| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 01/03/2007 | CN1293606C Method or growing N-Al co-blended p type ZnO transistor film by two step method |
| 01/03/2007 | CN1293229C Hollow cathode target and methods of making same |
| 01/02/2007 | US7157756 Field effect transistor |
| 01/02/2007 | US7157733 Floating-gate field-effect transistors having doped aluminum oxide dielectrics |
| 01/02/2007 | US7157187 Heat resistance; performance; ultrathin electrolyte/dielectric films |
| 01/02/2007 | US7157135 Co-extruded high refractive index coated embossable film |
| 01/02/2007 | US7157116 Method for the production of plane-parallel platelets by using organic separating agents |
| 01/02/2007 | US7156964 Sputtering target for phase-change memory, film for phase change memory formed by using the target, and method for producing the target |
| 01/02/2007 | US7156963 Tantalum sputtering target and method for preparation thereof |
| 01/02/2007 | US7156961 Sputtering apparatus and film forming method |
| 01/02/2007 | US7156960 Method and device for continuous cold plasma deposition of metal coatings |
| 01/02/2007 | US7156945 A pattern is printed with a masking coating or an ink, on the substrate, the pattern being such that, the desired thin film structures will be formed in the areas where the printed masking coating is not present |
| 01/02/2007 | US7156922 Multi-chamber installation for treating objects under vacuum, method for evacuating said installation and evacuation system therefor |
| 01/02/2007 | US7156921 Method and apparatus for chemical vapor deposition capable of preventing contamination and enhancing film growth rate |
| 01/02/2007 | CA2237280C Free-standing rotational rod-fed source |
| 12/28/2006 | WO2006137835A2 EPITAXIAL FERROMAGNETIC Ni3FeN |
| 12/28/2006 | WO2006137405A1 Material for thin film formation, thin film formed therefrom and method of forming thin film |
| 12/28/2006 | WO2006137199A1 Sputtering target and thin film for optical information recording medium |
| 12/28/2006 | WO2006137192A1 Method of surface reconstruction for silicon carbide substrate |
| 12/28/2006 | WO2006136310A2 Powder-fiber adhesive |
| 12/28/2006 | WO2006136242A1 Metal-coated graphite film |
| 12/28/2006 | WO2006136187A1 Device for the successive coating of a number of substrates |
| 12/28/2006 | WO2006119403A3 Metering material to promote rapid vaporization |
| 12/28/2006 | WO2006111618A8 Source, an arrangement for installing a source, and a method for installing and removing a source |
| 12/28/2006 | WO2006086319A3 Sputtering target and method of fabrication |
| 12/28/2006 | WO2006052576A3 Encapsulated wafer processing device and process for making thereof |
| 12/28/2006 | WO2005094280A3 High-strength backing plates, target assemblies, and methods of forming high-strength backing plates and target assemblies |
| 12/28/2006 | US20060292383 Metal-coated substrate and manufacturing method of the same |
| 12/28/2006 | US20060292302 Apparatus and method for growing a synthetic diamond |
| 12/28/2006 | US20060292028 High-purity ni-v alloy target therefrom high-purity ni-v alloy thin film and process for producing high-purity ni-v alloy |
| 12/28/2006 | US20060289793 Method and apparatus for simultaneously depositing and observing materials on a target |
| 12/28/2006 | US20060289306 Inclined carrier transferring apparatus |
| 12/28/2006 | US20060289305 Centering mechanism for aligning sputtering target tiles |
| 12/28/2006 | US20060289304 Sputtering target with slow-sputter layer under target material |
| 12/28/2006 | US20060289303 Inhibiting generation of arcing in sputtering process of forming transparent electrode film, suppressing generation of defects caused by arcing, and reducing formation of nodules and abnormal discharge; density of 7.12 g/cm3 or greater; no particle having diameter of 10 nm or greater exposed on surface |
| 12/28/2006 | US20060289296 Plasma processing method and high-rate plasma etching apparatus |
| 12/28/2006 | US20060289295 Shape memory device having two-way cyclical shape memory effect due to compositional gradient and method of manufacture |
| 12/28/2006 | US20060289294 Enhanced oxygen non-stoichiometry compensation for thin films |
| 12/28/2006 | US20060289293 Composite mold and method for manufacturing the same |
| 12/28/2006 | US20060289292 attaching a container to a plate through a first container fixing hole by screwing a first screw; less tightly attached through the second container fixing hole to the plate, and allow the sputtering apparatus expands by heat; semiconductor wafers or liquid crystal panels |
| 12/28/2006 | US20060289291 Method for adjusting electromagnetic field across a front side of a sputtering target disposed inside a chamber |
| 12/28/2006 | US20060288941 Evaporation source for evaporating an organic |
| 12/28/2006 | US20060288940 Evaporation source for evaporating an organic electroluminescent layer |
| 12/28/2006 | US20060288939 Evaporation source for evaporating an organic electroluminescent layer |
| 12/28/2006 | DE112004001760T5 Behälter zum Verdampfen von Metall und Verfahren zu seiner Herstellung Container for evaporating metal and process for its preparation |
| 12/28/2006 | DE102005028729A1 Cooled target material for a magnetron system is produced with cross cuts to improve the functional stability |
| 12/28/2006 | DE102004008598B4 Verfahren für den Betrieb einer Inline-Beschichtungsanlage A method of operating an in-line coating line |
| 12/27/2006 | EP1737053A1 Thermoelectric conversion element and thermoelectric conversion module |
| 12/27/2006 | EP1737044A1 Amorphous oxide and thin film transistor |
| 12/27/2006 | EP1736566A1 Method of applying coatings with a metallic or ceramic finish |
| 12/27/2006 | EP1736565A1 Composite coatings for finishing of hardened steels |
| 12/27/2006 | EP1736559A1 Silver alloy with excellent reflectance-maintaining characteristics |
| 12/27/2006 | EP1735847A2 Biaxially-textured film deposition for superconductor coated tapes |
| 12/27/2006 | EP1735476A1 Textured-grain-powder metallurgy tantalum sputter target |
| 12/27/2006 | EP1035553B1 Methods for producing a layered product |
| 12/27/2006 | CN2851276Y Symmetrically-arranged vacuum retrieving system |
| 12/27/2006 | CN2851275Y Target chamber cylinder door lifting system |
| 12/27/2006 | CN1886533A Method for manufacturing diamond coatings |
| 12/27/2006 | CN1886254A 气体阻挡膜 Gas barrier film |
| 12/27/2006 | CN1885595A Integrated full-solid-state lithium ion thin film micro cell anode preparing method |
| 12/27/2006 | CN1885493A Method for preparing ferromagnetic manganese silicon film on silicon substrate by magnetic control sputtering |
| 12/27/2006 | CN1885491A Vacuum processing apparatus and method operation thereof |
| 12/27/2006 | CN1885490A Structure for mounting loading table device, processing device, discharge prevention method between feeder lines |
| 12/27/2006 | CN1885488A Top electrode, plasma processing device and method |
| 12/27/2006 | CN1884613A Random pulsed DC power supply |
| 12/27/2006 | CN1884612A Surface treating device of mirror |
| 12/27/2006 | CN1884611A Enhanced oxygen non-stoichiometry compensation for thin films |
| 12/27/2006 | CN1884610A Anode device with on-line cleaning function and its application method |
| 12/27/2006 | CN1883855A Composite coatings for finishing of hardened steels |
| 12/27/2006 | CN1292424C 一种反射器 A reflective device |
| 12/27/2006 | CN1292402C Ultra-thin protective overcoats for magnetic materials |
| 12/27/2006 | CN1292091C Sputtering machine table and its sputtering carrying table |
| 12/27/2006 | CN1291809C Amorphous carbon coated tools and manufacture thereof |
| 12/26/2006 | US7155115 Method and device for vacuum sputtering |
| 12/26/2006 | US7154180 Electronic device, method of manufacture of the same, and sputtering target |
| 12/26/2006 | US7153769 Methods of forming a reaction product and methods of forming a conductive metal silicide by reaction of metal with silicon |
| 12/26/2006 | US7153586 Article with scandium compound decorative coating |
| 12/26/2006 | US7153584 Hybrid film, antireflection film comprising it, optical product, and method for restoring the defogging property of hybrid film |
| 12/26/2006 | US7153577 For use as insulating glass (IG) window units, architectural or residential monolithic window units, vehicle windows |
| 12/26/2006 | US7153544 primary layer bonds the transparent electro-conductive thin film to the polymer film and provides good resistance to scuffing for the transparent electro-conductive film |
| 12/26/2006 | US7153542 Assembly line processing method |
| 12/26/2006 | US7153468 mixing selenium and silver or germanium solids, then melting to form an homogenous distribution throughout the liquid phase and cooling or solidifying to define composite target blanks |
| 12/26/2006 | US7153453 Oxide sintered body, sputtering target, transparent conductive thin film and manufacturing method therefor |
| 12/26/2006 | US7153441 Method for manufacturing thin-film magnetic recording medium |
| 12/26/2006 | US7153399 Method and apparatus for producing uniform isotropic stresses in a sputtered film |
| 12/26/2006 | US7153372 Method for removing particles from elements installed in a vacuum chamber |
| 12/26/2006 | US7153367 Drive mechanism for a vacuum treatment apparatus |
| 12/26/2006 | US7153180 Continuous manufacture of flat panel light emitting devices |
| 12/26/2006 | US7152776 Friction stir welding using a superabrasive tool |
| 12/26/2006 | US7152549 Vapor deposition system |
| 12/21/2006 | WO2006135528A2 Adaptable fixation for cylindrical magnetrons |
| 12/21/2006 | WO2006135140A1 Tungsten-including diamond-like carbon film and manufacturing method thereof, and dental device manufactured by the method |
| 12/21/2006 | WO2006134908A1 Organic evaporation system and method |
| 12/21/2006 | WO2006134818A1 Film forming device, thin-film manufacturing apparatus, and film forming method |
| 12/21/2006 | WO2006134792A1 Silicon monoxide vapor deposition material and process for producing the same |
| 12/21/2006 | WO2006134743A1 Ruthenium-alloy sputtering target |
| 12/21/2006 | WO2006134694A1 Chromium oxide powder for spattering target and spattering target |
| 12/21/2006 | WO2006134207A1 Method and apparatus for making a wear-resistant coating on a coating blade or equivalent |
| 12/21/2006 | WO2006133779A2 Evaporator boat for a device for coating substrates |
| 12/21/2006 | WO2006133710A1 A corrosion resistant object having an outer layer of a ceramic material |