A2 Arc ion plating apparatus |
| 04/18/2007 | EP1775262A1 Hydrogen-containing carbon film |