| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 07/11/2007 | CN1325762C Heat-insulating coating material and gas turbine component and gas turbine |
| 07/11/2007 | CN1325693C Process and apparatus for the localized deposition of release agents |
| 07/11/2007 | CN1325692C Process for coating aluminium film and protective film for automobile reflector |
| 07/11/2007 | CN1325604C MY(1-x)SiO4:Ax light-emitting film and its preparation method |
| 07/11/2007 | CN1325212C Coated cutting tool member having hard coating layer and method for forming the hard coating layer on cutting tool |
| 07/10/2007 | US7242013 Method for depositing a film using a charged particle beam, method for performing selective etching using the same, and charged particle beam equipment therefor |
| 07/10/2007 | US7241688 Aperture masks for circuit fabrication |
| 07/10/2007 | US7241492 Multilayered film having excellent wear resistance, heat resistance and adhesion to substrate and method for producing the same |
| 07/10/2007 | US7241490 Enhanced adhesion between the intermediate layer and the film by including in the intermediate layer Mo, Cr, Ni, and/or Si dispersed to a depth of 20 nm or less from the surface; and a copper or copper alloy conductive layer formed on the intermediate layer |
| 07/10/2007 | US7241472 Method for producing antireflection film-coated plastic lens, and antireflection film-coated plastic lens |
| 07/10/2007 | US7241397 Honeycomb optical window deposition shield and method for a plasma processing system |
| 07/10/2007 | US7241368 Forming mixed oxide of hafnium, silicon; dielectrics |
| 07/10/2007 | US7241360 Method and apparatus for neutralization of ion beam using AC ion source |
| 07/10/2007 | US7241346 Apparatus for vapor deposition |
| 07/10/2007 | US7241339 Method and apparatus for applying a gel |
| 07/05/2007 | WO2007075977A2 Eb-pvd system with automatic melt pool height control |
| 07/05/2007 | WO2007075435A2 Apparatus for reactive sputtering |
| 07/05/2007 | WO2007074895A1 TRANSLUCENT REFLECTIVE FILM AND REFLECTIVE FILM FOR OPTICAL RECORDING MEDIUM, AND Ag ALLOY SPUTTERING TARGET FOR FORMING SUCH TRANSLUCENT REFLECTIVE FILM AND REFLECTIVE FILM |
| 07/05/2007 | WO2007074872A1 Sputtering target structure |
| 07/05/2007 | WO2007074563A1 Film forming apparatus and process for producing light emitting element |
| 07/05/2007 | WO2007017175B1 Vacuum depositing with condensation removing |
| 07/05/2007 | US20070152233 Manufacture method for ZnO based compound semiconductor crystal and ZnO based compound semiconductor substrate |
| 07/05/2007 | US20070152173 Ion implantation apparatus and ion implanting method |
| 07/05/2007 | US20070151847 Magnetron |
| 07/05/2007 | US20070151842 Apparatus for reactive sputtering |
| 07/05/2007 | US20070151841 Flexible magnetron including partial rolling support and centering pins |
| 07/05/2007 | DE19652741B4 Vorrichtung und Verfahren zur Erzeugung eines Oxidfilms eines Halbleiterbauelementes Apparatus and method for producing an oxide film of a semiconductor device |
| 07/05/2007 | DE102006056973A1 Heizeinrichtung zum Ablagern einer Dünnschicht Heating means for depositing a thin film |
| 07/05/2007 | DE102006041791A1 Reinigungsverfahren für eine Vorrichtung zum Abscheiden eines Al-aufweisenden Metallfilms und eines Al-aufweisenden Metallnitridfilms The cleaning method for an apparatus for depositing an Al-containing metal film and an Al-containing metal nitride |
| 07/05/2007 | DE102005063143A1 Verfahren zur Herstellung eines Sputtertargets sowie Sputtertarget A process for producing a sputtering target and sputtering target |
| 07/05/2007 | DE102004015230B4 Verfahren und Vorrichtung zum Intensivieren einer gepulsten Magnetronentladung Method and apparatus for intensifying a pulsed magnetron discharge |
| 07/04/2007 | EP1804306A1 Plant for the production in continuous of a superconducting tape and related surface treatment process |
| 07/04/2007 | EP1804275A1 Sputter device with a tubular cathode and process of operating the sputter device |
| 07/04/2007 | EP1803836A1 Evaporation source and method of depositing thin film using the same |
| 07/04/2007 | EP1803833A2 Method of manufacturing ceramic film and ceramic film manufacturing apparatus |
| 07/04/2007 | EP1803514A2 Cutting tool insert |
| 07/04/2007 | EP1802786A1 Device and method for cooling strip substrates |
| 07/04/2007 | EP1802785A1 Pvd-coated cutting tool insert |
| 07/04/2007 | EP1802452A2 Optical element with an opaque chrome coating having an aperture and method of making same |
| 07/04/2007 | EP1601471A4 Gas gate for isolating regions of differing gaseous pressure |
| 07/04/2007 | EP1422316A9 Method for cleaning reaction container and film deposition system |
| 07/04/2007 | CN1994022A Method for fabricating organic EL element and method for cleaning equipment for fabricating organic EL element |
| 07/04/2007 | CN1993492A Thin-film forming apparatus |
| 07/04/2007 | CN1993491A Sputtering source, sputtering device, method for forming thin film |
| 07/04/2007 | CN1993490A Apparatus for directing plasma flow to coat internal passageways |
| 07/04/2007 | CN1991274A Film plating method of solar stove panel |
| 07/04/2007 | CN1990907A Manufacture technique of seamless steel pipe units guide plate high-energy ion implantation WC gradient material |
| 07/04/2007 | CN1990906A Manufacture technique of carrying roll and loop-rising roll high-energy ion implantation WC gradient material in stick and wire mill |
| 07/04/2007 | CN1990905A Manufacture technique of perforation head high-energy ion implantation WC gradient material |
| 07/04/2007 | CN1990904A Coating clamp and coating carrying disk thereof |
| 07/04/2007 | CN1990903A Heater for depositing thin film |
| 07/04/2007 | CN1990902A Evaporation source and method for thin film evaporation using the same |
| 07/04/2007 | CN1990901A Application method |
| 07/04/2007 | CN1990900A Built-in double warehouse vacuum coating system and application method thereof |
| 07/04/2007 | CN1990899A Hydrophobic structure and preparation method thereof |
| 07/04/2007 | CN1990898A Cleaning method of apparatus for depositing ai-containing metal film and ai-containing metal nitride film |
| 07/04/2007 | CN1990422A Oxidate sintered body and method for making same, sputtering target and transparent conductive film |
| 07/04/2007 | CN1324649C 真空容器 Vacuum vessel |
| 07/04/2007 | CN1324641C Magnet array in conjunction with rotating magnetron for plasma sputtering |
| 07/04/2007 | CN1324371C Inorganic orientation film forming method,inorganic orientation film,substrate for electronic device,liquid crystal panel and electronic apparatus |
| 07/04/2007 | CN1324161C Preparation method of non-conductive plastic surface metal membrane |
| 07/04/2007 | CN1323812C Metallized cutlery and tableware |
| 07/03/2007 | US7238978 Ferroelectric memory device |
| 07/03/2007 | US7238912 Wafer characteristics via reflectometry and wafer processing apparatus and method |
| 07/03/2007 | US7238631 substrates are coated with ceramic titanium oxide layers which fulfil one or more protective effects and for example thus increase safety in everyday dealings with highly flammable and/or easily contaminated materials |
| 07/03/2007 | US7238628 Energy conversion and storage films and devices by physical vapor deposition of titanium and titanium oxides and sub-oxides |
| 07/03/2007 | US7238429 Ultra-hard low friction coating based on A1MgB14 for reduced wear of MEMS and other tribological components and system |
| 07/03/2007 | US7238389 Directing a stream of metered fluidized powder onto a first member; heating the member to vaporize the powder; collecting the vapors in a manifold; providing a second member an aperture(s) to direct the vapors onto the surface to form a film; and interrupting the vaporization to reduce wall deposits |
| 07/03/2007 | US7238383 compacting a mixture of sublimable organic powder and a thermally insulating and non-sublimable inorganic powder into a solid compacted pellet |
| 07/03/2007 | US7238262 Forming a bulbous light emitting chamber intermediate tubular end portions from a lamp burner envelope; coating the chamber surface; and sealing the ends with a heat source while shielding the coated surface to prevent degradation to the performance of the coating. |
| 07/03/2007 | CA2327031C Composite vapour deposited coatings and process therefor |
| 07/03/2007 | CA2305938C Filtered cathodic arc deposition method and apparatus |
| 07/03/2007 | CA2202430C Oxide film, laminate and methods for their production |
| 07/03/2007 | CA2192299C Glass material variable in volume by irradiation with ultraviolet light |
| 07/03/2007 | CA2183763C Porous metal composite body |
| 06/28/2007 | WO2007072877A1 Low emissivity glass |
| 06/28/2007 | WO2007072867A1 Feedstock supply unit and vapor deposition equipment |
| 06/28/2007 | WO2007072755A1 Raw powder mixture for ito sinter |
| 06/28/2007 | WO2007072732A1 Polycrystalline aluminum thin film and optical recording medium |
| 06/28/2007 | WO2007072658A1 Amorphous hard carbon coating |
| 06/28/2007 | WO2007071719A1 Method of manufacturing at least one sputter-coated substrate and sputter source |
| 06/28/2007 | WO2007044344A3 Method and apparatus for cylindrical magnetron sputtering using multiple electron drift paths |
| 06/28/2007 | US20070148500 excellent signal to noise ration and can conduct high density recording, by providing fine particle diameter to the magnetic crystal grains without forming distortion of crystallinity and orientation of the magnetic crystal grains; grain boundary field includes titanium oxides, TiO, Ti2O3, and TiO2 |
| 06/28/2007 | US20070148499 Perpendicular magnetic recording disk and manufacturing method thereof |
| 06/28/2007 | US20070148351 superior uniformity in electroluminescence( EL) layer film thickness, superior throughput, and improved utilization efficiency of EL materials |
| 06/28/2007 | US20070144901 Pulsed cathodic arc plasma |
| 06/28/2007 | US20070144900 Provide a high density sputtering target having a prolonged target life; forming thin film |
| 06/28/2007 | US20070144899 Target arrangement for mounting / dismounting and method of manufacturing |
| 06/28/2007 | US20070144892 Method for forming metal film or stacked layer including metal film with reduced surface roughness |
| 06/28/2007 | US20070144891 Sputter apparatus with a pipe cathode and method for operating this sputter apparatus |
| 06/28/2007 | US20070144890 Sputtering apparatus |
| 06/28/2007 | US20070144889 Machine for treating substrates and method |
| 06/28/2007 | US20070144888 Display element |
| 06/28/2007 | US20070144666 Process for producing packaging laminate material |
| 06/28/2007 | US20070144573 P-type and n-type thermoelectric thin films are selected from specific complex oxides with a positive Seebeck coefficient and specific complex oxides with a negative Seebeck coefficient, respectively; electrically connected onon a dielectric sibstrate; shapes; energy efficiency; waste heatconversion |
| 06/28/2007 | DE102006021565A1 Magnetic field system for a cathode unit, is produced using one or more cluster magnetron cathodes |
| 06/28/2007 | DE102005025935B4 Hochtemperatur-Verdampferzelle und Verfahren zur Verdampfung hochschmelzender Materialien High-temperature evaporator cell and method for vaporizing refractory materials |
| 06/27/2007 | EP1802177A1 Organic electroluminescent device and manufacturing method thereof |
| 06/27/2007 | EP1801898A2 Integrated circuit device and fabrication using metal-doped chalcogenide materials |
| 06/27/2007 | EP1801895A2 MgO/Nife MTJ for high performance MRAM application |