| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 03/07/2007 | EP1238122B1 Method and apparatus for forming carbonaceous film |
| 03/07/2007 | CN1926260A Sputtering target with few surface defects and method for processing surface thereof |
| 03/07/2007 | CN1926259A Reactive metal sources and deposition method for thioaluminate phosphors |
| 03/07/2007 | CN1926258A Sputtering target, optical information recording medium and process for producing the same |
| 03/07/2007 | CN1926254A Ni-Pt alloy and Ni-Pt alloy target |
| 03/07/2007 | CN1926252A High-purity Ru powder, sputtering target obtained by sintering the same, thin film obtained by sputtering the target and process for producing high-purity Ru powder |
| 03/07/2007 | CN1925190A Composite electrode having platinum adulterated by nickel acid lanthanum and its preparing method |
| 03/07/2007 | CN1925127A Film tray for fabricating flexible display |
| 03/07/2007 | CN1925111A Vacuum cavity chamber and vacuum processing device |
| 03/07/2007 | CN1925107A Integrated metrology tools for monitoring and controlling large area substrate processing chambers |
| 03/07/2007 | CN1924084A Preparation method of TiN/AlON nano multilayer coating reaction magnetron sputtering for cutting tool |
| 03/07/2007 | CN1924083A Insulating target material, method of manufacturing insulating target material, insulating complex oxide film, and device |
| 03/07/2007 | CN1924082A Apparatus for depositing an organic layer and method for controlling a heating unit thereof |
| 03/07/2007 | CN1924081A Source for inorganic layer and method for controlling heating source thereof |
| 03/07/2007 | CN1924080A Heater and vapor deposition source having the same |
| 03/07/2007 | CN1924079A Linear type deposition source |
| 03/07/2007 | CN1924078A Method and apparatus of processing magnesium alloy surface utilizing vacuum composite plating film |
| 03/07/2007 | CN1924077A Method of forming flawless diffused aluminium coating on titanium alloy surface at low temperature |
| 03/07/2007 | CN1923430A Superalloy repair methods |
| 03/07/2007 | CN1303437C Reflective Ag alloy film for reflectors and reflector provided with the same |
| 03/07/2007 | CN1303246C Metal ion source |
| 03/07/2007 | CN1303245C Sputtering device and its electrode and manufacturing method of the electrode |
| 03/06/2007 | US7187120 Organic electroluminescent display panel and method of manufacturing the same |
| 03/06/2007 | US7186992 Method of fabricating a polarizing layer on an interface |
| 03/06/2007 | US7186985 Method and apparatus for fabricating mercuric iodide polycrystalline films for digital radiography |
| 03/06/2007 | US7186479 Thin film battery and method of manufacture |
| 03/06/2007 | US7186471 Chemically ordered, cobalt-three platinum alloys for magnetic recording |
| 03/06/2007 | US7186466 Turbine blade with a ceramic thermal barrier coating of a ceramic alloy solid solution of a base oxide, a primary stabilizer, a group A dopant, and a group B dopant; base oxide of ZrO2 or HfO2; primary stabilizer of Y2O3, Dy2O3, or Er2O3; a dopant of rare earth oxides |
| 03/06/2007 | US7186439 Method of manufacturing organic electroluminescent display |
| 03/06/2007 | US7186385 For semiconductor processing system |
| 03/06/2007 | US7186324 Superior in wear resistance to TiAlN film and permits high-speed efficient cutting; composed of Ti, Al, Cr, Si, and B |
| 03/06/2007 | US7186319 Multi-track magnetron exhibiting more uniform deposition and reduced rotational asymmetry |
| 03/06/2007 | US7186298 Wafer support system |
| 03/06/2007 | US7185419 Method of manufacturing a mask for evaporation |
| 03/01/2007 | WO2007024465A2 Aluminum sputtering while biasing wafer |
| 03/01/2007 | WO2007024428A2 Monolithic sputter target backing plate with integrated cooling passages |
| 03/01/2007 | WO2007023941A1 Holding apparatus, assembly system, sputtering apparatus, machining method and machining apparatus |
| 03/01/2007 | WO2007023881A1 Method for forming electrode pattern, method for connecting electrode patterns, method for forming dye sensitized semiconductor electrode and photoelectric cell module |
| 03/01/2007 | WO2007023737A1 Method of organic material vacuum deposition and apparatus therefor |
| 03/01/2007 | WO2007023553A1 Alignment device for vacuum deposition |
| 03/01/2007 | WO2007023552A1 Alignment device for vacuum deposition |
| 03/01/2007 | US20070048453 Systems and methods for plasma doping microfeature workpieces |
| 03/01/2007 | US20070048444 Manufacturing method of optical disk and its manufacturing apparatus |
| 03/01/2007 | US20070048400 Apparatus for producing sheeting |
| 03/01/2007 | US20070045111 Plasma excitation system |
| 03/01/2007 | US20070045110 Carrier and manufacturing apparatus having the same |
| 03/01/2007 | US20070045109 preparing a first precursor including Pb, Zr, Ti and Nb raw material solution, a polycarboxylic acid or a ester, a solvent, forming 1st powder of a complex oxide of Pb, Zr, Ti and Nb by spray drying and heating the precursor, forming 2nd powder from 1st powder and 2nd precursor; hydrothermal synthesis |
| 03/01/2007 | US20070045108 Monolithic sputter target backing plate with integrated cooling passages |
| 03/01/2007 | US20070045103 Aluminum sputtering while biasing wafer |
| 03/01/2007 | US20070045102 Method of sputter depositing an alloy on a substrate |
| 03/01/2007 | DE10233222B4 Harte verschleissfeste Schicht, Verfahren zum Bilden derselben und Verwendung Hard-wearing layer method for forming the same and use |
| 03/01/2007 | DE102005040087A1 Depositing method for depositing absorber layers for thin-layer solar cells covers layer-forming elements in a vapor phase while depositing them on a substrate |
| 02/28/2007 | EP1757717A1 Method to deposit ZnO-based crystalline layer and substrate for it |
| 02/28/2007 | EP1757712A1 Sputtering target, optical information recording medium and method for producing same |
| 02/28/2007 | EP1757388A1 Surface-coated cutware and process for producing the same |
| 02/28/2007 | EP1756851A1 Media injector |
| 02/28/2007 | EP1756327A1 Methods of making gold nitride |
| 02/28/2007 | EP1756326A1 Transport system for nanoparticles and method for the operation thereof |
| 02/28/2007 | EP1497477B1 Functional fiber sheet |
| 02/28/2007 | EP1409762A4 A process and apparatus for plasma activated deposition in a vacuum |
| 02/28/2007 | EP1200980B1 Adaptive gas cluster ion beam for smoothing surfaces |
| 02/28/2007 | EP1076911B1 Method and apparatus for ionized physical vapor deposition |
| 02/28/2007 | EP0998592B1 Method of using hydrogen and oxygen gas in sputter deposition of aluminum-containing films and aluminum-containing films derived therefrom |
| 02/28/2007 | CN2874445Y Realtime temperature measurer for rotary part and vacuum coating system using said device |
| 02/28/2007 | CN2873800Y Target device |
| 02/28/2007 | CN2873799Y Magnetic sputter target with online cleaning function |
| 02/28/2007 | CN2873798Y Structure of shading electroplating auxiliary device in vacuum sputtering plating |
| 02/28/2007 | CN1922927A Vaporizing temperature sensitive materials for OLED |
| 02/28/2007 | CN1922716A Vapor-phase growth method |
| 02/28/2007 | CN1922708A Method for depositing carbide coatings of high-fusion metals |
| 02/28/2007 | CN1922339A Vapor deposition source with minimized condensation effects |
| 02/28/2007 | CN1922338A Carbonaceous thin film, process for producing the same and member utilizing the thin film |
| 02/28/2007 | CN1921069A Laser processing apparatus utilizing laser beam to irradiate semiconductor layer |
| 02/28/2007 | CN1921068A Particle sticking prevention apparatus and plasma processing apparatus |
| 02/28/2007 | CN1920262A Variable-throat exhaust turbocharger and method for manufacturing constituent members of variable throat mechanism |
| 02/28/2007 | CN1920091A Multifunctional vacuum continuous coating apparatus |
| 02/28/2007 | CN1920090A Reinforcement method of electric spark on surface of copper or copper alloy |
| 02/28/2007 | CN1920089A Cumulate molecular beam source for organic thin film |
| 02/28/2007 | CN1920088A Preparation method of metal oxide nano array-inverse thin film |
| 02/28/2007 | CN1919568A Forming mould and manufacture method thereof |
| 02/28/2007 | CN1302560C 电子电路 Electronic circuit |
| 02/28/2007 | CN1302151C Method and device for producing ferroelectric apparatus |
| 02/28/2007 | CN1302149C Device and method for vacuum deposition, and organic electroluminescent element provided by the device and the method |
| 02/28/2007 | CN1302148C Preparation method for TiOxNy highly effective solar photo-thermal conversion film |
| 02/28/2007 | CN1302147C Evaporation method and manufacturing method of display device |
| 02/28/2007 | CN1302074C Method for the production of plane-parallel platelets by using organic separating agents |
| 02/28/2007 | CN1301800C Coating roller in coating apparatus and producing method thereof |
| 02/27/2007 | US7184116 LCD having an alignment film comprising sintered carbon |
| 02/27/2007 | US7183766 Superconducting magnetic field generation apparatus and sputter coating apparatus |
| 02/27/2007 | US7183564 Channel spark source for generating a stable focused electron beam |
| 02/27/2007 | US7183012 High density and good storage stability |
| 02/27/2007 | US7182976 Process for forming a thin film and apparatus therefor |
| 02/27/2007 | US7182880 Process for reducing particle formation during etching |
| 02/27/2007 | US7182843 Rotating sputtering magnetron |
| 02/27/2007 | US7182842 Device for amplifying the current of an abnormal electrical discharge and system for using an abnormal electrical discharge comprising one such device |
| 02/27/2007 | US7182816 Particulate reduction using temperature-controlled chamber shield |
| 02/27/2007 | US7182814 Sample holder for physical vapor deposition equipment |
| 02/27/2007 | US7182122 Heating and cooling apparatus, and vacuum processing apparatus equipped with this apparatus |
| 02/22/2007 | WO2007022275A2 Siox:si sputtering targets and method of making and using such targets |
| 02/22/2007 | WO2007021783A1 Porous metallized sheets coated with an inorganic layer having low emissivity and high moisture vapor permeability |